Hideyuki Yamamoto
Hideyuki Yamamoto, Koshi-Shi JP
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20110079240 | ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STORAGE MEDIUM STORING COMPUTER PROGRAM FOR EXECUTING ULTRASONIC CLEANING METHOD - An ultrasonic cleaning apparatus including: a cleaning tank for storing a cleaning liquid; an object-to-be-processed holder for insertion into the cleaning tank, the holder holding an object to be processed and immersing the object into the cleaning liquid; a vibrator disposed on a bottom part of the cleaning tank; and an ultrasonic oscillator configured to make the vibrator ultrasonically vibrate. In the cleaning tank, a lateral holding member configured to hold the object is disposed. The holder is configured to be laterally moved by a driving apparatus. The control device is configured to control the driving apparatus such that the holder is laterally moved after the object has been held by the lateral holding member, and the control device is configured to control the ultrasonic oscillator such that the vibrator is made to ultrasonically vibrate so that the ultrasonic vibration from the vibrator is propagated to the object. | 04-07-2011 |
Hideyuki Yamamoto, Kudamatsu-Shi JP
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20100132888 | Plasma Processing Apparatus - A plasma processing apparatus includes a plasma processing main frame, and an apparatus controller controlling the plasma processing main frame. The plasma processing main frame has a vacuum process chamber, an exhaust device, a mass flow controller, a stage electrode receiving a workpiece, a high-frequency electrical source to, and a transfer device placing the workpiece on the stage electrode and carrying out the processed workpiece. The apparatus controller controls the plasma processing main frame in accordance with a predetermined procedure and is provided with a diagnosis device which acquires a plurality of recipes for processing workpieces carried in the chamber and apparatus parameters of the plasma processing apparatus when a specific recipe of the above recipes is executed, whereby the condition of the plasma processing main frame is diagnosed based on the acquired apparatus parameters. | 06-03-2010 |
20100297783 | Plasma Processing Method - A method for performing a plasma process using a plasma processing apparatus which includes a vacuum process chamber, an exhaust device, a mass flow controller supplying a process gas, a stage electrode which receives and holds a workpiece by adsorption, a transfer device, and a high-frequency electrical source. The method includes a first step of performing the plasma process for the workpiece in the vacuum process chamber by a corresponding recipe of predetermined recipes, a second step of acquiring apparatus parameters showing the condition of the plasma processing apparatus when a specific recipe of the predetermined recipes is executed to diagnose whether the condition of the plasma processing apparatus is good or not based on the acquired apparatus parameters. | 11-25-2010 |
Hideyuki Yamamoto, Tosu-Shi JP
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20090139656 | Substrate processing apparatus - The present invention provides a substrate processing apparatus for processing substrates by immersing the substrates in a processing liquid. This substrate processing apparatus includes a processing tank having a pair of side walls arranged to be opposed to each other; and a pair of processing-liquid supply mechanisms provided respectively corresponding to the pair of side walls. The pair of processing-liquid supply mechanisms are respectively configured for supplying the processing liquid toward a central portion of the processing tank in the width direction connecting the pair of side walls, thereby to create a rising flow of the processing liquid in a central area in the width direction of the processing tank. Each inner wall face of the pair of side walls includes a main body, a projecting portion located above the main body, and a discharge guide portion located uppermost and providing a discharge port configured for allowing the processing liquid to overflow. The discharge guide portion is inclined upward, opposite to the central portion in the width direction. The projecting portion includes an inner end portion located nearer to the central portion in the width direction, as compared with the main body and discharge guide portion. | 06-04-2009 |
Hideyuki Yamamoto, Kudamatsu JP
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20090120580 | Disturbance-Free, Recipe-Controlled Plasma Processing System And Method - A plasma processing apparatus includes a vacuum processing apparatus for performing a multi-step processing operation for a sample, a sensor for monitoring process parameters during at least a first step of the processing operation, a signal compression unit for compressing a signal from the sensor to generate an apparatus state signal, a worked result estimate model unit which estimates a processed result on the basis of the apparatus state signal and a set processed-result estimation equation, an optimum recipe calculation model unit which calculates corrections to processing conditions so that the processed result becomes a target value, a usable recipe selecting unit which judges validity of an optimum recipe. At a next step of the processing operation, sample processing is performed under optimum conditions on the basis of the usable recipe selected by the selected usable recipe. | 05-14-2009 |
Hideyuki Yamamoto, Fukuoka-Shi JP
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20130323343 | RECYCLABLE FORMWORK - There is disclosed to provide a recyclable formwork that can add the new function without spoiling the other functions of the recyclable formwork. The recyclable formwork includes: a main unit including a contact surface contacting with cast concrete, a non-contact surface being parallel and opposite to the contact surface, and a plurality of ribs outstanding from the non-contact surface to a side opposite to the non-contact surface and reinforcing the main unit; a case being housed between the plurality of ribs and being fixed on a side of the non-contact surface; and a circuit being stored in the case. A first highest point of the case at the side of the non-contact surface is not higher than a second highest point of upper ends of the plurality of the ribs. | 12-05-2013 |
20140239147 | RECYCLABLE FORMWORK - A recyclable formwork can suitably detect temperature of concrete cast contacting with the formwork in a field without spoiling the other functions of the formwork. The recyclable formwork is provided with: a main unit ( | 08-28-2014 |
Hideyuki Yamamoto, Tokyo JP
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20160070601 | LOAD BALANCE APPARATUS AND METHOD - An apparatus predicts time-series variations in resource usage for logical structures for a future time period (a schedule period) on the basis of a history representing the history of resource usage by the logical structures. The apparatus attempts to select a plurality of arrangement candidates for which resource usage in each of a plurality of physical machines is equal to or less than a criterion for each of a plurality of time segments comprising the schedule period. The apparatus computes a migration cost of migrating the logical structures between physical machines for an arrangement according to a holistic arrangement plan for each of a plurality of holistic arrangement plans. Each of the plurality of holistic arrangement plans is a combination of a plurality of selected arrangement candidates corresponding to each of the plurality of time segments. | 03-10-2016 |