Patent application number | Description | Published |
20100119698 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof - The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron to microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method. | 05-13-2010 |
20100154521 | Determining a Repairing Form of a Defect at or Close to an Edge of a Substrate of a Photo Mask - Determining a repairing form of a defect at or close to an edge of a substrate. The defect may be scanned with a scanning probe microscope to determine a three-dimensional contour of the defect. The defect may be scanned with a scanning particle microscope to determine the shape of the at least one edge of the substrate. The repairing form of the defect may be determined from a combination of the three-dimensional contour and the shape of the at least one edge. | 06-24-2010 |
20100297362 | METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES - A method for processing an object with miniaturized structures is provided. The method includes feeding a reaction gas onto a surface of the object. The method also includes processing the object by directing an energetic beam onto a processing site in a region, which is to be processed, on the surface of the object, in order to deposit material on the object or to remove material from the object. The method further includes detecting interaction products of the beam with the object, and deciding whether the processing of the object is to be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the beam with the object. The region to be processed is subdivided into a number of surface segments, and the interaction products detected upon the beam striking regions of the same surface segment are integrated to form a total signal in order to determine whether processing of the object must be continued or can be terminated. | 11-25-2010 |
20110210181 | APPARATUS AND METHOD FOR INVESTIGATING AND/OR MODIFYING A SAMPLE - An apparatus and a method for investigating and/or modifying a sample is disclosed. The apparatus comprises a charged particle source, at least one particle optical element forming a charged particle beam of charged particles emitted by said charged particle source. The apparatus further comprises an objective lens which generates a charged particle probe from said charged particle beam. The objective lens defines a particle optical axis. A first electrostatic deflection element is arranged—in a direction of propagation of charged particles emitted by said charged particle source—downstream of the objective lens. The electrostatic deflection element deflecting the charged particle beam in a direction perpendicular to said charged particle optical axis and has a deflection bandwidth of at least 10 MHz. | 09-01-2011 |
20130126728 | METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK - The invention relates to a method for determining a performance of a photolithographic mask at an exposure wavelength with the steps of scanning at least one electron beam across at least one portion of the photolithographic mask, measuring signals generated by the at least one electron beam interacting with the at least one portion of the photolithographic mask, and determining the performance of the at least one portion of the photolithographic mask at the exposure wavelength based on the measured signals. | 05-23-2013 |
20130156939 | METHOD AND APPARATUS FOR ANALYZING AND/OR REPAIRING OF AN EUV MASK DEFECT - The invention relates to a method for analyzing a defect of a photolithographic mask for an extreme ultraviolet (EUV) wavelength range (EUV mask) comprising the steps of: (a) generating at least one focus stack relating to the defect using an EUV mask inspection tool, (b) determining a surface configuration of the EUV mask at a position of the defect, (c) providing model structures having the determined surface configuration which have different phase errors and generating the respective focus stacks, and (d) determining a three dimensional error structure of the EUV mask defect by comparing the at least one generated focus stack of the defect and the generated focus stacks of the model structures. | 06-20-2013 |
20140027512 | APPARATUS AND METHOD FOR INVESTIGATING AN OBJECT - The present invention refers to an apparatus and a method for investigating an object with a scanning particle microscope and at least one scanning probe microscope with a probe, wherein the scanning particle microscope and the at least one scanning probe microscope are spaced with respect to each other in a common vacuum chamber so that a distance between the optical axis of the scanning particle microscope and the measuring point of the scanning probe microscope in the direction perpendicular to the optical axis of the scanning particle microscope is larger than the maximum field of view of both the scanning probe microscope and the scanning particle microscope, wherein the method comprises the step of determining the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope. | 01-30-2014 |
20140165236 | METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK - The invention refers to a method for analyzing a defect of an optical element for the extreme ultra-violet wavelength range comprising at least one substrate and at least one multi-layer structure, the method comprising the steps: (a) determining first data by exposing the defect to ultra-violet radiation, (b) determining second data by scanning the defect with a scanning probe microscope, (c) determining third data by scanning the defect with a scanning particle microscope, and (d) com-bining the first, the second and the third data. | 06-12-2014 |
20140255831 | METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING BY A PARTICLE BEAM - The invention refers to a method and apparatus for protecting a substrate during a processing by at least one particle beam. The method comprises the following steps: (a) applying a locally restrict limited protection layer on the substrate; (b) etching the substrate and/or a layer arranged on the substrate by use of the at least one particle beam and at least one gas; and/or (c) depositing material onto the substrate by use of the at least one particle beam and at least one precursor gas; and (d) removing the locally limited protection layer from the substrate. | 09-11-2014 |
Patent application number | Description | Published |
20110100736 | HYBRID DRIVE TRAIN FOR A MOTOR VEHICLE - A hybrid drive train for a motor vehicle comprises an internal combustion engine, and electric machine, with a stator and rotor, and a transmission. A disk clutch is located in the force flow, between the combustion engine and the transmission input shaft, and an outer disk carrier of the disk clutch is fixed to a transmission input stage and an inner disk carrier of the disk clutch is connected to the combustion engine. The rotor of the electric machine drives another element of the transmission input stage, and the disk carriers of the clutch are mounted and centered by two roller bearings which center the inner and outer disk carriers relative to one another and bring them into axial alignment, and axial tolerances within the unit which comprises the electric machine, the separator clutch and the transmission input stage are compensated by displacing and aligning the disk packet of the clutch in the drive gearing of the inner disk carrier. | 05-05-2011 |
20110116859 | DEVICE FOR MOUNTING A HYBRID TRANSMISSION ON AN INTERNAL COMBUSTION ENGINE - A device for mounting a hybrid transmission, comprising a transmission unit and a hybrid module, onto an internal combustion engine, namely, for coupling a transmission shaft ( | 05-19-2011 |
20110118070 | TRANSMISSION DEVICE COMPRISING A TRANSMISSION HOUSING - A transmission device ( | 05-19-2011 |
20110120568 | HYDRAULIC SYSTEM OF A TRANSMISSION UNIT, COMPRISING A MAIN TRANSMISSION PUMP AND AN AUXILIARY PUMP - A hydraulic system of a transmission comprises a main transmission pump that can be driven by torque transmitted via the transmission unit and with an auxiliary pump that can be driven by an electric machine, by which primary and secondary pressure circuits can be supplied with hydraulic fluid. Pressure sides of the main transmission pump and the auxiliary pump are connected to the primary pressure circuit upstream of a pressure relief valve provided for adjusting a main pressure in the primary pressure circuit. The pressure relief valve is arranged between the pressure sides of the main transmission pump and the auxiliary pump and the secondary pressure circuit. The pressure side of the auxiliary pump can be actively connected with the secondary pressure circuit, via a hydraulic line which can be blocked in the direction toward the primary and secondary pressure circuits, and which bypasses the pressure-relief valve. | 05-26-2011 |
20110124455 | HYBRID DRIVE TRAIN OF A MOTOR VEHICLE - A hybrid drive train of a motor vehicle which comprises a combustion engine with a drive shaft and an electric machine which operates as either a motor or generator. The electric machine has a stator and a rotor and surrounds a planetary automatic transmission. The combustion engine drive shaft communicates, via a controllable separating clutch, and the rotor of the electric machine communicates, via the input transmission section, with the automatic transmission input shaft. The electric machine, the separating clutch, and the input transmission section are coaxially combined within a module enclosure of a preassembled hybrid module that has input and output elements. The input element is connected with the drive shaft of the combustion engine and the output element is connected with the input shaft of the automatic transmission, and the hybrid module maintains the dimensions of a conventional hydrodynamic torque converter. | 05-26-2011 |
20110132674 | INTERNAL COMBUSTION ENGINE/HYBRID TRANSMISSION ASSEMBLY - An internal combustion engine/hybrid transmission assembly of a motor vehicle, comprising an internal combustion engine and a hybrid module mounted on the internal combustion engine, the internal combustion engine having a flywheel. The hybrid transmission comprises a transmission and a hybrid module. The hybrid module has an electric motor which comprises a stator, on the stator side, and a rotor, on the rotor side, and the stator on the stator side comprises a stator housing, a stator liner which accommodates a stator core, and an end winding positioned on both sides of the stator core, when viewed in the axial direction. The section of the end winding, positioned on the side of the stator core facing the flywheel, is at least partially covered by a section of the flywheel, when viewed in the axial direction. | 06-09-2011 |
20110224043 | HYBRID MODULE FOR THE HYBRID DRIVE TRAIN OF A MOTOR VEHICLE - A hybrid module for the hybrid drive train of a motor vehicle is proposed, comprising an electric motor, a planetary gear assembly and a clutch ( | 09-15-2011 |
20110263370 | HYBRID DRIVE TRAIN OF A MOTOR VEHICLE - A hybrid drive train of a motor vehicle which comprises a combustion engine, an electric machine which is operable as a motor and a generator and comprises a stator and a rotor, and a multi-stage planetary transmission with input and output shafts. The driveshaft of the combustion engine can be connected to the input shaft of the transmission, the electric machine is coaxially arranged about the input shaft, and the rotor of the electric machine is rigidly connected with the input shaft. To achieve a starting acceleration and climbing capacity on starting, corresponding to those provided by a drive train with an automatic transmission and a hydrodynamic torque converter or a manual gearshift transmission with a converter shifting clutch, the rotor of the electric machine can be connected with the transmission input shaft via an input transmission stage which is formed as a simple planetary gearset and has a high gear ratio. | 10-27-2011 |
Patent application number | Description | Published |
20110132218 | METHOD FOR REGULATING THE INK IN A PRINTING PRESS - The ink in a printing press, in which a stock of material is being printed in an ongoing printing process, is registered. At least one ink is applied to the stock in several inking zones. A measured value, indicating an ink density, is determined for the at least one ink which is being applied to the stock in the printing process and within the printing press. A relation is formed between the measured ink density for a specific ink in a selected ink zone and a measured ink density value determined for the same ink in at least one other inking zone. The relation between the measured ink density values in different inking zones is formed only if the majority of the inking zones of a specific inking unit of the printing press supply one respective measured ink density value for an ink supplied by that inking unit, and when the measured ink density value reaches at least a predetermined fraction of a preset, desired value in the respective inking zone. | 06-09-2011 |
20110132221 | METHOD FOR ASSESSING THE PLAUSIBILITY OF AT LEAST ONE MEASURED VALUE DETERMINED IN A PRINTING PRESS - The plausibility of at least one measured value, that is determined in a printing press, and that includes a density of an ink applied to a stock, is assessed. The stock is conveyed through the printing press and the ink is applied to the stock in several inking zones. A relation is formed between a measured ink density value, which is determined for a specific ink in a selected ink zone, and a measured ink density value determined for the same ink in at least one other inking zone. The measured ink density value for the specific ink in the selected ink zone is rejected as being implausible, and is not used for automatically regulating the ink in the printing press, if the relation between the measured value and the measured value for the same ink in the at least one other inking zone inadmissibly either exceeds or lies below at least one predefined threshold value. | 06-09-2011 |