Patent application number | Description | Published |
20080239455 | MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING CONDUCTING LAYERS SEPARATED BY STOPS - A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position. | 10-02-2008 |
20090009847 | INTEGRATED IMODS AND SOLAR CELLS ON A SUBSTRATE - Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator. | 01-08-2009 |
20090051369 | SYSTEM AND METHOD FOR MEASURING ADHESION FORCES IN MEMS DEVICES - A MEMS test device comprises a flexible beam spaced apart from an optical stack. The MEMS test device includes a reflective layer and a partially reflective layer, such that a change in the position of the MEMS test device can be observed without the use of an external interferometer. The flexible beam may be cantilevered or fixed at each end. The flexible beam may include a shoe suspended from the side of the beam facing the optical stack, to provide a fixed contact area. An array of MEMS test devices may be used to determine compliance, or to calculate adhesion forces. | 02-26-2009 |
20090147343 | MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT - MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity. | 06-11-2009 |
20090256218 | MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES - A microelectromechanical (MEMS) device includes a substrate and a movable layer mechanically coupled to the substrate. The movable layer moves from a first position to a second position at a first rate and from the second position to the first position at a second rate faster than the first rate. The MEMS device further includes an adjustable cavity defined between the substrate and the movable layer and containing a fluid. The MEMS device further includes a fluid conductive element through which the fluid flows at a first flowrate from inside the cavity to outside the cavity upon movement of the movable layer from the second position to the first position and through which the fluid flows at a second flowrate slower than the first flowrate from outside the cavity to inside the cavity upon movement of the movable layer from the first position to the second position. | 10-15-2009 |
20090308452 | INTEGRATED IMODS AND SOLAR CELLS ON A SUBSTRATE - Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator. | 12-17-2009 |
20100118382 | ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE - A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force. | 05-13-2010 |
20100165442 | MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS - Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices. | 07-01-2010 |
20100202039 | MEMS DEVICES HAVING SUPPORT STRUCTURES WITH SUBSTANTIALLY VERTICAL SIDEWALLS AND METHODS FOR FABRICATING THE SAME - Embodiments of MEMS devices include support structures having substantially vertical sidewalls. Certain support structures are formed through deposition of self-planarizing materials or via a plating process. Other support structures are formed via a spacer etch. Other MEMS devices include support structures at least partially underlying a movable layer, where the portions of the support structures underlying the movable layer include a convex sidewall. In further embodiments, a portion of the support structure extends through an aperture in the movable layer and over at least a portion of the movable layer. | 08-12-2010 |
20100265563 | ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME - Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another. | 10-21-2010 |
20110188109 | ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION - A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element. | 08-04-2011 |
20110205615 | MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS - Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices. | 08-25-2011 |
20120057216 | MULTICOMPONENT SACRIFICIAL STRUCTURE - A MEMS comprising a sacrificial structure, which comprises a faster etching portion and a slower etching portion, exhibits reduced damage to structural features when in forming a cavity in the MEMS by etching away the sacrificial structure. The differential etching rates mechanically decouple structural layers, thereby reducing stresses in the device during the etching process. Methods and systems are also provided. | 03-08-2012 |
20120088027 | ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE - Examples of methods of manufacturing a microelectromechanical system (MEMS) device can include forming a first reflective layer on a substrate, forming a sacrificial layer over the first reflective layer, removing a portion of the sacrificial layer to form an opening, and filling the opening with a dielectric material to form a post. Some methods further include forming a second reflective layer over the sacrificial layer, removing a portion of the second reflective layer and a portion of the post to form a hole, filling the hole with a conductive material to form an electrode, and removing the sacrificial layer. | 04-12-2012 |
20120272733 | ADAPTIVE MODIFICATIONS IN MICRO OPTO-ELECTRO-MECHANICAL SYSTEMS - A micro-opto-electromechanical rotation rate sensor (MOERRS) device, in which a rotation rate sensor is associated with peripheral circuitry. The magnitude of the output signal of the MOERRS is adaptable to correspond to a range of mechanical stimuli to which the sensor is sensitive, in order to accommodate the signal magnitude to the dynamic range available in the MOERRS device. The signal emanating from the rotation rate sensor is facilitated to exploit the dynamic range of said MOERRS device, by modifying some properties of one or more items on the MOERRS. | 11-01-2012 |
20120287138 | ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME - Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another. | 11-15-2012 |
20130069958 | ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION - A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element. | 03-21-2013 |
20130100518 | TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER - This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity. | 04-25-2013 |
20140251770 | SWITCHING DEVICE - An acceleration responsive switching device formed as a micro-electromechanical systems (MEMS) device in which components are deposited and etched on and or above a substrate. The device has a proof mass module. The proof mass module includes: at least one proof mass made of metal; at least three resilient suspending members made of metal, for suspending the proof mass; a lingule made of metal, connected to the proof mass; at least two contact pads to which at least one of the three resilient suspending members is permanently attached thereby allowing current to flow from the at least two pads to the proof mass module; and at least one additional contact pad, which is set against the lingule. | 09-11-2014 |