Patent application number | Description | Published |
20080239431 | MICROMECHANICAL DEVICE OF INCREASED RIGIDITY - A micromechanical device includes a deflectable micromechanical functional structure and a non-rigid biased suspension positioning the micromechanical functional structure in the micromechanical device. | 10-02-2008 |
20080239446 | MICROMECHANICAL DEVICE WITH TILTED ELECTRODES - A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis. | 10-02-2008 |
20080240202 | MICROMECHANICAL DEVICE WITH TEMPERATURE STABILIZATION AND METHOD FOR ADJUSTING A DEFINED TEMPERATURE OR A DEFINED TEMPERATURE COURSE ON A MICROMECHANICAL DEVICE - A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure. | 10-02-2008 |
20080242049 | METHOD FOR GENERATING A MICROMECHANICAL STRUCTURE - In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state. | 10-02-2008 |
20080278785 | MICROMECHANICAL DEVICE, MICROMECHANICAL SYSTEM, APPARATUS FOR ADJUSTING SENSITIVITY OF A MICROMECHANICAL DEVICE, METHOD FOR PRODUCING A MICROMECHANICAL DEVICE - A micromechanical device has a layer; at least a first slot formed in the layer to define a first oscillation element oscillatably suspended via a first spring portion of the layer; and at least a second slot formed in the layer to define a second oscillation element oscillatably suspended via a second spring portion of the layer, wherein a trench is formed in the spring portion pair in a main surface of the layer, wherein a resonance frequency of the first oscillation element is different from that of the second oscillation element, and the first and second spring portions and the trench are formed such that, in an anisotropic lateral material removal and/or addition of the first and second spring portions, a ratio of a relative change of the resonance frequency of the second oscillation element to that of the first oscillation element ranges from 0.8 to 1.2. | 11-13-2008 |
20080284078 | Micromechanical Element Which Can be Deflected - The invention relates to deflectable micromechanical elements which can preferably be deflected in translation and optionally also in an oscillatory manner. With respect to known solutions, it is the object of the invention to enable larger deflections with a simultaneously improved resistance toward lateral forces and torques. In this connection, a suspension having at least one spring system is present at elements in accordance with the invention. Levers pivotally connected to torsion spring elements are present at spring systems. Torsion spring elements of a spring system are aligned in a common axis and/or a plurality of axes arranged parallel to one another and at least one torsion spring element is fixedly clamped. | 11-20-2008 |
20090250853 | TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED - The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork/branching at at least one end face into which the straight-line region merges. | 10-08-2009 |
20090293632 | DEFLECTABLE MICROMECHANICAL SYSTEM AND USE THEREOF - The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material. | 12-03-2009 |
20090302960 | Oscillating, deflectable micromechanical element and method for use thereof - The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection. | 12-10-2009 |
20090303563 | Method for Structuring a Device Layer of a Substrate - Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed. | 12-10-2009 |
20100097681 | MICROMECHANICAL ELEMENT AND SENSOR FOR MONITORING A MICROMECHANICAL ELEMENT - A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation. | 04-22-2010 |
20120188625 | MICROMECHANICAL DEVICE WITH TEMPERATURE STABILIZATION AND METHOD FOR ADJUSTING A DEFINED TEMPERATURE OR A DEFINED TEMPERATURE COURSE ON A MICROMECHANICAL DEVICE - A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure. | 07-26-2012 |