Patent application number | Description | Published |
20100096110 | METHODS AND APPARATUS FOR RECOVERING HEAT FROM PROCESSING SYSTEMS - Methods and apparatus for recovering heat from disposed effluents are disclosed herein. In some embodiments, an apparatus may include a first process chamber configured for gaseous or liquid processes; a second process chamber configured for liquid processes; and a heat pump having a compressor and a first heat exchanger, wherein the compressor is configured to use a first effluent exhausted from the first process chamber and wherein the first heat exchanger having first and second sides configured to transfer heat therebetween, wherein the first side is configured to flow a liquid reagent therethrough and into the second process chamber, and wherein the second side is configured to flow the pressurized first effluent from the first process chamber therethrough. In some embodiments, a heater may be disposed between the heat pump and the second process chamber to further heat the liquid reagent prior to entering the second process chamber. | 04-22-2010 |
20100249968 | FACTORY RESOURCE OPTIMIZATION IDENTIFICATION PROCESS AND SYSTEM - A method and system for factory resource optimization identification is described herein. In one embodiment, an expected usage rate is determined for a resource in a manufacturing facility and an actual usage rate is determined for the resource in the manufacturing facility. A comparison between the expected usage rate and the actual usage rate is facilitated. A determination is made, based on the comparison, of whether a variance between the expected usage rate and the actual usage rate exceeds a threshold. A notification is provided if the variance exceeds the threshold. | 09-30-2010 |
20110023908 | METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE OF ABATEMENT EFFLUENT - Methods and apparatus for recovering hydrogen fluoride (HF) are provided herein. In some embodiments, an apparatus includes a system for processing substrates, including a process chamber for processing a substrate; a fluorine generator coupled to the process chamber to provide fluorine (F | 02-03-2011 |
20110070811 | POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY - The present invention generally relates to apparatus and method for recycling both polishing slurry and rinse water from CMP processes. The present invention also relates to rheology measurements and agglomeration prevention using centrifugal pumps. | 03-24-2011 |
20120091099 | METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS - Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system. | 04-19-2012 |
20120143574 | PROCESS TOOL CHEMICAL AND GAS USAGE OPTIMIZATION - A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning. | 06-07-2012 |
20120204965 | METHOD AND APPARATUS FOR CONTROLLING A PROCESSING SYSTEM - Methods and apparatus for controlling a processing system are provided herein. In some embodiments, a method of controlling a processing system may include operating a vacuum pump coupled to a process chamber at a first baseline pump idle speed selected to maintain the process chamber at a pressure equal to a first baseline pump idle pressure; monitoring the pressure in the process chamber while operating the vacuum pump at the first baseline pump idle speed; and determining whether the first baseline pump idle pressure can be maintained in the process chamber when the vacuum pump is operating at the first baseline pump idle speed. | 08-16-2012 |
Patent application number | Description | Published |
20100200289 | CABLE RUN - The present invention relates to a ceiling-mounted apparatus for running a cable harness, in more precise terms a ceiling-mounted apparatus for running a cable harness with a chain of guide carriages coupled to one another by means of spring elements, said guide carriages running in at least one guide rail in each instance, with a first guide carriage being connected to a cable harness source by means of at least one spring element and with the guide carriages comprising additional spring elements for attaching the cable harness. | 08-12-2010 |
20110073702 | FLEXIBLE HOSE TENSIONING DEVICE - A flexible hose tensioning device includes a shaper roller for receiving a flexible hose. The shaper roller includes guide grooves, into which raised sections of the flexible hose engage. The shaper roller and the guide grooves are configured so that there is a form fit between the shaper roller and the flexible hose. An element that holds the flexible hose in the shaper roller and a spring coupled to the shaper roller are also provided. The spring is tensioned when the flexible hose is pulled in a corresponding direction and generates an opposing force to a flexible hose tensile force. | 03-31-2011 |
20120275571 | ROBOT ARRANGEMENT WITH A GUIDE ELEMENT FOR SUPPLY LINES - The present embodiments relate to an arrangement with a robot having a robot arm formed from arm members. The robot arm carries a device fed by at least one electrical supply line. The arrangement has at least one guide element fixed to one of the arm members for guidance of the at least one electrical supply line on the robot arm. The at least one guide element is arranged rotatably about a longitudinal axis of the one arm member. | 11-01-2012 |
20140111227 | Housing Cladding Module with Collision Identification for Medical Devices - A housing cladding module for a medical device is provided for collision identification. The module includes resistor elements, which are arranged in and/or on the surface and which are designed such that the resistor elements change their electrical resistance on expansion. The resistor elements are arranged in such a way that the resistor elements are expanded in the event of a collision with an object. The collision is identified easily, and the effective collision force may be ascertained. | 04-24-2014 |
20140163734 | Motorized Assistance in the Movement of a Medical Apparatus - An arrangement for motorized assistance in movement of manually movable components of medical apparatuses is provided. The arrangement includes at least one torque sensor that is arranged in a drivetrain of a movable component of a medical apparatus. The at least one torque sensor detects the moments occurring in the drivetrain in a stationary state and in motion. Using an evaluation unit, the torque detected by the at least one torque sensor may be compared against a predefinable first threshold value. The first threshold value is predefined according to a possible position of the movable component. The arrangement includes a drive unit, by which the drive of the drivetrain may be provided with motorized assistance when the first threshold value is exceeded. | 06-12-2014 |
20140334608 | Medical Treatment or Examination Device - A medical treatment or examination device includes at least one device component that may move relative to at least one other device component via a drive device. A measuring device is provided for detecting a load acting on the movable device component. The measuring device includes a support that bends due to the load. The support, at least in a bending region, has a section producing a magnetic field. The measuring device also includes at least one coil that is assigned to the section and in which the magnetic field undergoing a change as a result of bending due to a load induces an induction current that serves as measurement signal describing the load. | 11-13-2014 |
20140359942 | Mobile Patient Bed - A mobile patient bed includes a bench that may be moved vertically via a lifting mechanism. Vertical movement may be effected via a first, electric drive mechanism including a drive device that may be operated when connected to an energy supply. As an alternative, vertical movement may be effected via a second drive mechanism that may be actuated by the operator using a foot pedal. The drive device is a drive motor that is coupled to the lifting mechanism via a motor shaft and is coupled to the second drive mechanism via a clutch. The clutch is closed with no connection to the energy supply and is opened with connection established. The motor shaft may be driven via the second drive mechanism when the clutch is closed. | 12-11-2014 |
20150023470 | C-Arm Mounting Apparatus and X-Ray Imaging Device with Cage Guide - A C-arm mounting apparatus for an x-ray imaging device includes a C-arm, a C-arm holding unit, and at least one cage guide unit. The at least one cage guide unit is moveably arranged between the C-arm and the C-arm holding unit. The C-arm is moveably mounted on the C-arm holding unit. The at least one cage guide unit includes a plurality of rolling bodies and at least one rolling body cage. The small overlap between the C-arm and the C-arm holding unit may facilitate greater rotations about an isocenter. An x-ray imaging device includes a C-arm mounting apparatus. | 01-22-2015 |
20150272518 | Medical Examination Facility - A medical examination facility is provided, wherein the facility includes an imaging apparatus and a mobile patient table. Mechanical coupling devices to be connected to each other are provided on both the imaging apparatus and the mobile patient table for the purpose of mechanically coupling the patient table to the imaging apparatus in an end position. The mechanical coupling device of the imaging apparatus includes a pulling device that is movable to a locking position via a controllable drive motor. In order to automatically move the patient table, the pulling device engages a driver provided on the patient table, before the end position is reached, and carries it by moving to the locking position, in which the patient table is in the end position. | 10-01-2015 |