Patent application number | Description | Published |
20120132228 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND BAFFLE STRUCTURE OF THE SUBSTRATE PROCESSING APPARATUS - A conventional substrate processing apparatus for generating plasma cannot generate plasma with high density and thus throughput of substrate processing is low. In order to solve this problem, provided is a substrate processing apparatus including a reaction vessel having a tubular shape and provided with a coil installed at an outer circumference thereof; a cover installed at a first end of the reaction vessel; a gas introduction port installed at the cover; a first plate installed between the gas introduction port and an upper end of the coil; a second plate installed between the first plate and the upper end of the coil; a substrate processing chamber installed at a second end of the reaction vessel; and a gas exhaust part connected to the substrate processing chamber. | 05-31-2012 |
20120329290 | Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device - Provided is a substrate placement stage or substrate processing apparatus which can suppress thermal deformation of the substrate placement stage when the substrate placement stage on which a substrate is placed is heated in a process chamber. The substrate placement stage includes: a heating element; a first member surrounding the heating element; and a second member covering a surface of the first member and including a placing surface for placing a substrate thereon, wherein the first member is made of a first material containing ceramics and aluminum, and the second member is made of a second material containing ceramics and aluminum, a content of the ceramics in the second material being lower than that of the first material. | 12-27-2012 |
20130012035 | Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device - A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector. | 01-10-2013 |
Patent application number | Description | Published |
20080299389 | Flame Resistant Fiber, Carbon Fiber and Production Method Thereof - In a flame resistant fiber assembly obtainable by fiber forming a flame resistant polymer, a flame resistant fiber of a higher performance is obtained by improving fiber forming ability. A carbon fiber of a high performance is obtained by carbonizing the flame resistant fiber. At obtaining a flame resistant fiber by subjecting a solution containing a flame resistant polymer modified by an amine-based compound to a wet spinning or a semi-dry spinning in a coagulation bath in such a way that a degree of swelling of a coagulated yarn at the outlet of the coagulation bath is 100 to 1000 wt % and then, in a bath, subjecting to a drawing and/or water washing and to a drying under tension, the flame resistant fiber is produced by controlling temperature of the drawing bath/water washing bath, drying temperature or tension in such a way that the obtained fiber would not crystallize. A carbon fiber is produced by carbonizing the flame resistant fiber. | 12-04-2008 |
20100278716 | DISPERSION CONTAINING FLAME-RESISTANT POLYMER, FLAME-RESISTANT FIBER, AND CARBON FIBER - A dispersion contains a flame-resistant polymer, which can improve shaping stability of the flame-resistant polymer during ejection from a die orifice, and physical stability of a shaped product in a washing step. The dispersion containing a flame-resistant polymer is a dispersion in which a flame-resistant polymer is dispersed in an organic solvent, an in-water tensile strength thereof per unit cross-sectional area is 1.0 MPa or more and 6.5 MPa or less, the flame-resistant polymer can be preferably obtained by heat-treating an acrylonitrile polymer in the presence of at least one kind of acid, acid anhydride or acid chloride in an organic solvent, and a suitable organic solvent is a polar organic solvent. | 11-04-2010 |