Patent application number | Description | Published |
20080237634 | CRYSTALLOGRAPHIC RECESS ETCH FOR EMBEDDED SEMICONDUCTOR REGION - Source and drain regions of an FET are etched by a crystallographic anisotropic etch to form a cavity surrounded by crystallographic facets. The exposure of the sidewalls of shallow trench isolation (STI) is avoided or reduced compared to the prior art. The crystallographic anisotropic etch may be combined with an isotropic etch or a recess etch to create undercuts beneath gate spacers and/or a pegging line beneath a top surface of the STI. The at least one cavity is then filled with a lattice-mismatched embedded material so that stress is applied to the channel of the FET. The resulting structure has increased containment of the embedded semiconductor region by shallow trench isolation. A reduction in stress due to the unconstrained sidewall area and an increase in the junction current due to the recessing of the pegging line are eliminated or alleviated. | 10-02-2008 |
20080237709 | AFTER GATE FABRICATION OF FIELD EFFECT TRANSISTOR HAVING TENSILE AND COMPRESSIVE REGIONS - A field effect transistor (“FET”) is formed to include a stress in a channel region of an active semiconductor region of an SOI substrate. A gate is formed to overlie the active semiconductor region, after which a sacrificial stressed layer is formed which overlies the gate and the active semiconductor region. Then, the SOI substrate is heated to cause a flowable dielectric material in a buried dielectric layer of the SOI substrate to soften and reflow. As a result of the reflowing, the sacrificial stressed layer induces stress in a channel region of the active semiconductor region underlying the gate. A source region and a drain region are formed in the active semiconductor region, desirably after removing the sacrificial stressed layer. | 10-02-2008 |
20080251817 | STRESSED FIELD EFFECT TRANSISTORS ON HYBRID ORIENTATION SUBSTRATE - A semiconductor structure having improved carrier mobility is provided. The semiconductor structures includes a hybrid oriented semiconductor substrate having at least two planar surfaces of different crystallographic orientation, and at least one CMOS device located on each of the planar surfaces of different crystallographic orientation, wherein each CMOS device has a stressed channel. The present invention also provides methods of fabricating the same. In general terms, the inventive method includes providing a hybrid oriented substrate having at least two planar surfaces of different crystallographic orientation, and forming at least one CMOS device on each of the planar surfaces of different crystallographic orientation, wherein each CMOS device has a stressed channel. | 10-16-2008 |
20080258180 | CROSS-SECTION HOURGLASS SHAPED CHANNEL REGION FOR CHARGE CARRIER MOBILITY MODIFICATION - A semiconductor structure and a method for fabricating the semiconductor structure include a semiconductor substrate having a cross-section hourglass shaped channel region. A stress imparting layer is located adjacent the channel region. The hourglass shape may provide for enhanced vertical tensile stress within the channel region when it is longitudinally compressive stressed by the stress imparting layer. | 10-23-2008 |
20080258234 | SEMICONDUCTOR STRUCTURE FOR LOW PARASITIC GATE CAPACITANCE - A semiconductor structure provides lower parasitic capacitance between the gate electrode and contact vias while providing substantially the same level of stress applied by a nitride liner as conventional MOSFETs by reducing the height of the gate electrode and maintaining substantially the same height for the gate spacer. The nitride liner contacts only the outer sidewalls of the gate spacer, while not contacting inner sidewalls, or only a small area of the inner sidewalls of the gate spacer, therefore applying substantially the same level of stress to the channel of the MOSFET as conventional MOSFETs. The volume surrounded by the gate spacer and located above the gate electrode is either filled with a low-k dielectric material or occupied by a cavity having a dielectric constant of substantially 1.0. The reduced height of the gate electrode and the low-k dielectric gate filler or the cavity reduces the parasitic capacitance. | 10-23-2008 |
20080261369 | STRUCTURE AND METHOD FOR MOSFET WITH REDUCED EXTENSION RESISTANCE - The present invention provides a method in which a low-resistance connection between the MOS channel and silicided source/drain regions is provided that has an independence from the extension ion implant process as well as device overlap capacitance. The method of the present invention broadly includes selectively removing outer spacers of an MOS structure and then selectively plating a metallic or intermetallic material on exposed portions of a semiconductor substrate that were previously protected by the outer spacers. The present invention also provides a semiconductor structure that is formed utilizing the method. The semiconductor structure includes a low-resistance connection between the silicided source/drain regions and the channel regions which includes a selectively plated metallic or intermetallic material. | 10-23-2008 |
20080265281 | EMBEDDED SILICON GERMANIUM USING A DOUBLE BURIED OXIDE SILICON-ON-INSULATOR WAFER - Disclosed is a p-type field effect transistor (pFET) structure and method of forming the pFET. The pFET comprises embedded silicon germanium in the source/drain regions to increase longitudinal stress on the p-channel and, thereby, enhance transistor performance. Increased stress is achieved by increasing the depth of the source/drain regions and, thereby, the volume of the embedded silicon germanium. The greater depth (e.g., up to 100 nm) of the stressed silicon germanium source/drain regions is achieved by using a double BOX SOI wafer. Trenches are etched through a first silicon layer and first buried oxide layer and then the stressed silicon germanium is epitaxially grown from a second silicon layer. A second buried oxide layer isolates the pFET. | 10-30-2008 |
20080283918 | Ultra Thin Channel (UTC) MOSFET Structure Formed on BOX Regions Having Different Depths and Different Thicknesses Beneath the UTC and SourceDrain Regions and Method of Manufacture Thereof - A MOSFET structure includes a planar semiconductor substrate, a gate dielectric and a gate. A UT SOI channel extends to a first depth below the top surface of the substrate and is self-aligned to and is laterally coextensive with the gate. Source-drain regions, extend to a second depth greater than the first depth below the top surface, and are self-aligned to the UT channel region. A BOX | 11-20-2008 |
20080286909 | SIDEWALL SEMICONDUCTOR TRANSISTORS - A novel transistor structure and method for fabricating the same. First, a substrate, a semiconductor region, a gate dielectric region, and a gate block are provided. The semiconductor region, the gate dielectric region, and the gate block are on the substrate. The gate dielectric region is sandwiched between the semiconductor region and the gate block. The semiconductor region is electrically insulated from the gate block by the gate dielectric region. The semiconductor region and the gate dielectric region share an interface surface which is essentially perpendicular to a top surface of the substrate. The semiconductor region and the gate dielectric region do not share any interface surface that is essentially parallel to a top surface of the substrate. Next, a gate region is formed from the gate block. Then, first and second source/drain regions are formed in the semiconductor region. | 11-20-2008 |
20090039461 | FORMATION OF IMPROVED SOI SUBSTRATES USING BULK SEMICONDUCTOR WAFERS - The present invention relates to a semiconductor-on-insulator (SOI) substrate having one or more device regions. Each device region comprises at least a base semiconductor substrate layer and a semiconductor device layer with a buried insulator layer located therebetween, while the semiconductor device layer is supported by one or more vertical insulating pillars. The vertical insulating pillars each preferably has a ledge extending between the base semiconductor substrate layer and the semiconductor device layer. The SOI substrates of the present invention can be readily formed from a precursor substrate structure with a “floating” semiconductor device layer that is spaced apart from the base semiconductor substrate layer by an air gap and is supported by one or more vertical insulating pillars. The air gap is preferably formed by selective removal of a sacrificial layer located between the base semiconductor substrate layer and the semiconductor device layer. | 02-12-2009 |
20090040006 | ELECTRICAL FUSE WITH ENHANCED PROGRAMMING CURRENT DIVERGENCE - A layer of semiconductor material is patterned to form a cathode semiconductor portion, a fuselink semiconductor portion, and an anode semiconductor portion. A first metal layer is deposited on the patterned semiconductor material layer. A dielectric material layer is deposited and lithographically patterned to cover a middle portion of the fuselink, followed by a deposition of a second metal layer. A thin metal semiconductor alloy is formed in the middle of the fuselink and thick metal semiconductor alloy alloys are formed abutting the thin metal semiconductor alloy alloy. The resulting inventive electrical fuse has interfaces at which a thinner metal semiconductor alloy abuts a thicker metal semiconductor alloy in the fuselink. The divergence of electrical current is enhanced at the interfaces due to a sudden change of a cross-sectional area available for current conduction. | 02-12-2009 |
20090042341 | ELECTRICAL FUSE WITH A THINNED FUSELINK MIDDLE PORTION - A metal layer is deposited on the patterned semiconductor material layer containing a cathode semiconductor portion, a fuselink semiconductor portion, and an anode semiconductor portion. The metal layer may be patterned so that a middle portion of the fuselink semiconductor portion has a thin metal layer, which upon annealing produces a thinner metal semiconductor alloy portion than surrounding metal semiconductor alloy portion on the fuselink semiconductor portion. Alternatively, a middle portion of the metal semiconductor alloy having a uniform thickness throughout the fuselink may be lithographically patterned and etched to form a thin metal semiconductor alloy portion in the middle of the fuselink, while thick metal semiconductor alloy portions are formed on the end portions of the fuselink. The resulting inventive electrical fuse has interfaces at which a thinner metal semiconductor alloy abuts a thicker metal semiconductor alloy in the fuselink to enhance the divergence of electrical current. | 02-12-2009 |
20090079011 | METHOD AND STRUCTURE FOR IMPROVING DEVICE PERFORMANCE VARIATION IN DUAL STRESS LINER TECHNOLOGY - A method and semiconductor structure that overcome the dual stress liner boundary problem, without significantly increasing the overall size of the integrated circuit, are provided. In accordance with the present invention, the dual stress liner boundary or gap therebetween is forced to land on a neighboring dummy gate region. By forcing the dual stress liner boundary or gap between the liners to land on the dummy gate region, the large stresses associated with the dual stress liner boundary or gap are transferred to the dummy gate region, not the semiconductor substrate. Thus, the impact of the dual stress liner boundary on the nearest neighboring FET is reduced. Additionally, benefits of device variability and packing density are achieved utilizing the present invention. | 03-26-2009 |
20090079026 | STRESS-GENERATING STRUCTURE FOR SEMICONDUCTOR-ON-INSULATOR DEVICES - A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region. | 03-26-2009 |
20090106714 | METHODS AND SYSTEM FOR ANALYSIS AND MANAGEMENT OF PARAMETRIC YIELD - Impact on parametric performance of physical design choices for transistors is scored for on-current and off-current of the transistors. The impact of the design parameters are incorporated into parameters that measure predicted shift in mean on-current and mean off-current and parameters that measure predicted increase in deviations in the distribution of on-current and the off-current. Statistics may be taken at a cell level, a block level, or a chip level to optimize a chip design in a design phase, or to predict changes in parametric yield during manufacturing or after a depressed parametric yield is observed. Further, parametric yield and current level may be predicted region by region and compared with observed thermal emission to pinpoint any anomaly region in a chip to facilitate detection and correction in any mistakes in chip design. | 04-23-2009 |
20090108396 | ELECTRICAL FUSE HAVING A FULLY SILICIDED FUSELINK AND ENHANCED FLUX DIVERGENCE - A contiguous block of a stack of two heterogeneous semiconductor layers is formed over an insulator region such as shallow trench isolation. A portion of the contiguous block is exposed to an etch, while another portion is masked during the etch. The etch removes an upper semiconductor layer selective to a lower semiconductor layer in the exposed portion. The etch mask is removed and the entirety of the lower semiconductor layer within the exposed region is metallized. A first metal semiconductor alloy vertically abutting the insulator region is formed, while exposed surfaces of the stack of two heterogeneous semiconductor layers, which comprises the materials of the upper semiconductor layer, are concurrently metallized to form a second metal semiconductor alloy. An inflection point for current and, consequently, a region of flux divergence are formed at the boundary of the two metal semiconductor alloys. | 04-30-2009 |
20090142894 | METHOD FOR FABRICATING A SEMICONDUCTOR STRUCTURE - A method for fabricating a semiconductor structure. The novel transistor structure comprises first and second source/drain (S/D) regions whose top surfaces are lower than a top surface of the channel region of the transistor structure. A semiconductor layer and a gate stack on the semiconductor layer are provided. The semiconductor layer includes (i) a channel region directly beneath the gate stack, and (ii) first and second semiconductor regions essentially not covered by the gate stack, and wherein the channel region is disposed between the first and second semiconductor regions. The first and second semiconductor regions are removed. Regions directly beneath the removed first and second semiconductor regions are removed so as to form first and second source/drain regions, respectively, such that top surfaces of the first and second source/drain regions are below a top surface of the channel region. | 06-04-2009 |
20090144670 | AUTOMATED OPTIMIZATION OF DEVICE STRUCTURE DURING CIRCUIT DESIGN STAGE - A method of improving a circuit design for a very large scale integrated circuit is provided which represents a plurality of semiconductor devices interconnected in a circuit. It is determined whether an edge of a feature of one of the plurality of semiconductor devices in the design can be moved in a first direction by a distance within a permitted range, such that a performance goal and a matching goal for the circuit are served. If so, the edge is moved in the first direction by the distance calculated to best serve the performance goal and the matching goal. The foregoing steps may be repeated for each of the plurality of semiconductor devices. If necessary, the foregoing steps may be repeated until the performance goal and matching goal for the circuit are deemed to be adequately served. | 06-04-2009 |
20090152590 | METHOD AND STRUCTURE FOR SEMICONDUCTOR DEVICES WITH SILICON-GERMANIUM DEPOSITS - A method of forming a semiconductor device including forming a second deposit of silicon-germanium on a first deposit of silicon-germanium, the first deposit formed in a conduction terminal region of a substrate of the semiconductor device and having a first percentage of germanium, and the second deposit having a second percentage of germanium that is less than the first percentage and supports forming a silicide deposit on the second deposit. A structure is also provided. | 06-18-2009 |
20090171644 | CA RESISTANCE VARIABILITY PREDICTION METHODOLOGY - A methodology for obtaining improved prediction of CA resistance in electronic circuits and, particularly, an improved CA resistance model adapted to capture larger than anticipated “out of spec” regime. In one embodiment, a novel bucketization scheme is implemented that is codified to provide a circuit designer with considerably better design options for handling large CA variability as seen through the design manual. The tools developed for modeling the impact of CA variable resistance phenomena provide developers with a resistance model, such as conventionally known, modified with a new CA model Basis including a novel CA intrinsic resistance model, and, a novel CA layout bucketization model. | 07-02-2009 |
20090177448 | COMPACT MODEL METHODOLOGY FOR PC LANDING PAD LITHOGRAPHIC ROUNDING IMPACT ON DEVICE PERFORMANCE - A method and computer program product for modeling a semiconductor transistor device structure having an active device area, a gate structure, and including a conductive line feature connected to the gate structure and disposed above the active device area, the conductive line feature including a conductive landing pad feature disposed near an edge of the active device area in a circuit to be modeled. The method includes determining a distance between an edge defined by the landing pad feature to an edge of the active device area, and, from modeling a lithographic rounding effect of the landing pad feature, determining changes in width of the active device area as a function of the distance between an edge defined by the landing pad feature to an edge of the active device area. From these data, an effective change in active device area width (deltaW adder) is related to the determined distance. Then, transistor model parameter values in a transistor compact model are updated for the transistor device to include deltaW adder values to be added to a built-in deltaW value. A netlist used in a device simulation may then include the deltaW adder values to quantify the influence of the lithographic rounding effect of the landing pad feature. | 07-09-2009 |
20090178012 | METHODOLOGY FOR IMPROVING DEVICE PERFORMANCE PREDICTION FROM EFFECTS OF ACTIVE AREA CORNER ROUNDING - A system and method for modeling a semiconductor transistor device structure having a conductive line feature of a designed length connected to a gate of a transistor device in a circuit to be modeled, the transistor including an active device (RX) area over which the gate is formed and over which the conductive line feature extends. The method includes providing an analytical model representation including a function for modeling a lithographic flare effect impacting the active device area width; and, from the modeling function, relating an effective change in active device area width (deltaW adder) as a function of a distance from a defined edge of the RX area. Then, transistor model parameter values in a transistor compact model for the device are updated to include deltaW adder values to be added to a built-in deltaW value. A netlist used in a simulation includes the deltaW adder values to more accurately describe the characteristics of the transistor device being modeled including modeling of lithographic corner rounding effect on transistor device parametrics. | 07-09-2009 |
20090200604 | VERTICAL FIN-FET MOS DEVICES - A new class of high-density, vertical Fin-FET devices that exhibit low contact resistance is described. These vertical Fin-FET devices have vertical silicon “fins” ( | 08-13-2009 |
20090206412 | HYBRID ORIENTATION SCHEME FOR STANDARD ORTHOGONAL CIRCUITS - Embodiments herein present device, method, etc. for a hybrid orientation scheme for standard orthogonal circuits. An integrated circuit of embodiments of the invention comprises a hybrid orientation substrate, comprising first areas having a first crystalline orientation and second areas having a second crystalline orientation. The first crystalline orientation of the first areas is not parallel or perpendicular to the second crystalline orientation of the second areas. The integrated circuit further comprises first type devices on the first areas and second type devices on the second areas, wherein the first type devices are parallel or perpendicular to the second type devices. Specifically, the first type devices comprise p-type field effect transistors (PFETs) and the second type devices comprise n-type field effect transistors (NFETs). | 08-20-2009 |
20090265673 | INTERSECT AREA BASED GROUND RULE FOR SEMICONDUCTOR DESIGN - A design rule that determines a degree of overlap between two design elements in two adjoining levels by estimating a physical overlap area, or an “intersect area,” of corresponding structures in a semiconductor chip is provided. The estimation of the physical intersect area may factor in line edge biasing, critical dimension tolerance, overlay tolerance, and corner rounding to provide an accurate estimate of a physical area for each of the structures corresponding to the two design elements. The intersect area is employed as a metric to determine compliance with a ground rule, i.e., the ground rule is specified in terms of the intersect region. Other derived quantities such as electrical resistance, electromigration resistance, expected yield may be calculated from the intersect area, and may be advantageously employed to optimize the design data. | 10-22-2009 |
20100013024 | HIGH PERFORMANCE STRESS-ENHANCE MOSFET AND METHOD OF MANUFACTURE - The invention relates to a semiconductor structure and method of manufacturing and more particularly to a CMOS device with a stress inducing material embedded in both gates and also in the source/drain region of the PFET and varying thickness of the PFET and NFET channel. In one embodiment, the structure enhances the device performance by varying the thickness of the top Silicon layer respective to the NFET or the PFET. | 01-21-2010 |
20100032846 | IC HAVING VIABAR INTERCONNECTION AND RELATED METHOD - An IC including first metal layer having wiring running in a first direction; a second metal layer having wiring running in a second direction perpendicular to the first direction; and a first via layer between the first metal layer and the second metal layer, the first via layer including a viabar interconnecting the first metal layer to the second metal layer at a first location where the first metal layer vertically coincides with the second metal layer and, at a second location, connecting to wiring of the first metal layer but not wiring of the second metal layer. | 02-11-2010 |
20100050138 | SYSTEM AND METHODOLOGY FOR DETERMINING LAYOUT-DEPENDENT EFFECTS IN ULSI SIMULATION - A layout of a semiconductor circuit is analyzed to calculate layout-dependant parameters that can include a mobility shift and a threshold voltage shift. Layout-dependant effects that affect the layout dependant parameters may include stress effects, rapid thermal anneal (RTA) effects, and lithographic effects. Intrinsic functions that do not reflect the layout-dependant effects are calculated, followed by calculation of scaling modifiers based on the layout-dependant parameters. A model output function that reflects the layout-dependant effects is obtained by multiplication of each of the intrinsic functions with a corresponding scaling parameter. | 02-25-2010 |
20100127327 | GATE ELECTRODE STRESS CONTROL FOR FINFET PERFORMANCE ENHANCEMENT DESCRIPTION - A finFET and its method for fabrication include a gate electrode formed over a channel region of a semiconductor fin. The semiconductor fin has a crystallographic orientation and an axially specific piezoresistance coefficient. The gate electrode is formed with an intrinsic stress determined to influence, and preferably optimize, charge carrier mobility within the channel region. To that end, the intrinsic stress preferably provides induced axial stresses within the gate electrode and semiconductor fin channel region that complement the axially specific piezoresistance coefficient. | 05-27-2010 |
20100181643 | EFUSE WITH PARTIAL SIGE LAYER AND DESIGN STRUCTURE THEREFOR - A fuse includes a fuse link region, a first region and a second region. The fuse link region electrically connects the first region to the second region. A SiGe layer is disposed only in the fuse link region and the first region. | 07-22-2010 |
20100252800 | NANOWIRE DEVICES FOR ENHANCING MOBILITY THROUGH STRESS ENGINEERING - A p-type semiconductor nanowire transistor is formed on the first semiconductor nanowire and an n-type semiconductor nanowire transistor is formed on the second semiconductor nanowire. The first and second semiconductor nanowires have a rectangular cross-sectional area with different width-to-height ratios. The type of semiconductor nanowires for each semiconductor nanowire transistor is selected such that top and bottom surfaces provide a greater on-current per unit width than sidewall surfaces in a semiconductor nanowire having a greater width-to-height ratio, while sidewall surfaces provide a greater on-current per unit width than top and bottom surfaces in the other semiconductor nanowire having a lesser width-to-height ratio. Different types of stress-generating material layers may be formed on the first and second semiconductor nanowire transistors to provide opposite types of stress, which may be employed to enhance the on-current of the first and second semiconductor nanowire transistors. | 10-07-2010 |
20100252801 | SEMICONDUCTOR NANOWIRE WITH BUILT-IN STRESS - A semiconductor nanowire having two semiconductor pads on both ends is suspended over a substrate. Stress-generating liner portions are formed over the two semiconductor pads, while a middle portion of the semiconductor nanowire is exposed. A gate dielectric and a gate electrode are formed over the middle portion of the semiconductor nanowire while the semiconductor nanowire is under longitudinal stress due to the stress-generating liner portions. The middle portion of the semiconductor nanowire is under a built-in inherent longitudinal stress after removal of the stress-generating liners because the formation of the gate dielectric and the gate electrode locks in the strained state of the semiconductor nanowire. Source and drain regions are formed in the semiconductor pads to provide a semiconductor nanowire transistor. A middle-of-line (MOL) dielectric layer may be formed directly on the source and drain pads. | 10-07-2010 |
20100252814 | SEMICONDUCTOR NANOWIRES HAVING MOBILITY-OPTIMIZED ORIENTATIONS - Prototype semiconductor structures each including a semiconductor link portion and two adjoined pad portions are formed by lithographic patterning of a semiconductor layer on a dielectric material layer. The sidewalls of the semiconductor link portions are oriented to maximize hole mobility for a first-type semiconductor structures, and to maximize electron mobility for a second-type semiconductor structures. Thinning by oxidation of the semiconductor structures reduces the width of the semiconductor link portions at different rates for different crystallographic orientations. The widths of the semiconductor link portions are predetermined so that the different amount of thinning on the sidewalls of the semiconductor link portions result in target sublithographic dimensions for the resulting semiconductor nanowires after thinning. By compensating for different thinning rates for different crystallographic surfaces, semiconductor nanowires having optimal sublithographic widths may be formed for different crystallographic orientations without excessive thinning or insufficient thinning. | 10-07-2010 |
20100252815 | STRUCTURALLY STABILIZED SEMICONDUCTOR NANOWIRE - In one embodiment, a semiconductor nanowire having a monotonically increasing width with distance from a middle portion toward adjoining semiconductor pads is provided. A semiconductor link portion having tapered end portions is lithographically patterned. During the thinning process that forms a semiconductor nanowire, the taper at the end portions of the semiconductor nanowire provides enhanced mechanical strength to prevent structural buckling or bending. In another embodiment, a semiconductor nanowire having bulge portions are formed by preventing the thinning of a semiconductor link portion at pre-selected positions. The bulge portions having a greater width than a middle portion of the semiconductor nanowire provides enhanced mechanical strength during thinning of the semiconductor link portion so that structural damage to the semiconductor nanowire is avoided during thinning. | 10-07-2010 |
20100269079 | Analyzing Multiple Induced Systematic and Statistical Layout Dependent Effects On Circuit Performance - A method for implementing systematic, variation-aware integrated circuit extraction includes inputting a set of processing conditions to a plurality of variation models, each model corresponding to a separate systematic, parametric variation associated with semiconductor manufacturing of an integrated circuit layout; generating, for each variation model, a netlist update attributable to the associated variation, wherein the netlist update is an update with respect to an original netlist extracted from the integrated circuit layout; and storing the netlist updates generated for each of the processing conditions. | 10-21-2010 |
20100330783 | ELECTRICAL FUSE HAVING A FULLY SILICIDED FUSELINK AND ENHANCED FLUX DIVERGENCE - A contiguous block of a stack of two heterogeneous semiconductor layers is formed over an insulator region such as shallow trench isolation. A portion of the contiguous block is exposed to an etch, while another portion is masked during the etch. The etch removes an upper semiconductor layer selective to a lower semiconductor layer in the exposed portion. The etch mask is removed and the entirety of the lower semiconductor layer within the exposed region is metallized. A first metal semiconductor alloy vertically abutting the insulator region is formed, while exposed surfaces of the stack of two heterogeneous semiconductor layers, which comprises the materials of the upper semiconductor layer, are concurrently metallized to form a second metal semiconductor alloy. An inflection point for current and, consequently, a region of flux divergence are formed at the boundary of the two metal semiconductor alloys. | 12-30-2010 |
20110012176 | Multiple Orientation Nanowires With Gate Stack Stressors - An electronic device includes a conductive channel defining a crystal structure and having a length and a thickness t | 01-20-2011 |
20110012177 | Nanostructure For Changing Electric Mobility - A structure and a method for a semiconductor including a nanostructure semiconductor channel. The semiconductor may include a dielectric and an electrode, the electrode attached to the dielectric, a semiconductor channel may be disposed proximate to the dielectric, wherein the semiconductor channel has an electric mobility and is configured to have at least one dimension, and wherein the dielectric may be configured to apply a force at the at least one dimension. | 01-20-2011 |
20110104860 | SEMICONDUCTOR NANOWIRE WITH BUILT-IN STRESS - A semiconductor nanowire having two semiconductor pads on both ends is suspended over a substrate. Stress-generating liner portions are formed over the two semiconductor pads, while a middle portion of the semiconductor nanowire is exposed. A gate dielectric and a gate electrode are formed over the middle portion of the semiconductor nanowire while the semiconductor nanowire is under longitudinal stress due to the stress-generating liner portions. The middle portion of the semiconductor nanowire is under a built-in inherent longitudinal stress after removal of the stress-generating liners because the formation of the gate dielectric and the gate electrode locks in the strained state of the semiconductor nanowire. Source and drain regions are formed in the semiconductor pads to provide a semiconductor nanowire transistor. A middle-of-line (MOL) dielectric layer may be formed directly on the source and drain pads. | 05-05-2011 |
20110147885 | FORMATION OF IMPROVED SOI SUBSTRATES USING BULK SEMICONDUCTOR WAFERS - The present invention relates to a semiconductor-on-insulator (SOI) substrate having one or more device regions. Each device region comprises at least a base semiconductor substrate layer and a semiconductor device layer with a buried insulator layer located therebetween, while the semiconductor device layer is supported by one or more vertical insulating pillars. The vertical insulating pillars each preferably has a ledge extending between the base semiconductor substrate layer and the semiconductor device layer. The SOI substrates of the present invention can be readily formed from a precursor substrate structure with a “floating” semiconductor device layer that is spaced apart from the base semiconductor substrate layer by an air gap and is supported by one or more vertical insulating pillars. The air gap is preferably formed by selective removal of a sacrificial layer located between the base semiconductor substrate layer and the semiconductor device layer. | 06-23-2011 |
20110175063 | SEMICONDUCTOR NANOWIRES HAVING MOBILITY-OPTIMIZED ORIENTATIONS - Prototype semiconductor structures each including a semiconductor link portion and two adjoined pad portions are formed by lithographic patterning of a semiconductor layer on a dielectric material layer. The sidewalls of the semiconductor link portions are oriented to maximize hole mobility for a first-type semiconductor structures, and to maximize electron mobility for a second-type semiconductor structures. Thinning by oxidation of the semiconductor structures reduces the width of the semiconductor link portions at different rates for different crystallographic orientations. The widths of the semiconductor link portions are predetermined so that the different amount of thinning on the sidewalls of the semiconductor link portions result in target sublithographic dimensions for the resulting semiconductor nanowires after thinning. By compensating for different thinning rates for different crystallographic surfaces, semiconductor nanowires having optimal sublithographic widths may be formed for different crystallographic orientations without excessive thinning or insufficient thinning. | 07-21-2011 |
20110225562 | COMPACT MODEL METHODOLOGY FOR PC LANDING PAD LITHOGRAPHIC ROUNDING IMPACT ON DEVICE PERFORMANCE - A method and computer program product for modeling a semiconductor transistor device structure having an active device area, a gate structure, and including a conductive line feature connected to the gate structure and disposed above the active device area, the conductive line feature including a conductive landing pad feature disposed near an edge of the active device area in a circuit to be modeled. The method includes determining a distance between an edge defined by the landing pad feature to an edge of the active device area, and, from modeling a lithographic rounding effect of the landing pad feature, determining changes in width of the active device area as a function of the distance between an edge defined by the landing pad feature to an edge of the active device area. From these data, an effective change in active device area width (deltaW adder) is related to the determined distance. Then, transistor model parameter values in a transistor compact model are updated for the transistor device to include deltaW adder values to be added to a built-in deltaW value. A netlist used in a device simulation may then include the deltaW adder values to quantify the influence of the lithographic rounding effect of the landing pad feature. | 09-15-2011 |
20110272779 | EFUSE CONTAINING SIGE STACK - An eFuse, includes: a substrate and an insulating layer disposed on the substrate; a first layer including a single crystal or polycrystalline silicon disposed on the insulating layer; a second layer including a single crystal or polycrystalline silicon germanium disposed on the first layer, and a third layer including a silicide disposed on the second layer. The Ge has a final concentration in a range of approximately five percent to approximately twenty-five percent. | 11-10-2011 |
20110307846 | METHODS AND SYSTEM FOR ANALYSIS AND MANAGEMENT OF PARAMETRIC YIELD - Impact on parametric performance of physical design choices for transistors is scored for on-current and off-current of the transistors. The impact of the design parameters are incorporated into parameters that measure predicted shift in mean on-current and mean off-current and parameters that measure predicted increase in deviations in the distribution of on-current and the off-current. Statistics may be taken at a cell level, a block level, or a chip level to optimize a chip design in a design phase, or to predict changes in parametric yield during manufacturing or after a depressed parametric yield is observed. Further, parametric yield and current level may be predicted region by region and compared with observed thermal emission to pinpoint any anomaly region in a chip to facilitate detection and correction in any mistakes in chip design. | 12-15-2011 |
20120139081 | STRESS-GENERATING STRUCTURE FOR SEMICONDUCTOR-ON-INSULATOR DEVICES - A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region. | 06-07-2012 |
20120144356 | ANALYZING MULTIPLE INDUCED SYSTEMATIC AND STATISTICAL LAYOUT DEPENDENT EFFECTS ON CIRCUIT PERFORMANCE - A method for implementing systematic, variation-aware integrated circuit extraction includes inputting a set of processing conditions to a plurality of variation models, each model corresponding to a separate systematic, parametric variation associated with semiconductor manufacturing of an integrated circuit layout; generating, for each variation model, a netlist update attributable to the associated variation, wherein the netlist update is an update with respect to an original netlist extracted from the integrated circuit layout; and storing the netlist updates generated for each of the processing conditions. | 06-07-2012 |
20120146092 | STRUCTURE AND METHOD FOR MOBILITY ENHANCED MOSFETS WITH UNALLOYED SILICIDE - While embedded silicon germanium alloy and silicon carbon alloy provide many useful applications, especially for enhancing the mobility of MOSFETs through stress engineering, formation of alloyed silicide on these surfaces degrades device performance. The present invention provides structures and methods for providing unalloyed silicide on such silicon alloy surfaces placed on semiconductor substrates. This enables the formation of low resistance contacts for both mobility enhanced PFETs with embedded SiGe and mobility enhanced NFETs with embedded Si:C on the same semiconductor substrate. Furthermore, this invention provides methods for thick epitaxial silicon alloy, especially thick epitaxial Si:C alloy, above the level of the gate dielectric to increase the stress on the channel on the transistor devices. | 06-14-2012 |
20120149159 | STRUCTURE AND METHOD FOR MOBILITY ENHANCED MOSFETS WITH UNALLOYED SILICIDE - While embedded silicon germanium alloy and silicon carbon alloy provide many useful applications, especially for enhancing the mobility of MOSFETs through stress engineering, formation of alloyed silicide on these surfaces degrades device performance. The present invention provides structures and methods for providing unalloyed silicide on such silicon alloy surfaces placed on semiconductor substrates. This enables the formation of low resistance contacts for both mobility enhanced PFETs with embedded SiGe and mobility enhanced NFETs with embedded Si:C on the same semiconductor substrate. Furthermore, this invention provides methods for thick epitaxial silicon alloy, especially thick epitaxial Si:C alloy, above the level of the gate dielectric to increase the stress on the channel on the transistor devices. | 06-14-2012 |
20120164758 | IC HAVING VIABAR INTERCONNECTION AND RELATED METHOD - An IC including first metal layer having wiring running in a first direction; a second metal layer having wiring running in a second direction perpendicular to the first direction; and a first via layer between the first metal layer and the second metal layer, the first via layer including a viabar interconnecting the first metal layer to the second metal layer at a first location where the first metal layer vertically coincides with the second metal layer and, at a second location, connecting to wiring of the first metal layer but not wiring of the second metal layer. | 06-28-2012 |
20120196412 | HIGH PERFORMANCE STRESS-ENHANCED MOSFETS USING SI:C AND SIGE EPITAXIAL SOURCE/DRAIN AND METHOD OF MANUFACTURE - A semiconductor device and method of manufacturing a semiconductor device. The semiconductor device includes channels for a pFET and an nFET. A SiGe layer is selectively grown in the source and drain regions of the pFET channel and a Si:C layer is selectively grown in source and drain regions of the nFET channel. The SiGe and Si:C layer match a lattice network of the underlying Si layer to create a stress component. In one implementation, this causes a compressive component in the pFET channel and a tensile component in the nFET channel. | 08-02-2012 |
20120217468 | Silicon Nanotube MOSFET - A nanotubular MOSFET device and a method of fabricating the same are used to extend device scaling roadmap while maintaining good short channel effects and providing competitive drive current. The nanotubular MOSFET device includes a concentric tubular inner and outer gate separated from each other by a tubular shaped epitaxially grown silicon layer, and a source and drain respectively separated by spacers surrounding the tubular inner and outer gates. The method of forming the nanotubular MOSFET device includes: forming on a substrate a cylindrical shaped Si layer; forming an outer gate surrounding the cylindrical Si layer and positioned between a bottom spacer and a top spacer; growing a silicon epitaxial layer on the top spacer adjacent to a portion of the cylindrical shaped Si layer; etching an inner portion of the cylindrical shaped Si forming a hollow cylinder; forming an inner spacer at the bottom of the inner cylinder; forming an inner gate by filling a portion of the hollow cylinder; forming a sidewall spacer adjacent to the inner gate; and etching a deep trench for accessing and contacting the outer gate and drain. | 08-30-2012 |
20120227019 | METHODS AND SYSTEM FOR ANALYSIS AND MANAGEMENT OF PARAMETRIC YIELD - Impact on parametric performance of physical design choices for transistors is scored for on-current and off-current of the transistors. The impact of the design parameters are incorporated into parameters that measure predicted shift in mean on-current and mean off-current and parameters that measure predicted increase in deviations in the distribution of on-current and the off-current. Statistics may be taken at a cell level, a block level, or a chip level to optimize a chip design in a design phase, or to predict changes in parametric yield during manufacturing or after a depressed parametric yield is observed. Further, parametric yield and current level may be predicted region by region and compared with observed thermal emission to pinpoint any anomaly region in a chip to facilitate detection and correction in any mistakes in chip design. | 09-06-2012 |
20120261672 | MINIMIZING LEAKAGE CURRENT AND JUNCTION CAPACITANCE IN CMOS TRANSISTORS BY UTILIZING DIELECTRIC SPACERS - A semiconductor structure and method for forming dielectric spacers and epitaxial layers for a complementary metal-oxide-semiconductor field effect transistor (CMOS transistor) are disclosed. Specifically, the structure and method involves forming dielectric spacers that are disposed in trenches and are adjacent to the silicon substrate, which minimizes leakage current. Furthermore, epitaxial layers are deposited to form source and drain regions, wherein the source region and drain regions are spaced at a distance from each other. The epitaxial layers are disposed adjacent to the dielectric spacers and the transistor body regions (i.e., portion of substrate below the gates), which can minimize transistor junction capacitance. Minimizing transistor junction capacitance can enhance the switching speed of the CMOS transistor. Accordingly, the application of dielectric spacers and epitaxial layers to minimize leakage current and transistor junction capacitance in CMOS transistors can enhance the utility and performance of the CMOS transistors in low power applications. | 10-18-2012 |
20120322215 | COMMUNICATION - An electronic device includes a conductive channel defining a crystal structure and having a length and a thickness t | 12-20-2012 |
20130015507 | MULTIPLE ORIENTATION NANOWIRES WITH GATE STACK SENSORS - An electronic device includes a conductive channel defining a crystal structure and having a length and a thickness t | 01-17-2013 |
20130126976 | SELECTIVE PARTIAL GATE STACK FOR IMPROVED DEVICE ISOLATION - A complementary metal oxide semiconductor (CMOS) device that may include a substrate having a first active region and a second active region that are separated from one another by an isolation region. An n-type semiconductor device is present on the first active region that includes a first gate structure having a first gate dielectric layer and an n-type work function metal layer, wherein the n-type work function layer does not extend onto the isolation region. A p-type semiconductor device is present on the second active region that includes a second gate structure having a second gate dielectric layer and a p-type work function metal layer, wherein the p-type work function layer does not extend onto the isolation region. A connecting gate structure extends across the isolation region into direct contact with the first gate structure and the second gate structure. | 05-23-2013 |
20130168695 | CMOS HAVING A SIC/SIGE ALLOY STACK - A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer. | 07-04-2013 |
20130168776 | Complementary Metal Oxide Semiconductor (CMOS) Device Having Gate Structures Connected By A Metal Gate Conductor - A complementary metal oxide semiconductor (CMOS) device including a substrate including a first active region and a second active region, wherein each of the first active region and second active region of the substrate are separated by from one another by an isolation region. A n-type semiconductor device is present on the first active region of the substrate, in which the n-type semiconductor device includes a first portion of a gate structure. A p-type semiconductor device is present on the second active region of the substrate, in which the p-type semiconductor device includes a second portion of the gate structure. A connecting gate portion provides electrical connectivity between the first portion of the gate structure and the second portion of the gate structure. Electrical contact to the connecting gate portion is over the isolation region, and is not over the first active region and/or the second active region. | 07-04-2013 |
20130168804 | STRESS-GENERATING STRUCTURE FOR SEMICONDUCTOR-ON-INSULATOR DEVICES - A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region. | 07-04-2013 |
20130238263 | METHODS AND SYSTEM FOR ANALYSIS AND MANAGEMENT OF PARAMETRIC YIELD - Impact on parametric performance of physical design choices for transistors is scored for on-current and off-current of the transistors. The impact of the design parameters are incorporated into parameters that measure predicted shift in mean on-current and mean off-current and parameters that measure predicted increase in deviations in the distribution of on-current and the off-current. Statistics may be taken at a cell level, a block level, or a chip level to optimize a chip design in a design phase, or to predict changes in parametric yield during manufacturing or after a depressed parametric yield is observed. Further, parametric yield and current level may be predicted region by region and compared with observed thermal emission to pinpoint any anomaly region in a chip to facilitate detection and correction in any mistakes in chip design. | 09-12-2013 |
20130273699 | MOS HAVING A SIC/SIGE ALLOY STACK - A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer. | 10-17-2013 |
20130288440 | MINIMIZING LEAKAGE CURRENT AND JUNCTION CAPACITANCE IN CMOS TRANSISTORS BY UTILIZING DIELECTRIC SPACERS - A semiconductor structure and method for forming dielectric spacers and epitaxial layers for a complementary metal-oxide-semiconductor field effect transistor (CMOS transistor) are disclosed. Specifically, the structure and method involves forming dielectric spacers that are disposed in trenches and are adjacent to the silicon substrate, which minimizes leakage current. Furthermore, epitaxial layers are deposited to form source and drain regions, wherein the source region and drain regions are spaced at a distance from each other. The epitaxial layers are disposed adjacent to the dielectric spacers and the transistor body regions (i.e., portion of substrate below the gates), which can minimize transistor junction capacitance. Minimizing transistor junction capacitance can enhance the switching speed of the CMOS transistor. Accordingly, the application of dielectric spacers and epitaxial layers to minimize leakage current and transistor junction capacitance in CMOS transistors can enhance the utility and performance of the CMOS transistors in low power applications. | 10-31-2013 |
20130320340 | CIRCUIT TECHNIQUE TO ELECTRICALLY CHARACTERIZE BLOCK MASK SHIFTS - A physical test integrated circuit has a plurality of repeating circuit portions corresponding to an integrated circuit design. A first of the portions is fabricated with a nominal block mask location, and additional ones of the portions are deliberately fabricated with predetermined progressive increased offset of the block mask location from the nominal block mask location. For each of the portions, the difference in threshold voltage between a first field effect transistor and a second field effect transistor is determined. The predetermined progressive increased offset of the block mask location is in a direction from the first field effect transistor to the second field effect transistor. The block mask overlay tolerance is determined at a value of the progressive increased offset corresponding to an inflection of the difference in threshold voltage from a zero difference. A method for on-chip monitoring, and corresponding circuits, are also disclosed. | 12-05-2013 |
20140061583 | SILICON NANOTUBE MOSFET - A nanotubular MOSFET device extends a scaling roadmap while maintaining good short channel effects and providing competitive drive current. The nanotubular MOSFET device includes a concentric tubular inner and outer gate separated from each other by a tubular shaped epitaxially grown silicon layer, and a source and drain respectively separated by spacers surrounding the tubular inner and outer gates. | 03-06-2014 |
20140103366 | SILICON DEVICE ON SI:C-OI AND SGOI AND METHOD OF MANUFACTURE - A semiconductor structure and method of manufacturing is provided. The method of manufacturing includes forming shallow trench isolation (STI) in a substrate and providing a first material and a second material on the substrate. The first material and the second material are mixed into the substrate by a thermal anneal process to form a first island and second island at an nFET region and a pFET region, respectively. A layer of different material is formed on the first island and the second island. The STI relaxes and facilitates the relaxation of the first island and the second island. The first material may be deposited or grown Ge material and the second material may deposited or grown Si:C or C. A strained Si layer is formed on at least one of the first island and the second island. | 04-17-2014 |
20140322873 | HIGH PERFORMANCE STRESS-ENHANCED MOSFETS USING SI:C AND SIGE EPITAXIAL SOURCE/DRAIN AND METHOD OF MANUFACTURE - Methods of forming a semiconductor device are provided. A method of forming a semiconductor device may include forming a stressing layer on a substrate. The method may include doping the stressing layer with dopants. The method may include forming a silicide layer on the stressing layer. Moreover, the stressing layer may include a first lattice constant different from a second lattice constant of the substrate. | 10-30-2014 |
20140349451 | COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) DEVICE HAVING GATE STRUCTURES CONNECTED BY A METAL GATE CONDUCTOR - A complementary metal oxide semiconductor (CMOS) device including a substrate including a first active region and a second active region, wherein each of the first active region and second active region of the substrate are separated by from one another by an isolation region. A n-type semiconductor device is present on the first active region of the substrate, in which the n-type semiconductor device includes a first portion of a gate structure. A p-type semiconductor device is present on the second active region of the substrate, in which the p-type semiconductor device includes a second portion of the gate structure. A connecting gate portion provides electrical connectivity between the first portion of the gate structure and the second portion of the gate structure. Electrical contact to the connecting gate portion is over the isolation region, and is not over the first active region and/or the second active region. | 11-27-2014 |