Patent application number | Description | Published |
20150013403 | VEHICLE DOOR OPEN/CLOSE OPERATION APPARATUS - A vehicle door open/close operation apparatus is provided in which a design cover can be opened by a manual operation and can close at least part of an opening provided in a door, and a latch release is operated by a latch device due to the operation of an operating member in a state in which the design cover is open, wherein displacement of the design cover from a closed position toward an open position is detected by a detection switch, and a control unit carries out the user authentication in response to detection of displacement of the design cover by the detection switch. This enables the necessity for carrying out an operation of the operating member again to be avoided even if the operating member is operated quickly, thus enabling the door to be opened smoothly. | 01-15-2015 |
20150191944 | LATCH RELEASE DEVICE FOR VEHICLE DOOR - A latch release device for a vehicle door is provided which includes an electric actuator that can exert power for latch release for releasing a latched state of a door, a latch mechanism that releases the latched state of the door in response to actuation of the electric actuator or input of a mechanical latch release operating force, and an operating member for latch release that enables normal operation by a vehicle user so as to actuate the electric actuator and emergency operation by a vehicle user so as to input a mechanical latch release operating force into the latch mechanism, wherein the emergency operation of an operating member for latch release is restricted and emergency operation restriction means restricts emergency operation of the operating member for latch release when an operating member for restriction release that a vehicle user can operate is in a non-operated state. | 07-09-2015 |
20150197964 | LATCH RELEASE DEVICE FOR VEHICLE DOOR - A latch release device for a vehicle door is provided which enables the release of the latched state of a latch mechanism that accompanies actuation of an electric actuator in response to the normal operation of an operating member for latch release, and the release of the latched state by a mechanical latch release operating force in response to emergency operation of the operating member for latch release, and includes a child lock mechanism attached to the latch mechanism, wherein the child lock mechanism is arranged so as to switch between linking and unlinking the actuating member for latch release and a mechanical operating force input member to which a mechanical latch release operating force is transmitted from the operating member for latch release, and latch release intention detection means is disposed on the latch mechanism so as to detect actuation of the actuating member for latch release. | 07-16-2015 |
Patent application number | Description | Published |
20080236614 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD - A plasma processing apparatus includes a vacuum chamber, a processing chamber housed in the vacuum chamber, and a sample stage located in the processing chamber, for supporting on its upper surface a disk-like sample to be processed, wherein plural disk-like samples are continuously processed with plasma generated in the processing chamber and wherein during the idling time between the successive processes the temperature of the sample stage is adjusted to a predetermined value higher than the temperature at which the samples are processed. | 10-02-2008 |
20080237184 | METHOD AND APPARATUS FOR PLASMA PROCESSING - A plasma processing apparatus comprising a vacuum vessel; a process chamber housed in the vacuum vessel; and a sample stage located in the process chamber, for supporting on its upper surface a disk-like sample to be processed; wherein plural disk-like samples are continuously processed with plasma generated in the process chamber and wherein during the idling time between the successive processes the temperature of the sample stage is adjusted to a predetermined value higher than the temperature at which the samples are processed. | 10-02-2008 |
20080280451 | Plasma processing method and plasma processing apparatus - A plasma processing apparatus includes: a film which is made of an insulative material and constructs a surface of a sample stage on which a sample is put; a disk-shaped member whose upper surface is joined with the film in a lower portion of the film and which is made of a heat conductive member; heaters which are arranged in the film and arranged in a center portion and regions of its outer peripheral side of the film; coolant channels which are arranged in the disk-shaped member and in which a coolant for cooling the disk-shaped member flows; a plurality of power sources each of which adjusts an electric power to each of the heaters in the plurality of regions; and a controller which adjusts outputs from the plurality of power sources by using a result obtained by presuming a temperature of the upper surface of the disk-shaped member. | 11-13-2008 |
20090218316 | MANUFACTURING METHOD IN PLASMA PROCESSING APPARATUS - A manufacturing method includes steps of: placing a film composed of dielectric, on the top surface of a sample stage, forming a film-like heater on the film made of the dielectric, supplying power to the heater to detect a temperature distribution, adjusting a resistance value of the heater on the basis of a result of detection of a temperature distribution so that the temperature distribution has a predetermined value, and then forming the film composed of the dielectric, on the heater. | 09-03-2009 |
20090321017 | Plasma Processing Apparatus and Plasma Processing Method - There is disclosed a plasma processing apparatus wherein a sample placed on the top surface of the sample table located within the processing chamber contained in a vacuum vessel is processed with plasma formed in the processing chamber, comprising a set of ducts cut within the sample table through which cooling medium flows; a film-shaped heater whose heating elements are concentrically embedded in the dielectric film serving as the top surface of the sample table; plural temperature controllers which set up the temperature of the cooling medium flowing through the ducts at different values, respectively; and a control unit which switches over the circulations through the ducts of the cooling medium supplied from the plural temperature controllers. | 12-31-2009 |