Patent application number | Description | Published |
20090159151 | GAS FILLING APPARATUS - This present invention provides a gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle. The gas filling apparatus is connected with an air feed source, and includes a base, a first inlet port and a set of air feed source route. The storage apparatus is loaded on the base, and the first inlet port which is disposed on the base corresponds with the second inlet port of the storage apparatus. The set of air feed source route includes an entrance part, a supply part and a branch part. The entrance part is connected with the air feed source, and the supply part is connected with the first inlet port. The branch part is a closed loop, which transmits the gas from the entrance part into the supply part. | 06-25-2009 |
20090165888 | GAS FILLING APPARATUS - This invention is about a gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle. The gas filling apparatus comprises a base and a port. The storage apparatus is loaded on the base. The port comprises a receiving part, which is connected with an air entrance of the storage apparatus. The contact portions of both the top of the receiving part and the air entrance of the storage apparatus are cambered surfaces and these two portions contacts in a ring fashion. The port also comprises a hole for the gas to pass through, and a joint port to connect with the air source. | 07-02-2009 |
20100038281 | Front Opening Unified Pod with latch component - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting wafers and an open front is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers within the container, the characteristic in that: at least one latch component including a cam and a pair of moving bars is disposed between outer surface and inner surface of the door, wherein a pair of cam grooves are disposed on the cam for being connected with guide bar on one end of the pair of moving bars, and each moving bar includes a slide groove for being fixed in by roller disposed between outer surface and inner surface of the door, which in turn allows the rotation of the cam to cause to-and-fro movement of another end of the moving bars. | 02-18-2010 |
20100038283 | Wafer container having the latch and inflatable seal element - A wafer container includes a container body that having an open front on sidewall, a plurality of slots disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, the characteristic in that: at least one latch is disposed in the door and an inflatable seal element is located at the rim of the inner side of the door. | 02-18-2010 |
20100065468 | Wafer Container with roller - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers within the container, the characteristic in that: a plurality of pairs of rollers are disposed on the inner rim of the opening of container body. | 03-18-2010 |
Patent application number | Description | Published |
20110139675 | Wafer container with at least one purgeable supporting module having a long slot - A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, a long slot is disposed on one side of the outgassing channel and a kind of porous material is disposed in the long slot, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals. | 06-16-2011 |
20110266193 | Wafer Container With Purgeable Supporting Module - A wafer container includes a container body, composed of a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals. | 11-03-2011 |
20130068656 | Large-sized Front Opening Unified wafer POD - A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (Overhead Hoist Transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process. | 03-21-2013 |
20130146503 | FRONT OPENING UNIFIED POD WITH LATCH STRUCTURE - A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers respectively disposed on the sliding devices to prevent the generation of dusts. | 06-13-2013 |