Patent application number | Description | Published |
20090267020 | Adjuvant for Controlling Polishing Selectivity and Chemical Mechanical Polishing Slurry - Disclosed is an adjuvant for controlling polishing selectivity when polishing a cationically charged material simultaneously with an anionically charged material. CMP slurry comprising the adjuvant is also disclosed. The adjuvant comprises: (a) a polyelectrolyte that forms an adsorption layer on the cationically charged material in order to increase the polishing selectivity of the anionically charged material; (b) a basic material; and (c) a fluorine-based compound. when the adjuvant for controlling polishing selectivity of CMP slurry according to the present invention is applied to a CMP process, it is possible to increase the polishing selectivity of a silicon oxide layer, to obtain a uniform particle size of CMP slurry, to stabilize variations in viscosity under an external force and to minimize generation of microscratches during a polishing process. Therefore, the adjuvant for CMP slurry according to the present invention can improve reliability and productivity during the fabrication of very large scale integrated semiconductors. | 10-29-2009 |
20100009539 | CERIUM OXIDE POWDER, METHOD FOR PREPARING THE SAME, AND CMP SLURRY COMPRISING THE SAME - Disclosed is cerium oxide powder for a CMP abrasive, which can improve polishing selectivity of a silicon oxide layer to a silicon nitride layer and/or within-wafer non-uniformity (WIWNU) during chemical mechanical polishing in a semiconductor fabricating process. More particularly, the cerium oxide powder is obtained by using cerium carbonate having a hexagonal crystal structure as a precursor. Also, CMP slurry comprising the cerium oxide powder as an abrasive, and a shallow trench isolation method for a semiconductor device using the CMP slurry as polishing slurry are disclosed. | 01-14-2010 |
20100044625 | METHOD FOR PREPARING CERIUM OXIDE POWDER USING ORGANIC SOLVENT AND CMP SLURRY COMPRISING THE SAME - Disclosed is a method for directly preparing cerium oxide powder in a solution phase by a) mixing a cerium precursor solution with a precipitant solution to cause a reaction; and b) performing oxidation treatment of the reacted solution, wherein at least one kind of pure organic solvent containing no water is used as a solvent for the cerium precursor solution as well as the precipitant solution to thereby prepare the cerium oxide powder, the particle size of which is adjusted to 50 nm to 3 μm. Cerium oxide powder obtained from the method and CMP slurry comprising the cerium oxide powder as a polishing agent are also disclosed. The method makes it possible to prepare cerium oxide powder with an average particle size of 50 nm or greater and high crystallinity, which is difficult to prepare by the conventional wet precipitation process, by using an organic solvent as a solvent in a wet precipitation process, and the so-prepared cerium oxide powder can be used as a polishing agent for CMP slurry even without being subjected to separate heat treatment. | 02-25-2010 |
20100062687 | CERIUM OXIDE POWDER FOR ABRASIVE AND CMP SLURRY COMPRISING THE SAME - Disclosed are cerium oxide powder for an abrasive; CMP slurry including the same; and a shallow trench isolation (STI) process using the CMP slurry. At least two kinds of cerium oxides prepared by using cerium carbonates having different crystal structures are mixed in an appropriate ratio and used as an abrasive for CMP slurry, thereby adjusting required polishing properties of the CMP slurry. Also, in a disclosed method of preparing a cerium carbonate, the crystal structure of the cerium carbonate can be easily controlled. Based on the finding that in a cerium oxide for an abrasive, the kind of improved polishing property depends on the crystal structure of a cerium carbonate, at least one from among polishing properties, such as the polishing rate of a silicon oxide layer, the polishing rate of a silicon nitride layer, the polishing selectivity between the silicon oxide layer and the silicon nitride layer, and WIWNU, can be adjusted by using at least two kinds of cerium oxides selected from the group including (i) a cerium oxide prepared by using a lanthanite-(Ce) crystal structured cerium carbonate, (ii) a cerium oxide prepared by using an orthorhombic crystal structured cerium carbonate, and (iii) a cerium oxide prepared by using a hexagonal crystal structured cerium carbonate, as an abrasive for CMP slurry, and adjusting the mixing ratio of the cerium oxides. | 03-11-2010 |
20100068883 | CMP SLURRY COMPOSITION FOR FORMING METAL WIRING LINE - Disclosed is CMP slurry, which includes a pyridine-based compound including at least two pyridinyl groups, and minimizes the occurrence of dishing and erosion of a wiring line. | 03-18-2010 |
20100133466 | Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same - Disclosed is a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution to cause precipitation, wherein at least one solvent used in the cerium precursor solution and the carbonate precursor solution is an organic solvent. Cerium carbonate powder obtained from the method, cerium oxide powder obtained from the cerium carbonate powder, a method for preparing the cerium oxide powder, and CMP slurry comprising the cerium oxide powder are also disclosed. The method for preparing cerium carbonate using an organic solvent, allows the resultant cerium carbonate powder to have a size and shape controllable from the initial nucleation step. Additionally, it is possible to easily control the size and shape of cerium oxide powder obtained from the cerium carbonate powder. | 06-03-2010 |
20100143233 | METHOD FOR PREPARING CERIUM CARBONATE POWDER - In a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution and carrying out a precipitation reaction, wherein cerium carbonate is controlled to have an orthorhombic crystal structure, a hexagonal crystal structure or an orthorhombic/hexagonal mixed crystal structure, by using at least one type of organic solvent comprising at least two hydroxyl groups (OH) in molecular formula as a solvent for either or both the cerium precursor solution and the carbonate precursor solution, and varying a number of carbons or hydroxyl groups (OH) included in the molecular formula of the organic solvent. The method can easily and inexpensively obtain cerium carbonate powder with a desired crystal structure without the danger by high-temperature high-pressure and the need for an expensive system in hydrothermal synthesis. | 06-10-2010 |
20100148113 | METHOD FOR PREPARING CERIUM CARBONATE POWDER - In a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a urea solution and carrying out a precipitation reaction, wherein the cerium carbonate powder has a hexagonal crystal structure, by using at least one type of organic solvent as a solvent for either or both the cerium precursor solution and the urea solution, and adjusting temperature of the precipitation reaction within a range of 120° C. to 300° C. Also, the method can yield cerium carbonate powder, cerium oxide powder from the cerium carbonate powder, and CMP slurry including the cerium oxide powder as an abrasive. In the method, urea as a precipitant can improve the uniformity of a reaction, and thus it is possible to easily and inexpensively obtain cerium carbonate powder with a hexagonal crystal structure without the danger by high-temperature high-pressure and the need for an expensive system in hydrothermal synthesis. | 06-17-2010 |
20100151684 | SLURRY COMPOSITION FOR PRIMARY CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD - The present invention relates to a slurry composition for primary chemical mechanical polishing that can show more improved WIWNU (Within Wafer Non-Uniformity) while exhibiting excellent polishing rate and polishing selectivity, and a chemical mechanical polishing method. The slurry composition for primary chemical mechanical polishing comprises an abrasive; an oxidant, an organic acid; a specific corrosion inhibitor, and, a polymeric additive comprising polyvinylpyrrolidone having weight average molecular weight of about 3000 to 100000, and has polishing selectivity of polishing rates between a copper layer:a tantalum layer of about 30:1 or more. | 06-17-2010 |
20100184291 | AQUEOUS SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD - The present invention relates to an aqueous slurry composition for chemical mechanical polishing that can show good polishing rate to the target layer, and yet has a high polishing selectivity and can maintain superior surface condition of the target layer after polishing, and a chemical mechanical polishing method. | 07-22-2010 |
20110008967 | CMP SLURRY AND A POLISHING METHOD USING THE SAME - The present invention relates to a CMP slurry that is able to reduce dishing generation, when it is applied to polishing or planarization of silicon oxide layer, for example, and a polishing method. | 01-13-2011 |
20110067315 | METHOD FOR PREPARING CERIUM CARBONATE, METHOD FOR CERIUM OXIDE PREPARED AND CRYSTALLINE CERIUM OXIDE - The present invention relates to a method for preparing cerium carbonate-based compound, which is capable of easily controlling the crystalline structure, size, shape, or etc. of the cerium carbonate-based compound, and of preparing the cerium carbonate-based compound efficiently at low cost. | 03-24-2011 |
20110107680 | METHOD FOR PREPARING CERIUM CARBONATE - The present invention relates to a method for preparing cerium carbonate which enables preparation of hexagonal cerium carbonate by a simplified process, a cerium carbonate powder prepared thereby, and a method for preparing a cerium oxide powder using the same. | 05-12-2011 |
20110117720 | METHOD FOR PREPARING CERIUM OXIDE, CERIUM OXIDE PREPARED THEREFROM AND CMP SLURRY COMPRISING THE SAME - The present invention relates to a method for preparing cerium oxide which enables preparation of cerium oxide showing improved polishing performance, cerium oxide prepared therefrom, and CMP slurry comprising the same. | 05-19-2011 |
20110206589 | METHOD FOR PREPARING CERIUM CARBONATE - Disclosed is a method for preparing cerium carbonate that can prepare cerium carbonate having uniform crystal structure, shape and size with high productivity. The method for preparing cerium carbonate comprises: continuously introducing a reaction solution comprising cerium precursor and urea in a tubular reactor including an inlet, an outlet, and one or more reaction tubes through the inlet; reacting the cerium precursor with urea at an elevated temperature in the reaction tube; and, continuously discharging cerium carbonate formed by the reaction of the cerium precursor and urea to the outlet. | 08-25-2011 |
20110244237 | METHOD FOR PREPARING CERIUM CARBONATE AND CERIUM OXIDE - Disclosed is a method for preparing cerium carbonate that can improve yield or productivity of cerium carbonate and enables preparation of cerium carbonate having uniform diameter, cerium carbonate, and a method for preparing cerium oxide. | 10-06-2011 |
20120000137 | CRYSTALLINE CERIUM OXIDE AND PREPARATION METHOD OF THE SAME - The present invention relates to crystalline cerium oxide prepared in a simple, economical, and efficient manner, of which crystal structure, shape, and size can be easily adjusted and that exhibits excellent polishing properties, and a preparation method thereof. The crystalline cerium oxide can be prepared as sub-micron crystalline cerium oxide that has a mean volume diameter and a diameter standard deviation within a predetermined range. | 01-05-2012 |
20120094490 | Slurry For Chemical Mechanical Polishing - The present invention relates to a slurry for chemical mechanical polishing, comprising an abrasive; an oxidant; an organic acid; and a polymeric additive comprising polyolefin-polyalkyleneoxide copolymer, wherein the polyolefin-polyalkyleneoxide copolymer comprises a polyolefin repeat unit and two or more polyalkyleneoxide repeat units, and at least one polyalkyleneoxide repeat unit is branched. | 04-19-2012 |
20120270399 | SLURRY COMPOSITION FOR CMP, AND POLISHING METHOD - The present invention relates to a CMP slurry composition comprising an abrasive particle; a dispersant; an ionic polymer additive; and a non-ionic polymer additive including a polyolefin-polyethylene glycol copolymer including at least two polyethylene glycol repeat unit as a backbone and at least a polyethylene glycol repeating unit as a side chain, and a polishing method with using the slurry composition. The CMP slurry composition shows a low polishing rate to a single-crystalline silicon layer or a polysilicon layer and a high polishing rate to a silicon oxide layer, resulting in having an excellent polishing selectivity. | 10-25-2012 |
20150024265 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER - The present invention relates to a method for preparing a lithium iron phosphate nanopowder, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a triethanolamine solvent, and (b) putting the mixture solution into a reactor and heating to prepare the lithium iron phosphate nanopowder under pressure conditions of 1 bar to 10 bar, and a lithium iron phosphate nanopowder prepared by the method. When compared to a common hydrothermal synthesis method, a supercritical hydrothermal synthesis method and a glycothermal synthesis method, a reaction may be performed under a relatively lower pressure. Thus, a high temperature/high pressure reactor is not necessary and process safety and economic feasibility may be secured. In addition, a lithium iron phosphate nanopowder having uniform particle size and effectively controlled particle size distribution may be easily prepared. | 01-22-2015 |
20150024266 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER - The present invention relates to a method for preparing a lithium iron phosphate nanopowder, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a glycerol solvent, and (b) putting the mixture solution into a reactor and heating to prepare the lithium iron phosphate nanopowder under pressure conditions of 10 bar to 100 bar, and a lithium iron phosphate nanopowder prepared by the method. When compared to a common hydrothermal synthesis method and a supercritical hydrothermal synthesis method, a reaction may be performed under a relatively lower pressure. When compared to a common glycothermal synthesis method, a lithium iron phosphate nanopowder having effectively controlled particle size and particle size distribution may be easily prepared. | 01-22-2015 |
20150024271 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER - The present invention relates to a method for preparing a lithium iron phosphate nanopowder, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a triethanolamine solvent, and (b) putting the mixture solution into a reactor and heating to prepare the lithium iron phosphate nanopowder under pressure conditions of 10 bar to 100 bar, and a lithium iron phosphate nanopowder prepared by the method. When compared to a common hydrothermal synthesis method and a supercritical hydrothermal synthesis method, a reaction may be performed under a relatively lower pressure. When compared to a common glycothermal synthesis method, a lithium iron phosphate nanopowder having effectively controlled particle size and particle size distribution may be easily prepared. | 01-22-2015 |
20150030918 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER - The present invention relates to a method for preparing a lithium iron phosphate nanopowder, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a glycerol solvent, and (b) putting the mixture solution into a reactor and heating to prepare the lithium iron phosphate nanopowder under pressure conditions of 1 bar to 10 bar, and a lithium iron phosphate nanopowder prepared by the method. When compared to a common hydrothermal synthesis method, a supercritical hydrothermal synthesis method and a glycothermal synthesis method, a reaction may be performed under a relatively lower pressure. Thus, a high temperature/high pressure reactor is not necessary and process safety and economic feasibility may be secured. In addition, a lithium iron phosphate nanopowder having uniform particle size and effectively controlled particle size distribution may be easily prepared. | 01-29-2015 |
20150030927 | POLYCRYSTALLINE LITHIUM MANGANESE OXIDE PARTICLES, PREPARATION METHOD THEREOF, AND CATHODE ACTIVE MATERIAL INCLUDING THE SAME - Provided are polycrystalline lithium manganese oxide particles represented by Chemical Formula 1 and a method of preparing the same: | 01-29-2015 |
20150030928 | CATHODE ACTIVE MATERIAL AND METHOD OF PREPARING THE SAME - Provided are a cathode active material including polycrystalline lithium manganese oxide and a boron-containing coating layer on a surface of the polycrystalline lithium manganese oxide, and a method preparing the same. | 01-29-2015 |
20150037665 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER COATED WITH CARBON - The present invention relates to a method for preparing a lithium iron phosphate nanopowder coated with carbon, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a glycerol solvent, (b) putting the mixture solution into a reactor and reacting to prepare amorphous lithium iron phosphate nanoseed particle, and (c) heat treating the lithium iron phosphate nanoseed particle thus to prepare the lithium iron phosphate nanopowder coated with carbon on a portion or a whole of a surface of a particle, and a lithium iron phosphate nanopowder coated with carbon prepared by the above method. The lithium iron phosphate nanopowder coated with carbon having controlled particle size and particle size distribution may be prepared in a short time by performing two simple steps. | 02-05-2015 |
20150037666 | METHOD FOR PREPARING LITHIUM IRON PHOSPHATE NANOPOWDER COATED WITH CARBON - The present invention relates to a method for preparing a lithium iron phosphate nanopowder coated with carbon, including the steps of (a) preparing a mixture solution by adding a lithium precursor, an iron precursor and a phosphorus precursor in a triethanolamine solvent, (b) putting the mixture solution into a reactor and reacting to prepare amorphous lithium iron phosphate nanoseed particle, and (c) heat treating the lithium iron phosphate nanoseed particle thus to prepare the lithium iron phosphate nanopowder coated with carbon on a portion or a whole of a surface of a particle, and a lithium iron phosphate nanopowder coated with carbon prepared by the above method. The lithium iron phosphate nanopowder coated with carbon having controlled particle size and particle size distribution may be prepared in a short time by performing two simple steps. | 02-05-2015 |
20150037678 | CATHODE ACTIVE MATERIAL AND METHOD OF PREPARING THE SAME - Provided are a cathode active material including polycrystalline lithium manganese oxide and a sodium-containing coating layer on a surface of the polycrystalline lithium manganese oxide, and a method preparing the same. | 02-05-2015 |