Patent application number | Description | Published |
20130319329 | PLASMA-ACTIVATED DEPOSITION OF CONFORMAL FILMS - Embodiments related to depositing thin conformal films using plasma-activated conformal film deposition (CFD) processes are described herein. In one example, a method of processing a substrate includes, applying photoresist to the substrate, exposing the photoresist to light via a stepper, patterning the resist with a pattern and transferring the pattern to the substrate, selectively removing photoresist from the substrate, placing the substrate into a process station, and, in the process station, in a first phase, generating radicals off of the substrate and adsorbing the radicals to the substrate to form active species, in a first purge phase, purging the process station, in a second phase, supplying a reactive plasma to the surface, the reactive plasma configured to react with the active species and generate the film, and in a second purge phase, purging the process station. | 12-05-2013 |
20150206719 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 07-23-2015 |
20150325435 | PECVD DEPOSITION OF SMOOTH SILICON FILMS - Smooth silicon films having low compressive stress and smooth tensile silicon films are deposited by plasma enhanced chemical vapor deposition (PECVD) using a process gas comprising a silicon-containing precursor (e.g., silane), argon, and a second gas, such as helium, hydrogen, or a combination of helium and hydrogen. Doped smooth silicon films and smooth silicon germanium films can be obtained by adding a source of dopant or a germanium-containing precursor to the process gas. In some embodiments dual frequency plasma comprising high frequency (HF) and low frequency (LF) components is used during deposition, resulting in improved film roughness. The films are characterized by roughness (Ra) of less than about 7 Å, such as less than about 5 Å as measured by atomic force microscopy (AFM), and a compressive stress of less than about 500 MPa in absolute value. In some embodiments smooth tensile silicon films are obtained. | 11-12-2015 |
20160097122 | TOP LAMP MODULE FOR CAROUSEL DEPOSITION CHAMBER - A heating module for use in a substrate processing chamber. The heating module having a housing with a heat source therein. The heating module can be part of a gas distribution assembly positioned above a susceptor assembly to heat the top surface of the susceptor and wafers directly. The heating module can have constant or variable power output. Processing chambers and methods of processing a wafer using the heating module are described. | 04-07-2016 |
20160104613 | Precise Critical Dimension Control Using Bilayer ALD - Methods for self-aligned multiple patterning including controlled slimming of features during spacer layer deposition. Multiple spacer layer deposition process conditions produce a balance between controlling the damage to the features and increasing production throughput. | 04-14-2016 |
Patent application number | Description | Published |
20090201082 | INTEGRATED CIRCUIT DEVICE HAVING POWER DOMAINS AND PARTITIONS BASED ON USE CASE POWER OPTIMIZATION - A programmable SoC (system on a chip) having optimized power domains and power islands. The SoC is an integrated circuit device including a plurality of power domains, each of the power domains having a respective voltage rail to supply power to the power domain. A plurality of power islands are included within the integrated circuit device, wherein each power domain includes at least one power island. A plurality of functional blocks are included within the integrated circuit device, wherein each power island includes at least one functional block. Each functional block is configured to provide a specific device functionality. The integrated circuit device adjusts power consumption in relation to a requested device functionality by individually turning on or turning off power to a selected one or more power domains, and for each turned on power domain, individually power gating one or more power islands. | 08-13-2009 |
20090204803 | HANDLING OF SECURE STORAGE KEY IN ALWAYS ON DOMAIN - Techniques for handling a secure storage key maintain the key in an always on domain and restore the key to the encryption/decryption engine when the engine is turned back on. The secure storage key however is only accessible by the boot loader code, which provides a secure chain of trust. In addition, the techniques allow the secure storage key to be updated. | 08-13-2009 |
20090204830 | POWER MANAGEMENT WITH DYNAMIC FREQUENCY DAJUSTMENTS - A central processing unit (CPU) can specify an initial (e.g., baseline) frequency for a clock signal used by a device to perform a task. The CPU is then placed in a reduced power mode. The device performs the task after the CPU is placed in the reduced power mode until a triggering event causes the device to send an interrupt to the CPU. In response to the interrupt, the CPU awakens to dynamically adjust the clock frequency. If the clock frequency is reset to the baseline value, then the CPU is again placed in the reduced power mode. | 08-13-2009 |
20090204835 | USE METHODS FOR POWER OPTIMIZATION USING AN INTEGRATED CIRCUIT HAVING POWER DOMAINS AND PARTITIONS - In a programmable SoC (system-on-a-chip) integrated circuit device, a method for optimizing power efficiency for a requested device functionality. The method includes determining a requested device functionality, and in response to the requested device functionality, turning on power for a selected one or more power domains out of a plurality of power domains included within the integrated circuit device. Each of the power domains has its own respective voltage rail to obtain power. The method further includes turning on one or more power islands out of a plurality of power islands included within the integrated circuit device. The requested device functionality is then implemented using one or more functional blocks wherein each functional block is configured to provide a specific device functionality. | 08-13-2009 |
20090205053 | Confidential information protection system and method - Efficient and effective permission confidential information protection systems and methods are described. The secure information protection systems and methods facilitate storage of confidential information in a manner safe from rogue software access. In one embodiment, a confidential information protection method is implemented in hardware and facilitates protection against software and/or Operating System hacks. In one exemplary implementation, a confidential information protection method includes setting a permission sticky bit flag to a default state upon system set up. The permission sticky bit flag access permission indication is adjusted at system reset in accordance with an initial application instruction. Access to the confidential information is restricted in accordance with the permission sticky bit and the permission sticky bit is protected from adjustments attempting to violate the permission indication. For example, another software application can not access or alter confidential information (e.g., an encryption key, initialization vector, etc.) if a permission sticky bit is designated as the highest security rating (e.g., disabling read permission and write permission until system reset). | 08-13-2009 |
20110158310 | DECODING DATA USING LOOKUP TABLES - To decode encoded data, an element in a first lookup table is indexed using an index determined from a sequence of bits in a data stream. The element has either a first format or a second format. The first format includes a run field, a level field, and a length field. The second format includes an offset field. If the element is in the first format, then information in the run, level, and length fields is used to retrieve a decoded symbol corresponding to the sequence of bits. If the element is in the second format, then information in the offset field is used to locate a second lookup table that is used in a manner similar to that of the first lookup table to advance the decoding process. | 06-30-2011 |
20130212417 | POWER MANAGEMENT WITH DYNAMIC FREQUENCY ADJUSTMENTS - A central processing unit (CPU) can specify an initial (e.g., baseline) frequency for a clock signal used by a device to perform a task. The CPU is then placed in a reduced power mode. The device performs the task after the CPU is placed in the reduced power mode until a triggering event causes the device to send an interrupt to the CPU. In response to the interrupt, the CPU awakens to dynamically adjust the clock frequency. If the clock frequency is reset to the baseline value, then the CPU is again placed in the reduced power mode. | 08-15-2013 |
20140281319 | SYSTEM AND METHOD FOR PROTECTING DATA - A system and method are provided for protecting data. In operation, a request to read data from memory is received. Additionally, it is determined whether the data is stored in a predetermined portion of the memory. If it is determined that the data is stored in the predetermined portion of the memory, the data and a protect signal are returned for use in protecting the data. In certain embodiments of the invention, data stored in the predetermined portion of the memory may be further processed and written hack to the predetermined portion of the memory. In other embodiments of the invention, such processing may involve unprotected data stored outside the predetermined portion of the memory. | 09-18-2014 |
Patent application number | Description | Published |
20110087709 | METHODS AND SYSTEM FOR DYNAMIC DATABASE CONTENT PERSISTENCE AND INFORMATION MANAGEMENT - According to one embodiment of the invention, a method for composing information into a generic information cell structure, which includes an information vacuole and a cell, is provided. In another embodiment, attaching generic tags, which correspond to the generic information cell structure, is provided. In another embodiment, generating structural and positional identification, fetching information characteristics, decomposing an information element into an atom class, processing the information element, and forming a native data manipulation statement, is provided. In another embodiment, a data repository, which includes an information element name and an atom type is provided. In yet another embodiment, a data directory, which includes a cell structure storage location identification, is provided. In one embodiment, a method of routing data by receiving a data store location identification for information, is provided. The data store identification may be externally defined and/or run-time defined. In another embodiment, a method for detecting an interaction within a transaction, where the transaction spans one or more sessions, storing intermediate transactional data, and providing a state description for the intermediate transactional data, is provided. | 04-14-2011 |
Patent application number | Description | Published |
20160106835 | COMBINATION THERAPIES FOR CANCER - A novel combination comprising a B-Raf inhibitor, particularly N-{3-[5-(2-Amino-4-pyrimidinyl)-2-(1,1-dimethylethyl)-1,3-thiazol-4-yl]-2-fluorophenyl}-2,6-difluorobenzenesulfonamide or a pharmaceutically acceptable salt thereof, the MEK inhibitor N-{3-[3-cyclopropyl-5-(2-fluoro-4-iodo-phenylamino)6,8-dimethyl; -2,4,7-trioxo-3,4,6,7-tetrahydro-2H-pyrido[4,3-d]pyrimidin-1-yl]phenyl}acetamide, or a pharmaceutically acceptable salt or solvate thereof, and a PD-1 antagonist; pharmaceutical compositions comprising the same and methods of using such combinations and compositions in the treatment of conditions in which the inhibition of MEK and/or B-Raf and/or immune modulation through PD-1 is beneficial, e.g., cancer. | 04-21-2016 |
Patent application number | Description | Published |
20160106835 | COMBINATION THERAPIES FOR CANCER - A novel combination comprising a B-Raf inhibitor, particularly N-{3-[5-(2-Amino-4-pyrimidinyl)-2-(1,1-dimethylethyl)-1,3-thiazol-4-yl]-2-fluorophenyl}-2,6-difluorobenzenesulfonamide or a pharmaceutically acceptable salt thereof, the MEK inhibitor N-{3-[3-cyclopropyl-5-(2-fluoro-4-iodo-phenylamino)6,8-dimethyl; -2,4,7-trioxo-3,4,6,7-tetrahydro-2H-pyrido[4,3-d]pyrimidin-1-yl]phenyl}acetamide, or a pharmaceutically acceptable salt or solvate thereof, and a PD-1 antagonist; pharmaceutical compositions comprising the same and methods of using such combinations and compositions in the treatment of conditions in which the inhibition of MEK and/or B-Raf and/or immune modulation through PD-1 is beneficial, e.g., cancer. | 04-21-2016 |