Patent application number | Description | Published |
20080278699 | Method For Distortion Correction In A Microlithographic Projection Exposure Apparatus - For the correction of anamorphism in the case of a projection lens of an EUV projection exposure apparatus for wafers it is proposed to tilt the reticle bearing the pattern to be projected and preferably also the wafer by a small angle about an axis that is perpendicular to the axis A of the lens and perpendicular to the scan direction and that in each instance passes through the middle of the light field generated on the reticle or on the wafer. For the correction of a substantially antisymmetric quadratic distortion the reticle and/or the substrate is instead rotated about an axis of rotation that is disposed at least approximately parallel to an optical axis of the projection lens. | 11-13-2008 |
20080304033 | PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Another approach to decrease the resolution is to introduce an immersion liquid having high refractive index into the gap that remains between a final lens element on the image side of the projection objective and the photoresist or another photosensitive layer to be exposed. Projection objectives that are designed for immersion operation and are therefore also referred to as immersion objective may reach numerical apertures of more than 1, for example 1.3 or 1.4. The term “immersion liquid” shall, in the context of this application, relate also to what is commonly referred to as “solid immersion”. In the case of solid immersion, the immersion liquid is in fact a solid medium that, however, does not get in direct contact with the photoresist but is spaced apart from it by a distance that is only a fraction of the wavelength used. This ensures that the laws of geometrical optics do not apply such that no total reflection occurs. | 12-11-2008 |
20080309894 | MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS - A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid. | 12-18-2008 |
20100141912 | EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS - A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid. | 06-10-2010 |
20110228246 | PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Another approach to decrease the resolution is to introduce an immersion liquid having high refractive index into the gap that remains between a final lens element on the image side of the projection objective and the photoresist or another photosensitive layer to be exposed. Projection objectives that are designed for immersion operation and are therefore also referred to as immersion objective may reach numerical apertures of more than 1, for example 1.3 or 1.4. The term “immersion liquid” shall, in the context of this application, relate also to what is commonly referred to as “solid immersion”. In the case of solid immersion, the immersion liquid is in fact a solid medium that, however, does not get in direct contact with the photoresist but is spaced apart from it by a distance that is only a fraction of the wavelength used. This ensures that the laws of geometrical optics do not apply such that no total reflection occurs. | 09-22-2011 |
20130044303 | METHOD FOR STRESS-ADJUSTED OPERATION OF A PROJECTION EXPOSURE SYSTEM AND CORRESPONDING PROJECTION EXPOSURE SYSTEM - A projection exposure system and a method for operating a projection exposure system for microlithography with an illumination system are disclosed. The illumination system includes at least one variably adjustable pupil-defining element. The illumination stress of at least one optical element of the projection exposure system is determined automatically in the case of an adjustment of the at least one variably adjustable pupil-defining element. From the automatically determined illumination stress, the maximum radiant power of the light source is set or determined and/or in which an illumination system is provided with which different illumination settings can be made. Usage of the projection exposure system is recorded and, from the history of the usage, at least one state parameter of at least one optical element of the projection exposure system is determined. | 02-21-2013 |
20130120723 | EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS - A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid. | 05-16-2013 |
20160062245 | METHOD FOR STRESS-ADJUSTED OPERATION OF A PROJECTION EXPOSURE SYSTEM AND CORRESPONDING PROJECTION EXPOSURE SYSTEM - A projection exposure system and a method for operating a projection exposure system for microlithography with an illumination system are disclosed. The illumination system includes at least one variably adjustable pupil-defining element. The illumination stress of at least one optical element of the projection exposure system is determined automatically in the case of an adjustment of the at least one variably adjustable pupil-defining element. From the automatically determined illumination stress, the maximum radiant power of the light source is set or determined and/or in which an illumination system is provided with which different illumination settings can be made. Usage of the projection exposure system is recorded and, from the history of the usage, at least one state parameter of at least one optical element of the projection exposure system is determined. | 03-03-2016 |
Patent application number | Description | Published |
20120125132 | Bearing system for a worm in a steering gear - Disclosed is a bearing system for a worm engaging with a worm wheel as part of a steering gear, wherein the bearing system comprises at least one bearing with an outer ring, an inner ring, and rolling bodies that are movably accommodated between the outer an inner rings, the bearing being pivotally arranged in a bearing seat for accommodating the outer ring of the bearing, and wherein the inner ring accommodates one of the two shaft ends of the worm in order to seat said shaft end of the worm radially in the housing of the steering gear. For an improved dampening of the worm at least one spring element, which exerts a spring force on a region of the outer ring of the bearing, is provided at the bearing, said spring force supporting a pivotal motion of the worm toward the worm wheel. | 05-24-2012 |
20130206497 | HELICAL GEARING FOR A STEERING SYSTEM OF A MOTOR VEHICLE - Helical gearing for a steering system of a motor vehicle comprises a helical pinion which engages a helical gear. Minimization of friction in the gearing and increased efficiency since continuous elastically urging with an approximately consistent spring force during the entire service life is attained. It is not necessary for a very large spring force to be applied. By way of the continuous elastically urging with an approximately consistent spring force, clattering noises or disturbing noises are prevented or largely reduced throughout the entire service life. Due to the simple design the requirements on assembly are reduced. It is advantageous that the elastically urging of the helical pinion or the worm need not be adjusted during assembly since the necessary elastically urging is automatically adjusted. | 08-15-2013 |
20130239726 | HELICAL GEAR MECHANISM FOR A STEERING SYSTEM OF A MOTOR VEHICLE - A helical gear mechanism for a steering system in a motor vehicle comprises a helical pinion which engages with a helical gear and a bearing bushing which accommodates a bearing of the helical pinion. An inner ring of the bearing bushing is connected to an outer ring via a pivot bearing so that a pivoting motion of the helical pinion relative to the helical gear is possible. A pressure piece is disposed between the inner ring and the outer ring of the bearing bushing. The pressure piece is movable in a spring-loaded manner in a section of an annular gap between the inner ring and the outer ring. The inner ring and/or the outer ring are designed in the section so that the annular gap between the inner ring and the outer ring is tapered in the direction in which the pressure piece can be moved in a spring-loaded manner. | 09-19-2013 |
Patent application number | Description | Published |
20100204007 | METHOD FOR CONTROLLING AN AUTOMATIC TRANSMISSION OF A MOTOR VEHICLE - A method of controlling an automatic transmission of a vehicle in which a hold gear function is activated by a driver request and is deactivated independently of a return condition. To allow an effective, safe to operate, and comfortable use, the return condition depends on one of the following criteria or a useful combination of the same: a flexible time span, consideration of the vehicle stand still time; a rotational speed of the vehicle engine, or one or several parameters which correlate with the engine rotational speed, a new, the same, or a different drive request by the driver, a change in the operating condition of the vehicle, and a plausibility check occurring during the startup procedure. | 08-12-2010 |
20130303332 | METHOD FOR CONTROLLING AN AUTOMATIC TRANSMISSION OF A MOTOR VEHICLE - A method of controlling an automatic transmission of a vehicle in which a hold gear function is activated by a driver request and deactivated depending on a return condition. The method comprises the step of (a) determining the return condition by a change in operating state, and (b) deactivating the hold gear function if a temporary operating state, for which the hold function is requested, ends and a change takes place between one of uphill driving and downhill driving and between driving one of up and down a hill and driving on a same plane. | 11-14-2013 |
Patent application number | Description | Published |
20090101621 | STOPPER FOR A CONTAINER - The stopper ( | 04-23-2009 |
20100219202 | DEVICE FOR SEPARATELY STORING A SUBSTANCE, PREFERABLY A MEDICAL OR PHARMACEUTICAL SUBSTANCE, AND A LIQUID AND MIXING THE SAME PRIOR TO THE DELIVERY THEREOF - The device for separately storing a substance, such as a medical or pharmaceutical active substance, and a liquid, and for mixing the same prior to use, comprising a first receptacle containing the liquid, a second receptacle that contains the substance and has a bottom to be opened so that the substance passes into the liquid, and comprising a means that can be advanced in order to apply a force to the bottom of the second receptacle such that the bottom is opened, is characterized in that the second receptacle is a blister pack which is mounted inside or on the first receptacle. The substance is thereby sealed within a housing that has a preferably flat bottom and a substantially cup-shaped or blister-shaped upper chamber wall. The flat bottom is torn open in order to release the substance, with the chamber wall being preferably turned upside down through the bottom. | 09-02-2010 |
20110079300 | ONE-WAY VALVE - The one-way valve for discharging a liquid out of a container, comprising an outer cap which is fastened to the container neck and comprises an exit channel for the liquid is characterized in that a valve body of elastic material is arranged between the container and the outer cap, that the valve body extends over the opening of the container neck and comprises a projection which projects into the exit channel of the outer cap and is arranged therein to be movable back and forth, that a space remains between the inner wall of the exit channel and the outer circumference of the projection, and that at least one cut severs the wall of the valve body, through which cut liquid passes into the space of the exit channel upon exertion of pressure on the container. | 04-07-2011 |
20120024905 | SINGLE-USE APPLICATOR - The single-use applicator used for discharging a filling substance and comprising a substance receiving chamber provided with an outlet is characterized in that the receiving chamber comprises an outwardly curved wall and an opposite wall which is provided with a surrounding web which engages into the cavity of the curved wall on the edge thereof, and that the curved wall is shaped such that it can be smoothly pressed onto the web and the interposed area of the opposite wall. | 02-02-2012 |
20120261377 | STOPPER FOR A CONTAINER - A stopper which engages a neck of a container. The stopper includes a circular bottom section and a head section which rises above the container and encompasses a slide. The rim of the head section has a maximum diameter that does not exceed the external diameter of the opening of the container. The slide can be pushed against the force of a spring device in one direction and, when released, returns to its retracted initial position as a result of the spring force. Opposing sides of the slide each end in circumferential sections. A first one of the circumferential sections forming an outer surface for receiving a first applied force for advancing the slide and causing the second one of the circumferential sections to protrude from the stopper. The second one of the circumferential sections receiving a second different applied force to remove the stopper from the container. | 10-18-2012 |
20120305566 | PACKAGING - The packaging comprising an essentially dimensionally stable, elastically deformable external container, an easily deformable inner bag arranged therein, which receives the filling material, and a valve, is characterized in that the valve comprises a base body which extends over the opening of the external container and comprises at least one through opening for the filling material and a pin oriented away from the external container, and a cap which is fastened to the neck of the external container and covers the base body and the upper end wall of which is formed by a membrane which delimits a receiving chamber for the filling material between the cap and the base body and comprises an outlet opening for the filling material which in the unpressurized state of the packaging is closed by the pin in that the membrane with the area containing the outlet opening rests under preload on the pin, the membrane being lifted from the pin upon exertion of pressure on the external container by the pressurized filling material contained in the receiving chamber, so that filling material can exit, and that the cap comprises an air chamber which is separated from the receiving chamber for the filling material and sealed relative to the receiving chamber and the external container and which is connected via at least one hole through the wall of the external container to the intermediate chamber between the external container and the inner bag and via at least one venting valve to the exterior atmosphere. | 12-06-2012 |
20120305602 | PACKAGING - The packaging comprising an essentially dimensionally stable, elastically deformable external container, an easily deformable inner bag arranged therein, which receives the filling material, and a valve is characterized in that the valve comprises a base body which extends over the opening of the external container and comprises at least one through opening for the filling material and a valve holder which has fastened therein a valve body which comprises an elastically deformable partition wall tightly sealing the valve holder, and a valve pin pointing away from the external container, said partition wall together with the valve holder delimiting an air chamber under the valve pin, and comprising a cap which is fastened to the neck of the external container and covers the base body and the valve body and which delimits a receiving chamber for the filling material between the cap and the base body and comprises an outlet opening for the filling material which in the unpressurized state of the packaging is closed by the valve pin which under preload of the elastically deformable partition wall abuts on the area of the cap containing the outlet opening, the valve pin being retracted from the cap upon application of pressure to the external container by the pressurized filling material contained in the receiving chamber so that the filling material can exit, and that the cap comprises an air chamber which is separated from the receiving chamber for the filling material and sealed with respect to the receiving chamber and the external container and which is connected by means of at least one hole through the wall of the external container to the intermediate chamber between the external container and the inner bag and to the exterior atmosphere by means of at least one venting valve. | 12-06-2012 |
20130161341 | CONTAINER HAVING AN INNER BAG - The container produced in a coextrusion-type blow molding process, which consists of a substantially rigid outer container and an easily deformable inner bag, with the inner bag being closed by a bottom weld seam when excess material is squeezed off at the bottom of a blow mold, and said bottom weld seam being clamped in a likewise closed bottom weld seam of the outer container, at least one pressure compensating opening being formed on both sides of the bottom weld seam, and all pressure compensating openings being formed at points of the outer container that are offset in the circumferential direction from the intersection lines of a plane extending through the bottom weld seam and through the longitudinal center axis of the container with the circumferential wall of the outer container and of the inner bag so that the inner bag contracts only from two sides when the container contents is dispensed, is characterized in that the wall thickness of the inner bag is greater in the area of the intersection lines than in the interposed circumferential portions. | 06-27-2013 |
20140374439 | CONTAINER HAVING AN INNER BAG - The container produced in a coextrusion-type blow molding process, which consists of a substantially rigid outer container and an easily deformable inner bag, with the inner bag being closed by a bottom weld seam when excess material is squeezed off at the bottom of a blow mold, and said bottom weld seam being clamped in a likewise closed bottom weld seam of the outer container, at least one pressure compensating opening being formed on both sides of the bottom weld seam, and all pressure compensating openings being formed at points of the outer container that are offset in the circumferential direction from the intersection lines of a plane extending through the bottom weld seam and through the longitudinal center axis of the container with the circumferential wall of the outer container and of the inner bag so that the inner bag contracts only from two sides when the container contents is dispensed, is characterized in that the wall thickness of the inner bag is greater in the area of the intersection lines than in the interposed circumferential portions. | 12-25-2014 |
Patent application number | Description | Published |
20090039549 | METHOD AND DEVICE FOR PRODUCING A CONTAINER - The method comprises the following steps; a) the container opening is seated, b) at least one wall opening is created by drilling through or piercing the wall of the outer container using a drill, graver or needle, a pressurised medium being introduced into the gap between the outer container and the inner tube, once the wall of the outer container has been fully penetrated, c) the advance of the drill or needle is halted as soon as a predetermined first pressure threshold has been reached in the inner tube, d) the introduction of the pressurised medium into the gap between the outer container and the inner tube is halted as soon as a predetermined second pressure threshold has been reached in the inner tube, e) once the pressure in the gap between the outer container and the inner tube has been relieved, a pressurised medium is introduced into the inner tube through the container opening, in order to place the inner tube against the container wall again after it has been detached from the latter. The method allows the inner tube to be detached in a controlled manner with a high degree of uniformity from the outer container and to be placed against said outer container again without a significant inclusion of air. | 02-12-2009 |
20090274788 | DEVICE FOR PRODUCING A CONTAINER - The method comprises the following steps: a) the container opening is sealed, b) at least one wall opening is created by drilling through or piercing the wall of the outer container using a drill, graver or needle, a pressurized medium being introduced into the gap between the outer container and the inner tube, once the wall of the outer container has been fully penetrated, c) the advance of the drill or needle is halted as soon as a predetermined first pressure threshold has been reached in the inner tube, d) the introduction of the pressurized medium into the gap between the outer container and the inner tube is halted as soon as a predetermined second pressure threshold has been reached in the inner tube, e) once the pressure in the gap between the outer container and the inner tube has been relieved, a pressurized medium is introduced into the inner tube through the container opening, in order to place the inner tube against the container wall again after it has been detached from the latter. The method allows the inner tube to be detached in a controlled manner with a high degree of uniformity from the outer container and to be placed against said outer container again without a significant inclusion of air. | 11-05-2009 |