Patent application number | Description | Published |
20100328670 | SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION - A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose. | 12-30-2010 |
20110310388 | DISCRETE POLARIZATION SCATTEROMETRY - Systems and methods for discrete polarization scatterometry are provided. | 12-22-2011 |
20130033704 | LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM - The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage. | 02-07-2013 |
20130114085 | Dynamically Adjustable Semiconductor Metrology System - The present invention may include an illumination source, a detector, a selectably adjustable optical system including a dynamically adjustable illumination pupil of the illumination arm, a dynamically adjustable collection pupil of the collection arm, a dynamically adjustable illumination field stop of the illumination arm, a dynamically adjustable collection field stop of the collection arm, a sensor configured to measure one or more optical characteristics of one or more components of the optical system, and a control system configured to selectably dynamically adjust at least one of the illumination pupil, the collection pupil, the illumination field stop, the collection field stop, and a spectral radiance of the illumination source. | 05-09-2013 |
20130169966 | Optical Metrology Tool Equipped with Modulated Illumination Sources - The present invention may include a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology. | 07-04-2013 |
20140375981 | MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS - An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image. | 12-25-2014 |
20150055123 | Broadband And Wide Field Angle Compensator - A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates. | 02-26-2015 |
Patent application number | Description | Published |
20120002542 | Traffic Engineering and Server Selection for Content Distribution - An apparatus comprising a traffic engineering (TE) and server selection (SS) component configured to couple to an SS component and operate at a first time scale based on SS policies from the SS component, wherein the SS is configured to operate at a second timescale based on TE policies from the TE and SS component, and wherein the second timescale has a finer time granularity than the first time scale by at least one order of magnitude. Also disclosed is a network component comprising a receiver configured to receive one or more SS policies from a content provider or customer node, a logic circuit configured to compute a plurality of joint TE and SS policies for a plurality of network nodes based on the received SS policies, and a transmitter configured to send the joint TE and SS components to the content provider or customer node. | 01-05-2012 |
20120005251 | Method and Apparatus for Network-Friendly Collaborative Caching - An apparatus comprising a first content oriented network architecture (CONA) node configured to couple to at least one second CONA nodes and implement collaborative caching in accordance with criteria comprising at least one content caching objective and at least one network operational objective, wherein the content caching objectives are in accordance with the network operational objectives. Also disclosed is a network component comprising a caching policy engine configured to receive network policy information and compute a caching policy in accordance with the network policy information, an inter-cache data transfer component coupled to the caching policy engine and configured to fetch a plurality of content object portions in accordance with the caching policy, a storage engine coupled to the inter-cache data transfer component and configured to cache the content object portions, and an eviction algorithm component coupled to the storage engine and configured to determine which, if any, of the cached content object portions are to be evicted. | 01-05-2012 |
20120174181 | Method and Apparatus to Create and Manage a Differentiated Security Framework for Content Oriented Networks - A network component comprising a receiver configured to receive a signed content item and an associated security information from a publisher, wherein the security information indicates which group from a plurality of groups is allowed to access the signed content item, a storage unit configured to cache the content item and the associated security information, a processor to implement procedures to enforce security policies defined by the security information, and a transmitter configured to send the signed content item from the cache to a subscriber when the subscriber is a member of a group indicated by the security information as authorized to access the signed content item. | 07-05-2012 |
20120204224 | Method and Apparatus for a Control Plane to Manage Domain-Based Security and Mobility in an Information Centric Network - A networking system comprising a virtual group controller in an information centric network configured to enable mobility and security for a plurality of users groups of the information centric network, a plurality of user groups coupled to the virtual group controller and associated with the users, a plurality of agents that are each associated with one of the user groups, and a database for trusted service profile coupled to the virtual group controller, wherein the virtual group controller is configured to interact with the agents to enable mobility for the user groups using a server-less domain-based naming scheme. | 08-09-2012 |
20120317655 | Method for Flexible Data Protection with Dynamically Authorized Data Receivers in a Content Network or in Cloud Storage and Content Delivery Services - A networking system comprising an application service that runs on a cloud infrastructure and is configured to receive dual encrypted content from a content provider and re-encrypt the dual encrypted content to enable dynamic user group control for group-based user authorization, and a cloud storage service coupled to the application service and configured to store the dual encrypted content from the content provider and the re-encrypted dual encrypted content from the application service, wherein the application service and the storage service are configured to communicate and operate with a content delivery service that uses a content delivery network (CDN) to deliver the re-encrypted content to one or more users in a group authorized by the content provider. | 12-13-2012 |
20130041982 | METHOD AND NODE FOR ACQUIRING CONTENT AND CONTENT NETWORK - The present invention discloses a method and node for acquiring content and a content network, and is related to the field of communications. The method includes: receiving a content request, where the content request at least includes an identifier of requested content; determining whether the content corresponding to the identifier can be acquired locally; if yes, acquired the content corresponding to the identifier locally; otherwise, searching, according to the identifier, a name resolution system for a target node that stores the identifier, and acquiring the content corresponding to the identifier from the target node; where the name resolution system comprises a multilevel DHT and a global content resolution structure, and the global content resolution structure supports name aggregation and longest matching search. | 02-14-2013 |
20130275752 | METHOD AND SYSTEM FOR SECURE MULTIPARTY CLOUD COMPUTATION - One embodiment of the present invention provides a system for performing secure multiparty cloud computation. During operation, the system receives multiple encrypted datasets from multiple clients. An encrypted dataset associated with a client is encrypted from a corresponding plaintext dataset using a unique, client-specific encryption key. The system re-encrypts the multiple encrypted datasets to a target format, evaluates a function based on the re-encrypted multiple datasets to produce an evaluation outcome, and sends the evaluation outcome to the multiple clients, which are configured to cooperatively decrypt the evaluation outcome to obtain a plaintext evaluation outcome. | 10-17-2013 |
20140233575 | Method for Scalable Routing in Content-Oriented Networks - A method for routing content, comprising receiving an interest packet from a first face, wherein the interest packet comprises a content name field populated with a first content name, a destination field, and a broadcast flag field set to broadcast, wherein the broadcast field indicates whether the first face has previously received a request having the first content name, and receiving a data packet from a second face, wherein the data packet comprises a content name field populated with a second content name, a source field populated with the identity of a source of data associated with the second content name, and a data field populated with the data associated with the second content name. | 08-21-2014 |
20140344378 | Multi-Tier Push Service Control Architecture for Large Scale Conference Over ICN - A network element (NE) comprising a memory configured to store a digest log for a conference, a receiver coupled to the memory and configured to receive a first message from a first of a plurality of service proxies of the conference, wherein the first message comprises a signature profile of a first of a plurality of participants of the conference associated with the first service proxy, a processor coupled to the receiver and the memory and configured to track a state of the conference by updating the digest log according to the first message, and a transmitter coupled to the processor and configured to send a plurality of second messages to indicate the digest log update to the service proxies without a transmission request from the service proxies. | 11-20-2014 |
20140344379 | Multi-Tier Push Hybrid Service Control Architecture for Large Scale Conferencing over ICN - A network element (NE) comprising a memory configured to store a digest log for a conference, a receiver configured to receive a first message from a first of a plurality of participants associated with the NE, wherein the first message comprises a signature profile of the first participant, a processor coupled to the receiver and the memory and configured to track a state of the conference by performing a first update of the digest log according to the first message, and a transmitter coupled to the processor and configured to send a second message to a first of a plurality of service proxies that serve the conference, wherein the second messages indicate the updated digest log. | 11-20-2014 |
Patent application number | Description | Published |
20110271007 | System and Method for a Context Layer Switch - In accordance with an embodiment, a network device has an input port for receiving input packets, and an output port for sending output packets, where the input packets and output packets have context layer information. The network device also includes a processor configured to process the input packets and output packets using a network protocol having a context layer. | 11-03-2011 |
20120011271 | System and Method for Content and Application Acceleration in a Wireless Communications System - A system and method for content and application acceleration in a wireless communications system are provided. A method for transmitting data includes receiving a block of data from a content provider, generating a signature from the block of data, and determining if the signature exists in a content cache. The content cache includes previously transmitted signatures and blocks of data associated with the previously transmitted signatures. The method also includes if the signature exists in the content cache, saving the signature but not the block of data in a buffer. The method further includes if the signature does not exist in the content cache, saving the block of data in the buffer. The method additionally includes transmitting contents of the buffer over a backhaul link. | 01-12-2012 |
20120151086 | System and Method for Content-Oriented Network Interworking - A content-oriented communications network includes an ingress gateway in communication with a legacy client of a first legacy communications network, and an egress gateway in communication with the ingress gateway and a legacy server of a second legacy communications network. The ingress gateway translates a content request of the legacy client from a first legacy protocol to a content-oriented protocol and translates a content reply received in response to the content request from the content-oriented protocol to the first legacy protocol. The egress gateway translates the content request from the content-oriented protocol to a second legacy protocol and translates the content reply received in response to the content request from the second legacy protocol to the content-oriented protocol. | 06-14-2012 |
20120159176 | Method and Apparatus to Create and Manage Virtual Private Groups in a Content Oriented Network - A content router for managing content for virtual private groups in a content oriented network, the content router comprising storage configured to cache a content from a customer in a content oriented network (CON), and a transmitter coupled to the storage and configured to forward the content upon request, wherein the content is signed by the user, wherein the CON provides different security levels for different users in a plurality of users, and wherein the plurality of users correspond to a plurality of user classes. | 06-21-2012 |
20120297088 | Selective Content Routing and Storage Protocol for Information-Centric Network - A network component comprising a receiver configured to receive an advertisement for a content name for content associated with a list of secured router identifiers (SRIDs) that indicates a plurality of content routers authorized for routing and caching the content, a processor configured to determine whether to flood the advertisement to a plurality of neighboring nodes if a locally assigned SRID is included in the list of SRIDs received in the advertisement or to drop the advertisement otherwise, a transmitter configured to flood the advertisement on a plurality of ports coupled to the neighboring nodes, and a storage configured to cache received content if the received content is associated with the locally assigned SRID. | 11-22-2012 |
20130016695 | Method and Apparatus for Seamless Mobility Techniques in Content-Centric Network - A networking system for a content-centric-network (CCN)/named-data networking (NDN) comprising a first point of attachment (PoA) configured to communicate with a mobile node (MN) and maintain a forwarding state for the MN to support seamless mobility for the MN, and a second PoA configured to communicate with the MN and obtain the forwarding state for the MN from the first PoA after a handoff of the MN from the first PoA to the second PoA, wherein the forwarding state is used to exchange a plurality of interests and a plurality of data responses between the MN and the CCN/NDN. | 01-17-2013 |
20130039249 | Seamless Mobility Schemes in Named-Data Networking Using Multi-Path Routing and Content Caching - A content-centric-network (CCN)/named-data networking (NDN) system to support seamless mobility for a mobile node (MN) comprising a first point of attachment (PoA) configured to indicate to the MN that attaches to the first PoA one or more neighbor PoAs and to multicast an interest for content from the MN to the neighbor PoAs in a CCN or NDN when the MN starts a handoff procedure, and a second PoA from the one or more neighbor PoAs of the first PoA configured to receive the multicast interest from the first PoA, forward the interest to the CCN or NDN, receive content data from the CCN or NDN, and forward the content data to the MN. | 02-14-2013 |
20130060962 | Generalized Dual-Mode Data Forwarding Plane for Information-Centric Network - A networking system comprising a content router for an information-centric network (ICN) comprising a content store (CS), a pending interest table (PIT), a forwarding information base (FIB), and a plurality of interfaces, and configured to receive and forward interest from one or more users and data from one or more applications via the interfaces using a dual-mode data forwarding plane, and a plurality of next hop nodes of the ICN coupled to the content router and configured to forward the interest and data to the content router via the interfaces, wherein the dual-mode forwarding plane forwards the interest and data using the FIB without the CS and PIT for conversational traffic and using the CS, PIT, and FIB for content dissemination traffic. | 03-07-2013 |
20130219081 | Method and Apparatus for Adaptive Forwarding Strategies in Content-Centric Networking - A named-data networking (NDN) node, comprising a plurality of faces each of which is coupled to a different node in a content-centric network, and a processor coupled to the faces, wherein the processor is configured to probe the performance of each of the faces for an interest, wherein the interest is associated with multiple ones of the faces, wherein a next-hop is identified by the face, wherein a one of the faces associated with the interest is used to forward the interest when the interest is received by the NDN node, and wherein the one of the faces used is determined based on a selection probability determined from feedback from the probe of the performance of the faces. | 08-22-2013 |
20130227166 | Method and Apparatus for Internet Protocol Based Content Router - An internet protocol (IP) content router, comprising a forwarding information base (FIB) engine comprising a data store comprising forwarding instructions, an IP packet classifier comprising a processor configured to classify a first incoming IP packet as an information centric networking (ICN) packet and a second incoming IP packet as a non-ICN packet, and an IP packet processor comprising a processor, wherein the IP packet processor is coupled to the FIB engine and to the IP packet classifier, wherein the IP packet processor is configured to intercept the ICN packet for further ICN processing in the IP content router, consult the FIB engine for forwarding instructions for the non-ICN packet, and forward the non-ICN packet according to the forwarding instructions. | 08-29-2013 |
20130282860 | Name-Based Neighbor Discovery and Multi-Hop Service Discovery in Information-Centric Networks - A content router, comprising a plurality of physical links to other nodes in an information centric network, a receiver coupled to the plurality of physical links configured to receive messages, a transmitter coupled to the plurality of physical links configured to transmit messages, and a service publishing and discovery (SPD) module comprising a processor and memory device coupled to the receiver and to the transmitter, wherein the SPD is configured to store status updates of the physical links, wherein the SPD is configured to determine a next hop and a number of hops to forward a received message based on a prefix in a name-based service discovery protocol name of a received message. | 10-24-2013 |
20130282920 | Principal-Identity-Domain Based Naming Scheme for Information Centric Networks - A network node in an information centric network (ICN), comprising a receiver configured to receive a request for content from a user, wherein the request comprises a name, wherein the name uniquely identifies the content associated with the name, wherein the name provides persistently locatable routing to the content, wherein the name provides meaning to an application, and wherein the name comprises a security verifier, a processor coupled to the receiver and configured to determine a next hop to which to forward the request based on the name, and a transmitter coupled to the processor and configured to forward the request to the next hop. | 10-24-2013 |
20130322451 | System and Method for a Context Layer Switch - In accordance with an embodiment, a network device has an input port for receiving input packets, and an output port for sending output packets, where the input packets and output packets have context layer information. The network device also includes a processor configured to process the input packets and output packets using a network protocol having a context layer. | 12-05-2013 |
20140126370 | Method of Traffic Engineering for Provisioning Routing and Storage in Content-Oriented Networks - A transceiver configured to receive and transmit data in a content oriented network (CON), and a processor configured to obtain a jointly provisioned routing and storage solution resolved according to an aggregated data flow equation generating a conventional data flow of content on a link to a destination, and an aggregated data flow of the content on the link, and a storage indicator, and to determine whether to store and transmit the data. | 05-08-2014 |
20140173076 | Method and Apparatus for Policy Based Routing in Information Centric Networking Based Home Networks - A network node, comprising a receiver configured to receive a request for a service, wherein the request comprises a hierarchically structured name comprising a root and a suffix, a data storage component comprising a network synchronized policy rule associated with a service name root, wherein the network synchronized policy rule is applied to any request for a service whose name comprises a root matching the service name root, and a processor coupled to the receiver and to the data storage component, wherein the processor is configured to apply the network synchronized policy rule to the request, wherein the processor is configured to synchronize service definitions and service policies with other nodes in a network based on the name of the service, and wherein the network synchronized policy rule is synchronized with the other nodes in the network using name-based routing. | 06-19-2014 |
20140192717 | Information Centric Networking Based Service Centric Networking - A method implemented by a network device residing in a service domain, wherein the network device comprises an information centric networking (ICN) transport layer and a service access layer (SAL) for handling context-aware service logistics and service mobility overlaid on the ICN transport layer, the method comprising receiving, in the ICN transport layer, a message comprising a service request that originates from a user equipment (UE), in the SAL, retrieving, from the service request, contextual information relevant to the UE or an access network connected to the UE, determining, based on the contextual information, one or more services needed to execute the service request, and determining one or more service identities (SIDs) each of which identifies one of the one or more services. | 07-10-2014 |
20140195641 | Contextualized Information Bus - An NE comprising a plurality of physical interfaces configured to communicate to a plurality of remote NEs in an ICN, a receiver coupled to the plurality of physical interfaces and configured to receive a request for a service from a first of the remote NE via the ICN, wherein the service request comprises a requested service name and a requested service context, a memory comprising a service profile comprising a supported service associating with a supported service name and a supported service context, a processor coupled to the memory and the receiver and configured to generate a service response when the requested service name matches the supported service name and the requested service context matches the supported service context, and a transmitter coupled to the processor and the plurality of physical interfaces and configured to transmit the service response to the first NE via the ICN. | 07-10-2014 |
20140281505 | Augmenting Name/Prefix Based Routing Protocols With Trust Anchor In Information-Centric Networks - An apparatus comprising a memory, a processor coupled to the memory, wherein the memory contains instructions that when executed by the processor cause the apparatus to receive an information centric network (ICN) name prefix announcement message comprising a message prefix specific to a publisher, a public key certificate specific to the content publisher, and a signature specific to the content publisher, verify the signature with a name registration service (NRS), and update internal data indicating that the content publisher is a trusted publisher, wherein the internal data comprises the prefix, the public key, and the signature. | 09-18-2014 |
Patent application number | Description | Published |
20100081308 | RF connector having contact terminal set with movable bridge - A RF connector comprising: an insulative housing defining a space section; an upper fixed contact and a lower movable contact are disposed on two opposite sides of the housing in a first direction, each of said upper fixed contact and said lower movable contact including a contact section in the space section and a solder tail exposed outside of the housing, the lower movable contact having on two opposite sides a pair of bending ends disposed which is a lying U-shape; and an upper case mounted upon the housing and defining a plug insertion passageway; and a metallic shell enclosing said upper case and the housing. | 04-01-2010 |
20130039630 | OPTICAL FIBER CONNECTOR AND ASSEMBLY TOOL FOR OPTICAL FIBER CONNECTOR - An optical fiber connector includes an inner housing and a fixing module sleeved in the inner housing. The fixing module includes a support member and a fastening assembly fastened to the support member. The support member has a fixing portion, and the fixing portion defines a first restricting groove. The fastening assembly includes a fastener, a fixing member, an elastic member, and a pressing member. The fixing member defines a second restricting groove. The fastener sleeves on the fixing member and the elastic member. The fastener engages with the support member, and then the elastic member is resisted between the fixing member and the fastener, thereby generating an elastic force to drive the fixing member to abut against the fixing portion. The pressing member slidably engages with the support member and resists the fixing member. | 02-14-2013 |
20130051735 | OPTICAL FIBER CONNECTOR - An optical fiber connector includes an inner housing and a fixing module sleeved in the inner housing. The fixing module includes a fixing mechanism having a supporting member and a clamping member. The supporting member includes a first fixing portion axially defining a first restricting groove, a first fixing end and a second fixing end at two opposite ends of the first fixing portion, and the clamping member includes a second fixing portion axially defining two sliding grooves on two borders of the second fixing portion. The fixing module further includes a locking member sleeved on the fixing mechanism, a position member fixed at the first fixing end of the fixing mechanism, and an elastic member sleeved on the fixing mechanism with an end of the elastic member resisting with the position member and the other end of the elastic member resisting with the locking member. | 02-28-2013 |
20130129285 | OPTICAL FIBER CONNECTOR, OPTICAL FIBER ADAPTER, AND WATERPROOF OPTICAL FIBER ASSEMBLY USING THE SAME - An optical fiber assembly includes an optical fiber connector, and an optical fiber adapter mating with the optical fiber connector. The optical fiber connector includes a fiber joining assembly, a first sealing member, an elastic member, and a housing assembly sleeved on the fiber joining assembly. The elastic member is slidably sleeved in the housing assembly with two ends of the elastic member resisting with the housing assembly. The optical fiber adapter includes a base board, a fixing seat protruding out from the base board, and a second sealing member sleeved on the outer surface of the fixing seat. The optical fiber adapter further includes two latching arms protruding out from the base board positioned at opposite sides of the fixing seat. The fixing seat axially defines an assembling groove for receiving the fiber joining assembly of the optical fiber connector. | 05-23-2013 |
20130163933 | OPTICAL FIBER CONNECTOR, OPTICAL FIBER ADAPTER, AND ASSEMBLY THEREWITH - A waterproof optical fiber assembly includes an optical fiber connector mating with an optical fiber adapter. The optical fiber connector includes a fiber joining head, a sealing member, a sleeve, a housing, and a boot. The sleeve defines an annular groove for receiving the sealing member and two latching protrusions adjacent to the annular groove, the housing defines two unlocking grooves for the two latching protrusions, the fiber joining head is sleeved in the sleeve adjacent to the annular groove, the housing is fitted around an end of the sleeve away from the fiber joining head. The optical fiber adapter includes an assembling seat including a base board, a barrel, and two elastic arms. | 06-27-2013 |
20130163937 | ADAPTER FOR OPTICAL FIBER CONNECTOR - An adapter for an optical fiber connector includes a fixing base and two terminals. The fixing base has a main portion and two assembly portions formed on the main portion. The terminal has a positioning portion, a connecting portion, and an inserting portion. The connecting portion and the inserting portion extend from opposite ends of the positioning portion, and the positioning portion is positioned in the assembly portion of the fixing base. | 06-27-2013 |
Patent application number | Description | Published |
20140148119 | Emergency (SOS) Mode Enhancements for Cellular Networks - Systems and methods for enabling a group of user equipments located in an emergency area to cooperatively transmit an emergency (SOS) message to a cellular network and to cooperatively receive an SOS message (or response) from the cellular network are provided. Embodiments further provide a scheme for enabling dedicated receivers, and/or user equipments that are attached to the cellular network to serve as relay stations for SOS messages, thereby extending the coverage of the cellular network to the emergency area. | 05-29-2014 |
20140199996 | Wireless Communication System Utilizing Enhanced Air-Interface - In a Long Term Evolution (LTE) environment, the LTE network can coordinate with a subscribing user equipment to manage offloading to a wireless local area network (WLAN) access point or other base station. In doing so, the serving base station on the LTE network can acquire device capabilities of the user equipment and provide configuration details to the user equipment based on those capabilities. These configuration details may cause the user equipment to monitor one or more triggers, and may configure a scan to be later performed by the user equipment. Based on the monitored trigger, the user equipment can then scan the environment according to the scan configuration defined by the base station, and relay scan results to the base station to make a handover determination. | 07-17-2014 |
20140200008 | Wireless Communication System Utilizing Broadcast-Based Blind Offloading - In an Long Term Evolution (LTE) environment, LTE base stations may collect relevant data from subscribing wireless devices, as well as from nearby LTE base stations and WLAN access points. Based on the collected data, as well as data of the base station itself, the base station may make a determination as to whether to institute offloading of some or all of the subscribing UEs. Rather than independently communicating the offload command to each of the UEs, the base station may issue a broadcast notification that may be decoded by all of the UEs for performing offloading. In order to mitigate a surge of offloading, the base station can include surge prevention parameters in the broadcast message to distribute or reduce offloading. | 07-17-2014 |
20140211757 | Wireless Communication System Utilizing Staggered Device Handovers - Carrier aggregation and dual connectivity allow a user device to communicate with one or more base stations on multiple component carrier frequencies. When it is determined that the user device should handover to a new base station, the user device performs a substantial portion of the needed handover operations with the new base station using only one of the component carrier frequencies. Meanwhile, the user device maintains data communications with the original base station on the remaining component carrier frequencies. | 07-31-2014 |
20140355566 | Cross Radio Access Technology Access with Handoff and Interference Management Using Communication Performance Data - Systems and methods for adaptive access and handover configuration based on historical data are provided. Access and handover decisions are optimized in a multiple radio access technology environment using historical data associated with network performance. Future needs for access and handovers are predicted using historical data associated with the user and historical data associated with network performance. Performance metrics are received periodically or continuously from nodes in one or more networks at a centralized controller. The centralized multi RAT controller correlates these performance metrics and determines predicted handovers for a user device. Preparations for the predicted handovers can then be made prior to the handover event. | 12-04-2014 |
20140357224 | Application Layer Integration Into a Multi-Rat Access and Handover Environment - A wireless communication device communicating with a serving base station in a wireless communication environment may have one or more applications running. When seeking to handover from the serving base station to a target base station, the wireless communication device adjusts the configurations of the applications based on the new communication link properties. Likewise, when an application is loaded that prefers communication link properties that exceeds a current communication link's capabilities, the wireless communication device may seek out and hand over to other communication links. By cooperatively coordinating the functionality of installed applications with communication link properties, the wireless communication device can maintain high levels of device and application functionality. | 12-04-2014 |
20150038142 | Cellular Broadcast Enhancements for Inter-System Mobility - Methodologies and apparatus to support interworking operations between a cellular radio area network (RAN) and a wireless local area network (WLAN) utilizing broadcast RAN assistance information. In various embodiments, a RAN (such as a LTE/LTE-advanced RAN) transmits RAN assistance information to a multimode user equipment (UE) for use in network selection and traffic steering operations. Certain parameters, such as RAN load assistance information, may be transmitted in a first format or a second, less granular format that changes relatively infrequently over time as compared to the first format. A system information broadcast procedure utilizing a paging message is employed to transmit information in the second format. The paging message may include a change notification flag that triggers a UE to initiate a system information acquisition procedure to a retrieve system information message(s) including the relevant interworking parameters. | 02-05-2015 |
Patent application number | Description | Published |
20080268645 | METHOD FOR FRONT END OF LINE FABRICATION - In one embodiment, a method for removing native oxides from a substrate surface is provided which includes supporting a substrate containing silicon oxide within a processing chamber, generating a plasma of reactive species from a gas mixture within the processing chamber, cooling the substrate to a first temperature of less than about 65° C. within the processing chamber, and directing the reactive species to the cooled substrate to react with the silicon oxide thereon while forming a film on the substrate. The film usually contains ammonium hexafluorosilicate. The method further provides positioning the substrate in close proximity to a gas distribution plate, and heating the substrate to a second temperature of about 100° C. or greater within the processing chamber to sublimate or remove the film. The gas mixture may contain ammonia, nitrogen trifluoride, and a carrier gas. | 10-30-2008 |
20080295872 | SUBSTRATE CLEANING CHAMBER AND COMPONENTS - A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring. | 12-04-2008 |
20090111280 | METHOD FOR REMOVING OXIDES - A method for removing native oxides from a substrate surface is provided. In one embodiment, the method comprises positioning a substrate having an oxide layer into a processing chamber, generating a plasma of a reactive species from a gas mixture within the processing chamber, exposing the substrate to the reactive species while forming a volatile film on the substrate and maintaining the substrate at a temperature below 65° C., heating the substrate to a temperature of at least about 75° C. to vaporize the volatile film and remove the oxide layer, and depositing a first layer on the substrate after heating the substrate. | 04-30-2009 |
20090201622 | Detachable electrostatic chuck for supporting a substrate in a process chamber - A substrate support has an electrostatic chuck comprising an electrostatic puck with a dielectric covering an electrode capable of being charged to energize a process gas. The chuck has a frontside surface to receive a substrate and a base plate having an annular flange. A spring loaded heat transfer plate contacts the base plate, and has a fluid channel comprising first and second spiral channels. A pedestal is below the heat transfer plate. | 08-13-2009 |
20110223755 | METHOD FOR REMOVING OXIDES - A method for removing native oxides from a substrate surface is provided. In one embodiment, the method comprises positioning a substrate having an oxide layer into a processing chamber, generating a plasma of a reactive species from a gas mixture within the processing chamber, exposing the substrate to the reactive species while forming a volatile film on the substrate and maintaining the substrate at a temperature below 65° C., heating the substrate to a temperature of at least about 75° C. to vaporize the volatile film and remove the oxide layer, and depositing a first layer on the substrate after heating the substrate. | 09-15-2011 |
20110232845 | SUBSTRATE CLEANING CHAMBER AND COMPONENTS - A consumable ceramic liner can be used for connecting a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber. The ceramic liner comprises an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber, and an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber. A conical flare joins the inlet cylinder to the outlet cylinder. | 09-29-2011 |
20120244704 | METHOD FOR REMOVING OXIDES - A method for removing native oxides from a substrate surface is provided. In one embodiment, the method comprises positioning a substrate having an oxide layer into a processing chamber, exposing the substrate to a gas mixture while forming a volatile film on the substrate and maintaining the substrate at a temperature below 65° C., heating the substrate to a temperature of at least about 75° C. to sublimate the volatile film and remove the oxide layer, and depositing a first layer on the substrate after heating the substrate. | 09-27-2012 |
20120258602 | Method for Metal Deposition Using Hydrogen Plasma - Methods for formation and treatment of pure metal layers using CVD and ALD techniques are provided. In one or more embodiments, the method includes forming a metal precursor layer and treating the metal precursor layer to a hydrogen plasma to reduce the metal precursor layer to form a metal layer. In one or more embodiments, treating the metal precursor layer includes exposing the metal precursor layer to a high frequency-generated hydrogen plasma. Methods of preventing a hydrogen plasma from penetrating a metal precursor layer are also provided. | 10-11-2012 |
20130256126 | SUBSTRATE SUPPORT WITH RADIO FREQUENCY (RF) RETURN PATH - Apparatus for processing substrates are provided herein. In some embodiments, an apparatus for processing a substrate includes a substrate support that may include a dielectric member having a surface to support a substrate thereon; one or more first conductive members disposed below the dielectric member and having a dielectric member facing surface adjacent to the dielectric member; and a second conductive member disposed about and contacting the one or more first conductive members such that RF energy provided to the substrate by an RF source returns to the RF source by traveling radially outward from the substrate support along the dielectric member facing surface of the one or more first conductive members and along a first surface of the second conductive member disposed substantially parallel to a peripheral edge surface of the one or more first conductive members after travelling along the dielectric layer facing surface. | 10-03-2013 |
20130330920 | METHOD AND APPARATUS FOR SUBSTRATE PRECLEAN WITH HYDROGEN CONTAINING HIGH FREQUENCY RF PLASMA - A high-frequency, hydrogen-based radio-frequency (RF) plasma is used to reduce a metal oxide and other contaminant disposed in an aperture that is formed in an ultra-low k dielectric material. Because the frequency of the plasma is at least about 40 MHz and the primary gas in the plasma is hydrogen, metal oxide can be advantageously removed without damaging the dielectric material. | 12-12-2013 |
20140076234 | MULTI CHAMBER PROCESSING SYSTEM - A multi-chamber processing system includes a transfer chamber, a first processing chamber outfitted to perform CVD, a second processing chamber, and a robot positioned to transfer substrates between the transfer chamber, the first processing chamber, and the second processing chamber. The second processing chamber may include one or a combination of a first electrode and a second electrode comprising a plasma cavity formed therein. | 03-20-2014 |
20140269826 | IN-SITU TEMPERATURE MEASUREMENT IN A NOISY ENVIRONMENT - Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. One or more lift pins has a light pipe disposed therein to collect radiation emitted or transmitted by the substrate when the lift pin contacts the substrate surface. | 09-18-2014 |
Patent application number | Description | Published |
20120173882 | SYSTEM AND METHOD FOR IN-PLACE ENCRYPTION - Disclosed herein are systems, methods, and non-transitory computer-readable storage media for performing in-place encryption. A system configured to practice the method receives a request from a user to encrypt an unencrypted volume of a computing device and identifies, generates, and/or randomly selects a volume key. Then the system converts the unencrypted volume to an encryptable format divided into portions. The system then encrypts, based on the volume key, the encryptable volume, portion by portion, to enable the user to use the computing device while encrypting. The system can maintain an encryption progress status and display the encryption progress status. The system can monitor disk accesses to the encryptable volume, and, when the disk accesses exceed a first threshold, apply a back-off algorithm to stop encrypting until the disk accesses fall below a second threshold. Thus, the computing device can be used while the encryption occurs in the background. | 07-05-2012 |
20130185266 | LOCATION INDEPENDENT FILES - Managing data units by converting the data units into data segments and access files describing how to retrieve the data segments using hash values for the data segments. In a data store operation, the data unit is divided into data segments and an access file is generated. The access file includes segmenting scheme information for the data segments, hashing scheme information for the hash values, hash identification information describing the hash values, and location information identifying the locations at which the data segments are available. In a data retrieval operation, data from the data unit is retrieved by accessing the data segments and extracting the data therefrom, where the data segments are retrieved based on the access file for the data unit. | 07-18-2013 |
20130185271 | OPTIMIZED B-TREE - The present technology includes an optimized b-tree. To improve concurrent access, a read lock can be applied to traversed nodes of a b-tree in a lock coupling. A read locked node can be promoted to a write locked node upon a determination that the node is likely to be modified, wherein the locked node first restricts access to further functions and then applies a write lock to the node when all existing functions accessing the node end. If one of the other functions attempts to promote the later function can be canceled and removed from the tree. A node can be promoted if the node is likely to be modified when considering multiple factors such as type of function, whether it is a leaf node, the number of keys in the node, or the number of keys in a child node. | 07-18-2013 |
20130185555 | SYSTEM AND METHOD FOR SECURE ERASE IN COPY-ON-WRITE FILE SYSTEMS - Disclosed herein are systems, methods, and non-transitory computer-readable storage media for a delayed secure deletion of files from a copy-on-write file system. A system configured to practice the method receives a change to a file, writes a copy of the file in a first block of a storage device, the copy including the change, determines whether the change meets a predetermined condition, adds an entry into a delayed secure deletion list when the change triggers the predetermined condition, the entry storing an address associated with the first block, and deletes the first block when another change to the file is received, wherein the another change triggers another predetermined event. | 07-18-2013 |
20130218901 | CORRELATION FILTER - In one embodiment, the correlation filter can use one of several data structure to track each migration unit and reject successive accesses within a period of time to each migration unit. In one embodiment, the correlation filter uses a space efficient data structure, such as a hash indexed correlation array to store the address of referenced migration units, and to filter accesses to a single migration unit that are correlated accesses resulting from multiple accesses to the same migration unit during a sequential I/O stream. In one embodiment, the correlation array contains a global timeout, which resets each element to a default value, clearing all store migration unit address values from the correlation array. In one embodiment, each element of the migration array can time-out separately. | 08-22-2013 |
20130219116 | DATA MIGRATION FOR COMPOSITE NON-VOLATILE STORAGE DEVICE - In one embodiment, a method for managing a composite storage device made up of fast non-volatile storage, such as a solid state device, and slower non-volatile storage, such as a traditional magnetic hard drive, can include maintaining a first data structure, which stores instances of recent access to each unit in a set of units in the fast non-volatile storage device, such as the SSD device and also maintaining a second data structure that indicates whether or not units in the slower storage device, such as the HDD, have been accessed at least a predetermined number of times. In one embodiment, the second data structure can be a probabilistic hash table, which has a low required memory overhead but is not guaranteed to always provide a correct answer with respect to whether a unit or block in the slower storage device has been referenced recently. | 08-22-2013 |
20130219117 | DATA MIGRATION FOR COMPOSITE NON-VOLATILE STORAGE DEVICE - Approaches to managing a composite, non-volatile data storage device are described. In one embodiment, a method for managing a composite storage device made up of fast non-volatile storage, such as a solid state device, and slower non-volatile storage, such as a traditional magnetic hard drive, can include maintaining a first data structure, which stores instances of recent access to each unit in a set of units in the fast non-volatile storage device, such as the SSD device and also maintaining a second data structure that indicates whether or not units in the slower storage device, such as the HDD, have been accessed at least a predetermined number of times. In one embodiment, the second data structure can be a queue of Bloom filters. | 08-22-2013 |
20130219139 | METHODS AND SYSTEMS FOR MAINTAINING A STORAGE VOLUME WITH HOLES AND FILLING HOLES - In one embodiment, a method for managing access to a fast non-volatile storage device, such as a solid state device, and a slower non-volatile storage device, such as a magnetic hard drive, can include a method of managing a sparse logical volume in which unmapped blocks of the logical volume are not allocated until use. In one embodiment, a method of sparse hole filling operates in which range locks are dynamically adjusted to perform allocations for sparse hole filling, and then re-adjusted to perform standard operations using a byte range lock. In one embodiment, a high level data structure can be used in the range lock service in the form of an ordered search tree, which could use any search tree algorithm, such as red-black tree, AVL tree, splay tree, etc. | 08-22-2013 |
20140059261 | NOVEL LOCK LEASING METHOD FOR SOLVING DEADLOCK - A method for resolving deadlock in a multi-threaded computing system using a novel lock lease is disclosed. A first thread leases a lock held by the first thread to a second thread different from the first thread. The leasing transfers control of the lock to the second thread while the first thread retains ownership of the lock. To lease the lock: (1) the second thread applies for the lease from the first thread; (2) the first thread grants the lease; (3) the first thread waits for the second thread to complete a task; (4) the second thread terminates the lease; (5) the first thread confirms termination of the lease. The first thread receives control of the lock back from the second thread after the second thread has finished using resources controlled by the lock. The second thread also can sublease the lock to a third thread. | 02-27-2014 |
20140074841 | CONCURRENT ACCESS METHODS FOR TREE DATA STRUCTURES - In one embodiment, non-transitory computer-readable medium stores instructions for implementing a file system, which include operations for acquiring an exclusive lock on a first node in an ordered tree data-structure, and adding an identifier and index of the first node to a path data structure. If the value of the index in the first node is non-zero, then each exclusive lock acquired between the first node and the root of the tree data structure is released. In any case, the operation proceeds to a second node, which is addressed at the index on the first node. In one embodiment, operations further include acquiring an exclusive lock on the second node, and, if the second node is a leaf node, performing updates to the second node, and then releasing each exclusive lock in the data-structure. | 03-13-2014 |
20140181455 | CATEGORY BASED SPACE ALLOCATION FOR MULTIPLE STORAGE DEVICES - The invention provides a technique for carrying out a request to store data. The technique includes the steps of receiving, from an application, the request to store data, and determining a storage functionality associated with the request. The storage functionality represents a particular storage function (e.g., RAID-5) that can be implemented using space available in one or more storage devices that are associated with the storage functionality. Identifications of the one or more storage devices, as well as a size of the data, are transmitted to a space allocator. In turn, the space allocator analyzes various aspects of the one or more storage devices (e.g., amount of free space therein) and allocates space within at least one of the one more storage devices according to the analysis. Information about the space allocations is then used to issue In/Out (I/O) commands that cause the storage functionality to be implemented. | 06-26-2014 |
20140195571 | FAST NEW FILE CREATION CACHE - In one embodiment, a new file creation cache is reserved on a fast storage device that is part of a composite storage device that also includes a slow storage device; the composite storage device is treated as a single logical volume (or a plurality of logical volumes) by a file system which maintains a mapping table that is used to determine whether the write operation is for a new file. If the write operation is for a new file, the file system attempts to write the new file to the fast storage device. If the write operation is not for a new file, the mapping table specifies which device is used for the write operation. | 07-10-2014 |
20140195761 | LOGICAL VOLUME SPACE SHARING - Space sharing between logical volumes is achieved through a technique that enables available storage space to be flexibly consumed and released by the logical volumes. Each logical volume is associated with an address tree that defines how available storage space is consumed by the logical volume. The technique involves receiving an input/output (I/O) operation that specifies a logical address within an address tree associated with the logical volume, parsing the address tree to identify an entry therein, if any, that is associated with the logical address, where the entry stores physical address information that is associated with the logical address. If it is determined that the entry exists, then one or more translated I/O operations are generated based on the physical address information and forwarded to a physical device manager to carry out the translated one or more I/O operations. | 07-10-2014 |
20140310317 | LOCKING AND TRAVERSAL METHODS FOR ORDERED TREE DATA STRUCTURES - In one embodiment, two-phase mutation of an ordered tree data structure is performed, wherein a lock can be acquired on a first node in an ordered tree data structure, and an identifier for the first node can be added to a lock path data structure. A second node can also be locked, and an identifier for the second node can be added to the lock path data structure. Subsequently, a set of operations to perform on the ordered tree responsive to a modification of the second node can be determined for each node affected by the modification, and the operation for each node can be stored in the lock path data structure. Once the operations for the nodes have been determined, the operations listed in the lock path can be performed. | 10-16-2014 |
Patent application number | Description | Published |
20080225952 | SYSTEM AND METHOD FOR PROVIDING IMPROVED RESIDUAL PREDICTION FOR SPATIAL SCALABILITY IN VIDEO CODING - A system and method for providing improved residual prediction for spatial scalability in video coding. In order to prevent visual artifacts in residual prediction in extended spatial scalability (ESS), each enhancement layer macroblock is checked to determine if the macroblock satisfies a number of conditions. If the conditions are met for an enhancement layer macroblock, then it is likely that visual artifacts will be introduced if applying residual prediction on the macroblock. Once such locations are identified, various mechanisms may be used to avoid or remove the visual artifacts. | 09-18-2008 |
20090083275 | Method, Apparatus and Computer Program Product for Performing a Visual Search Using Grid-Based Feature Organization - A method, apparatus and computer program product are provided for visually searching feature sets that are organized in a grid-like manner. As such, a feature set associated with a location-based grid area may be received. The location-based grid area may also be associated with the location of a device. After receiving query image features, a visual search may be performed by comparing the query image features with the feature set. The search results are then returned. By conducting the visual search within a feature set that is selected based upon the location of the device, the efficiency of the search can be enhanced and the search may potentially be performed by the device, such as a mobile device, itself. | 03-26-2009 |
20090094289 | METHOD, APPARATUS AND COMPUTER PROGRAM PRODUCT FOR MULTIPLE BUFFERING FOR SEARCH APPLICATION - A method, apparatus and computer program product are provided for facilitating a fast and efficient search. The apparatus may include a processor configured to receive and buffer a dataset based on the current location of a user, in a first buffer; receive and buffer another dataset based on the current location of the user and the direction of movement of the user, in a second buffer; search the dataset, based on the current location of the user, to identify an object from an image; and update buffers based on a change in location of the user, wherein updating buffers includes associating the second buffer with a current location and receive and buffer a dataset, based on the current location of the user and the direction of movement of the user, in the first buffer. | 04-09-2009 |
20100111441 | METHODS, COMPONENTS, ARRANGEMENTS, AND COMPUTER PROGRAM PRODUCTS FOR HANDLING IMAGES - Artifacts are located in an electronic representation of an image. There is stored a characterisation of a located artifact. There is also output at least one of a characterisation of the artifact or a representation of the artifact. The system may aid the user to correct artifacts, for example by guiding her how to take a new image that contains data that helps in correcting the artifacts. | 05-06-2010 |
Patent application number | Description | Published |
20130347123 | MEDIA DATA PROCESSING METHOD AND APPARATUS - Embodiments of the present invention provide a media data processing method and apparatus. The media data processing method includes: obtaining each media segment in a coding representation; and performing content protection processing on at least a part of media segments in the coding representation. In the embodiments of the present invention, a media segment in a coding representation is used as a unit of content protection, and the content protection may be performed on at least a part of media segments in the coding representation, so that protection manners of media segments in the coding representation are differentiated, so as to improve reliability and flexibility of performing the content protection on an HTTP streaming media service. | 12-26-2013 |
20140089518 | METHOD AND DEVICE FOR TRANSMITTING STREAMING MEDIA - A method and a device for transmitting streaming media are provided. The method includes: generating at least one index segment, where the at least one index segment includes index information of at least one media segment, and the at least one index segment is independent of the at least one media segment; generating storage location information corresponding to the at least one index segment according to a generation rule of the storage location information corresponding to the at least one index segment; and storing the at least one index segment at a storage location corresponding to the storage location information, so that a client can obtain the at least one index segment from the storage location. | 03-27-2014 |
20140304297 | Method, Server, and User Terminal for Providing and Acquiring Media Content - A method, a server, and a user terminal for providing and acquiring media content are provided. The providing method includes: receiving a file segment acquiring request sent by a user terminal, where the file segment acquiring request is generated and sent by the user terminal according to an identifier of the user terminal, and the media segment description file includes a storage address and an embedded identifier of each media file segment that is divided from media content; and providing the user terminal with a media file segment that is embedded with the identifier of the user terminal. In the technical solution of the present invention, a server no longer processes media content in real time and responds to an acquiring request of a user terminal, thereby reducing concurrent load of the server and reducing concurrent bandwidth occupied by media content distribution. | 10-09-2014 |
20150052259 | Method For Generating Media Information, Terminal, Server, and AHS System - The present invention discloses a method for generating media information, a terminal, a server, and an adaptive streaming system. Media code streams of m types of code rate, which are generated by an AHS system, are divided into h groups, and tracing codes are separately embedded into code stream segments of each group. The tracing codes embedded into the code stream segments, and code stream group information are stored in a media presentation description MPD file. In a downloading process of a terminal, tracing of an end user that downloads media data is implemented. | 02-19-2015 |
Patent application number | Description | Published |
20090057264 | HIGH THROUGHPUT LOW TOPOGRAPHY COPPER CMP PROCESS - Embodiments described herein generally provide a method for processing metals disposed on a substrate in a chemical mechanical polishing system. The apparatus advantageously facilitates efficient bulk and residual conductive material removal from a substrate. In one embodiment a method for chemical mechanical polishing (CMP) of a conductive material disposed on a substrate is provided. A substrate comprising a conductive material disposed over an underlying barrier material is positioned on a first platen containing a first polishing pad. The substrate is polished on a first platen to remove a bulk portion of the conductive material. A rate quench process is performed in order to reduce a metal ion concentration in the polishing slurry. The substrate is polished on the first platen to breakthrough the conductive material exposing a portion of the underlying barrier material. | 03-05-2009 |
20090061741 | ECMP POLISHING SEQUENCE TO IMPROVE PLANARITY AND DEFECT PERFORMANCE - A method for processing a substrate having a conductive layer disposed thereon is provided. The substrate is coupled with a planarizing head. The planarizing head is moved to a position above a polishing pad assembly. The planarizing pad is positioned relative to the polishing pad assembly without applying a voltage to the substrate. A first voltage is applied to the substrate for a first time period. A second voltage is applied to the substrate for a second time period in order to remove a portion of the conductive layer, wherein the second voltage is greater than the first voltage. In certain embodiments, applying a first voltage to the substrate further comprises forming a uniform passivation layer on the conductive layer. | 03-05-2009 |
20120003759 | ENDPOINT CONTROL DURING CHEMICAL MECHANICAL POLISHING BY DETECTING INTERFACE BETWEEN DIFFERENT LAYERS THROUGH SELECTIVITY CHANGE - Embodiments described herein relate to methods of detecting an endpoint for a target substrate during chemical mechanical polishing process. In one embodiment, the method includes polishing one or more target substrates at a first film removal rate to provide reference spectra, polishing one or more target substrates at a second film removal rate to provide current spectra of the one or more target substrates, wherein the second film removal rate is different from the first film removal rate, identifying an interface transition between different layers formed on the one or more target substrates using a sequence of endpoint values obtained based on the reference spectra collected during polishing of the one or more reference substrates, and comparing each current spectrum obtained from current spectra of the one or more target substrates to the reference spectra to obtain the sequence of endpoint values. After identifying the interface transition between different layers formed on the one or more target substrates, the one or more target substrates is optionally overpolished to past a target polishing thickness. | 01-05-2012 |
20120026492 | DETECTION OF LAYER CLEARING USING SPECTRAL MONITORING - A method of polishing includes polishing a substrate having a second layer overlying a first layer, measuring a sequence of groups of spectra of light from the substrate while the substrate is being polished, each group of the groups of spectra including spectra from different locations on the substrate, for each group, calculating a value for a dispersion parameter of the spectra in the group to generate a sequence of dispersion values, and detecting exposure of the first layer based on the sequence of dispersion values. | 02-02-2012 |
20120034844 | SPECTROGRAPHIC MONITORING USING INDEX TRACKING AFTER DETECTION OF LAYER CLEARING - A method of controlling polishing includes storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value, polishing a substrate having a second layer overlying a first layer, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values, detecting exposure of the first layer, fitting a function to a portion of the sequence of index values corresponding to spectra measured after detection of exposure of the first layer, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the function. | 02-09-2012 |
20120034845 | TECHNIQUES FOR MATCHING MEASURED SPECTRA TO REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING - A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum. | 02-09-2012 |
20120100781 | MULTIPLE MATCHING REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING - A method of controlling polishing includes storing a plurality libraries, each library including a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching first reference spectrum from a first library from the plurality of libraries and finding a best matching second reference spectrum from a different second library from the plurality of libraries, determining a first value associated with the best matching first reference spectrum and determining a second value from the best matching second reference spectrum, and calculating a third value from the first value and the second value to generate a sequence of calculated third values. At least one of a polishing endpoint or an adjustment for a polishing rate can be determined based on the sequence of calculated third values. | 04-26-2012 |
20120276814 | AUTOMATIC SELECTION OF REFERENCE SPECTRA LIBRARY - A computer-implemented method of generating reference spectra includes polishing a plurality of set-up substrates, the plurality of set-up substrates comprising at least three set-up substrates, measuring a sequence of spectra from each of the plurality of set-up substrates during polishing with an in-situ optical monitoring system to provide a plurality of sequences of spectra, generating a plurality of sequences of potential reference spectra from the plurality of sequences of spectra, determining which sequence of potential reference spectra of the plurality of sequences provides a best match to remaining sequences of the plurality of sequences, and storing the sequence of potential reference spectra determined to provide the best match as reference spectra, and selecting and storing the sequence of potential reference spectra. | 11-01-2012 |
20140004626 | TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING | 01-02-2014 |
20140024291 | Endpoint Detection During Polishing Using Integrated Differential Intensity - A method of controlling a polishing operation includes polishing a substrate, during polishing obtaining a sequence over time of measured spectra from the substrate with an in-situ optical monitoring system, for each measured spectrum from the sequence of measured spectra determining a difference between the measured spectrum and an immediate previous spectrum from the sequence, accumulating the difference for each measured spectrum to generate a total difference, comparing the total difference to a threshold, and detecting a polishing endpoint based on the comparison of the total difference to the threshold. | 01-23-2014 |
20140024292 | Polishing Control Using Weighting With Default Sequence - A method of controlling polishing includes storing a sequence of default values, polishing a substrate, monitoring the substrate during polishing with an in-situ monitoring system, generating a sequence of measured values from measurements from the in-situ monitoring system, combining the sequence of measured values with the sequence of default values to generate a sequence of modified values, fitting a function to the sequence of modified values, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the function. | 01-23-2014 |
20140024293 | Control Of Overpolishing Of Multiple Substrates On the Same Platen In Chemical Mechanical Polishing - A polishing method includes simultaneously polishing a first substrate and a second substrate on the same polishing pad, storing a default overpolishing time, determining first and second polishing endpoint times of the first and substrates with the in-situ monitoring system, determining a difference between the first and second polishing endpoint times, and determining whether the difference exceeds a threshold. If the difference is less than the threshold, then an overpolishing stop time is calculated and polishing of the first substrate and the second substrates is halted simultaneously at the overpolishing stop time. If the difference is greater than the threshold, then first and second overpolishing stop times that equal the first and second endpoint times plus the default overpolishing time are calculated, and polishing of the first and second substrates is halted at the first and second overpolishing stop times, respectively. | 01-23-2014 |
20140027407 | Monitoring Retaining Ring Thickness And Pressure Control - A chemical mechanical polishing apparatus includes a carrier head including a retaining ring having a plastic portion with a bottom surface to contact a polishing pad, an in-situ monitoring system including a sensor that generates a signal that depends on a thickness of the plastic portion, and a controller configured to receive the signal from the in-situ monitoring system and to adjust at least one polishing parameter in response to the signal to compensate for non-uniformity caused by changes in the thickness of the plastic portion of the retaining ring. | 01-30-2014 |
20140030956 | CONTROL OF POLISHING OF MULTIPLE SUBSTRATES ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING - A polishing method includes positioning two substrates in contact with the same polishing pad. Prior to commencement of polishing and while the two substrates are in contact with the polishing pad, two starting values are generated from an in-situ monitoring system. Either a starting polishing time or a pressure applied to one of the substrates can be adjusted so that the two substrates have closer endpoint conditions. During polishing the two substrates are monitored with the in-situ monitoring system to generate a two sequences of values, and a polishing endpoint can be detected or an adjustment for a polishing parameter can be based on the two sequences of values. | 01-30-2014 |
20140141694 | In-Sequence Spectrographic Sensor - A method of controlling a polishing system includes polishing a substrate at a first polishing station, transporting the substrate to an in-line optical metrology system positioned between the first polishing station and a second polishing station, at the in-line optical metrology system measuring a spectrum reflected from the substrate, and generating a characterizing value from the spectrum, determining that the substrate needs rework based on the characterizing value, returning the substrate to the first polishing station and performing rework of the substrate at the first polishing station; and transporting the substrate to the second polishing station and polishing the substrate at the second polishing station. | 05-22-2014 |
20140222188 | ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING - A difference between a first expected required polish time for a first substrate and a second expected required polish time for a second substrate is determined using a first pre-polish thickness and a second pre-polish thickness measured at an in-line metrology station. A duration of an initial period is determined based on the difference between the first expected required polish time and the second expected required polish time. For the initial period at a beginning of a polishing operation, no pressure is applied to whichever of the first substrate and the second substrate has a lesser expected required polish time while simultaneously pressure is applied to whichever of the first substrate and the second substrate has a greater expected required polish time. After the initial period, pressure is applied to both the first substrate and the second substrate. | 08-07-2014 |