Patent application number | Description | Published |
20080272416 | Image sensor and method of manufacturing the same - Provided is an image sensor and method of manufacturing the same. The image sensor can include a semiconductor substrate, a metal interconnection layer, an inorganic layer, lens seed patterns, and microlenses. The semiconductor substrate can include unit pixels. The metal interconnection layer can be disposed on the semiconductor substrate to provide signal and poser connections to the unit pixels. The inorganic layer can be disposed on the metal interconnection layer. The lens seed patterns are selectively disposed on the inorganic layer and are formed of an organic material. The microlenses are formed on the lens seed patterns. | 11-06-2008 |
20090170235 | Method for Manufacturing Image Sensor - A method for manufacturing an image sensor includes forming a photolithography key in a scribe lane of a first substrate over which circuitry is formed in an active region. A photodiode is formed on an active region of a second substrate. The second substrate is bonded to the first substrate such that the photodiode is electrically connected to the circuitry. The photolithography key in the scribe lane of the first substrate is opened. A pattern is formed on the active region of the bonded second substrate using the opened photolithography key on/over the first substrate. | 07-02-2009 |
20100059840 | CMOS IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME - A Complementary Metal Oxide Semiconductor (CMOS) image sensor and a method for manufacturing the same are disclosed. The CMOS image sensor includes a photodiode formed in a semiconductor substrate, an inter dielectric layer formed over the semiconductor substrate in which the photodiode is formed, at least one metal line layer formed in the inter dielectric layer, an anti-reflection layer formed over the metal line layer in the inter dielectric layer, a color filter layer formed over the inter dielectric layer, and a micro-lens formed over the color filter layer. | 03-11-2010 |
20100117177 | Image Sensor and Method of Manufacturing the Same - An image sensor and a method of manufacturing the same are disclosed. A passivation layer on an interlayer dielectric layer has different thicknesses for neighboring pixels. Consequently, a phase of light incident on a pixel is out of phase with light incident on an adjacent pixel before it reaches a photodiode. As a result, diffraction of the incident light results in destructive interference between the pixels. Thus, cross talk between adjacent pixels can be prevented. | 05-13-2010 |
20130264671 | Image Sensor and Method for Fabricating the Same - The present invention discloses an image sensor including photodiodes formed in a semiconductor substrate, a color filter array formed over the photodiodes, and microlenses formed on the color filter array. A first microlens, which may be any one of two adjacent microlenses, includes an upper portion and a lower portion. The lower portion of the first microlens is formed of a material different than a material of the upper portion of the first microlens. | 10-10-2013 |
Patent application number | Description | Published |
20100001381 | SEMICONDUCTOR DEVICE - Embodiments relate to a semiconductor device and a method of manufacturing a semiconductor. In embodiments, the method may include a first exposure step of performing an exposure process for forming a first photoresist on a semiconductor substrate at one side of the outside of a trench pattern which will be formed, a first etching step of performing a predetermined dry etching method with respect to the first photoresist, a second exposure step of performing an exposure process for forming a second photoresist at the other side of the outside of the trench pattern, which is a side opposite to the first photoresist, and a second etching step of performing the predetermined dry etching method with respect to the second photoresist. | 01-07-2010 |
20100032550 | IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME - Disclosed are embodiments of an image sensor and a method of manufacturing the same. The image sensor includes an insulating layer on a substrate, and a graded-index microlens in the insulating layer corresponding to each pixel of the image sensor. | 02-11-2010 |
20100032782 | IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME - Disclosed are an image sensor and a method of manufacturing the same. The image sensor includes a substrate including a pixel area and a logic circuit area; an interlayer dielectric layer on the substrate and having a trench in the pixel area; and an insulating layer microlens formed in the trench of the interlayer dielectric layer. According to the method, a substrate including a pixel area and a logic circuit area is prepared; an interlayer dielectric layer is formed on the substrate; a first microlens pattern is formed on the interlayer dielectric layer on the pixel area; and a second microlens pattern is formed by etching the interlayer dielectric layer on the pixel area using the first microlens pattern as an etch mask. During the etching, a second photoresist pattern, exposing the first microlens pattern, can be used to protect the interlayer dielectric layer on the logic circuit area. | 02-11-2010 |
Patent application number | Description | Published |
20090140360 | IMAGE SENSOR AND FABRICATING METHOD THEREOF - An image sensor and fabricating method thereof may include a semiconductor substrate, a plurality of photodiodes formed on and/or over the semiconductor substrate, a first insulating layer formed on and/or over the semiconductor substrate including the plurality of photodiodes, at least one metal line formed on and/or over the first insulating layer, a second insulating layer having a plurality of wells formed on and/or over the plurality of photodiodes, a plurality of color filters formed by embedding color filter layers in a plurality of the wells, and a plurality of microlenses formed on and/or over the color filters. | 06-04-2009 |
20090146237 | IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF - An image sensor and a method for manufacturing thereof include a semiconductor substrate having a plurality of unit pixels formed therein, a dielectric film formed over the semiconductor substrate, a seed lens array including a plurality of seed lenses formed spaced apart by a gap of a predetermined width over the dielectric film, a color micro lens array formed over the seed lens array, the color micro lens array including a color micro lens formed over and contacting a respective one of the seed lenses. In accordance with embodiments, each color micro lens has a thickness that is one-half the predetermined width to thereby fill the gap between the seed lenses. | 06-11-2009 |
20090160002 | IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME - An image sensor may include an image sensor may include a photodiode formed over a semiconductor substrate. An interlayer dielectric, which may include a plurality of metal wires in a transistor region, may be formed over the semiconductor substrate, including a waveguide dielectric for guiding incident light in a photodiode region. A refractive layer may be formed at a bottom of the waveguide dielectric in the interlayer dielectric. A color filter may be formed over an upper surface of the interlayer dielectric. An overcoat may be formed over the color filter. A micro lens may be formed over the interlayer dielectric. Accordingly, high reflectivity at a bottom of the wave guide can be effectively restrained while guaranteeing reflectivity of the wave guide with respect light which is not vertically incident. | 06-25-2009 |
20090170233 | METHOD FOR FABRICATING CMOS IMAGE SENSOR - A method for fabricating a CMOS image sensor for preventing corrosion of a metal pad. The method for fabricating the CMOS image sensor can include sequentially forming a dielectric film, a metal pad having an opening, and a first passivation film on a semiconductor substrate having a scribe lane and a pixel region defined therein, forming a color filter layer on the first passivation film at the pixel region, forming an overcoat layer on the entire surface of the semiconductor substrate, including the metal pad, to reduce the step difference between the scribe lane and the pixel region, forming a micro lens on the overcoat layer at the pixel region, forming a photo resist to expose the overcoat layer at the scribe lane, performing an etching process on the entire surface of the semiconductor substrate to etch the overcoat layer at the scribe lane, and removing the photo resist by a cleaning process. | 07-02-2009 |
20100015748 | Image Sensor and Method for Manufacturing the Same - A method for manufacturing an image sensor includes forming first to third photodiodes and first to third color filters corresponding thereto; forming a photoresist film including photosensitive materials on the upper surfaces of the first to third color filters; forming a first exposed part by exposing the photoresist film with a first exposure energy using a first pattern mask with a first light transmitting part having a first width at boundaries between the individual color filters; forming a second exposed part overlapping a portion of the first exposed part by exposing the photoresist film with a second exposure energy smaller than the first exposure energy using a second pattern mask with a second light transmitting part having a second width wider than the first width; and forming microlenses by developing the photoresist film. | 01-21-2010 |