Patent application number | Description | Published |
20130004739 | PATTERN FORMING METHOD, METHOD FOR PRODUCING ELECTRONIC DEVICE USING THE SAME, AND ELECTRONIC DEVICE - Provided is a pattern forming method including, in the following order: (1) forming a resist film on a substrate; (2) exposing the resist film, and thereby forming a first line-and-space latent image; (3) subjecting the resist film in which the first line-and-space latent image has been formed, to a first heating treatment; (4) exposing the resist film that has been subjected to the first heating treatment, and thereby forming a second line-and-space latent image, so that the line direction in the second line-and-space latent image intersects the line direction in the first line-and-space latent image; (5) subjecting the resist film in which the second line-and-space latent image has been formed, to a second heating treatment; and (6) developing the resist film that has been subjected to the second heating treatment, using a developer containing an organic solvent. | 01-03-2013 |
20140106119 | PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE BY USING THE SAME, AND ELECTRONIC DEVICE - There is provided a pattern forming method for forming hole patterns in a substrate, comprising pattern forming steps each including, in order, the steps (1) to (6): (1) forming a resist film on the substrate by using a chemical amplification resist composition containing (A) a resin capable of increasing the polarity by the action of an acid to decrease the solubility for an organic solvent-containing developer and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; (2) exposing the resist film to form a first line-and-space latent image; (3) exposing the resist film to form a second line-and-space latent image; (4) developing the resist film by using an organic solvent-containing developer to form a hole pattern group in the resist film; (5) applying an etching treatment to the substrate with the resist film; and (6) removing the resist film. | 04-17-2014 |
20150118627 | PATTERN FORMING METHOD, COMPOSITION USED TEHREIN, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE - A pattern forming method includes: (i) a step of forming a first film by using an actinic ray-sensitive or radiation-sensitive resin composition (I), (ii) a step of exposing the first film, (iii) a step of developing the exposed first film by using an organic solvent-containing developer to form a negative pattern, (iv) a step of forming a second film on the negative pattern by using a specific composition (II), (v) a step of increasing polarity of the specific compound present in the second film, and (vi) a step of removing a specific area of the second film by using the organic solvent-containing remover. | 04-30-2015 |
20150140482 | PATTERN FORMING METHOD, AND, ELECTRONIC DEVICE PRODUCING METHOD AND ELECTRONIC DEVICE, EACH USING THE SAME - A pattern forming method includes: (a) forming a first film on a substrate using an actinic ray-sensitive or radiation-sensitive resin composition (I) containing a resin of which solubility in a developer containing an organic solvent decreases due to polarity increased by an action of an acid; (b) exposing the first film; (c) developing the exposed first film using a developer containing an organic solvent to form a first negative pattern; (e) forming a second film on the substrate using an actinic ray-sensitive or radiation-sensitive resin composition (II) containing a resin of which solubility in a developer containing an organic solvent decreases due to polarity increased by an action of an acid; (f) exposing the second film; and (g) developing the exposed second film using a developer containing an organic solvent to form a second negative pattern in this order. | 05-21-2015 |
20150160555 | PATTERN FORMING METHOD, AND, METHOD FOR PRODUCING ELECTRONIC DEVICE AND ELECTRONIC DEVICE, EACH USING THE SAME - The pattern forming method of the invention includes (i) a step of forming a first film on a substrate using an actinic ray-sensitive or radiation-sensitive resin composition including a resin (A) capable of increasing the polarity by the action of an acid to decrease the solubility in a developer including an organic solvent; (ii) a step of exposing the first film; (iii) a step of developing the exposed first film using a developer including an organic solvent to form a negative tone pattern; and (iv) a step of forming a second film on the second substrate so as to cover the periphery of the negative tone pattern. | 06-11-2015 |
Patent application number | Description | Published |
20130122347 | POWER STORAGE DEVICE AND MANUFACTURING METHOD THEREFOR - A power storage device having: a laminated body formed by providing a separator layer between a first electrode which is one of a cathode and an anode and a second electrode which is the other electrode; an electrolyte; and a package which houses the laminated body and the electrolyte. At least two first electrode composite sheets are included which are each obtained by integrating a first collector electrode, a first electrode active material layer provided on one principal surface of the first collector electrode, and a separator layer covering at least part of the one principal surface, and the other principal surface of the first collector electrode of one first electrode composite sheet out of the at least two first electrode composite sheets is opposed to, and bonded to, the other principal surface of the first collector electrode of the other first electrode composite sheet. | 05-16-2013 |
20140106191 | ELECTRICAL STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME - An electrical storage unit that includes a positive electrode, which includes a positive-electrode collector electrode and a positive-electrode active material layer on the positive-electrode collector electrode, a negative electrode, which includes a negative-electrode collector electrode and a negative-electrode active material layer on the negative-electrode collector electrode, the negative-electrode active material layer facing the positive-electrode active material layer, and a first insulating layer bonded to the positive electrode and the negative electrode and separating the positive electrode from the negative electrode. The first insulating layer is bonded to part of a surface of the positive electrode and part of a surface of the negative electrode and includes a communication path for connecting the outside of the electrical storage unit to the inside of the electrical storage unit. | 04-17-2014 |
20140134487 | ELECTRIC STORAGE DEVICE AND METHOD FOR PRODUCING THE SAME - An electric storage device includes an electrolyte and an electric storage unit including a positive electrode including a positive-electrode collector electrode and a positive-electrode active-material layer disposed on the positive-electrode collector electrode; a negative electrode including a negative-electrode collector electrode and a negative-electrode active-material layer disposed on the negative-electrode collector electrode and facing the positive-electrode active-material layer; a first insulating layer bonded to the positive electrode and the negative electrode to isolate the positive electrode and the negative electrode from each other; and a region that is sealed with the first insulating layer in plan view and that holds the electrolyte between the positive electrode and the negative electrode, wherein an air permeability P of the first insulating layer satisfies the formula 1250 s/100 cc | 05-15-2014 |