Patent application number | Description | Published |
20090170312 | METHOD FOR PRODUCING A MICROMECHANICAL AND/OR NANOMECHANICAL DEVICE WITH ANTI-BONDING STOPS - A method for producing a micromechanical and/or nanomechanical device comprising the steps of: | 07-02-2009 |
20090261431 | PRE-RELEASED STRUCTURE DEVICE - A pre-released structure device comprising:
| 10-22-2009 |
20100001361 | SUSPENDED GETTER MATERIAL-BASED STRUCTURE - Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed. | 01-07-2010 |
20100003789 | METHOD OF ENCAPSULATING A MICROELECTRONIC DEVICE BY A GETTER MATERIAL - A method of encapsulating a microelectronic device arranged on a substrate, comprising at least the following steps: a) formation of a portion of sacrificial material covering at least one part of the microelectronic device, the volume of which occupies a space intended to form at least one part of a cavity in which the device is intended to be encapsulated; b) deposition of a layer based on at least one getter material, covering at least one part of the portion of sacrificial material; c) formation of at least one orifice through at least the layer of getter material, forming an access to the portion of sacrificial material; d) elimination of the portion of sacrificial material via the orifice, forming the cavity in which the microelectronic device is encapsulated; and e) sealing of the cavity. | 01-07-2010 |
20100014036 | ALIGNMENT LAYER OF LIQUID CRYSTALS DEPOSITED AND RUBBED BEFORE MAKING MICROSTRUCTURES - A process for formation of cavities of a micro-optic device, comprising: a) formation, on the surface plane of a support, of an alignment layer of liquid crystals; and b) formation of walls of said cavities, the base of said cavities being formed by said alignment layer. | 01-21-2010 |
20100244246 | ELECTRONIC COMPONENT WITH MECHANICALLY DECOUPLED BALL CONNECTIONS - An electronic component including at least one chip and/or one support, the chip configured to be transferred onto the support and linked, at a level of at least one connection site of the chip, formed by at least one portion of a layer of the chip, to at least one connection site of the support formed by at least one portion of a layer of the support, by at least one ball, the chip and/or the support including a mechanism for mechanical decoupling of the connection site of the chip and/or of the support with respect to the chip and/or to the support, which mechanism includes at least one cavity made in the layer of the chip and/or of the support, under the connection site of the chip and/or of the support, and at least one trench, made in the layer of the chip and/or of the support, communicating with the cavity. | 09-30-2010 |
20110006400 | HANDLE WAFER HAVING VIEWING WINDOWS - The invention relates to a method for making a handle wafer ( | 01-13-2011 |
20110030989 | MICROCAVITY STRUCTURE AND ENCAPSULATION STRUCTURE FOR A MICROELECTRONIC DEVICE - Microcavity structure comprising:
| 02-10-2011 |
20120325091 | GETTER STRUCTURE INCLUDING A GAZ-PERMEABLE MATERIAL - A getter structure including at least one portion of getter material at least one face of which is positioned against at least one portion of gas-permeable material such that said portion of getter material is able to achieve a gaseous absorption and/or adsorption at least by said face through at least said portion of gas-permeable material, and in which the portion of gas-permeable material includes one or more channels made at the level of a face of said portion of gas-permeable material which is in contact with the portion of getter material, where the portion of getter material is able to achieve a gaseous absorption, or a gaseous adsorption, or both a gaseous absorption and a gaseous adsorption, via the channel or channels. | 12-27-2012 |