Patent application number | Description | Published |
20090309936 | METHOD OF MANUFACTURING A PIEZOELECTRIC ACTUATOR AND LIQUID EJECTION HEAD - The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided. | 12-17-2009 |
20100201755 | LIQUID EJECTION HEAD, LIQUID EJECTION APPARATUS AND IMAGE FORMING APPARATUS - A liquid ejection head includes: a flow channel unit including a plurality of pressure chambers arranged along a plane surface; and a piezoelectric actuator for changing volume of the plurality of pressure chambers so as to pressurize liquid in the plurality of pressure chambers, the piezoelectric actuator comprising: a diaphragm forming one wall surface of the plurality of pressure chambers; a plurality of piezoelectric bodies arranged on first regions of the diaphragm that are within a surface of the diaphragm opposite from the plurality of pressure chambers, the first regions overlapping with the plurality of pressure chambers respectively when viewed in a direction perpendicular to the plane surface; a plurality of individual electrodes arranged on second regions of one surface of the plurality of piezoelectric bodies respectively, the second regions overlapping with marginal parts of the plurality of pressure chambers that are non-central parts of the plurality of pressure chambers when viewed in the direction perpendicular to the plane surface; a common electrode arranged on another surface of the plurality of piezoelectric bodies; and a reinforcing member arranged on third regions of the diaphragm that are within the surface of the diaphragm opposite from the plurality of pressure chambers, the third regions respectively overlapping with pressure chamber partition portions between the plurality of pressure chambers when viewed in the direction perpendicular to the plane surface. | 08-12-2010 |
20100231650 | Liquid Ejection Head, Method of Manufacturing Liquid Ejection Head and Image Forming Apparatus - A liquid ejection head includes: a flow channel unit having a plurality of pressure chambers arranged in a plane; and piezoelectric actuators which change volume of the plurality of pressure chambers so as to apply pressure to liquid inside the plurality of the pressure chambers respectively, wherein the piezoelectric actuators comprise: a diaphragm which constitutes one wall of the plurality of pressure chambers; a common electrode formed on a surface of the diaphragm; a piezoelectric layer formed on a surface of the common electrode; a plurality of ring-shaped individual electrodes formed on a surface of the piezoelectric layer and formed in regions which overlap respectively with marginal portions which are non-central portions of the plurality of pressure chambers, as viewed from a direction perpendicular to the plane; and central electrodes connected electrically to the common electrode, and formed so as not to make contact with the plurality of ring-shaped individual electrodes in inner regions of the plurality of ring-shaped individual electrodes, as viewed from the direction perpendicular to the plane. | 09-16-2010 |
20110063348 | Liquid Ejection Head, Methods of Manufacturing and Driving the Same, and Image Recording Apparatus - A liquid ejection head includes a piezoelectric actuator that changes volume of a pressure chamber to cause liquid in the pressure chamber to eject from a nozzle connected with the pressure chamber, wherein the piezoelectric actuator is formed into a projecting shape protruding toward the pressure chamber, and displaced in a direction opposite to the pressure chamber when applied with a driving voltage, to increase the volume of the pressure chamber. | 03-17-2011 |
20120249673 | INKJET HEAD, INKJET HEAD CLEANING SYSTEM AND MAINTENANCE METHOD OF INKJET HEAD - An inkjet head includes: a plurality of nozzle plates which are arranged in a width direction of a recording medium and each of which has a plurality of nozzles for ejecting ink and has a hydrophobic property; and cleaning liquid holding members which are provided respectively on both sides of the plurality of nozzle plates in terms of a direction perpendicular to a direction of arrangement of the plurality of nozzle plates so as to extend substantially in parallel with the direction of arrangement of the plurality of nozzle plates, and which have a lower hydrophobic property than the plurality of nozzle plates, wherein the cleaning liquid holding members include a cleaning liquid holding mechanism for holding cleaning liquid. | 10-04-2012 |
Patent application number | Description | Published |
20090026887 | PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, AND LIQUID DISCHARGE DEVICE - In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller. | 01-29-2009 |
20090244203 | METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, AND LIQUID EJECTION HEAD - The method of manufacturing a piezoelectric actuator, includes the steps of: forming a lower electrode film on an insulating substrate; forming a piezoelectric film on the lower electrode film; forming a slit on the piezoelectric film to expose a portion of the lower electrode film on an upper surface side of the piezoelectric film; forming an insulating layer which covers a portion of the piezoelectric film; forming an upper electrode film so as to span the insulating layer and the piezoelectric film; forming, on the piezoelectric film, a lower wire in connection with the portion of the lower electrode film exposed through the slit; depositing a first metal film on the lower wire and thereby making a film thickness of the lower wire greater than a film thickness of the lower electrode film; and depositing a second metal film on a portion of the upper electrode film on the insulating layer and thereby making a film thickness of the portion of the upper electrode film on the insulating layer greater than a film thickness of a portion of the upper electrode film that has been deposited directly on the piezoelectric film. | 10-01-2009 |
20090313826 | METHOD OF MANUFACTURING A PIEZOELECTRIC ACTUATOR AND LIQUID EJECTION HEAD - The method of manufacturing a piezoelectric actuator includes the steps of: carrying out a first heat treatment of a diaphragm of stainless steel containing iron, chromium and aluminum, in a gas containing oxygen, so as to form an aluminum oxide film on a first surface of the diaphragm and form a chromium oxide film between the aluminum oxide film and the first surface of the diaphragm; forming a lower electrode on the aluminum oxide film; forming a piezoelectric body on a surface of the lower electrode reverse to a surface of the lower electrode on which the chromium oxide film and the aluminum oxide film are formed; forming an upper electrode on a surface of the piezoelectric body reverse to a surface of the piezoelectric body on which the lower electrode is formed; and calcining the piezoelectric body by carrying out a second heat treatment of the diaphragm with which the piezoelectric body is provided. | 12-24-2009 |