Patent application number | Description | Published |
20080230839 | Method of producing a semiconductor structure - The invention is related to a method of producing a semiconductor structure comprising the steps of: fabricating a gate stack structure and oxidizing at least a portion of the gate stack structure's sidewalls, wherein the step of oxidizing is carried out at a temperature below 500° C. using a process gas which comprises oxygen radicals. | 09-25-2008 |
20080315326 | Method for forming an integrated circuit having an active semiconductor device and integrated circuit - An integrated circuit having an active semiconductor device is formed comprising a trench defined by conductor lines previously formed. | 12-25-2008 |
20090321805 | INSULATOR MATERIAL OVER BURIED CONDUCTIVE LINE - One embodiment relates to an integrated circuit that includes a conductive line that is arranged in a groove in a semiconductor body. An insulating material is disposed over the conductive line. This insulating material includes a first insulating layer comprising a horizontal portion, and a second insulating layer that is disposed over the first insulating layer. Other methods, devices, and systems are also disclosed. | 12-31-2009 |
20120302037 | Method of Protecting STI Structures From Erosion During Processing Operations - Generally, the present disclosure is directed to a method of at least reducing unwanted erosion of isolation structures of a semiconductor device during fabrication. One illustrative method disclosed includes forming an isolation structure in a semiconducting substrate and forming a conductive protection ring above plurality isolation structure. | 11-29-2012 |
20120329239 | METHODS OF FABRICATING A SEMICONDUCTOR IC HAVING A HARDENED SHALLOW TRENCH ISOLATION (STI) - Methods and provided for fabricating a semiconductor IC having a hardened shallow trench isolation (STI). In accordance with one embodiment the method includes providing a semiconductor substrate and forming an etch mask having an opening exposing a portion the semiconductor substrate. The exposed portion is etched to form a trench extending into the semiconductor substrate and an oxide is deposited to at least partially fill the trench. At least the surface portion of the oxide is plasma nitrided to form a nitrided oxide layer and then the etch mask is removed. | 12-27-2012 |
20140051227 | METHODS OF FORMING ISOLATION STRUCTURES FOR SEMICONDUCTOR DEVICES BY PERFORMING A DRY CHEMICAL REMOVAL PROCESS - A method includes forming a patterned mask comprised of a polish stop layer positioned above a protection layer above a substrate, performing at least one etching process through the patterned mask layer on the substrate to define a trench in the substrate, and forming a layer of silicon dioxide above the patterned mask layer such that the layer of silicon dioxide overfills the trench. The method also includes removing portions of the layer of silicon dioxide positioned outside of the trench to define an isolation structure, performing a dry, selective chemical oxide etching process that removes silicon dioxide selectively relative to the material of the polish stop layer to reduce an overall height of the isolation structure, and performing a selective wet etching process to remove the polish stop layer selectively relative to the isolation region. | 02-20-2014 |
Patent application number | Description | Published |
20080251815 | Method for manufacturing a transistor - The present invention relates to a transistor comprising a gate channel area and a gate stack having mechanical stress arranged on the gate channel area. | 10-16-2008 |
20130214381 | METHODS OF FORMING ISOLATION STRUCTURES FOR SEMICONDUCTOR DEVICES - Disclosed herein are various methods of forming isolation structures, such as trench isolation structures, for semiconductor devices. In one example, the method includes forming a trench in a semiconducting substrate, forming a lower isolation structure in the trench, wherein the lower isolation structure has an upper surface that is below an upper surface of the substrate, and forming an upper isolation structure above the lower isolation structure, wherein a portion of the upper isolation structure is positioned within the trench. | 08-22-2013 |
20130214392 | METHODS OF FORMING STEPPED ISOLATION STRUCTURES FOR SEMICONDUCTOR DEVICES USING A SPACER TECHNIQUE - Disclosed herein are various methods of forming stepped isolation structures for semiconductor devices using a spacer technique. In one example, the method includes forming a first trench in a semiconducting substrate, wherein the first trench has a bottom surface, a width and a depth, the depth of the first trench being less than a target final depth for a stepped trench isolation structure, performing an etching process through the first trench on an exposed portion of the bottom surface of the first trench to form a second trench in the substrate, wherein the second trench has a width and a depth, and wherein the width of the second trench is less than the width of the first trench, and forming the stepped isolation structure in the first and second trenches. | 08-22-2013 |
20130217205 | METHODS FOR FABRICATING SEMICONDUCTOR DEVICES WITH ISOLATION REGIONS HAVING UNIFORM STEPHEIGHTS - Methods for fabricating semiconductor devices are provided. In an embodiment, a method for fabricating a semiconductor device includes forming a planarization stop layer overlying a semiconductor substrate. A trench is etched through the planarization stop layer and into the semiconductor substrate and is filled with an isolation material. The isolation material is planarized to establish a top surface of the isolation material coplanar with the planarization stop layer. In the method, a dry deglaze process is performed to remove a portion of the planarization stop layer and a portion of the isolation material to lower the top surface of the isolation material to a desired stepheight above the semiconductor substrate. | 08-22-2013 |
20130221478 | METHODS OF FORMING ISOLATION STRUCTURES FOR SEMICONDUCTOR DEVICES BY EMPLOYING A SPIN-ON GLASS MATERIAL OR A FLOWABLE OXIDE MATERIAL - Disclosed herein are various methods of forming isolation structures, such as trench isolation structures, for semiconductor devices using a spin-on glass material or a flowable oxide material. In one example, the method includes forming a trench in a semiconducting substrate, forming a lower isolation structure comprised of an insulating material in at least the trench, wherein the lower isolation structure has an upper surface that is below an upper surface of the substrate, and forming an upper isolation structure above the lower isolation structure, wherein a portion of the upper isolation structure is positioned within the trench. | 08-29-2013 |
20130273709 | METHODS OF RECESSING AN ACTIVE REGION AND STI STRUCTURES IN A COMMON ETCH PROCESS - Generally, the present disclosure is directed to various methods of recessing an active region and an adjacent isolation structure in a common etch process. One illustrative method disclosed includes forming an isolation structure in a semiconducting substrate, wherein the isolation structure defines an active area in the substrate, forming a patterned masking layer above the substrate, wherein the patterned masking layer exposes the active area and at least a portion of the isolation structure for further processing, and performing a non-selective dry etching process on the exposed active area and the exposed portion of the isolation structure to define a recess in the substrate and to remove at least some of the exposed portions of the isolation structure. | 10-17-2013 |