Patent application number | Description | Published |
20080236875 | WIRING STRUCTURE AND METHOD OF FORMING THE SAME - A CNT bundle is formed by growing a plurality of CNTs from opposing surfaces of contact blocks toward mutual opposing surfaces, and by contacting the CNTs so that they intersect to electrically connect with each other. Subsequently, a gap of the electrically connected CNT bundle is filled with a metal material, to thereby form a wiring being a composite state of the CNT bundle and the metal material. | 10-02-2008 |
20090016951 | DEVICE STRUCTURE OF CARBON FIBERS AND MANUFACTURING METHOD THEREOF - An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end. | 01-15-2009 |
20090035209 | METHOD OF MANUFACTURING CARBON NANOTUBE - According to a method of manufacturing carbon nanotubes, minute concavities and convexities are formed at a surface of a substrate, a catalyst metal layer having a predetermined film thickness is formed on the surface having the concavities and convexities, the substrate is subject to a heat treatment at a predetermined temperature to change the catalyst metal layer into a plurality of isolated fine particles. The catalyst metal fine particles have a uniform particle diameter and uniform distribution. Then, the substrate supporting the plurality of fine particles is placed in a carbon-containing gas atmosphere to grow carbon nanotubes on the catalyst metal fine particles by a CVD method using the carbon-containing gas. The carbon nanotubes can be formed to have a desired diameter and a desired shell number with superior reproducibility. | 02-05-2009 |
20090065765 | CARBON NANOTUBE GROWN ON CATALYST AND MANUFACTURE METHOD - A method for manufacturing carbon nanotubes includes the steps of: (a) depositing catalytic fine particles containing Al—Fe, Zr—Co or Hf—Co on a base body; and (b) growing carbon nanotubes on the catalytic fine particles deposited on the base body. | 03-12-2009 |
20090291216 | Carbon nanotube device and manufacturing method of the same - After forming an opening, a resist film is formed on the entire surface and a resist pattern is formed by patterning the resist film. The shape of the resist pattern is such that it covers one side of the bottom of the opening. As a result, a Si substrate is exposed only in one part of the opening. Then, using the resist pattern as a mask, a catalytic layer is formed on the bottom of the opening. Then, the resist pattern is removed. Carbon nanotubes are grown on the catalytic layer. At this time, since the catalytic layer is formed on only one side of the bottom of the opening, the Van der Waals force biased towards that side works horizontally on the growing carbon nanotubes. Therefore, the carbon nanotubes are attracted towards the nearest side of the SiO | 11-26-2009 |
20100244262 | DEPOSITION METHOD AND A DEPOSITION APPARATUS OF FINE PARTICLES, A FORMING METHOD AND A FORMING APPARATUS OF CARBON NANOTUBES, AND A SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD OF THE SAME - A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject. | 09-30-2010 |
20100252486 | Particulate size classification apparatus and method - Particulates called nanoparticles (principally having a diameter of 10 nm or less) are reliably and easily according to size with high throughput. An impactor includes a particulate size classifying chamber provided with an exhaust port for particulates, a nozzle ejecting to the inside of the particulate size classifying chamber a carrier gas containing particulates to be classified, and a trapping plate as particulate trapping unit provided in the particulate size classifying chamber and selectively trapping particulates ejected from the nozzle. | 10-07-2010 |
20100316558 | DEVICE STRUCTURE OF CARBON FIBERS AND MANUFACTURING METHOD THEREOF - An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end. | 12-16-2010 |
20100317187 | DEVICE STRUCTURE OF CARBON FIBERS AND MANUFACTURING METHOD THEREOF - An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end. | 12-16-2010 |
20110117275 | FILM DEPOSITION DEVICE AND METHOD THEREOF - A film deposition device includes a nozzle configured to inject a plurality of particles to a target; and a suction unit provided around the nozzle and configured to suck particles that are rebounded from the target among the plurality of particles injected from the nozzle. | 05-19-2011 |
20120042922 | GRAPHITE STRUCTURE, ELECTRONIC COMPONENT AND METHOD OF MANUFACTURING ELECTRONIC COMPONENT - The graphite structure includes a plurality of domains of graphite where a layer body of graphene sheets is curved in domelike, wherein the plurality of domains are arranged in plane, and the domains adjacent each other are in contact with each other. | 02-23-2012 |
20120199815 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device including a graphene layer and a method of manufacturing the same are disclosed. A method in which graphene is grown on a catalyst metal by a chemical vapor deposition or the like is known. However, the graphene cannot be used as a channel, since the graphene is in contact with the catalyst metal, which is conductive. There is disclosed a method in which a catalyst film ( | 08-09-2012 |
20130109170 | DEPOSITION METHOD AND A DEPOSITION APPARATUS OF FINE PARTICLES, A FORMING METHOD AND A FORMING APPARATUS OF CARBON NANOTUBES, AND A SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD OF THE SAME | 05-02-2013 |