Patent application number | Description | Published |
20090288639 | Mechanism for Restraining Fuel Pressure Pulsation and High Pessure Fuel Supply Pump of Internal Combustion Engine with Such Mechanism - A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion, with gas being sealed in the aforementioned hermetically sealed space of the damper, has a pair of pressing members which give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion, and is unitized with the pair of pressing members being connected in a state in which they sandwich the metal damper. | 11-26-2009 |
20100111734 | Electromagnetically-Driven Valve Mechanism and High-Pressure Fuel Supply Pump Using the Same - In a conventional configuration, a lead line weld joined portion | 05-06-2010 |
20110253109 | High-Pressure Fuel Pump - It is an object of the present invention to accurately position a cylinder of a high-pressure fuel pump with respect to an attachment fitting hole provided in an engine block of an internal combustion engine in mounting the pump on the engine block. | 10-20-2011 |
20120090708 | High-Pressure Fuel Supply Pump Having Electromagnetically-Driven Intake Valve - It is an object of the present invention to improve responsiveness in valve opening and valve closing of an electromagnetically driven intake valve unit in which a valve is provided on a pressurizing chamber side of a valve seat. The valve includes an annular abutting surface that abuts the valve seat to shut off a fuel intake passage and a bottomed cylindrical part provided at an inner peripheral part of the annular abutting surface. The bottomed cylindrical part is inserted into a fuel introduction hole formed in the valve housing inside the valve seat, and the outer surface of an end part of the bottomed cylindrical part is exposed to fuel in a low pressure fuel chamber provided upstream of the fuel introduction hole. | 04-19-2012 |
20120093670 | High-Pressure Fuel Supply Pump Having Electromagnetically-Driven Intake Valve - The present invention eliminates a valve holder and accommodates a valve guide in a small space provided between a valve seat and a peripheral surface part of a pressure chamber to reduce the size of a pump. The valve guide guides a stroke of the valve and is provided inside the valve seat. The valve includes an annular abutting surface that abuts a valve seat formed in a valve housing to shut off a fuel intake passage and a bottomed cylindrical part is provided at an inner peripheral part of the annular abutting surface. The bottomed cylindrical part is inserted into a fuel introduction hole formed in the valve housing inside the valve seat. A member having a cylindrical surface part that supports a reciprocating motion of the valve, is fixed to the valve housing, face-to-face with an inner peripheral part of the bottomed cylindrical part. | 04-19-2012 |
20120180764 | High Pressure Fuel Supply Pump - In a high pressure fuel supply pump for transmitting rotation of a cam to a reciprocating plunger via a tappet and a retainer, a diametric force acting on the plunger is reduced. The pump includes the retainer disposed on the plunger and a return spring exerting an urging force on the retainer in a direction of the tappet. A clearance between a plunger leading end and a tappet bottom surface opposed thereto is set to be greater than a clearance between a retainer bottom surface and the tappet bottom surface opposed thereto, and a clearance between a retainer inside diameter section and a plunger peripheral surface section opposed thereto is set to be greater than a clearance between a retainer outside diameter section and a tappet inner wall opposed thereto. | 07-19-2012 |
20130149177 | Mechanism for Restraining Fuel Pressure Pulsation and High Pressure Fuel Supply Pump of Internal Combustion Engine with Such Mechanism - A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion, with gas being sealed in the aforementioned hermetically sealed space of the damper, has a pair of pressing members which give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion, and is unitized with the pair of pressing members being connected in a state in which they sandwich the metal damper. | 06-13-2013 |
20140099215 | HIGH PRESSURE FUEL SUPPLY PUMP WITH ELECTROMAGNETIC SUCTION VALVE - To reduce collision noise created by the operation of an electromagnetic suction valve provided on a high pressure fuel supply pump. In the present invention, in order to achieve the above object, the mass of a member which collides by magnetic attractive force is reduced to reduce the noise to be generated. The thus configured present invention provides the following advantageous effects. The noise generated when a core and an anchor collide with each other by magnetic attractive force depends on the magnitude of the kinetic energy of a moving element. The kinetic energy to be consumed in the collision is only the kinetic energy of the anchor. The kinetic energy of a rod, being absorbed by a spring, does not contribute to the noise; thus, the energy when the anchor and the core collide with each other can be reduced, whereby the noise to be created can be reduced. | 04-10-2014 |
20150017039 | HIGH-PRESSURE FUEL SUPPLY PUMP HAVING AN ELECTROMAGNETICALLY-DRIVEN INLET VALVE - A high-pressure fuel supply pump having a normally-closed type electromagnetically-driven inlet valve mechanism supporting a large capacity and causing least sound is provided. A valve member having a seat surface that comes into abutment with an inlet valve seat; and a plunger rod positioned on the seat surface side of the valve member and configured to operate the valve member by a magnetic attraction force are provided, and a protector configured to face a surface of the valve member on the surface opposite to the seat surface with a gap therebetween when the plunger rod makes a full stroke in the valve-open direction of the valve member and an anchor for driving the plunger rod comes into contact with a stopper is provided. | 01-15-2015 |
20150017041 | Mechanism for Restraining Fuel Pressure Pulsation and High Pressure Fuel Supply Pump of Internal Combustion Engine with Such Mechanism - A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion. Gas is sealed in the aforementioned hermetically sealed space of the damper, and a pair of pressing members give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion. The mechanism is unitized, with the pair of pressing members being connected in a state in which they sandwich the metal damper. | 01-15-2015 |
Patent application number | Description | Published |
20090147246 | OPTICAL DEFECT INSPECTION APPARATUS - A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus the useful life of each plane mirror can be prolonged without displacing the optical axis. | 06-11-2009 |
20100141936 | OPTICAL DEFECT INSPECTION APPARATUS - A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis. | 06-10-2010 |
20100196127 | SUBSTRATE HOLDING APPARATUS, AND INSPECTION OR PROCESSING APPARATUS - In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation. | 08-05-2010 |
20100231900 | OPTICAL DEFECT INSPECTION APPARATUS - A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis. | 09-16-2010 |
20110102781 | OPTICAL DEFECT INSPECTION APPARATUS - A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis. | 05-05-2011 |
20110260080 | SUBSTRATE HOLDING APPARATUS, AND INSPECTION OR PROCESSING APPARATUS - In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation. | 10-27-2011 |
20120144938 | INSPECTION DEVICE AND METHOD - Inspection units have moving parts such as XY-movement stage mechanisms and high-speed rotation mechanisms for inspecting the entire surfaces of substrates, and it is difficult for fan filter units (FFUs) to completely remove all foreign materials. The provided inspection device has: a fan filter unit divided into a plurality of regions; an exhaust unit, divided into a plurality of regions, for getting rid of air from the fan filter unit; and a transfer system disposed between the fan filter unit and the exhaust unit. The chief characteristic of the provided inspection device is that the flow rate in some of the regions of the fan filter unit and the flow rate in some of the regions of the exhaust unit are controlled in accordance with the operations of the transfer system. | 06-14-2012 |
20120182547 | OPTICAL DEFECT INSPECTION APPARATUS - A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis. | 07-19-2012 |
20120205850 | SUBSTRATE HOLDING APPARATUS, AND INSPECTION OR PROCESSING APPARATUS - In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation. | 08-16-2012 |
20130154675 | SUBSTRATE HOLDING DEVICE AND METHOD, AND INSPECTION APPARATUS AND METHOD USING THE SUBSTRATE HOLDING DEVICE AND METHOD - Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor. | 06-20-2013 |
20130286385 | INSPECTION APPARATUS - To increase the speed of inspection, an inspection apparatus may conduct an inspection by irradiating a wafer surface with a thin light beam and acquiring an image of an irradiated region with a photodetector. However, it is not easy to have the photodetector properly form the image of the irradiated region. This problem is not solved by prior art technologies. | 10-31-2013 |