Patent application number | Description | Published |
20080236744 | Plasma etching equipment - To provide a plasma processing equipment that can reduce the particles or contamination in a sample by suppressing the occurrence of an abnormal electric discharge during processing. The plasma processing equipment that employs a plasma process using a halogen-based gas in fabricating a semiconductor device, wherein a plasma sprayed coating film is applied to a surface of a well, such as a wall in a processing chamber, which plasma is in constant with, and wherein a conductor is incorporated into a material of this plasma sprayed coating film, thereby making the plasma sprayed coating film conductive. | 10-02-2008 |
20090165952 | VACUUM PROCESSING APPARATUS - The invention provides a semiconductor manufacturing apparatus having a high productivity per installed area. In a vacuum processing apparatus provided with a plurality of cassettes on which a cassette is stored, a vacuum feed chamber arranged in a back face side of the atmospheric air feed chamber in a state of being coupled thereto, having a polygonal plane shape and structured such that the wafer is fed in a depressurized inner portion, and a plurality of vacuum processing chambers detachably coupled to a side surface of the vacuum feed chamber, arranged in adjacent thereto and processing the wafer fed to an inner portion from the vacuum feed chamber, a plurality of vacuum processing apparatuses includes a plurality of etching processing chamber carrying out an etching process of the wafer and at least one ashing processing chamber carrying out an ashing process of the wafer, the ashing processing chamber is coupled to a side surface in one of right and left sides as seen from the front face of the vacuum feed chamber, and the atmospheric air feed chamber is arranged so as to be biased to the one side to which the ashing processing chamber is coupled. | 07-02-2009 |
20090183835 | ETCHING PROCESS APPARATUS AND MEMBER FOR ETCHING PROCESS CHAMBER - It is an object of the present invention to provide an etching process apparatus which can suppress evolution of foreign matter to improve production yield. | 07-23-2009 |
20090324367 | VACUUM PROCESSING APPARATUS - A vacuum processing apparatus includes vacuum processing vessels each having a processing chamber with a pressure-reduced interior space, a vacuum transfer vessel which is coupled to the vacuum vessels disposed therearound and which has a low-pressure interior space in which a to-be-processed workpiece is conveyed, an atmospheric air transfer vessel which is coupled to the front side of the vacuum transfer vessel and which includes on its front face side cassette tables mounting thereon a cassette with the workpiece received therein for conveying the workpiece in an interior space under an atmospheric pressure, a position-aligning machine disposed within the atmospheric air transfer vessel at one of right and left ends for adjusting a position of the workpiece, and an adjuster disposed between lower part of this machine and a floor face for adjusting the supply of a fluid being fed to the vacuum processing vessels. | 12-31-2009 |
20100068009 | VACUUM PROCESSING APPARATUS - A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor. | 03-18-2010 |
Patent application number | Description | Published |
20090285087 | COMMUNICATION APPARATUS AND ABNORMALITY RESTORATION METHOD - According to one embodiment, a communication apparatus includes an acquisition module selectively acquires equipment information showing communication equipment including the same program as the program recorded on the first recording medium to record the equipment information in a second recording medium differing from the first recording medium, and a failure restoration module obtains a program from communication equipment based on the equipment information recorded on the second recording medium, and start the communication apparatus based on the obtained program, when the communication apparatus cannot start by the program recorded on the first recording medium. | 11-19-2009 |
20120002665 | Telephone Exchange Apparatus and Telephone Terminal and a Control Method Used for a Telephone System - According to one embodiment, a telephone exchange apparatus includes a communication processor, a memory and a controller. The communication processor establishes a communication session between a plurality of telephone terminals on the private network and a telephone terminal on the global network through a common port specifying the private network. The memory stores a management table which associates a terminal ID specifying a telephone terminal to be connected, a session ID specifying a communication session, and an address and port ID specifying a network to be connected to the telephone terminal, for each session. The controller refers to the management table based on a session ID included in a communication packet, and sends instruction data to the communication processor to effect communication by the communication packet between telephone terminals establishing a communication session, based on a reference result of the management table. | 01-05-2012 |
20120120946 | Telephone Exchange Apparatus, Telephone Exchange Apparatus Control Method, and Telephone System - According to one embodiment, a telephone exchange apparatus includes a determining module, a memory and a controller. The determining module determines whether an IP address is transferred through a router, by information notified from the plurality of telephone terminals, when a telephone terminal requests registration. The memory stores a management table associating the terminal ID, the results of determination by the determining module, and the IP address. The controller refers to the management table registered in the memory, and executes one of a first process of establishing connection for communication in a peer-to-peer form between first and second telephone terminals, and a second process of relaying connection by using a relay function, based on a reference results of the management table. | 05-17-2012 |
20130163585 | TELEPHONE SYSTEM, SERVER APPARATUS, AND CONTROL METHOD USED IN THE SERVER APPARATUS - According to one embodiment, a server apparatus includes a memory, a determination module, a storage controller and a service controller. The memory stores in an authentication management table associating identification information with first authentication information and second authentication information. The determination module determines whether registration is authenticated based on the authentication management table. The storage controller stores the identification information, the attribute information, and the IP addresses in a registration management table. The service controller performs control regarding use of the communication services. | 06-27-2013 |
20130336312 | COMMUNICATION SYSTEM, DATACENTER APPARATUS, AND CONTROL METHOD USED IN DATACENTER APPARATUS - According to one embodiment, a communication system includes at least one user apparatus and a datacenter apparatus. The datacenter apparatus includes a processor, a memory and a controller. The processor includes a plurality of containers required to execute a plurality of communication functions associated with the exchange processing between the communication terminals or between the communication terminal and the communication line. The memory stores a user ID used to identify the user apparatus. The controller provides a communication service using at least one of the plurality of containers when a use request of the communication function is received from the user apparatus. | 12-19-2013 |
20140126571 | TELEPHONE EXCHANGE APPARATUS, TELEPHONE EXCHANGE APPARATUS CONTROL METHOD, AND TELEPHONE SYSTEM - According to one embodiment, a telephone exchange apparatus includes a determining module, a memory and a controller. The determining module determines whether an IP address is transferred through a router, by information notified from the plurality of telephone terminals, when a telephone terminal requests registration. The memory stores a management table associating the terminal ID, the results of determination by the determining module, and the IP address. The controller refers to the management table registered in the memory, and executes one of a first process of establishing connection for communication in a peer-to-peer form between first and second telephone terminals, and a second process of relaying connection by using a relay function, based on a reference results of the management table. | 05-08-2014 |