Patent application number | Description | Published |
20080242110 | Capping Layer Formation Onto a Dual Damescene Interconnect - A process for the formation of a capping layer on a conducting interconnect for a semiconductor device is provided, the process comprising the steps of: (a) providing one or more conductors in a dielectric layer, and (b) depositing a capping layer on an upper surface of at least some of the one or more conductors, characterised in that the process further includes: (c) the step of, prior to depositing the capping layer, reacting the dielectric layer with an organic compound in a liquid phase, the said organic compound having the following general formula: (I) where X is a functional group, R is an organic group or a organosiloxane group, Y1 is either a functional group or an organic group or organosiloxane group, and Y2 is either a functional group or an organic group or organosiloxane group, and where the functional group(s) is/are independently selected from the following: NH2, a secondary amine, a tertiary amine, acetamide, trifluoroacetamide, imidazole, urea, OH, an alkyoxy, acryloxy, acetate, SH, an alkylthiol, sulfonate, methanosulfonate, and cyanide, and salts thereof. | 10-02-2008 |
Patent application number | Description | Published |
20080254894 | CENTRAL DETERMINATION GAMING SYSTEM WITH A KENO GAME - A central determination gaming system with a keno game. Upon a player initiating a game play at a gaming terminal, the gaming terminal enables the player to select a plurality of symbols. The gaming terminal accesses a standard set of predefined symbols for the specific game played. The gaming terminal bidirectionally maps the player's selected symbols with the standard set of predefined symbols. The gaming terminal receives a predetermined game outcome seed from a central controller. The gaming terminal utilizes the selected game outcome seed to generate a plurality of game symbols. The gaming terminal determines if each of the generated game symbols needs to be modified. If so, the gaming terminal modifies these generated game symbols based on the bidirectionally mapping, presents the modified game symbols to the player and provides the player a game outcome that is determined based on the selected game outcome seed. | 10-16-2008 |
20090203433 | GAMING MACHINE INCLUDING REDO FEATURE - A wager manipulation feature for a wagering game is provided. The feature may be implemented after the player's wager is set but before game play takes place, after game play takes place or both simultaneously. If before game play, the feature enables the player to undo or nullify the wager, for example, if the player changes his or her mind or enters a wager incorrectly. If after game play, the feature provides a bonus to the player in which the player may nullify a bet after an unsuccessful outcome or increase the bet to enhance a favorable outcome. In any case, the redo feature can be accumulated in one embodiment and stored and/or restored on a gaming device ticket, player tracking card or promotion. | 08-13-2009 |
20100041459 | MULTI-PLAYER BINGO GAME WITH OPTIONAL PROGRESSIVE JACKPOT WAGER - The invention is directed to methods and gaming units for conducting a wagering game and an associated progressive jackpot. Players may win the wagering game, interim pattern awards and/or progressive jackpot awards by matching predetermined patterns with patterns formed on their unique game array with indicia matching selected indicia. The players may optionally participate and be eligible to win all or a portion of the progressive jackpot. In one embodiment, the player may be eligible for the progressive jackpot by wagering at least a minimum wager amount, and perhaps the maximum bet for the wagering game. In another embodiment, the player may affirmatively elect to be eligible for the progressive jackpot by placing a wager or fee in addition to a wager on the wagering game. Graphics corresponding to the progressive jackpot may be optionally displayed only to players eligible to win the progressive jackpot. | 02-18-2010 |
20110130196 | Techniques for Awarding Random Rewards in a Reward Program - A method receives information for a pay table for a game. The pay table including a first set of fixed payouts for a set of outcomes that are possible when playing the game. Information is received for at least a portion of the set of outcomes, the information including an independently specified balancing point between a minimum and a maximum for each of the at least a portion of the set of outcomes. A second set of payouts for the set of outcomes is determined. The at least portion of the second set of payouts includes, for each of the at least a portion of the set of outcomes, a random payout dynamically generated using the balancing point to be between the minimum and maximum. A random payout in the second set of payouts for an outcome is different from the fixed payout in the first set of payouts. | 06-02-2011 |
20110201417 | MULTI-PLAYER BINGO GAME WITH PROGRESSIVE JACKPOTS - Methods and gaming units for conducting a wagering game and an associated progressive jackpot in a gaming network having a plurality of operatively coupled gaming units are described. A progressive jackpot award amount may be determined in part based on the amount of the player's wager for the occurrence of the wagering game in relation to a maximum wager amount that may be made on one of the gaming units in the gaming network. The progressive jackpot pool may include a main pool and a reserve pool. Portions of players' wagers being added to the progressive jackpot pool may be apportioned between the main pool and the reserve pool based on calculation performed at the gaming network, with the apportionment being at least partially determined by the amount in the main pool. | 08-18-2011 |
20120058810 | CENTRAL DETERMINATION GAMING SYSTEM WITH A CENTRAL CONTROLLER PROVIDING A GAME OUTCOME AND A GAMING TERMINAL DETERMINING A PRESENTATION OF THE PROVIDED GAME OUTCOME - A central determination gaming system with a central controller providing a game outcome to an individual gaming terminal and the gaming terminal determining the presentation of the provided game outcome. In one embodiment of the present invention, a gaming terminal receives a predetermined game outcome from a central controller. The gaming terminal determines a game outcome presentation, (i.e., how the game outcome is displayed or presented to the player) for the provided game outcome by selecting a game outcome presentation seed for the received game outcome. The gaming terminal utilizes the selected game outcome presentation seed to determine a game outcome presentation. The determined game outcome presentation is displayed to the player and the received game outcome is provided to the player. | 03-08-2012 |
20120058811 | CENTRAL DETERMINATION GAMING SYSTEM WITH A CENTRAL CONTROLLER PROVIDING A GAME OUTCOME AND A GAMING TERMINAL DETERMINING A PRESENTATION OF THE PROVIDED GAME OUTCOME - A central determination gaming system with a central controller providing a game outcome to an individual gaming terminal and the gaming terminal determining the presentation of the provided game outcome. In one embodiment of the present invention, a gaming terminal receives a predetermined game outcome from a central controller. The gaming terminal determines a game outcome presentation, (i.e., how the game outcome is displayed or presented to the player) for the provided game outcome by selecting a game outcome presentation seed for the received game outcome. The gaming terminal utilizes the selected game outcome presentation seed to determine a game outcome presentation. The determined game outcome presentation is displayed to the player and the received game outcome is provided to the player. | 03-08-2012 |
20120077573 | CENTRAL DETERMINATION GAMING SYSTEM WITH A GAME OUTCOME GENERATED BY A GAMING TERMINAL AND APPROVED BY A CENTRAL CONTROLLER - A central determination gaming system including a plurality of gaming terminals in communication with a central controller. In one embodiment, upon initiation of a game at one of the gaming terminals, the gaming terminal randomly generates a proposed game outcome. The proposed game outcome is communicated to the central controller. The central controller determines if a pool of predetermined game outcomes includes the proposed game outcome. If the pool includes the proposed game outcome, the central controller authorizes the proposed game outcome to be provided to the player, flags the authorized game outcome from further authorizations and communicates the authorized game outcome to the gaming terminal. The gaming terminal then provides the authorized game outcome to the player. If the pool does not include the proposed game outcome, the central controller discards the proposed game outcome and instructs the gaming terminal to generate another proposed game outcome for authorization. | 03-29-2012 |
20120077577 | CENTRAL DETERMINATION GAMING SYSTEM WITH A GAME OUTCOME GENERATED BY A GAMING TERMINAL AND APPROVED BY A CENTRAL CONTROLLER - A central determination gaming system including a plurality of gaming terminals in communication with a central controller. In one embodiment, upon initiation of a game at one of the gaming terminals, the gaming terminal randomly generates a proposed game outcome. The proposed game outcome is communicated to the central controller. The central controller determines if a pool of predetermined game outcomes includes the proposed game outcome. If the pool includes the proposed game outcome, the central controller authorizes the proposed game outcome to be provided to the player, flags the authorized game outcome from further authorizations and communicates the authorized game outcome to the gaming terminal. The gaming terminal then provides the authorized game outcome to the player. If the pool does not include the proposed game outcome, the central controller discards the proposed game outcome and instructs the gaming terminal to generate another proposed game outcome for authorization. | 03-29-2012 |
20120165092 | MULTI-PLAYER BINGO GAME WITH OPTIONAL PROGRESSIVE JACKPOT WAGER - The invention is directed to methods and gaming units for conducting a wagering game and an associated progressive jackpot. Players may win the wagering game, interim pattern awards and/or progressive jackpot awards by matching predetermined patterns with patterns formed on their unique game array with indicia matching selected indicia. The players may optionally participate and be eligible to win all or a portion of the progressive jackpot. In one embodiment, the player may be eligible for the progressive jackpot by wagering at least a minimum wager amount, and perhaps the maximum bet for the wagering game. In another embodiment, the player may affirmatively elect to be eligible for the progressive jackpot by placing a wager or fee in addition to a wager on the wagering game. Graphics corresponding to the progressive jackpot may be optionally displayed only to players eligible to win the progressive jackpot. | 06-28-2012 |
20130065669 | GAMING SYSTEM, GAMING DEVICE AND METHOD FOR UTILIZING BITCOINS - The gaming system may enable a player to wager an amount of bitcoins on one or more plays of one or more primary or base games. If a player wagers an amount of bitcoins on a play of a game, the gaming system may determine and display an outcome for the play of the game. The gaming system then may determine if any award may be associated with the determined outcome. If an award having a value greater than zero is associated with the determined outcome, the gaming system may provide the determined award to the player, such as an amount of bitcoins. | 03-14-2013 |
20130065670 | GAMING SYSTEM, GAMING DEVICE AND METHOD FOR UTILIZING BITCOINS - The gaming system may enable a player to wager an amount of bitcoins on one or more plays of one or more primary or base games. If a player wagers an amount of bitcoins on a play of a game, the gaming system may determine and display an outcome for the play of the game. The gaming system then may determine if any award may be associated with the determined outcome. If an award having a value greater than zero is associated with the determined outcome, the gaming system may provide the determined award to the player, such as an amount of bitcoins. | 03-14-2013 |
20140066187 | MULTI-PLAYER BINGO GAME WITH PROGRESSIVE JACKPOTS - Methods and gaming units for conducting a wagering game and an associated progressive jackpot in a gaming network having a plurality of operatively coupled gaming units are described. A progressive jackpot award amount may be determined in part based on the amount of the player's wager for the occurrence of the wagering game in relation to a maximum wager amount that may be made on one of the gaming units in the gaming network. The progressive jackpot pool may include a main pool and a reserve pool. Portions of players' wagers being added to the progressive jackpot pool may be apportioned between the main pool and the reserve pool based on calculation performed at the gaming network, with the apportionment being at least partially determined by the amount in the main pool. | 03-06-2014 |
20150310705 | CENTRAL DETERMINATION GAMING SYSTEM WITH A CENTRAL CONTROLLER PROVIDING A GAME OUTCOME AND A GAMING TERMINAL DETERMINING A PRESENTATION OF THE PROVIDED GAME OUTCOME - A central determination gaming system with a central controller providing a game outcome to an individual gaming terminal and the gaming terminal determining the presentation of the provided game outcome. In one embodiment of the present invention, a gaming terminal receives a predetermined game outcome from a central controller. The gaming terminal determines a game outcome presentation, (i.e., how the game outcome is displayed or presented to the player) for the provided game outcome by selecting a game outcome presentation seed for the received game outcome. The gaming terminal utilizes the selected game outcome presentation seed to determine a game outcome presentation. The determined game outcome presentation is displayed to the player and the received game outcome is provided to the player. | 10-29-2015 |
20160071375 | MULTI-PLAYER BINGO GAME WITH PROGRESSIVE JACKPOTS - Methods and gaming units for conducting a wagering game and an associated progressive jackpot in a gaming network having a plurality of operatively coupled gaming units are described. A progressive jackpot award amount may be determined in part based on the amount of the player's wager for the occurrence of the wagering game in relation to a maximum wager amount that may be made on one of the gaming units in the gaming network. The progressive jackpot pool may include a main pool and a reserve pool. Portions of players' wagers being added to the progressive jackpot pool may be apportioned between the main pool and the reserve pool based on calculation performed at the gaming network, with the apportionment being at least partially determined by the amount in the main pool. | 03-10-2016 |
Patent application number | Description | Published |
20090275149 | METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LITHOGRAPHY TOOLS - A method of controlling wafer critical dimension (CD) uniformity on a track lithography tool includes obtaining a CD map for a wafer. The CD map includes a plurality of CD data points correlated with a multi-zone heater geometry map. The multi-zone heater includes a plurality of heater zones. The method also includes determining a CD value for a first heater zone of the plurality of heater zones based on one or more of the CD data points and computing a difference between the determined CD value for the first heater zone and a target CD value for the first heater zone. The method further includes determining a temperature variation for the first heater zone based, in part, on the computed difference and a temperature sensitivity of a photoresist deposited on the wafer and modifying a temperature of the first heater zone based, in part, on the temperature variation. | 11-05-2009 |
20120088193 | Radiation Patternable CVD Film - Methods for forming photoresists sensitive to radiation on a substrate are provided. Described are chemical vapor deposition methods of forming films (e.g., silicon-containing films) as photoresists using a plasma which may be exposed to radiation to form a pattern. The deposition methods utilize precursors with cross-linkable moieties that will cross-link upon exposure to radiation. Radiation may be carried out in the with or without the presence of oxygen. Exposed or unexposed areas may then be developed in an aqueous base developer. | 04-12-2012 |
20120088369 | Atomic Layer Deposition Of Photoresist Materials And Hard Mask Precursors - Methods for forming photoresists sensitive to radiation on substrate are provided. Atomic layer deposition methods of forming films (e.g., silicon-containing films) photoresists are described. The process can be repeated multiple times to deposit a plurality of silicon photoresist layers. Process of depositing photoresist and forming patterns in photoresist are also disclosed which utilize carbon containing underlayers such as amorphous carbon layers. | 04-12-2012 |
20130113085 | Atomic Layer Deposition Of Films Using Precursors Containing Hafnium Or Zirconium - Provided are low temperature methods of depositing hafnium or zirconium containing films using a Hf(BH | 05-09-2013 |
20130115778 | Dry Etch Processes - Provided methods of etching and/or patterning films. Certain methods comprise exposing at least part of a film on a substrate, the film comprising one or more of HfO | 05-09-2013 |
20140231930 | Atomic Layer Deposition of Hafnium or Zirconium Alloy Films - Provided are methods of depositing hafnium or zirconium containing metal alloy films. Certain methods comprise sequentially exposing a substrate surface to alternating flows of an organometallic precursor and a reductant comprising M(BH | 08-21-2014 |
20140263172 | RESIST HARDENING AND DEVELOPMENT PROCESSES FOR SEMICONDUCTOR DEVICE MANUFACTURING - In some embodiments, a method of forming an etch mask on a substrate is provided that includes (1) forming a resist layer on a substrate; (2) exposing one or more regions of the resist layer to an energy source so as to alter at least one of a physical property and a chemical property of the exposed regions; (3) performing a hardening process on the resist layer to increase the etch resistance of first regions of the resist layer relative to second regions of the resist layer, the hardening process including exposing the resist layer to one or more reactive species within an atomic layer deposition (ALD) chamber; and (4) dry etching the resist layer to remove the one or more second regions and to form a pattern in the resist layer. Other embodiments are provided. | 09-18-2014 |
20140268080 | PLANARIZED EXTREME ULTRAVIOLET LITHOGRAPHY BLANK, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR - An integrated extreme ultraviolet (EUV) blank production system includes: a vacuum chamber for placing a substrate in a vacuum; a first deposition system for depositing a planarization layer having a planarized top surface over the substrate; and a second deposition system for depositing a multi-layer stack on the planarization layer without removing the substrate from the vacuum. The EUV blank is in an EUV lithography system includes: an extreme ultraviolet light source; a mirror for directing light from the EUV source; a reticle stage for placing a EUV mask blank with a planarization layer; and a wafer stage for placing a wafer. The EUV blank includes: a substrate; a planarization layer to compensate for imperfections related to the surface of the substrate, the planarization layer having a flat top surface; and a multi-layer stack on the planarization layer. | 09-18-2014 |
20140268082 | VAPOR DEPOSITION DEPOSITED PHOTORESIST, AND MANUFACTURING AND LITHOGRAPHY SYSTEMS THEREFOR - A photoresist vapor deposition system includes: a vacuum chamber having a heating element and cooled chuck for holding a substrate, the vacuum chamber having a heated inlet; and a vapor deposition system connected to the heated inlet for volatilizing a precursor into the vacuum chamber for condensing a photoresist over the substrate cooled by the cooled chuck. The deposition system creates a semiconductor wafer system that includes: a semiconductor wafer; and a vapor deposited photoresist over the semiconductor wafer. An extreme ultraviolet lithography system requiring the semiconductor wafer system includes: an extreme ultraviolet light source; a mirror for directing light from the extreme ultraviolet light source; a reticle stage for imaging the light from the extreme ultraviolet light source; and a wafer stage for placing a semiconductor wafer with a vapor deposited photoresist. | 09-18-2014 |
20150162214 | Methods Of Selective Layer Deposition - Provided are methods for selective deposition. Certain methods describe providing a first substrate surface; providing a second substrate surface; depositing a first layer of film over the first and second substrate surfaces, wherein the deposition has an incubation delay over the second substrate surface such that the first layer of film over the first substrate surface is thicker than the first layer of film deposited over the second substrate surface; and etching the first layer of film over the first and second substrate surfaces, wherein the first layer of film over the second substrate surface is at least substantially removed, but the first layer of film over the first substrate is only partially removed. | 06-11-2015 |
20150275364 | Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Processing - Provided are apparatus and methods for the sequential deposition and annealing of a film within a single processing chamber. An energy source positioned within the processing chamber in an area isolated from process gases can be used to rapidly form and decompose a film on the substrate without damaging underlying layers due to exceeding the thermal budget of the device being formed. | 10-01-2015 |
Patent application number | Description | Published |
20080273748 | Image And Part Recognition Technology - A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems. | 11-06-2008 |
20090017271 | Densely packed sensor arrays - A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems. | 01-15-2009 |
20100092089 | Image And Part Recognition Technology - A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems. | 04-15-2010 |
20120194671 | Image And Part Recognition Technology - A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems. | 08-02-2012 |