Patent application number | Description | Published |
20090275146 | METHOD AND APPARATUS FOR MANUFACTURING DEVICE - A method for manufacturing a device, includes: (A) forming a first electrode layer on a substrate; (B) forming a ferroelectric layer on the first electrode layer; (C) forming a second electrode layer on the ferroelectric layer; (D) forming a mask having a predetermined pattern on the second electrode layer; (E) forming a memory element by selectively removing the first electrode layer, the ferroelectric layer, and the second electrode layer using the mask; and (F) removing the mask, where at least, the processes (D) and (E), or the processes (E) and (F) are continuously performed under a reduced pressure. | 11-05-2009 |
20100083981 | DRY CLEANING METHOD FOR PLASMA PROCESSING APPARATUS - This dry cleaning method for a plasma processing apparatus is a dry cleaning method for a plasma processing apparatus that includes: a vacuum container provided with a dielectric member; a planar electrode and a high-frequency antenna that are provided outside the dielectric member; and a high-frequency power source that supplies high-frequency power to both the high-frequency antenna and the planar electrode, to thereby introduce high-frequency power into the vacuum container via the dielectric member and produce an inductively-coupled plasma, the method comprising the steps of: introducing a gas including fluorine into the vacuum container and also introducing high-frequency power into the vacuum container from the high-frequency power source, to thereby produce an inductively-coupled plasma in the gas including fluorine; and by use of the inductively-coupled plasma, removing a product including at least one of a precious metal and a ferroelectric that is adhered to the dielectric member. | 04-08-2010 |
20100089533 | ASHING APPARATUS - Disclosed is an ashing apparatus wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate. | 04-15-2010 |
20100151150 | PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-INHIBITORY MEMBER - A plasma processing apparatus of the present invention performs on a substrate to be processed, plasma processing with a noble metal material and a ferroelectric material and is provided with a constituent member that is exposed to plasma while being heated. The constituent member is formed with an aluminum alloy of at least 99% aluminum purity. | 06-17-2010 |
20100193131 | ASHING DEVICE - An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind. | 08-05-2010 |
20100213170 | ETCHING METHOD AND ETCHING APPARATUS - An etching method which uses an apparatus having a chamber in which an etching gas is excited by plasma; a table arranged in the chamber which heats a substrate mounted thereon; and a frame member which includes etching-endurable material which is arranged around the table, and which has an upper surface arranged at a position lower than an upper surface of the table, the etching method including: arranging the substrate on the upper surface of the table such that a peripheral part of the substrate projects above the table; and arranging the substrate such that a ratio of a height from the upper surface of the frame member to a bottom surface of the substrate and a projecting length from a side surface of the table to an outer circumference of the substrate is 1.5 or more | 08-26-2010 |
20120152889 | METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT - A method for manufacturing a piezoelectric element, in which a ferroelectric film is processed in an appropriate shape by plasma etching, is provided. A metal mask made of a metal thin film which is hard to be etched by oxygen gas is placed on an object to be processed formed by laminating a lower electrode layer and a ferroelectric film on a substrate in this order. An etching gas containing a mixture gas of the oxygen gas and a reactive gas including fluorine in a chemical structure is turned into plasma and is brought into contact with the metal mask and the object to be processed. An AC voltage is applied to an electrode disposed beneath the object to be processed so that ions in the plasma are caused to enter the object to be processed to perform anisotropic etching on the ferroelectric film. | 06-21-2012 |
20120193323 | METHOD FOR OPERATING SUBSTRATE PROCESSING APPARATUS - A method for operating a substrate processing apparatus is provided which can contain generation of particles by generating plasma in a stable manner. After a substrate is disposed in an evacuated vacuum chamber, a rare gas is initially supplied into the vacuum chamber, a voltage is applied to a plasma generating means, and plasma of the rare gas is generated. Subsequently, a reaction gas is supplied into the vacuum chamber, the reaction gas is brought into contact with the plasma of the rare gas, and plasma of the reaction gas is generated. The plasma of the reaction gas is brought into contact with the substrate; and the substrate is processed. Plasma is stably generated not by turning the reaction gas into plasma but by first turning the rare gas into plasma by the plasma generating means, and generation of particles is subsequently suppressed. | 08-02-2012 |
20150013715 | ASHING DEVICE - An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind. | 01-15-2015 |
Patent application number | Description | Published |
20090007546 | Exhaust Gas Purifying Apparatus for an Internal Combustion Engine and a Method for Controlling Same Apparatus - An exhaust gas purifying system for an internal combustion engine includes a first exhaust passage ( | 01-08-2009 |
20090178392 | Exhaust Gas Purification System for Internal Combustion Engine and Method for Regenerating Purification Ability of Exhaust gas Purification Device - The problem is to regenerate the purification ability of an exhaust gas purification device more reliably or efficiently in an exhaust gas purification system that combines a plurality of branch passages branch off from an exhaust gas passage and exhaust gas purification devices. When the purification ability of an exhaust gas purification device is regenerated, in the branch passage where the exhaust gas purification device is provided whose purification ability is to be regenerated, the opening angle of an exhaust gas flow volume control valve is set to the minimum opening angle that can reliably transport a reducing agent that is added from a reducing agent addition section. While the opening angle is maintained, the reducing agent is added. After the addition of the reducing agent is complete, the opening angle of an exhaust gas flow volume control valve is closed completely. | 07-16-2009 |
20090205323 | Exhaust Gas Purification System For Internal Combustion Engine - An object of the invention is to provide a technique for improving the efficiency of performance regeneration process that is executed on NOx storage reduction catalysts provided in a plurality of branch passages branching from the exhaust passage and reduce emissions of NOx from an internal combustion engine to the atmosphere. When the quantity of NOx discharged from an internal combustion engine and flowing into an exhaust pipe is smaller than a predetermined quantity, fuel serving as reducing agent is added through a fuel addition valve while torque change moderating process is executed (from T | 08-20-2009 |
20090293465 | POWER SOURCE SYSTEM OF INTERNAL COMBUSTION ENGINE - Provided is a technology enabling a temperature of an exhaust gas purifying device to rise more surely by operating an electric heater for a catalyst attached with the electric heater more steadily without exerting an excessive load on a battery. Included are the battery and the electric heater operating upon being supplied with electric power from the battery and heating an occlusion-reduction type NOx catalyst, wherein it is predicted, from a point that a SOx occluded quantity into the occlusion-reduction type NOx catalyst is equal to or larger than S | 12-03-2009 |
20100146945 | Exhaust Purification System for Internal Combustion Engine - The present invention provides a technology enabling regeneration of the purification performance of an exhaust purification device more reliably and more efficiently in an exhaust purification system combining a plurality of branch passages bifurcating from an exhaust passage and an exhaust purification device provided in each branch passage. When regenerating the purification performance of a first exhaust purification device provided in a first branch passage, a second valve provided in a second branch passage is set at a predetermined first intermediate opening and a first valve provided in the first branch passage is fully closed. Fuel is then added from a first fuel addition valve provided in the first branch passage. | 06-17-2010 |
20100186378 | EXHAUST GAS PURIFICATION APPARATUS FOR INTERNAL COMBUSTION ENGINE - An apparatus including an exhaust passage that forks at a separating portion and joins at a joining portion, exhaust gas purification catalysts between the separating portion and the joining portion, a filter downstream of the joining portion, reducing agent supply units supplying reducing agent to the respective exhaust passages at positions upstream of the exhaust gas purification catalysts, and control units controlling quantity of the exhaust gas passing through the exhaust gas purification catalysts. When regenerating the filter, the reducing agent is supplied by one reducing agent supply unit, and the quantity of exhaust gas passing through the exhaust gas purification catalyst provided in the exhaust passage to which the reducing agent is supplied is made smaller. | 07-29-2010 |