Patent application number | Description | Published |
20100078045 | SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING SAME - An LPCVD apparatus is provided with a processing chamber and a reaction cooling apparatus. The reaction cooling apparatus is placed outside the processing chamber and is configured to generate hydrogen fluoride gas by reaction of hydrogen gas and fluorine gas and to cool the hydrogen fluoride gas. The hydrogen fluoride gas cooled by the reaction cooling apparatus is supplied into the processing chamber as a cleaning gas. | 04-01-2010 |
20100078622 | NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - A nonvolatile memory device includes: a substrate; a stacked structure member including a plurality of dielectric films and a plurality of electrode films alternately stacked on the substrate and including a through-hole penetrating through the plurality of the dielectric films and the plurality of the electrode films in a stacking direction of the plurality of the dielectric films and the plurality of the electrode films; a semiconductor pillar provided in the through-hole; and a charge storage layer provided between the semiconductor pillar and each of the plurality of the electrode films. At least one of the dielectric films includes a film generating one of a compressive stress and a tensile stress, and at least one of the electrode films includes a film generating the other of the compressive stress and the tensile stress. | 04-01-2010 |
20100112822 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS - In a manufacturing process of a semiconductor device by forming a structure film on a substrate in a reaction chamber of a manufacturing apparatus, cleaning inside the reaction chamber is performed. That is, a precoat film made of a silicon nitride film containing boron is deposited on an inner wall of the reaction chamber, a silicon nitride film not containing boron is formed as the structure film on the substrate in the reaction chamber, and the inner wall of the reaction chamber is dry etched to be cleaned. At this time, the dry etching is terminated after boron is detected in a gas exhausted from the reaction chamber. | 05-06-2010 |
20110057249 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked structural body, a semiconductor pillar, and a memory unit. The stacked structural body is provided on a major surface of the substrate. The stacked structural body includes electrode films alternately stacked with inter-electrode insulating films in a direction perpendicular to the major surface. The pillar pierces the body in the direction. The memory unit is provided at an intersection between the pillar and the electrode films. The electrode films include at least one of amorphous silicon and polysilicon. The stacked structural body includes first and second regions. A distance from the second region to the substrate is greater than a distance from the first region to the substrate. A concentration of an additive included in the electrode film in the first region is different from that included in the electrode film in the second region. | 03-10-2011 |
20110232686 | METHOD OF CLEANING SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND MANAGEMENT SYSTEM - In one embodiment, a method of cleaning a semiconductor manufacturing apparatus includes supplying a cleaning gas for removing a deposition film deposited on an inside wall of a treatment chamber through a supply pipe of the treatment chamber so that a supply amount of the cleaning gas from the supply pipe per unit time is greater than an exhaust amount of the cleaning gas from an exhaust pipe of the treatment chamber per unit time. The method further includes supplying an inert gas to fill the supply pipe with the inert gas. | 09-29-2011 |
20120031331 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS - In a manufacturing process of a semiconductor device by forming a structure film on a substrate in a reaction chamber of a manufacturing apparatus, cleaning inside the reaction chamber is performed. That is, a precoat film made of a silicon nitride film containing boron is deposited on an inner wall of the reaction chamber, a silicon nitride film not containing boron is formed as the structure film on the substrate in the reaction chamber, and the inner wall of the reaction chamber is dry etched to be cleaned. At this time, the dry etching is terminated after boron is detected in a gas exhausted from the reaction chamber. | 02-09-2012 |
20120104340 | NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - A nonvolatile memory device includes: a substrate; a stacked structure member including a plurality of dielectric films and a plurality of electrode films alternately stacked on the substrate and including a through-hole penetrating through the plurality of the dielectric films and the plurality of the electrode films in a stacking direction of the plurality of the dielectric films and the plurality of the electrode films; a semiconductor pillar provided in the through-hole; and a charge storage layer provided between the semiconductor pillar and each of the plurality of the electrode films. At least one of the dielectric films includes a film generating one of a compressive stress and a tensile stress, and at least one of the electrode films includes a film generating the other of the compressive stress and the tensile stress. | 05-03-2012 |
20130237047 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked structural body, a semiconductor pillar, and a memory unit. The stacked structural body is provided on a major surface of the substrate. The stacked structural body includes electrode films alternately stacked with inter-electrode insulating films in a direction perpendicular to the major surface. The pillar pierces the body in the direction. The memory unit is provided at an intersection between the pillar and the electrode films. The electrode films include at least one of amorphous silicon and polysilicon. The stacked structural body includes first and second regions. A distance from the second region to the substrate is greater than a distance from the first region to the substrate. A concentration of an additive included in the electrode film in the first region is different from that included in the electrode film in the second region. | 09-12-2013 |
20130319473 | SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING SAME - An LPCVD apparatus is provided with a processing chamber and a reaction cooling apparatus. The reaction cooling apparatus is placed outside the processing chamber and is configured to generate hydrogen fluoride gas by reaction of hydrogen gas and fluorine gas and to cool the hydrogen fluoride gas. The hydrogen fluoride gas cooled by the reaction cooling apparatus is supplied into the processing chamber as a cleaning gas. | 12-05-2013 |
Patent application number | Description | Published |
20080211628 | Biometric authentic device - A biometrics authentication system capable of achieving high precision and high safety is provided. A biometrics authentication system includes: a light source applying light to a living organism; a microlens array section condensing light from the living organism, and including a plurality of microlenses each having a different refractive power; an image pickup device obtaining image pickup data on a plurality of layers of the living organism on the basis of light condensed by the microlens array section; and an authentication section performing authentication of the living organism on the basis of image pickup data on the plurality of layers of the living organism. | 09-04-2008 |
20100014410 | OPTICAL PICKUP AND OPTICAL DISK DEVICE - An optical pickup includes: a light source that emits a light beam; an object lens that condenses the light beam on a target recording layer of an optical disk; a lens moving unit; a condensing lens; a hologram element that diffracts, in diffracting a reflected light beam and separating it into reflected zeroth-order and first-order light beams, parts of the reflected first-order light beam in a first direction and sets them as first and second beams, diffracts parts of the reflected first-order light beam in a second direction and sets them as third and fourth beams; and a photodetector that receives the first and second beams and the third and fourth beams and generates light reception signals, and receives interlayer stray light of a part of the light beam reflected by the other recording layers other than the target recording layer and generates a stray light reception signal. | 01-21-2010 |
20100214902 | OPTICAL PICKUP AND OPTICAL DISC DEVICE - An optical pickup includes: a light source outputting a light beam; an objective lens collecting the light beam on a target recording layer as a target of plural recording layers provided in an optical disc; a lens moving unit moving the objective lens in a tracking direction nearly orthogonal to track grooves helically or coaxially formed in the target recording layer; a collective lens collecting a reflected light beam formed when the light beam is reflected by the optical disc; a diffraction optical element diffracting part of the reflected first-order light beam in predetermined directions as first, second, third and fourth beams; and a photodetector receiving the first and second beams using first and second light receiving areas, and generating light reception signals, and receiving the third and fourth beams using third and fourth light receiving areas, and generates light reception signals. | 08-26-2010 |
20120294128 | RECORDING APPARATUS AND SERVO CONTROL METHOD - A recording apparatus includes the following elements. A recording light source emits pulse laser light for recording. A first light source emits first CW laser light. An irradiation optical system irradiates an optical recording medium with the pulse laser light and the first CW laser light via an objective lens in the state in which the optical axis of the first CW laser light is tilted with respect to the optical axis of the pulse laser light. A reception optical system outputs, to a first light receiver, a returned light portion of the first CW laser light which has been reflected by a reflection surface formed on the optical recording medium and which has been input through the objective lens. A focus servo controller performs focus servo control for the objective lens on the basis of a first reception signal obtained by the first light receiver. | 11-22-2012 |
20140044940 | OPTICAL RECORDING MEDIUM AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM - An optical recording medium includes a first transparent film layer, a second transparent film layer, and a recording material layer sandwiched between the first transparent film layer and the second transparent film layer. The recording material layer includes a hologram recording material. | 02-13-2014 |
20140068642 | OPTICAL PICKUP AND OPTICAL DISC DEVICE - There is provided an optical pickup including a light source, an objective lens configured to focus light from the light source onto one signal face of an optical disc, the optical disc including two or more signal faces, each of the signal faces having a groove formed therein, a photodetector configured to receive returning rays from the optical disc, the photodetector having a light receiving face divided into four light receiving regions by a dividing line that is substantially parallel to a track direction of the optical disc and by a dividing line that is substantially perpendicular to the track direction, and a shading unit disposed at an incident side of the photodetector and configured to block, of returning rays from a signal face other than the one signal face of the optical disc, at least a diffracted ray that is diffracted by the groove. | 03-06-2014 |
20140355404 | OPTICAL MEDIUM REPRODUCING APPARATUS AND OPTICAL MEDIUM REPRODUCING METHOD - An optical medium reproducing apparatus that optically reproduces an optical medium on which a plurality of tracks is formed in which a beam returning from the optical medium is divided into a first region of an outside portion and a second region of an inside region, according to the shape of the pupil of an object lens, and crosstalk between the tracks is reduced by using a first detection signal of the first region and a second detection signal of the second region. | 12-04-2014 |
Patent application number | Description | Published |
20090115138 | Gasket - A first gasket | 05-07-2009 |
20100044970 | Gasket - A gasket in an integrated double-layered structure comprising an outer layer and an inner layer enclosed by the outer layer, in which the outer layer is a low-hardness rubber layer having a JIS A hardness of 40-70, and the inner layer is a high-hardness rubber layer having a JIS A hardness of 80-100, where a ratio h/h | 02-25-2010 |
20110114232 | Method for Producing Steel Sheet for Gasket, and Gasket - The present invention aims at providing: a method for manufacturing such a kind of gasket-oriented steel plate excellent in elasticity and formability, in a manner to allow for reduction of a breaking elongation of the steel plate to thereby improve a formability (punchability) thereof while improving a proof stress of the steel plate against a repeated stress from a discharge valve to thereby maintain a higher elasticity of the steel plate; and a gasket able to withstand the repeated stress from the discharge valve. The manufacturing method of a gasket-oriented steel plate of the present invention comprises the steps of: annealing a starting steel material having a composition of: Mn less than 0.5%, Ni less than 2.0%, and Cr less than 12.0%; and subsequently temper rolling the annealed starting steel material at a rolling reduction ratio of 10% or more; and the gasket of the present invention is formed by adopting a gasket-oriented steel plate obtained by the above manufacturing method. | 05-19-2011 |
20130025337 | Gasket-Oriented Steel Plate Manufacturing Method, and Gasket - A method for manufacturing a gasket-oriented steel plate excellent in elasticity and formability, to allow for reduction of a breaking elongation of the steel plate to improve a formability (punchability) and improve a proof stress of the steel plate against a repeated stress from a discharge valve to maintain a higher elasticity of the steel plate and a gasket able to withstand the repeated stress from the discharge valve. | 01-31-2013 |
Patent application number | Description | Published |
20090255363 | PARALLEL MECHANISM - A parallel mechanism includes a base, actuators attached to the base, a plurality of arms coupled together in parallel, and a sensing device. Each of the arms has a first link, one end of which is coupled to the actuator, a second link through which the other end of the first link and a bracket are coupled together, a ball joint through which one end of the second link and the other end of the first link are swingably coupled together, and a ball joint through which the other end of the second link and the bracket are swingably coupled together. Each of the ball joints includes a ball stud including a ball-shaped head, a socket swingably holding the ball-shaped head of the ball stud, and a conductive member interposed between the ball-shaped head and the socket. The sensing device senses when at least one of the plurality of ball joints is loose, based on whether or not the ball stud and the socket are electrically continuous with one another. | 10-15-2009 |
20140040323 | ANALYZER CONTROLLING APPARATUS - An analyzer controlling apparatus enabling a user to correctly and easily select a method file in which analysis conditions for operating an analyzer are described. An analyzer controlling apparatus reads out a method file stored in a memory and sets an analysis condition for an analyzer. The analyzer controlling apparatus includes: image creating unit for creating an image according to a predetermined rule based on content of an analysis condition described in a method file and/or a file name of the method file and for storing the image into the memory in association with the method file; an image showing unit for reading an image out of the memory and showing the image onto a display screen; and an analysis condition setting unit for reading, out of the memory, a method file associated with an image selected by a user and for setting an analysis condition for the analyzer. | 02-06-2014 |