Patent application number | Description | Published |
20090231085 | RESISTOR AND DESIGN STRUCTURE HAVING RESISTOR MATERIAL LENGTH WITH SUB-LITHOGRAPHIC WIDTH - A resistor and design structure including at least one resistor material length in a dielectric, each of the least one resistor material length having a sub-lithographic width are disclosed. | 09-17-2009 |
20090231087 | RESISTOR AND DESIGN STRUCTURE HAVING SUBSTANTIALLY PARALLEL RESISTOR MATERIAL LENGTHS - A resistor and design structure including a pair of substantially parallel resistor material lengths separated by a first dielectric are disclosed. The resistor material lengths have a sub-lithographic dimension and may be spacer shaped. | 09-17-2009 |
20100025813 | STRUCTURE FOR DUAL CONTACT TRENCH CAPACITOR AND STRUCTURE THEROF - A dual contact trench capacitor and design structure for a dual contact trench capacitor is provided. The structure includes a first plate extending from a trench and isolated from a wafer body, and a second plate extending from the trench and isolated from the wafer body and the first plate. | 02-04-2010 |
20100025814 | STRUCTURE FOR DUAL CONTACT TRENCH CAPACITOR AND STRUCTURE THEREOF - A dual contact trench capacitor and design structure for a dual contact trench capacitor is provided. The structure includes a first plate extending from a trench and isolated from a wafer body, and a second plate extending from the trench and isolated from the wafer body and the first plate. | 02-04-2010 |
20100029055 | METHOD OF MANUFACTURING A DUAL CONTACT TRENCH CAPACITOR. - A method of manufacturing a dual contact trench capacitor is provided. The method includes forming a first plate provided within a trench and isolated from a wafer body by a first insulator layer formed in the trench. The method further includes forming a second plate provided within the trench and isolated from the wafer body and the first plate by a second insulator layer formed in the trench. | 02-04-2010 |
20100029056 | METHOD OF MANUFACTURING A DUAL CONTACT TRENCH CAPACITOR - A method of manufacturing a dual contact trench capacitor is provided. The method includes a first plate extending from a trench and isolated from a wafer body, and forming a second plate extending from the trench and isolated from the wafer body and the first plate. | 02-04-2010 |
20100117237 | Silicided Trench Contact to Buried Conductive Layer - A trench contact silicide is formed on an inner wall of a contact trench that reaches to a buried conductive layer in a semiconductor substrate to reduce parasitic resistance of a reachthrough structure. The trench contact silicide is formed at the bottom, on the sidewalls of the trench, and on a portion of the top surface of the semiconductor substrate. The trench is subsequently filled with a middle-of-line (MOL) dielectric. A contact via may be formed on the trench contact silicide. The trench contact silicide may be formed through a single silicidation reaction with a metal layer or through multiple silicidation reactions with multiple metal layers. | 05-13-2010 |
20100187614 | SELECTIVE NITRIDATION OF GATE OXIDES - A method of fabricating a semiconductor structure. The method includes forming a first feature of a first active device and a second feature of a second active device, introducing a first amount of nitrogen into the first feature of the first active device, and introducing a second amount of nitrogen into the second feature of the second active device, the second amount of nitrogen being different from the first amount of nitrogen. | 07-29-2010 |
20110084360 | EMBEDDED SERIES DEEP TRENCH CAPACITORS AND METHODS OF MANUFACTURE - Trench capacitors and methods of manufacturing the trench capacitors are provided. The trench capacitors are very dense series capacitor structures with independent electrode contacts. In the method, a series of capacitors are formed by forming a plurality of insulator layers and a plurality of electrodes in a trench structure, where each electrode is formed in an alternating manner with each insulator layer. The method further includes planarizing the electrodes to form contact regions for a plurality of capacitors. | 04-14-2011 |
20110088008 | METHOD FOR CONVERSION OF COMMERCIAL MICROPROCESSOR TO RADIATION-HARDENED PROCESSOR AND RESULTING PROCESSOR - A method is provided to convert commercial microprocessors to radiation-hardened processors and, more particularly, a method is provided to modify a commercial microprocessor for radiation hardened applications with minimal changes to the technology, design, device, and process base so as to facilitate a rapid transition for such radiation hardened applications. The method is implemented in a computing infrastructure and includes evaluating a probability that one or more components of an existing commercial design will be affected by a single event upset (SEU). The method further includes replacing the one or more components with a component immune to the SEU to create a final device. | 04-14-2011 |
20110316058 | FERRO-ELECTRIC CAPACITOR MODULES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator layer of a CMOS structure. The method further includes forming a top plate and a bottom plate over the barrier layer. The method further includes forming a ferro-electric material between the top plate and the bottom plate. The method further includes encapsulating the barrier layer, top plate, bottom plate and ferro-electric material with an encapsulating material. The method further includes forming contacts to the top plate and bottom plate, through the encapsulating material. At least the contact to the top plate and a contact to a diffusion of the CMOS structure are in electrical connection through a common wire. | 12-29-2011 |
20120042298 | STRUCTURE HAVING SUBSTANTIALLY PARALLEL RESISTOR MATERIAL LENGTHS - A design structure including a pair of substantially parallel resistor material lengths separated by a first dielectric are disclosed. The resistor material lengths have a sub-lithographic dimension and may be spacer shaped. | 02-16-2012 |
20120104551 | EMBEDDED SERIES DEEP TRENCH CAPACITORS AND METHODS OF MANUFACTURE - Trench capacitors and methods of manufacturing the trench capacitors are provided. The trench capacitors are very dense series capacitor structures with independent electrode contacts. In the method, a series of capacitors are formed by forming a plurality of insulator layers and a plurality of electrodes in a trench structure, where each electrode is formed in an alternating manner with each insulator layer. The method further includes planarizing the electrodes to form contact regions for a plurality of capacitors. | 05-03-2012 |
20120119273 | HYDROGEN BARRIER LINER FOR FERRO-ELECTRIC RANDOM ACCESS MEMORY (FRAM) CHIP - A ferro-electric random access memory (FRAM) chip, including a substrate; a first dielectric layer over the substrate; a gate over the first dielectric layer; a first aluminum oxide layer over the first dielectric layer and the gate; a second dielectric layer over the first aluminum oxide layer; a trench through the second dielectric layer and the first aluminum oxide layer to the gate; a hydrogen barrier liner over the second dielectric layer and lining the trench, and contacting the gate; and a silicon dioxide plug over the hydrogen barrier liner substantially filling the trench. | 05-17-2012 |
20120146069 | Oxide Based LED BEOL Integration - A light emitting diode (LED) structure and method for making a light emitting diode are disclosed. The structure comprises deep trench metal electrodes between which electroluminescent material is disposed on the sidewalls of the electrodes, forming a series of luminescent diode elements stacked horizontally on a substrate. | 06-14-2012 |
20120205776 | DUAL CONTACT TRENCH RESISTOR IN SHALLOW TRENCH ISOLATION (STI) AND METHODS OF MANUFACTURE - The invention relates to a semiconductor structures and methods of manufacture and, more particularly, to a dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture. In a first aspect of the invention, a method comprises forming a trench in a substrate; forming a first insulator layer within the trench; forming a first electrode within the trench, on the first insulator layer, and isolated from the substrate by the first insulator layer; forming a second insulator layer within the trench and on the first electrode; and forming a second electrode within the trench, on the second insulator layer, and isolated from the substrate by the first insulator layer and the second insulator layer. | 08-16-2012 |
20120299152 | DUAL CONTACT TRENCH RESISTOR AND CAPACITOR IN SHALLOW TRENCH ISOLATION (STI) AND METHODS OF MANUFACTURE - A resistor and capacitor are provided in respective shallow trench isolation structures. The method includes forming a first and second trench in a substrate and forming a first insulator layer within the first and second trench. The method includes forming a first electrode material within the first and second trench, on the first insulator layer, and forming a second insulator layer within the first and second trench and on the first electrode material. The method includes forming a second electrode material within the first and second trench, on the second insulator layer. The second electrode material pinches off the second trench. The method includes removing a portion of the second electrode material and the second insulator layer at a bottom portion of the first trench, and filling in the first trench with additional second electrode material. The additional second electrode material is in electrical contact with the first electrode material. | 11-29-2012 |
20130137233 | HYDROGEN BARRIER LINER FOR FERRO-ELECTRIC RANDOM ACCESS MEMORY (FRAM) CHIP - A method for forming a hydrogen barrier liner for a ferro-electric random access memory chip including forming a first dielectric layer over a substrate; forming a gate over the first dielectric layer; forming a first aluminum oxide layer over the gate and the first dielectric layer; forming a second dielectric layer over the first aluminum oxide layer; etching a trench through the second dielectric layer and the first aluminum oxide layer to the gate; forming a hydrogen barrier liner over the second dielectric layer, the hydrogen barrier liner lining the trench and contacting the gate; forming a silicon dioxide layer over the first aluminum dioxide layer, the silicon dioxide layer substantially filling the trench; and substantially removing the silicon dioxide layer leaving a silicon dioxide plug in the trench. | 05-30-2013 |
20130147015 | DEEP TRENCH DECOUPLING CAPACITOR AND METHODS OF FORMING - Solutions for forming a silicided deep trench decoupling capacitor are disclosed. In one aspect, a method of forming a semiconductor device includes: forming an outer trench in a silicon substrate, the forming exposing portions of the silicon substrate below an upper surface of the silicon substrate; depositing a dielectric liner layer inside the trench; depositing a doped polysilicon layer over the dielectric liner layer, the doped polysilicon layer forming an inner trench in the silicon substrate; forming a silicide layer over a portion of the doped polysilicon layer; forming an intermediate contact layer within the inner trench; and forming a contact over a portion of the intermediate contact layer and a portion of the silicide layer. | 06-13-2013 |
20130189818 | TRENCH ISOLATION AND METHOD OF FABRICATING TRENCH ISOLATION - Trench isolation structure and method of forming trench isolation structures. The structures includes a trench in a silicon region of a substrate, the trench extending from a top surface of the substrate into the silicon region; an ion implantation stopping layer over sidewalls of the trench; a dielectric fill material filling remaining space in the trench, the dielectric fill material not including any materials found in the stopping layer; an N-type dopant species in a first region of the silicon region on a first side of the trench; the N-type dopant species in a first region of the dielectric material adjacent to the first side of the trench; a P-type dopant species in a second region of the silicon region on a second side of the trench; and the P-type dopant species in a second region of the dielectric material adjacent to the second side of the trench. | 07-25-2013 |
20130292798 | DUAL CONTACT TRENCH RESISTOR AND CAPACITOR IN SHALLOW TRENCH ISOLATION (STI) AND METHODS OF MANUFACTURE - A resistor and capacitor are provided in respective shallow trench isolation structures. The method includes forming a first and second trench in a substrate and forming a first insulator layer within the first and second trench. The method includes forming a first electrode material within the first and second trench, on the first insulator layer, and forming a second insulator layer within the first and second trench and on the first electrode material. The method includes forming a second electrode material within the first and second trench, on the second insulator layer. The second electrode material pinches off the second trench. The method includes removing a portion of the second electrode material and the second insulator layer at a bottom portion of the first trench, and filling in the first trench with additional second electrode material. The additional second electrode material is in electrical contact with the first electrode material. | 11-07-2013 |
20140084352 | FERROELECTRIC RANDOM ACCESS MEMORY WITH OPTIMIZED HARDMASK - Device structures, fabrication methods, and design structures for a capacitor of a memory cell of ferroelectric random access memory device. The capacitor may include a first electrode comprised of a first conductor, a ferroelectric layer on the first electrode, a second electrode on the ferroelectric layer, and a cap layer on an upper surface of the second electrode. The second electrode may be comprised of a second conductor, and the cap layer may have a composition that is free of titanium. The second electrode may be formed by etching a layer of a material formed on a layer of the second conductor to define a hardmask and then modifying the remaining portion of that material in the hardmask to have a comparatively less etch rate, when exposed to a chlorine-based reactive ion etch chemistry, than when initially formed. | 03-27-2014 |
20140203342 | FERROELECTRIC RANDOM ACCESS MEMORY WITH OPTIMIZED HARDMASK - Device structures, fabrication methods, and design structures for a capacitor of a memory cell of ferroelectric random access memory device. The capacitor may include a first electrode comprised of a first conductor, a ferroelectric layer on the first electrode, a second electrode on the ferroelectric layer, and a cap layer on an upper surface of the second electrode. The second electrode may be comprised of a second conductor, and the cap layer may have a composition that is free of titanium. The second electrode may be formed by etching a layer of a material formed on a layer of the second conductor to define a hardmask and then modifying the remaining portion of that material in the hardmask to have a comparatively less etch rate, when exposed to a chlorine-based reactive ion etch chemistry, than when initially formed. | 07-24-2014 |
20140239498 | SILICIDED TRENCH CONTACT TO BURIED CONDUCTIVE LAYER - A trench contact silicide is formed on an inner wall of a contact trench that reaches to a buried conductive layer in a semiconductor substrate to reduce parasitic resistance of a reachthrough structure. The trench contact silicide is formed at the bottom, on the sidewalls of the trench, and on a portion of the top surface of the semiconductor substrate. The trench is subsequently filled with a middle-of-line (MOL) dielectric. A contact via may be formed on the trench contact silicide. The trench contact silicide may be formed through a single silicidation reaction with a metal layer or through multiple silicidation reactions with multiple metal layers. | 08-28-2014 |
20140258958 | METHOD FOR CONVERSION OF COMMERCIAL MICROPROCESSOR TO RADIATION-HARDENED PROCESSOR AND RESULTING PROCESSOR - A method is provided to convert commercial microprocessors to radiation-hardened processors and, more particularly, a method is provided to modify a commercial microprocessor for radiation hardened applications with minimal changes to the technology, design, device, and process base so as to facilitate a rapid transition for such radiation hardened applications. The method is implemented in a computing infrastructure and includes evaluating a probability that one or more components of an existing commercial design will be affected by a single event upset (SEU). The method further includes replacing the one or more components with a component immune to the SEU to create a final device. | 09-11-2014 |