Patent application number | Description | Published |
20110085001 | Ejection Examination Apparatus and Printing Apparatus - A small-sized module configured of a detection electrode and a determination unit is provided. | 04-14-2011 |
20110090284 | Printing Apparatus, Discharge Inspecting Apparatus and Discharge Inspecting Method - The printing apparatus includes: a head which discharges liquid from a nozzle and is grounded; a detection electrode which is opposed to the nozzle at a predetermined interval and is sealed by an insulating member; a power source which ensures the detection electrode is at a predetermined potential; a determining unit which detects a change in potential of the detecting electrode that is caused by the discharge of the liquid from the nozzle and determines a nozzle that does not normally discharge the liquid to the head on the basis of the change in potential of the detection electrode; and a cap portion which abuts the head during non-printing and accommodates the detection electrode. | 04-21-2011 |
20110115841 | Printing Device, Discharge Test Device and Discharge Test Method - A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified by the identification section, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium. | 05-19-2011 |
20130147869 | Printing Device, Discharge Test Device and Discharge Test Method - A discharge test device including: a head that includes nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, an identification section that identifies an abnormal nozzle, and a control section that controls the head and the identification section so that: when the temperature obtained is within a first temperature range, the head discharges the liquid to the medium after identification of the abnormal nozzle, when the temperature is outside the first temperature range and within a larger, second temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium. | 06-13-2013 |
20140071193 | Printing Device, Discharge Test Device And Discharge Test Method - A printing device or discharge test device comprising a head that includes a nozzle discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a missing-dot detecting section that detects whether or not the liquid is discharged from the nozzle, and a control section that controls the head and the missing-dot detecting section. When the temperature obtained is within a first temperature range, the head is configured to discharge the liquid to the medium and whether or not the liquid is discharged from the nozzle is detected. No such detection is made at other temperatures. When the temperature obtained is outside the first temperature range and within a second temperature range, the head is configured to discharge the liquid to the medium, and when the temperature obtained is outside the second temperature range, the liquid is not discharged to the medium. | 03-13-2014 |
20140192114 | Printing Apparatus - A printing apparatus which prints onto a recording medium by causing a print head to move in a main scanning direction includes a flexible cable through which, together with an arc-shaped loop, a signal is transmitted from a control substrate to the print head, a supporting member which is provided at a position which supports a portion of the flexible cable from the print head to the loop, and an insulating film which is provided between the supporting member and the flexible cable. | 07-10-2014 |
Patent application number | Description | Published |
20090230304 | SCANNING ELECTRON MICROSCOPE - In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response. | 09-17-2009 |
20090322973 | CHARGED PARTICLE BEAM APPARATUS - A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis. | 12-31-2009 |
20100090109 | SCANNING ELECTRON MICROSCOPE - A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode. | 04-15-2010 |
20110291010 | CHARGED PARTICLE RADIATION DEVICE - The present invention provides a scanning charged particle beam device including a sample chamber ( | 12-01-2011 |
20120127299 | SCANNING ELECTRON MICROSCOPE - A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole. | 05-24-2012 |
20120298864 | Charged Particle Beam Apparatus - In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source ( | 11-29-2012 |
20130026363 | CHARGED PARTICLE RADIATION DEVICE - The present invention provides a scanning charged particle beam device including a sample chamber ( | 01-31-2013 |
20130043388 | CHARGED PARTICLE RADIATION DEVICE - Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined. | 02-21-2013 |
20130299715 | CHARGED PARTICLE BEAM DEVICE - Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view ( | 11-14-2013 |
20130313430 | CHARGED PARTICLE BEAM DEVICE - Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere. | 11-28-2013 |
Patent application number | Description | Published |
20140021347 | CHARGED PARTICLE BEAM APPARATUS - Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film ( | 01-23-2014 |
20140151553 | CHARGED PARTICLE BEAM DEVICE, METHOD FOR ADJUSTING CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR INSPECTING OR OBSERVING SAMPLE - A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam. | 06-05-2014 |
20140175278 | CHARGED PARTICLE BEAM APPARATUS - Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film ( | 06-26-2014 |
20140197725 | ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE - Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source. | 07-17-2014 |
20140246583 | INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERVATION METHOD - Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section. | 09-04-2014 |
20140284477 | CHARGED-PARTICLE RADIATION APPARATUS - In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector ( | 09-25-2014 |
20140361167 | SCANNING ELECTRON MICROSCOPE - To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun ( | 12-11-2014 |
20150014530 | CHARGED PARTICLE BEAM APPARATUS - Provided is a charged particle beam apparatus ( | 01-15-2015 |
20150076347 | CHARGED PARTICLE BEAM APPARATUS - Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film ( | 03-19-2015 |
20150083908 | INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERVATION METHOD - A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance. | 03-26-2015 |
20150129763 | Charged Particle Beam Device - A charged particle beam device ( | 05-14-2015 |
20150213999 | Charged Particle Beam Apparatus - The ordinary charged particle beam apparatus works on the assumption that signals are detected while its diaphragm and the sample are being positioned close to each other. This structure is not suitable for observing a sample with a prominently uneven surface in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. The present invention provides a charged particle beam apparatus that separates its charged particle optical tube from the space in which the sample is placed. The apparatus includes a detachable diaphragm that lets a primary charged particle beam permeate or pass therethrough. Installed in the space where the sample is placed is a detector that detects secondary particles discharged from the sample irradiated with the primary charged particle beam. | 07-30-2015 |
20150228447 | Charged Particle Beam Device and Sample Observation Method - A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam. | 08-13-2015 |
20150318143 | Sample Base, Charged Particle Beam Device and Sample Observation Method - This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform. | 11-05-2015 |