Patent application number | Description | Published |
20080216743 | CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES - Embodiments of the invention provide chemical precursor ampoules that may be used during vapor deposition processes. In one embodiment, an apparatus for generating a chemical precursor gas used in a vapor deposition processing system is provided which includes a canister having a sidewall, a top, and a bottom forming an interior volume and a solid precursor material at least partially contained within a lower region of the interior volume. The apparatus further contains an inlet port and an outlet port in fluid communication with the interior volume and an inlet tube connected to the inlet port and positioned to direct a carrier gas towards the sidewall and away form the outlet port. In one example, the solid precursor contains pentakis(dimethylamido) tantalum (PDMAT). In another example, the apparatus contains a plurality of baffles that form an extended mean flow path between the inlet port and the outlet port. | 09-11-2008 |
20100247767 | GAS DELIVERY APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION - Apparatus and method for forming thin layers on a substrate are provided. A processing chamber has a gas delivery assembly that comprises a lid with a cap portion and a covering member that together define an expanding channel at a central portion of the lid, the covering member having a tapered bottom surface extending from the expanding channel to a peripheral portion of the covering member. Gas conduits are coupled to the expanding channel and positioned at an angle from a center of the expanding channel to form a circular gas flow through the expanding channel. The bottom surface of the chamber lid is shaped and sized to substantially cover the substrate receiving surface. One or more valves are coupled to the passageway, and one or more gas sources are coupled to each valve. A choke is disposed on the chamber lid adjacent a perimeter of the tapered bottom surface. | 09-30-2010 |
20120103526 | HIGH PURITY ALUMINUM COATING HARD ANODIZATION - The disclosure relates to a chamber component or a method for fabricating a chamber component for use in a plasma processing chamber apparatus. The chamber component includes a polished high purity aluminum coating and a hard anodized coating that is resistive to the plasma processing environment. | 05-03-2012 |
Patent application number | Description | Published |
20090220865 | METHOD AND APPARATUS FOR SOURCE FIELD SHAPING IN A PLASMA ETCH REACTOR - A method and apparatus for improved plasma etching uniformity are provided herein. In one embodiment, a field-shaping magnet is disposed above the chamber processing volume and adjacent to field induction coils. The field-shaping magnet provides improved control of the etch rate at various locations along the surface of a substrate by providing adjustability in the radial profile of a plasma-producing electric field generated by the induction coils. In another embodiment, two field-shaping magnets are used to improve etching uniformity at the substrate surface. | 09-03-2009 |
20100224321 | INDUCTIVELY COUPLED PLASMA REACTOR HAVING RF PHASE CONTROL AND METHODS OF USE THEREOF - Embodiments of the present invention generally provide an inductively coupled plasma (ICP) reactor having a substrate RF bias that is capable of control of the RF phase difference between the ICP source (a first RF source) and the substrate bias (a second RF source) for plasma processing reactors used in the semiconductor industry. Control of the RF phase difference provides a powerful knob for fine process tuning. For example, control of the RF phase difference may be used to control one or more of average etch rate, etch rate uniformity, etch rate skew, critical dimension (CD) uniformity, and CD skew, CD range, self DC bias control, and chamber matching. | 09-09-2010 |
20100276391 | INDUCTIVELY COUPLED PLASMA REACTOR HAVING RF PHASE CONTROL AND METHODS OF USE THEREOF - Methods of operating inductively coupled plasma (ICP) reactors having ICP sources and substrate bias with phase control are provided herein. In some embodiments, a method of operating a first plasma reactor having a source RF generator inductively coupled to the first plasma reactor on one side of a substrate support surface of a substrate support within the first plasma reactor and a bias RF generator coupled to the substrate support on an opposing side of the substrate support surface, wherein the source RF generator and the bias RF generator provide respective RF signals at a common frequency may include selecting a desired value of a process parameter for a substrate to be processed; and adjusting the phase between respective RF signals provided by the source RF generator and the bias RF generator to a desired phase based upon a predetermined relationship between the process parameter and the phase. | 11-04-2010 |
20110162797 | METHOD AND APPARATUS FOR PHOTOMASK PLASMA ETCHING - A method and apparatus for etching photomasks is provided herein. In one embodiment, the apparatus comprises a process chamber having a support pedestal adapted for receiving a photomask. An ion-neutral shield is disposed above the pedestal and a deflector plate assembly is provided above the ion-neutral shield. The deflector plate assembly defines a gas flow direction for process gases towards the ion-neutral shield, while the ion-neutral shield is used to establish a desired distribution of ion and neutral species in a plasma for etching the photomask. | 07-07-2011 |
20110236806 | DC VOLTAGE CHARGING OF CATHODE FOR PLASMA STRIKING - Methods for processing photomasks are provided herein. In some embodiments, a method for processing a photomask may include providing a photomask to a substrate support within a process chamber; providing a process gas to the process chamber having the photomask disposed therein; providing a negative or zero voltage to a substrate support cathode having the photomask disposed thereon; providing a source RF power to an anode coupled to the process chamber to ignite the process gas to form a plasma; and processing the photomask. | 09-29-2011 |
Patent application number | Description | Published |
20090100268 | METHODS AND SYSTEMS FOR PROVIDING ACCESS CONTROL TO SECURED DATA - In a system for providing access control management to electronic data, techniques to secure the electronic data and keep the electronic data secured at all times are disclosed. According to one embodiment, a secured file or secured document includes two parts: an attachment, referred to as a header, and an encrypted document or data portion. The header includes security information that points to or includes the access rules and a file key. The access rules facilitate restrictive access to the secured document and essentially determine who/when/how/where the secured document can be accessed. The file key is used to encrypt/decrypt the encrypted data portion. Only those who have the proper access privileges are permitted to retrieve the file key to encrypt/decrypt the encrypted data portion. | 04-16-2009 |
20100199088 | Method and System For Securing Digital Assets Using Process-Driven Security Policies - Techniques for dynamically altering security criteria used in a file security system are disclosed. The security criteria pertains to keys (or ciphers) used by the file security system to encrypt electronic files to be secured or to decrypt electronic files already secured. The security criteria can, among other things, include keys that are required to gain access to electronic files. Here, the keys can be changed automatically as electronic files transition between different states of a process-driven security policy. The dynamic alteration of security criteria enhances the flexibility and robustness of the security system. In other words, access restrictions on electronic files can be dependent on the state of the process-driven security policy. | 08-05-2010 |
20120159191 | METHOD AND APPARATUS FOR TRANSITIONING BETWEEN STATES OF SECURITY POLICIES USED TO SECURE ELECTRONIC DOCUMENTS - Techniques for dynamically altering security criteria used in a file security system are disclosed. The security criteria pertains to keys (or ciphers) used by the file security system to encrypt electronic files to be secured or to decrypt electronic files already secured. The security criteria can, among other things, include keys that are required to gain access to electronic files. Here, the keys can be changed automatically as electronic files transition between different states of a process-driven security policy. The dynamic alteration of security criteria enhances the flexibility and robustness of the security system. In other words, access restrictions on electronic files can be dependent on the state of the process-driven security policy and enforced in conjunction with one or more cryptographic methods. | 06-21-2012 |
20140201850 | METHODS AND SYSTEMS FOR PROVIDING ACCESS CONTROL TO SECURED DATA - In a system for providing access control management to electronic data, techniques to secure the electronic data and keep the electronic data secured at all times are disclosed. According to one embodiment, a secured file or secured document includes two parts: an attachment, referred to as a header, and an encrypted document or data portion. The header includes security information that points to or includes the access rules and a file key. The access rules facilitate restrictive access to the secured document and essentially determine who/when/how/where the secured document can be accessed. The file key is used to encrypt/decrypt the encrypted data portion. Only those who have the proper access privileges are permitted to retrieve the file key to encrypt/decrypt the encrypted data portion. | 07-17-2014 |
Patent application number | Description | Published |
20090003794 | Method and system for facilitating creation of content - There is provided a method for use by a content capturing device for facilitating creation of content. According to one embodiment, the method includes receiving a content project file in a receiver of the content capturing device. The method further includes providing instructions to the user via a user interface for creating one or more portions of the content. In one embodiment, the instructions can be included in the content project file. The content can be, for example, a video or a collection of one or more digital still images. The method further includes capturing the one or more portions of the content using a video module and automatically editing the one or more portions of the content to generate the content. | 01-01-2009 |
20090234888 | Method and system for producing a mood guided media playlist - There is provided a method of providing a mood guided media playlist. The method comprises identifying a mood rating of media assets stored in a media assets database; labeling the media assets with metatags corresponding to the mood rating; identifying a mood theme according to an input received from a client computer; designating mood associated media assets corresponding to the mood theme from the labeled media assets; determining a media playlist length corresponding to the mood theme; assembling a media playlist having the media playlist length corresponding to the mood theme, from the mood associated media assets; and providing the media playlist for displaying. The method may comprise providing a mood selection virtual tool enabling a user of the client computer to recognize and select a desired mood theme, wherein the mood selection virtual tool can display a spectrum of colors corresponding to a plurality of user selectable mood themes. | 09-17-2009 |
20100116890 | Microtransactional association of physical and virtual accessories - There is provided a stored value card comprising a physical accessory being a portion of the stored value card and being detachable from the stored value card, wherein the physical accessory is configured to be attached to a physical primary; and a unique identification code, wherein the unique identification code is associated with the stored value card, the physical accessory and a virtual accessory, and wherein a virtual primary and the virtual accessory are stored in a network server and correspond to the physical primary and the physical accessory, respectively. | 05-13-2010 |