Patent application number | Description | Published |
20090079800 | ACTUATOR AND LIQUID-EJECTING HEAD - An actuator includes a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode and displaceably disposed above a substrate and a film covering side and top surfaces of the piezoelectric element. The rigidity of the film is 1% or less of that of the piezoelectric layer. | 03-26-2009 |
20090219345 | METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS - A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern. | 09-03-2009 |
20090231396 | LIQUID JET HEAD AND A LIQUID JET APPARATUS - An upper surface of a piezoelectric layer in an area opposed to a pressure generating chamber and a side surface of the piezoelectric layer in an arrangement direction of the piezoelectric elements are covered with an upper electrode. In addition, on one end in a longitudinal direction of the piezoelectric element, the piezoelectric layer extends up to an adhesive area of a flow passage forming substrate to which a circumferential portion of a piezoelectric element preserver of a joining substrate is adhered, and the lower electrode extends up to the outside of an end portion of the piezoelectric layer to form a terminal section in an end portion of the lower electrode. | 09-17-2009 |
20090284568 | LIQUID JET HEAD AND A LIQUID JET APPARATUS - A lower electrode | 11-19-2009 |
20100149284 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, ACTUATOR DEVICE, AND MANUFACTURING METHOD OF LIQUID EJECTING HEAD - A liquid ejecting head includes: a piezoelectric element having a first electrode provided above a flow path forming substrate in which pressure generation chambers are formed, a piezoelectric body layer provided so as to correspond to each pressure generation chamber, and a second electrode provided above the piezoelectric body layer, wherein the first electrode, which is formed in the region facing the region where the piezoelectric body layer is formed, includes a first electrically-conductive layer, and a second electrically-conductive layer, which is made of a material having a smaller Young's modulus than that of the first electrically-conductive layer and is formed closer to the flow path forming substrate than the first electrically-conductive layer; and the first electrode, which is formed in the region facing the region where the piezoelectric body layer is not formed, has a surface constituted of the second electrically-conductive layer. | 06-17-2010 |
20100245491 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR DEVICE - A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation. | 09-30-2010 |
20110115855 | LIQUID DROPLET DISCHARGING HEAD AND LIQUID DROPLET DISCHARGING APPARATUS - A liquid droplet discharging head includes a pressure chamber substrate having a pressure chamber in communication with a nozzle hole. The pressure chamber has compartments adjacent to one another in a first direction. A vibrating plate has a first surface for covering the pressure chamber and a second, opposite, surface. The vibrating plate has a first area surface as a part of the first surface, the first area surface covering the pressure chamber in a view in a second direction that is orthogonal to the first direction and is normal to the first surface. A first conductive layer is formed at a plurality of areas to cover, in a view in the second direction. | 05-19-2011 |
20110193916 | ACTUATOR, LIQUID DROPLET EJECTING HEAD, AND MANUFACTURING METHOD THEREOF, AND LIQUID DROPLET EJECTING APPARATUS - An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact ; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion. | 08-11-2011 |
20110234710 | LIQUID EJECTING HEAD, METHOD FOR MANUFACTURING THE SAME AND LIQUID EJECTING APPARATUS - There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths. | 09-29-2011 |
20110316938 | LIQUID JET HEAD AND A LIQUID JET APPARATUS - A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode 60 and the end surface of the piezoelectric material layer 70 satisfy the relationship D2≧D1. | 12-29-2011 |
20120026250 | METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS - A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern. | 02-02-2012 |
20140071206 | LIQUID JET HEAD AND A LIQUID JET APPARATUS - A lower electrode | 03-13-2014 |
20140078215 | METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS - A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern. | 03-20-2014 |
20140267508 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC ELEMENT, ULTRASONIC TRANSDUCER, AND ULTRASONIC DEVICE - A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method. | 09-18-2014 |
20140267511 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT - A flow channel substrate includes pressure chambers, and the pressure chambers communicate with nozzle openings. Piezoelectric elements located on either side of the flow channel substrate include a first electrode, a piezoelectric layer, and a second electrode. The piezoelectric layer contains lead, titanium, and zirconium. The second electrode includes a first layer on the piezoelectric layer side and a second layer on the side of the first layer opposite the piezoelectric layer. The second electrode also includes projections. The projections are aggregates of the lead originating in the piezoelectric layer, and the projections stick out of the surface of the second electrode opposite the piezoelectric layer. | 09-18-2014 |
20140292949 | LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS - A piezoelectric layer is integrally formed in such a way that opening portions of a plurality of pressure chambers in a flow channel forming member are covered. In a region that corresponds to a position between adjacent pressure chambers in the piezoelectric layer, a hollow that penetrates the piezoelectric layer or that has a relatively thin thickness in the piezoelectric layer is formed along the sides of the opening of each of the pressure chambers. The hollow is formed to avoid a region along a corner of the pressure chamber in the region. | 10-02-2014 |
20150052715 | METHODS OF MANUFACTURING PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND ULTRASONIC TRANSDUCER - A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer. | 02-26-2015 |