Patent application number | Description | Published |
20090255447 | TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION - The invention is directed to a table for vacuum application which is guided by means of aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members. | 10-15-2009 |
20100061667 | AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOADING UNIT, PARTICULARLY FOR VACUUM APPLICATION - A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element. | 03-11-2010 |
20100122603 | Aerostatically Guided Table System for Vacuum Application - A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units ( | 05-20-2010 |
20140369640 | Coating of Optical Waveguides - The invention relates to a method for producing an optical waveguide ( | 12-18-2014 |
Patent application number | Description | Published |
20090308851 | DEVICE FOR LASER MACHINING - Devices for laser machining include a machining head for directing laser light towards a workpiece, the laser light being emitted from a laser light source and directed along an optical beam path and the machining head including one or more focusing optics that are arranged in the optical beam path, a collimator including one or more collimating optics that are arranged in the optical beam path in front of the focusing optics and the collimator having an axis that extends parallel to the main direction of the laser light at the collimating optics, one or more deflecting optics arranged in the optical beam path between the collimating optics and the focusing optics, the deflecting optics configured to deflect the laser light emerging from the collimating optics towards the focusing optics, wherein the machining head is adjustable relative to the collimator along a z-axis, and the axis of the collimator extends under an angle to the z-axis. | 12-17-2009 |
20140202972 | Profile carriers and related methods - A profile carrier includes a base profile of metal and a reinforcement member of fiber-reinforced plastic material that reinforces the base profile. The reinforcement member and the base profile are connected to each other by at least one wall-side positive-locking element that is provided on a profile wall of the base profile and that extends in a transverse direction of the profile wall. The at least one wall-side positive-locking element and the reinforcement member engage one inside of the other in the transverse direction of the profile wall with a positive-locking connection between the reinforcement member and the base profile formed substantially parallel to the profile wall. | 07-24-2014 |
20140332654 | Movement Unit for a Machine Tool and Machine Tool with such a Movement Unit - A movement unit for a machine tool comprises a supporting structure movable in a first direction for supporting a functional unit of the machine tool, with two longitudinal guides extending in the first direction which are offset relative to one another in a transverse second direction. A guide unit is mounted on each longitudinal guide to be relatively movable in the first direction and not the second direction. A bearing structure connects the supporting structure to one of the guide units to be not relatively movable in the first direction and movable in the second direction. The bearing structure comprises a bearing receptacle having a receptacle wall extending in the second direction, and a bearing projection which engages the bearing receptacle. The bearing projection and the receptacle wall are supported against one another to prevent their relative motion in the first direction and are movable in the second direction. | 11-13-2014 |
Patent application number | Description | Published |
20090217484 | HINGE FOR AN AIRBAG COVER - The invention relates to a hinge for an airbag cover, having a planar textile element as a hinge between the cover of the airbag and an adjacent airbag cover region, for example in the interior of a motor vehicle, and to a region of the planar textile element which faces a carrier of the airbag cover and is embedded in a matrix which is connected to the cover, and a region of the planar textile element which is not embedded in the matrix. | 09-03-2009 |
20090302579 | METHOD FOR PRODUCING A WEAKENED ZONE, IN PARTICULAR A PREDETERMINED BREAKING POINT FOR AN AIRBAG EXIT OPENING, COMPONENT AND APPARATUS - In a method for producing a weakened zone, in particular a predetermined breaking point for an airbag exit opening, in a carrier part equipped on the visible side with a decorative material, in particular a leather decoration, the carrier part is provided with a weakened section using first process, and weakening of the decorative material is performed through the weakened section of the carrier part using a second process. The weakening of the carrier part and the weakening of the decorative material taking place temporally close to one another, in particular at the same time. Furthermore, the invention relates to a component and an apparatus for carrying out the method. | 12-10-2009 |
20090304973 | THERMOPLASTIC FILM FOR AIRBAG COVERS - A thermoplastic film for airbag covers contains a cover layer and a foam layer. The cover layer is made of at least two layers, having an outer layer and an inner layer, and an elongation at tear of the inner layer of the cover layer and of the foamed layer is considerably less than the elongation at tear of the outer layer of the cover layer. | 12-10-2009 |
Patent application number | Description | Published |
20080247632 | Method for Mask Inspection for Mask Design and Mask Production - The invention relates to a mask inspection method that can be used for the design and production of masks, in order to detect relevant weak points early on and to correct the same. According to said method for mask inspection, an aerial image simulation, preferably an all-over aerial image simulation, is carried out on the basis of the mask design converted into a mask layout, in order to determine a list of hot spots. The mask/test mask is analysed by means of an AIMS tool, whereby real aerial images are produced and compared with the simulated aerial images. The determined differences between the aerial images are used to improve the mask design. The inventive arrangement enables a method to be carried out for mask inspection for mask design and mask production. The use of the AIMS tool directly in the mask production process essentially accelerates the mask production, while reducing the error rate and cost. | 10-09-2008 |
20110229010 | METHOD AND DEVICE FOR MEASURING THE RELATIVE LOCAL POSITION ERROR OF ONE OF THE SECTIONS OF AN OBJECT THAT IS EXPOSED SECTION BY SECTION - A method for measuring the relative local position error of one of the sections of an object that is exposed section by section, in particular of a lithography mask or of a wafer, is provided, each exposed section having a plurality of measurement marks, wherein a) a region of the object which is larger than the one section is imaged in magnified fashion and is detected as an image, b) position errors of the measurement marks contained in the detected image are determined on the basis of the detected image, c) corrected position errors are derived by position error components which are caused by the magnified imaging and detection being extracted from the determined position errors of the measurement marks, d) the relative local position error of the one section is derived on the basis of the corrected position errors of the measurement marks. | 09-22-2011 |