Patent application number | Description | Published |
20080199181 | OPTICAL TRANSMISSION APPARATUS WITH OPTICAL AMPLIFIERS - An optical transmission apparatus including an optical amplifier for providing a high-power optical amplifier on the receive side, in which a wavelength of pumping light for an optical amplifier on the transmission side is suitably shifted to be different from a wavelength of pumping light for an optical amplifier on the receive side, pumping optical power for the optical amplifier on the transmission side is not all consumed in a doped fiber in amplification process, and remnant pump light that was left surplus is added by a wavelength multiplex coupler to the pumping light for the optical amplifier on the receive side, thereby enhancing a gain and light output without an increase in output power of the pumping light used for the optical amplifier on the receive side. | 08-21-2008 |
20080204724 | Method Of Apparatus For Detecting Particles On A Specimen - A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors. | 08-28-2008 |
20080310855 | Optical Transmission Equipment and Method for Controlling Thereof - The optical transmission equipment includes: a demultiplexer for demultiplexing a transmitted wavelength-multiplexed optical signal to first and second optical signals; a first variable dispersion compensation unit; a second variable dispersion compensation unit; a first error detector; a second error detector; and a dispersion compensation control unit for controlling dispersion compensation amounts of the first and second variable dispersion compensation units based on the detection result of the first or second error detector. Upon detection of a signal error in the first optical signal, the first variable dispersion compensation unit is controlled to change from a first compensation amount to a third compensation amount, and the second variable dispersion compensation unit is controlled to change from a second compensation amount to a fourth compensation amount. | 12-18-2008 |
20090079973 | METHOD AND APPARATUS FOR INSPECTING FOREIGN PARTICLE DEFECTS - The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus. | 03-26-2009 |
20090087185 | OPTICAL TRANSMISSION APPARATUS AND CONTROL METHOD THEREFOR - An optical transmission apparatus comprising a first detector for detecting the power of the supervisory signal light separated from received wavelength-division multiplexed signal lights; a second detector for detecting the power of the wavelength-division multiplexed signal lights after the separation of the supervisory signal light; a gain-controlled type optical amplifier for amplifying the wavelength-division multiplexed signal lights; an optical attenuator coupled to the amplifier; and a control unit for controlling the optical amplifier and the optical attenuator so as to keep the output level of the wavelength-division multiplexed signal lights to a predetermined target value, wherein the control unit restrains automatic output level control by the optical attenuator when the supervisory signal light power fluctuates within its permissible range and fluctuations in the signal light power have deviated from its permissible range. | 04-02-2009 |
20090091750 | Method For Inspecting Pattern Defect And Device For Realizing The Same - When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects. | 04-09-2009 |
20090116839 | OPTICAL TRANSMISSION SYSTEM AND SIGNAL SPEED CONVERTING APPARATUS - A signal speed converting apparatus to be connected to a WDM transmission end office, comprising a first interface connected to a first optical line group, a plurality of second interfaces connected to a second optical line group, and a speed converter. The first interface has a first framer for terminating a frame in a first format received from the first optical line group and outputting an information signal extracted from the received frames as a serial signal train or parallel signal trains. The speed converter converts the output signal from the first framer into transmission signal trains each including interleaved communication frame by cyclically distributing the output signal from the first framer to a plurality of internal lines. Each of the second interfaces has a second framer for converting the communication frame received from one of the internal lines into information frame in a second format to be transmitted to the second optical line group. Management information inserting units are located between the first and second interfaces in order to insert management information to be communicated with an opposite apparatus into the transmission signal trains on the internal lines. | 05-07-2009 |
20090142057 | OPTICAL TRANSMISSION EQUIPMENT AND OPTICAL NETWORK - In order to insert a regenerator into a wavelength cross-connect equipment, there is provided at least one port that demultiplexes one wavelength among the wavelength multiplexed signals that are input to a wavelength selective switch. An output of the port that demultiplexes one wavelength is input to the regenerator, and an output of the regenerator is again input to the WSS. The wavelength output from the regenerator is converted into another wavelength different from the wavelength that is input to the regenerator and can be processed by the WSS in advance. The output from the regenerator is input to the WSS through an optical coupler or another input port of the WSS. | 06-04-2009 |
20090317078 | OPTICAL TRANSMISSION DEVICE AND OPTICAL TRANSMISSION METHOD - The signal quality of ultra high-speed signals such as 40 Gbit/s and 100 Gbit/s are significantly degraded due to wavelength dispersion and nonlinear effects in an optical fiber. Thus, there is provided a transponder unit in which a light source is polarization multiplexed in a direction mutually orthogonal to a signal direction, in order to reduce the nonlinear effects in the optical fiber and improve the signal quality. At the same time, it is possible to monitor an amount of the wavelength dispersion in the optical fiber, allowing for more precise dispersion compensation design. | 12-24-2009 |
20090324229 | OPTICAL TRANSMISSION APPARATUS AND CONTROL METHOD THEREFOR - An optical transmission apparatus comprising a first detector for detecting the power of the supervisory signal light separated from received wavelength-division multiplexed signal lights; a second detector for detecting the power of the wavelength-division multiplexed signal lights after the separation of the supervisory signal light; a gain-controlled type optical amplifier for amplifying the wavelength-division multiplexed signal lights; an optical attenuator coupled to the amplifier; and a control unit for controlling the optical amplifier and the optical attenuator so as to keep the output level of the wavelength-division multiplexed signal lights to a predetermined target value, wherein the control unit restrains automatic output level control by the optical attenuator when the supervisory signal light power fluctuates within its permissible range and fluctuations in the signal light power have deviated from its permissible range. | 12-31-2009 |
20100103409 | METHOD AND APPARATUS FOR DETECTING DEFECTS - An inspection apparatus projects a laser beam on the surface of a SOI wafer and detects foreign matter on and defects in the surface of the SOI wafer by receiving scattered light reflected from the surface of the SOI wafer. The wavelength of the laser beam used by the inspection apparatus is determined so that a penetration depth of the laser beam in a Si thin film may be 10 nm or below to detect only foreign matter on and defects in the outermost surface and not to detect foreign matter and defects in a BOX layer. Only the foreign matter on and defects in the outermost surface layer can be detected without being influenced by thin-film interference by projecting the laser beam on the surface of the SOI wafer and receiving scattered light rays. | 04-29-2010 |
20100172644 | Optical Transmission Equipment And Optical Add-Drop Multiplexer - An optical transmission equipment includes an optical amplifier that is coupled to an optical transmission path and amplifies a first optical signal which is received from the optical transmission path, a first controller that controls the optical amplifier depending on a first optical power of output light from the optical amplifier and a second optical power of reflecting light to the optical amplifier, an optical coupler that branches a second optical signal from the optical amplifier into a first output and a second output, an optical demultiplexer that demultiplexes the first output of the optical coupler, an optical switch or attenuator that receives the second output of the optical coupler, and a second controller that controls the optical switch or attenuator depending on a third optical power of output light from the optical switch or attenuator and a fourth optical power of reflecting light to the optical switch or attenuator. | 07-08-2010 |
20110032515 | METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN - A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors. | 02-10-2011 |
20110228258 | METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN - A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors. | 09-22-2011 |