Patent application number | Description | Published |
20090261084 | Laser Dicing Sheet and Manufacturing Method For Chip Body - An object of the present invention is to provide a laser dicing sheet which is capable of preventing cutting of dicing sheet by laser beam, damage of the chuck table and fusion of the dicing sheet to the chuck table. | 10-22-2009 |
20110053059 | MASK BLANKS - The present invention provides a mask blank which comprises a substrate made of a synthetic quartz glass and a light-shielding film laminated on a surface of the substrate and is for use in a semiconductor device production technique employing an exposure light wavelength of 200 nm or shorter, wherein the mask blank has a birefringence, as measured at a wavelength of 193 nm, of 1 nm or less per substrate thickness. According to the present invention, mask blanks suitable for use in the immersion exposure technique and the polarized illumination technique are provided. | 03-03-2011 |
20120209072 | ENDOSCOPE - An endoscope includes: a distal end rigid member to which an observation optical portion is fixedly provided; a distal end cover fixed to the distal end rigid member in an integrated manner, and including an illuminating window portion and a light-emitting device installing hole; a light-emitting device arranged in the light-emitting device installing hole and including a light-emitting portion that faces the illuminating window portion included in the distal end cover, and a conductive portion opposed to the opening of the light-emitting device installing hole; a substrate having thermal conductance and combining as a heat dissipating portion, and connected to the conductive portion of the light-emitting device, a power supply cable being connected thereto; and a heat dissipation member having thermal conductance, an end side of which being connected to the substrate and another end side projecting relative to the substrate to dissipate heat conducted to the substrate. | 08-16-2012 |
20130133938 | Dicing Sheet and a Production Method of a Semiconductor Chip - A dicing sheet includes a base, an intermediate layer on one face of the base, and an pressure sensitive adhesive layer provided on the intermediate layer and having the thickness of 8 to 30 μm. The pressure sensitive adhesive layer includes a compound having an energy ray curable double bond in a molecule, and a storage elasticity G′ at 23° C. of the pressure sensitive adhesive layer before curing is larger than 4 times of a storage elasticity at 23° C. of the intermediate layer. When the dicing sheet is laminated via the adhesive sheet on a wafer formed with a cylinder shape electrodes having a height of 15 μm and a diameter of 15 μm at a pitch of 40 μm having 3 rows 3 columns in equal spacing, at a center of the electrode of the cylinder shape electrodes formed in 3 rows 3 columns, the pressure sensitive adhesive layer does not contact at a part of a height of 7.5 μm or less of the electrode. | 05-30-2013 |
20130274554 | ENDOSCOPE - An endoscope includes a rigid portion having an illuminating portion disposed therein and a cover integrally molded to include a transparent first resin member and a colored second resin member. The first resin member configures a first molded portion including an illumination window forming portion which includes an incident surface on which the illumination light is made incident and an emission surface from which the incident illumination light is emitted and an eaves portion projecting from the illumination window forming portion and including a first surface located on the emission surface side and a second surface located on the incident surface side. The second resin member configures a second molded portion forming a cover external shape that covers, the side surface of the illumination window forming portion, the first surface of the eaves portion, and the second surface of the eaves portion. | 10-17-2013 |
Patent application number | Description | Published |
20100326708 | IMAGE DISPLAY ELEMENT AND MANUFACTURING METHOD THEREOF - An image display element includes: a front panel; a back panel opposite thereto; a plurality of pixels arranged in a matrix between both the panels; and plural electrodes for controlling the pixels. Both the panels are bonded together with the pixels and the electrodes interposed therebetween, and the electrodes are connected to a driving circuit via metal film wires. Division is performed so as to expose electrode terminals, and a groove part V-shaped in cross section is formed at the divided portion. The metal film wires are formed on the surface of the top of the back panel, and the electrode terminals and the metal film wires are connected by a conductive paste coated along the tilt surfaces forming the groove part. | 12-30-2010 |
20100328192 | IMAGE DISPLAY ELEMENT AND MANUFACTURING METHOD THEREOF - An image display element includes: a front panel; a back panel opposite to the front panel; a plurality of pixels arranged in a matrix between both the panels, and to be selected to be in a display or non-display state; and plural electrodes for controlling the pixels. Both the panels are bonded together with the pixels and the electrodes interposed therebetween, and the electrodes are connected to a driving control circuit via metal wires. The back panel is divided such that electrode terminals connected to the electrodes are exposed between adjacent plural pixel lines, and a groove part having a shape wider at the top on the back side of the opposing surface from the front panel than at the bottom is formed at the divided portion. The metal wires are connected to the exposed electrode terminals of the groove part. | 12-30-2010 |
20100328193 | IMAGE DISPLAY ELEMENT AND MANUFACTURING METHOD THEREOF - An image display element includes: a front panel; a back panel opposite thereto; a plurality of pixels arranged between both the panels; and plural electrodes for controlling the pixels. The panels are bonded with the pixels and the electrodes interposed therebetween, and the electrodes are connected to a driving circuit via metal film wires. The back panel is divided so as to expose electrode terminals, and a groove part V-shaped in cross section is formed at the divided portion. The metal film wires are formed on the top surface of the back panel, and the electrode terminals and the metal film wires are connected by a conductive paste coated along the tilt surfaces forming the groove part. Partitions are disposed between the adjacent electrode terminals at the bottom of the groove part. | 12-30-2010 |
20100328921 | IMAGE DISPLAY ELEMENT AND MANUFACTURING METHOD THEREOF - An image display element includes: a front panel; a back panel opposite thereto; plural pixels arranged in a matrix between the panels; and plural electrodes for controlling the pixels. The panels are bonded with the pixels and the electrodes interposed therebetween. The electrodes are connected to a driving circuit via metal film wires. The back panel is divided so as to expose electrode terminals, and a groove part V-shaped in cross section is formed at the divided portion. The metal film wires are formed on the top surface of the back panel, and the electrode terminals and the metal film wires are connected by a conductive paste coated along the tilt surfaces forming the groove part. A contact resistance reducing means is disposed at the connection part interface between the electrode terminal and the conductive paste. | 12-30-2010 |
20100330862 | METHOD FOR MANUFACTURING IMAGE DISPLAY ELEMENT - A method for manufacturing an image display element including: a front panel; a back panel facing the front panel; plural pixels arranged in a matrix between the panels, and to be selected to be in a display or non-display state; and plural electrodes for controlling the pixels, the panels being bonded with the pixels and the electrodes interposed therebetween, and the electrodes being connected to a driving control circuit via metal wires, includes a first step of performing dicing from the back side of the opposing surface from the front panel, and forming a groove part such that electrode terminals connected to the electrodes are exposed between adjacent plural pixel lines, with the back panel bonded thereto, and a second step of forming the metal wires so as to be connected to the electrode terminals exposed at the groove part. | 12-30-2010 |
20120309253 | METHOD FOR MANUFACTURING IMAGE DISPLAY ELEMENT - A method for manufacturing an image display element including: a front panel; a back panel facing the front panel; plural pixels arranged in a matrix between the panels, and to be selected to be in a display or non-display state; and plural electrodes for controlling the pixels, the panels being bonded with the pixels and the electrodes interposed therebetween, and the electrodes being connected to a driving control circuit via metal wires, includes a first step of performing dicing from the back side of the opposing surface from the front panel, and forming a groove part such that electrode terminals connected to the electrodes are exposed between adjacent plural pixel lines, with the back panel bonded thereto, and a second step of forming the metal wires so as to be connected to the electrode terminals exposed at the groove part. | 12-06-2012 |
Patent application number | Description | Published |
20090022337 | SIGNAL AMPLIFIER CIRCUIT - A plurality of main amplifiers amplifies input audio signals with an adjustable gain. A first selector selects any of the input audio signals. An auxiliary amplifier receives an output of the first selector and amplifies this output with an adjustable gain. A second selector receives n outputs from the main amplifiers and selects any of the outputs. A soft switching circuit receives an output of the second selector at a first input terminal, receives an output of the auxiliary amplifier at a second input terminal, and makes the output transition gradually from one of the input terminals to the other of the input terminals. Output switches are respectively provided for the main amplifiers, an output of a corresponding main amplifier is received at a first input terminal, an output of the soft switching circuit is received at a second input terminal, and one of the outputs is selected to be outputted. | 01-22-2009 |
20090208034 | AUDIO SIGNAL PROCESSING CIRCUIT - Plural variable gain amplifiers amplify audio signals of plural channels for each channel. An interface receives, from outside, plural gain control data individually designating gain of each channel. Plural gain controllers respectively switch the gain of the plural variable gain amplifiers, based on the plural gain control data. The plural gain controllers arrange timing to change gain of a variable gain amplifier corresponding to gain control data received in a predetermined data entry period, among the plural gain control data that are inputted at different timing. | 08-20-2009 |
20090220106 | AUDIO SIGNAL PROCESSING CIRCUIT - A first amplifier amplifies a first audio signal. A synthesizer circuit synthesizes an output signal of the first amplifier with a second audio signal. The first amplifier is arranged such that a first state in which the first amplifier amplifies a signal with a set gain and a second state in which the first amplifier outputs a fixed bias voltage can be seamlessly switched. A signal processing unit is disposed upstream of the first amplifier, subjects a third audio signal to a predetermined signal process, and outputs it as the first audio signal. When a state of the signal processing unit is switched, the first amplifier is changed from the first state to the second state, the state of the signal processing unit is switched in the second state, and subsequently the first amplifier is switched from the second state to the first state. | 09-03-2009 |
20100220874 | INPUT SELECTOR - A first selector receives a second input signal and a second reference voltage, and selects either one. A first buffer receives the output signal of the first selector, and outputs the signal thus received to a terminal of the first resistor, and to a terminal of the third resistor. A second selector receives a first input signal and a third input signal, and selects either one. A fourth selector receives, as input signals, the output signal of an operational amplifier, a signal that corresponds to the output signal of the second selector, and a signal that corresponds to the second input signal, and selects one signal selected from among the signals thus received. | 09-02-2010 |
Patent application number | Description | Published |
20090123846 | ALL-SOLID-STATE CELL - An all-solid-state cell contains a combination of an electrode active material and a solid electrolyte, and has a plate-shaped fired solid electrolyte body of a ceramic containing a solid electrolyte, a first electrode layer (e.g. a positive electrode) integrally formed on one surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte, and a second electrode layer (e.g. a negative electrode) integrally formed on the other surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte. The solid electrolyte materials added to the first electrode layer and the second electrode layer comprise an amorphous polyanion compound. | 05-14-2009 |
20090123847 | ALL-SOLID-STATE CELL - An all-solid-state cell has a fired solid electrolyte body, a first electrode layer integrally formed on one surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte, and a second electrode layer integrally formed on the other surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte. The first and the second electrode layers are formed by mixing and firing the electrode active material and the amorphous solid electrolyte, which satisfy the relation Ty>Tz (wherein Ty is a temperature at which the capacity of the electrode active material is lowered by reaction between the electrode active material and the solid electrolyte material, and Tz is a temperature at which the solid electrolyte material is shrunk by firing). | 05-14-2009 |
20100047696 | CERAMIC MATERIAL AND PROCESS FOR PRODUCING THE SAME - A ceramic material that can exhibit sufficient compactness and lithium (Li) conductivity to enable the use thereof as a solid electrolyte material for a lithium secondary battery and the like is provided. The ceramic material contains aluminum (Al) and has a garnet-type crystal structure or a garnet-like crystal structure containing lithium (Li), lanthanum (La), zirconium (Zr) and oxygen (O). | 02-25-2010 |
20140205890 | ALL-SOLID-STATE CELL - An all-solid-state cell contains a combination of an electrode active material and a solid electrolyte, and has a plate-shaped fired solid electrolyte body of a ceramic containing a solid electrolyte, a first electrode layer (e.g. a positive electrode) integrally formed on one surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte, and a second electrode layer (e.g. a negative electrode) integrally formed on the other surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte. The solid electrolyte materials added to the first electrode layer and the second electrode layer comprise an amorphous polyanion compound. | 07-24-2014 |
20140205891 | ALL-SOLID-STATE CELL - An all-solid-state cell has a fired solid electrolyte body, a first electrode layer integrally formed on one surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte, and a second electrode layer integrally formed on the other surface of the fired solid electrolyte body by mixing and firing an electrode active material and a solid electrolyte. The first and the second electrode layers are formed by mixing and firing the electrode active material and the amorphous solid electrolyte, which satisfy the relation Ty>Tz (wherein Ty is a temperature at which the capacity of the electrode active material is lowered by reaction between the electrode active material and the solid electrolyte material, and Tz is a temperature at which the solid electrolyte material is shrunk by firing). | 07-24-2014 |
20140290863 | CERAMIC MEMBER, MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING CERAMIC MEMBER - A ceramic member | 10-02-2014 |
20140377665 | CERAMIC MATERIAL AND PROCESS FOR PRODUCING THE SAME - A ceramic material that can exhibit sufficient compactness and lithium (Li) conductivity to enable the use thereof as a solid electrolyte material for a lithium secondary battery and the like is provided. The ceramic material contains aluminum (Al) and has a garnet-type crystal structure or a garnet-like crystal structure containing lithium (Li), lanthanum (La), zirconium (Zr) and oxygen (O). | 12-25-2014 |
Patent application number | Description | Published |
20090011677 | Method for Manufacturing Light-Emitting Device - A method for manufacturing a light-emitting device including a layer containing different evaporation materials, by which a desired layer containing the different evaporation materials is formed easily using a plurality of evaporation materials. A light-emitting device is manufactured in such a manner that a plurality of layers each containing a different evaporation material from each other is stacked over a first substrate; a second substrate which has a first electrode is placed at a position facing the first substrate; the plurality of layers containing evaporation materials is heated to form a layer containing different evaporation materials is formed on the first electrode provided for the second substrate; and a second electrode is formed on the layer containing different evaporation materials. | 01-08-2009 |
20090075214 | MANUFACTURING METHOD OF LIGHT EMITTING DEVICE, AND EVAPORATION DONOR SUBSTRATE - An object is to provide a manufacturing method of a light emitting device, by which manufacturing costs in manufacturing a flat panel display can be reduced. A first substrate provided with a reflective layer having an opening over a first surface, and provided with a light absorption layer and an evaporation material over a second surface facing the first surface is used. Then, in a state where the second surface of the first substrate is disposed close to a first surface of a second substrate, light irradiation is performed from the first surface side of the first substrate. The irradiation light is absorbed by a portion of the light absorption layer overlapping with the opening in the reflective layer, thereby heating the evaporation material. The heated evaporation material is attached to the first surface of the second substrate. | 03-19-2009 |
20090104403 | Evaporation Donor Substrate and Method for Manufacturing Light-Emitting Device - To provide an evaporation donor substrate which is used for deposition by an evaporation method and which allows reduction in manufacturing cost and high uniformity of a film which is deposited. In addition, to provide a method for manufacturing a light-emitting device using the evaporation donor substrate. The evaporation donor substrate includes a reflective layer having an opening which is formed over a substrate, a heat insulating layer having a light-transmitting property which is formed over the substrate and the reflective layer, a light absorption layer which is formed over the heat insulating layer; and a material layer which is formed over the light absorption layer. | 04-23-2009 |
20090104835 | Method of Manufacturing Light-Emitting Device, and Evaporation Donor Substrate - The present invention provides a method of manufacturing a light-emitting device and an evaporation donor substrate, by which the precision of patterning of an EL layer of each color can be improved in manufacture of a full color flat panel display using emission colors of red, green, and blue. A first substrate which includes a reflective layer including an opening portion, a heat insulating layer including an opening portion in a position overlapped with the opening portion of the reflective layer over the reflective layer, a light absorption layer covering the opening portion of the reflective layer and the opening portion of the heat insulating layer over the heat insulating layer, and a material layer over the light absorption layer is used. While one surface of the first substrate is disposed close to a deposition target surface of a second substrate, the first substrate is irradiated with light from the other surface of the first substrate. The irradiation light is absorbed in the light absorption layer in the position overlapped with the opening portion of the reflective layer to heat an evaporation material. The heated evaporation material is evaporated onto the second substrate. | 04-23-2009 |
20090142510 | Evaporation Donor Substrate and Method for Manufacturing Light-Emitting Device - A first supporting substrate on a front surface of which a reflective layer having an opening is formed and a second supporting substrate on a front surface of which a light absorption layer patterned into island or stripe shapes and a material layer over the light absorption layer are formed are prepared, the first and second supporting substrates are disposed so that the opening of the reflective layer and the light absorption layer overlap with each other and the reflective layer is in contact with a back surface of the second supporting substrate, the second supporting substrate and a deposition target substrate are disposed so that the front surface of the second supporting substrate faces the deposition target substrate, and the material layer is attached to the deposition target substrate by irradiating the back surface of the first supporting substrate with light and by sublimating the material layer. | 06-04-2009 |
20090169809 | Evaporation Donor Substrate, Method for Manufacturing the Same, and Method for Manufacturing Light-Emitting Device - An evaporation donor substrate that makes it possible to evaporate only a desired evaporation material in the case of performing deposition by an evaporation method. Thus, the use efficiency of an evaporation material can be increased resulting in reduction in production cost, and further a film with high uniformity can be deposited. The evaporation donor substrate can be obtained by forming a reflective layer having an opening over a substrate, forming a thermal insulation layer having a light-transmitting property separately over the substrate and the reflective layer, forming a light absorption layer over the thermal insulation layer, and forming a material layer over the light absorption layer. | 07-02-2009 |
20120251772 | Method of Manufacturing Light-Emitting Device, and Evaporation Donor Substrate - The present invention relates to a donor substrate and a method of manufacturing a light-emitting device. The donor substrate includes a reflective layer including an opening portion, a light absorption layer covering the opening portion of the reflective layer over the reflective layer, a heat insulating layer including an opening portion in a position overlapped with the opening portion of the reflective layer over the light absorption layer, and a material layer including a light-emitting material covering the opening portion of the heat insulating layer over the heat insulating layer. A target substrate and the donor substrate are disposed to face each other, and an EL layer is formed over the target substrate by performing light irradiation from a rear surface of the donor substrate. | 10-04-2012 |
Patent application number | Description | Published |
20080233669 | Method for Manufacturing Light-Emitting Device - A full-color light-emitting device is achieved with plural kinds of light-emitting elements in each of which a stacked layer of a first material layer formed selectively with a droplet discharge apparatus and a second material layer formed by vapor-deposition method using the conductive-surface plate on which a layer containing an organic compound is formed is provided between a pair of electrodes. The first material layer is a layer in which an organic compound and a metal oxide which is an inorganic compound are mixed. By adjusting the thickness of the first material layer of each light-emitting element, which is different depending on an emission color, a blue light emission component, a green light emission component, or a red light emission component among a plurality of components for white light emission can be selectively emphasized and taken out by light interference phenomenon. | 09-25-2008 |
20080268135 | MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE - For a full-color flat panel display, demands for high definition, high aperture ratio and high reliability have been increasing. Therefore, increasing in the number of pixels and narrowing a pixel pitch have been major issues. According to the present invention, a layer including an organic compound is selectively formed with a light-exposure apparatus used in a photolithography technique without a resist mask. A material layer including a photopolymerization initiator, a material polymerized with the photopolymerization initiator, and an organic compound are formed on a plate, and then are exposed to light and selectively cured. A film-formation substrate is disposed so as to face the plate. The film-formation substrate or the material layer is heated so that the organic compound included in a region exposed to light or a region not exposed to light is evaporated to be selectively deposited on the surface of the film-formation substrate. | 10-30-2008 |
20130178004 | Method for Manufacturing Light-Emitting Device - A full-color light-emitting device is achieved with plural kinds of light-emitting elements in each of which a stacked layer of a first material layer formed selectively with a droplet discharge apparatus and a second material layer formed by vapor-deposition method using the conductive-surface plate on which a layer containing an organic compound is formed is provided between a pair of electrodes. The first material layer is a layer in which an organic compound and a metal oxide which is an inorganic compound are mixed. By adjusting the thickness of the first material layer of each light-emitting element, which is different depending on an emission color, a blue light emission component, a green light emission component, or a red light emission component among a plurality of components for white light emission can be selectively emphasized and taken out by light interference phenomenon. | 07-11-2013 |
Patent application number | Description | Published |
20120062588 | IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD - A CPU generates an image by performing inverse projection transformation for an input image by using an inverse matrix of a matrix which enlarges a size of the input image. When a position A on the input image is transformed into a position B on the generated image by the inverse projection transformation, the CPU obtains a ratio of a distance between pixels around the position B to a distance between pixels around the position A. The CPU calculates filter coefficients for a low-pass filter using a product of a Nyquist frequency of the input image and the ratio as a cutoff frequency. The CPU obtains a sum of results obtained by multiplying pixel values of pixels in a pixel array including the position A in the input image by the filter coefficients, as a pixel value at the position A in an image having undergone filter processing. | 03-15-2012 |
20120281882 | IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND MEDIUM - When first input image and second input image are input to generate an interpolated image, based on search basis position of the interpolated image, correlation between a block based on the first image as reference and a block based on the second input image as reference is acquired to calculate a motion vector. | 11-08-2012 |
20130343636 | IMAGE PROCESSING APPARATUS, CONTROL METHOD OF THE SAME AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM - An image processing apparatus for generating an image of an arbitrary viewpoint using a plurality of input images obtains image information of a projection position at which a point along a first straight line passing through the arbitrary viewpoint and a pixel position on the image of the arbitrary viewpoint is projected onto each of the plurality of input images, defines parallax information of the plurality of input images at the pixel position, using the image information obtained for the point along the first straight line, and generates the image of the arbitrary viewpoint, by defining the image information of the pixel position from the plurality of input images using the parallax information for the pixel position. | 12-26-2013 |
20140340543 | IMAGE-PROCESSING APPARATUS AND IMAGE-PROCESSING METHOD - An image-processing apparatus obtains first image data having a first angle of view and second image data having a second angle of view smaller than the first angle of view. The image-processing apparatus then generates third image data by performing weighted combination of the first image data and the second image data, the third image data having a third angle of view determined according to a user command and being smaller than the first angle of view but larger than the second angle of view. Weights used in this weighted combination are such that the closer the third angle of view is to the second angle of view, the larger is the weight on the second image data relative to the weight on the first image data. | 11-20-2014 |
Patent application number | Description | Published |
20120231243 | CERAMIC MATERIAL, LAMINATE, MEMBER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND SPUTTERING TARGET MEMBER - A ceramic material mainly contains magnesium, aluminum, oxygen, and nitrogen, in which the ceramic material has a magnesium-aluminum oxynitride phase serving as a main phase, wherein XRD peaks of the magnesium-aluminum oxynitride phase measured with CuKα radiation appear at at least 2θ=47 to 50°. | 09-13-2012 |
20120231945 | CERAMIC MATERIAL, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, SPUTTERING TARGET MEMBER AND METHOD FOR PRODUCING CERAMIC MATERIAL - A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO—AlN solid solution measured with CuKα radiation appear at 2θ=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2θ=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride. | 09-13-2012 |
20130220988 | HEATING DEVICE - A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray. | 08-29-2013 |
20130228565 | HEATING DEVICE - A heating apparatus | 09-05-2013 |
20130228566 | HEATING DEVICE - A heating apparatus | 09-05-2013 |
20130229746 | ELECTROSTATIC CHUCK - An electrostatic chuck | 09-05-2013 |
20130235507 | ELECTROSTATIC CHUCK - Electrostatic chucks ( | 09-12-2013 |