Patent application number | Description | Published |
20080224213 | PROCESS FOR MAKING FINFET DEVICE WITH BODY CONTACT AND BURIED OXIDE JUNCTION ISOLATION - There is a FinFET device. The device has a silicon substrate, an oxide layer, and a polysilicone gate. The silicon substrate defines a planar body, a medial body, and a fin. The planar body, the medial body, and the fin are integrally connected. The medial body connects the planar body and the fine. The planar body extends generally around the medial body. The fin is situated to extend substantially from a first side of the substrate to an opposing second side of the substrate. The fin is substantially perpendicularly disposed with respect to the planar body. The first oxide layer is situated on the planar body between the planar body and the fine. The oxide layer extends substantially around the medial body. The polysilicone gate is situated on the oxide layer to extend substantially from a third side to an opposing fourth side of the substrate. The gate is situated to extend across the fin proximal to a medial portion of an upper surface of the fine. There is also a process for making a FinFET device. | 09-18-2008 |
20080230868 | PATTERN ENHANCEMENT BY CRYSTALLOGRAPHIC ETCHING - A method for producing predetermined shapes in a crystalline Si-containing material that have substantially uniform straight sides or edges and well-defined inside and outside corners is provided together with the structure that is formed utilizing the method of the present invention. The inventive method utilizes conventional photolithography and etching to transfer a pattern, i.e., shape, to a crystalline Si-containing material. Since conventional processing is used, the patterns have the inherent limitations of rounded corners. A selective etching process utilizing a solution of diluted ammonium hydroxide is used to eliminate the rounded corners providing a final shape that has substantially straight sides or edges and substantially rounded corners. | 09-25-2008 |
20080237634 | CRYSTALLOGRAPHIC RECESS ETCH FOR EMBEDDED SEMICONDUCTOR REGION - Source and drain regions of an FET are etched by a crystallographic anisotropic etch to form a cavity surrounded by crystallographic facets. The exposure of the sidewalls of shallow trench isolation (STI) is avoided or reduced compared to the prior art. The crystallographic anisotropic etch may be combined with an isotropic etch or a recess etch to create undercuts beneath gate spacers and/or a pegging line beneath a top surface of the STI. The at least one cavity is then filled with a lattice-mismatched embedded material so that stress is applied to the channel of the FET. The resulting structure has increased containment of the embedded semiconductor region by shallow trench isolation. A reduction in stress due to the unconstrained sidewall area and an increase in the junction current due to the recessing of the pegging line are eliminated or alleviated. | 10-02-2008 |
20080237726 | STRUCTURE AND METHODS FOR STRESS CONCENTRATING SPACER - A stress-concentrating spacer structure is a stack of an upper gate spacer with a low Young's modulus and a lower gate spacer with a high Young's modulus. The stacked spacer structure surrounds the gate electrode. The stress-concentrating spacer structure may contact an inner gate spacer that contacts the gate electrode or may directly contact the gate electrode. The upper gate spacer deforms substantially more than the lower gate spacer. The stress generated by the stress liner is thus transmitted primarily through the lower gate spacer to the gate electrode and subsequently to the channel of the MOSFET. The efficiency of the transmission of the stress from the stress liner to the channel is thus enhanced compared to conventional MOSFETs structure with a vertically uniform composition within a spacer. | 10-02-2008 |
20080237749 | CMOS GATE CONDUCTOR HAVING CROSS-DIFFUSION BARRIER - A gate conductor is provided for a transistor pair including an n-type field effect transistor (“NFET”) having an NFET active semiconductor region and a p-type field effect transistor (“PFET”) having a PFET active semiconductor region, where the NFET and PFET active semiconductor regions are separated by an isolation region. An NFET gate extends in a first direction over the NFET active semiconductor region. A PFET gate extends in the first direction over the PFET active semiconductor region. A diffusion barrier is sandwiched between the NFET gate and the PFET gate. A continuous layer extends continuously in the first direction over the NFET gate and the PFET gate. The continuous layer contacts top surfaces of the NFET gate and the PFET gate and the continuous layer includes at least one of a semiconductor, a metal or a conductive compound including a metal. | 10-02-2008 |
20080246056 | SILICIDE FORMATION FOR eSiGe USING SPACER OVERLAPPING eSiGe AND SILICON CHANNEL INTERFACE AND RELATED PFET - Methods of forming a suicide in an embedded silicon germanium (eSiGe) source/drain region using a suicide prevention spacer overlapping an interface between the eSiGe and the silicon channel, and a related PFET with an eSiGe source/drain region and a compressive stress liner in close proximity to a silicon channel thereof, are disclosed. In one embodiment, a method includes providing a gate having a nitrogen-containing spacer adjacent thereto and an epitaxially grown silicon germanium (eSiGe) region adjacent to a silicon channel of the gate; removing the nitrogen-containing spacer that does not extend over the interface between the eSiGe source/drain region and the silicon channel; forming a single silicide prevention spacer about the gate, the single silicide prevention spacer overlapping the interface; and forming the silicide in the eSiGe source/drain region using the single silicide prevention spacer to prevent the silicide from forming in at least an extension area of the silicon channel. | 10-09-2008 |
20080246069 | Folded Node Trench Capacitor - A trench capacitor is filled with a set of two or more storage plates by consecutively depositing layers of dielectric and conductor and making contact to the ground plates by etching an aperture through the plates to the buried plate in the substrate and connecting the one or more ground plate to the substrate; the charge storage plates are connected at the top of the capacitor by blocking the end of the first plate during the formation of the second ground plate and exposing the material of the first storage plate during deposition of the second storage plate. | 10-09-2008 |
20080272445 | LOW-K DISPLACER FOR OVERLAP CAPACITANCE REDUCTION - Source/drain extensions and source and drain regions are formed in a semiconductor substrate utilizing an optional temporary first gate spacer and a temporary second gate spacer. After forming a gate silicide and a source and drain silicide in a silicidation process, the optional temporary first gate spacer and a temporary second gate spacer are removed. Low-k dielectric material is disposed directly on the sidewalls of the gate electrode. The low-k dielectric material may form a portion of a lower gate spacer. Alternatively, the low-k dielectric material may form a layer that contacts and covers the source and drain regions. The low-k material displaces the optional temporary first gate spacer and the temporary second gate spacer to lower the overlap capacitance between the gate electrode and the source/drain extensions. A continuous mobile ion diffusion barrier dielectric layer is formed over the low-k material. | 11-06-2008 |
20080283890 | DEEP TRENCH INTER-WELL ISOLATION STRUCTURE - A deep trench is formed in a semiconductor substrate. The deep trench may comprise a pair of parallel substantially vertical sidewalls having a constant separation distance. A set of outer substantially vertical sidewalls may have a closed shape in a horizontal cross-section. At least one dielectric layer is formed in the deep trench. The deep trench is filled with at least one conductive trench fill material to form a conductive deep trench fill region. A shallow trench isolation structure is formed directly on the deep trench to encapsulate the conductive deep trench fill region therebeneath. The stack of the deep trench and the shallow trench isolation structure form a deep trench inter-well isolation structure that provides electrical isolation of devices on one side of the stack from devices on the other side. | 11-20-2008 |
20080283930 | EXTENDED DEPTH INTER-WELL ISOLATION STRUCTURE - By depositing and forming a spacer out of a semiconductor material layer or a dielectric material layer on the edges of an inter-well isolation area while forming a plug over an intra-well isolation area, a narrow intra-well isolation trench having a normal depth is formed in the intra-well isolation area, while a wider inter-well isolation trench having an extended portion is formed in the inter-well isolation area. The extended portion of the inter-well isolation trench provides enhanced inter-well isolation due to the presence of the extended portion beneath the normal depth. The extended portion of the inter-well isolation trench enables reduction of the width of the intra-well isolation trench structure relative to prior art inter-well isolation structures having a normal depth. | 11-20-2008 |
20080283962 | SELF-ALIGNED AND EXTENDED INTER-WELL ISOLATION STRUCTURE - A pedestal is formed out of the pad layer such that two edges of the pedestal coincide with a border of the wells as implanted. An extended pedestal is formed over the pedestal by depositing a conformal dielectric layer. The area of the extended pedestal is exposed the semiconductor surface below is recessed to a recess depth. Other trenches including at least one intra-well isolation trench are lithographically patterned. After a reactive ion etch, both an inter-well isolation trench and at least one intra-well isolation trench are formed. The width of the inter-well isolation trench may be reduced due to the deeper bottom surface compared to the prior art structures. The boundary between the p-well and the n-well below the inter-well isolation structure is self-aligned to the middle of the inter-well isolation structure. | 11-20-2008 |
20080303060 | Semiconductor devices and methods of manufacturing thereof - Semiconductor devices and methods of manufacturing thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming a first material on the semiconductor wafer, and affecting the semiconductor wafer with a manufacturing process. The manufacturing process inadvertently causes a portion of the first material to be removed. The portion of the first material is replaced with a second material. | 12-11-2008 |
20080311714 | SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURE - A complimentary metal oxide semiconductor and a method of manufacturing the same using a self-aligning process to form one of the stacks of device. The method includes depositing an oxide layer over a portion of a metal layer over an nFET region of a CMOS structure and etching the metal layer over a pFET region of the CMOS structure. The method further includes etching at the oxide layer over the nFET region and forming gate structures over the nFET region and pFET region. | 12-18-2008 |
20090008705 | BODY-CONTACTED FINFET - A silicon containing fin is formed on a semiconductor substrate. A silicon oxide layer is formed around the bottom of the silicon containing fin. A gate dielectric is formed on the silicon containing fin followed by formation of a gate electrode. While protecting the portion of the semiconductor fin around the channel, a bottom portion of the silicon containing semiconductor fin is etched by a isotropic etch leaving a body strap between the channel of a finFET on the silicon containing fin and an underlying semiconductor layer underneath the silicon oxide layer. The fin may comprise a stack of inhomogeneous layers in which a bottom layer is etched selectively to a top semiconductor layer. Alternatively, the fin may comprise a homogeneous semiconductor material and the silicon containing fin may be protected by dielectric films on the sidewalls and top surfaces of the silicon containing fin. | 01-08-2009 |
20090014808 | Methods For Forming Self-Aligned Dual Stress Liners For CMOS Semiconductor Devices - CMOS (complementary metal oxide semiconductor) fabrication techniques are provided to form DSL (dual stress liner) semiconductor devices having non-overlapping, self-aligned, dual stress liner structures. | 01-15-2009 |
20090017625 | Methods For Removing Gate Sidewall Spacers In CMOS Semiconductor Fabrication Processes - Semiconductor fabrication processes are provided for removing sidewall spacers from gate structures while mitigating or otherwise preventing defect mechanisms such as damage to metal silicide structures or otherwise impeding or placing limitations on subsequent process flows. | 01-15-2009 |
20090039442 | Semiconductor Devices and Methods of Manufacture Thereof - Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming at least one isolation structure within the semiconductor wafer, and forming at least one feature over the semiconductor wafer. A top portion of the at least one isolation structure is removed, and a liner is formed over the semiconductor wafer, the at least one feature, and the at least one isolation structure. A fill material is formed over the liner. The fill material and the liner are removed from over at least a portion of a top surface of the semiconductor wafer. | 02-12-2009 |
20090057755 | SPACER UNDERCUT FILLER, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME - Disclosed herein is a semiconducting device comprising a gate stack formed on a surface of a semiconductor substrate; a vertical nitride spacer element formed on each vertical sidewall of the gate stack; a portion of the vertical nitride spacer overlying the semiconductor substrate; a silicide contact formed on the semiconductor substrate adjacent the gate stack, the silicide contact being in operative communication with drain and source regions formed in the semiconductor substrate; and an oxide spacer disposed between the vertical nitride spacer element and the silicide contact; the oxide spacer operating to minimize an undercut adjacent the vertical nitride spacer during an etching process. | 03-05-2009 |
20090101942 | PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region. The crystallographic etch ensures that the second profile is angled so that all of the exposed recess surfaces comprise silicon. Thus, the recesses can be filled by epitaxial deposition without divot formation. Additional process steps can be used to ensure that the first side of the recess is formed with a different profile that enhances the desired stress in the channel region. | 04-23-2009 |
20090101979 | Methods of Forming Field Effect Transistors Having Stress-Inducing Sidewall Insulating Spacers Thereon and Devices Formed Thereby - Methods of forming integrated circuit devices include forming a field effect transistor having a gate electrode, a sacrificial spacer on a sidewall of the gate electrode and silicided source/drain regions. The sacrificial spacer is used as an implantation mask when forming highly doped portions of the source/drain regions. The sacrificial spacer is then removed from the sidewall of the gate electrode. A stress-inducing electrically insulating layer, which is configured to induce a net tensile stress (for NMOS transistors) or compressive stress (for PMOS transistors) in a channel region of the field effect transistor, is then formed on the sidewall of the gate electrode. | 04-23-2009 |
20090146221 | METHOD OF PATTERNING SEMICONDUCTOR STRUCTURE AND STRUCTURE THEREOF - Method of patterning a semiconductor structure is disclosed. The method involves crystallographic etching techniques to enhance a patterned monocrystalline layer as a hard mask. In one embodiment, the method includes bonding a monocrystalline silicon layer to a non-crystalline protective layer; patterning the monocrystalline layer to form a hard mask; enhancing the pattern of the hard mask; stripping the hard mask after conventional etching of protective layer; and forming a gate oxide thereon. The enhanced patterning of the hard mask is performed with crystallographic etching to replace optical effects of rounding and dimension narrowing at the ends of a defined region with straight edges and sharp corners. A resulting structure from the use of the enhanced patterned hard mask includes a layer of composite materials on the substrate of the semiconductor structure. The layer of composite materials includes different materials in discrete blocks defined by straight edges within the layer. | 06-11-2009 |
20090152638 | DUAL OXIDE STRESS LINER - A transistor structure includes a first type of transistor (e.g., P-type) positioned in a first area of the substrate, and a second type of transistor (e.g., N-type) positioned in a second area of the substrate. A first type of stressing layer (compressive conformal nitride) is positioned above the first type of transistor and a second type of stressing layer (compressive tensile nitride) is positioned above the second type of transistor. In addition, another first type of stressing layer (compressive oxide) is positioned above the first type of transistor. Further, another second type of stressing layer (compressive oxide) is positioned above the second type of transistor. | 06-18-2009 |
20090203200 | GATE PATTERNING SCHEME WITH SELF ALIGNED INDEPENDENT GATE ETCH - A method for self-aligned gate patterning is disclosed. Two masks are used to process adjacent semiconductor components, such as an nFET and pFET that are separated by a shallow trench isolation region. The mask materials are chosen to facilitate selective etching. The second mask is applied while the first mask is still present, thereby causing the second mask to self align to the first mask. This avoids the undesirable formation of a stringer over the shallow trench isolation region, thereby improving the yield of a semiconductor manufacturing operation. | 08-13-2009 |
20090230427 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer. | 09-17-2009 |
20090230508 | SOI PROTECTION FOR BURIED PLATE IMPLANT AND DT BOTTLE ETCH - An SOI layer has an initial trench extending therethrough, prior to deep trench etch. An oxidation step, such as thermal oxidation is performed to form a band of oxide on an inner periphery of the SOI layer to protect it during a subsequent RIE step for forming a deep trench. The initial trench may stop on BOX underlying the SOI. The band of oxide may also protect the SOI during buried plate implant or gas phase doping. | 09-17-2009 |
20090233455 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - A semiconductor device having a tensile and/or compressive strain applied thereto and methods of manufacturing the semiconductor devices to enhance channel strain. The method includes relaxing a gate structure using a low temperature thermal creep process to enhance channel strain. The gate structure undergoes a plastic deformation during the low temperature thermal creep process. | 09-17-2009 |
20090236685 | EMBEDDED INTERCONNECTS, AND METHODS FOR FORMING SAME - The present invention relates to a semiconductor device comprising first and second active device regions that are located in a semiconductor substrate and are isolated from each other by an isolation region therebetween, while the semiconductor device comprises a first conductive interconnect structure that is embedded in the isolation region and connects the first active device region with the second active device region. The semiconductor device preferably contains at least one static random access memory (SRAM) cell located in the semiconductor substrate, and the first conductive interconnect structure cross-connects a pull-down transistor of the SRAM cell with a pull-up transistor thereof. The conductive interconnect preferably comprises doped polysilicon and can be formed by processing steps including photolithographic patterning, etching, and polysilicon deposition. | 09-24-2009 |
20090236691 | DEEP TRENCH (DT) METAL-INSULATOR-METAL (MIM) CAPACITOR - A deep trench metal-insulator-metal (MIM) capacitor in an SOI-type substrate. In the deep trench, a layer of TiN, followed by a layer of high-k dielectric, followed by a second layer of TiN. The resulting capacitor is completely buried below the SOI layer, thereby allowing for subsequent structures to be placed over the deep trench. | 09-24-2009 |
20090250738 | SIMULTANEOUS BURIED STRAP AND BURIED CONTACT VIA FORMATION FOR SOI DEEP TRENCH CAPACITOR - A node dielectric, an inner electrode, and a buried strap cavity are formed in the deep trench in an SOI substrate. A buried layer contact cavity is formed by lithographic methods. The buried strap cavity and the buried layer contact cavity are filled simultaneously by deposition of a conductive material, which is subsequently planarized to form a buried strap in the deep trench and a buried contact via outside the deep trench. The simultaneous formation of the buried strap and the buried contact via enables formation of a deep trench capacitor in the SOI substrate in an economic and efficient manner. | 10-08-2009 |
20090256173 | COMPLEMENTARY FIELD EFFECT TRANSISTORS HAVING EMBEDDED SILICON SOURCE AND DRAIN REGIONS - A method is provided of fabricating complementary stressed semiconductor devices, e.g., an NFET having a tensile stressed channel and a PFET having a compressive stressed channel. In such method, a first semiconductor region having a lattice constant larger than silicon can be epitaxially grown on an underlying semiconductor region of a substrate. The first semiconductor region can be grown laterally adjacent to a second semiconductor region which has a lattice constant smaller than that of silicon. Layers consisting essentially of silicon can be grown epitaxially onto exposed major surfaces of the first and second semiconductor regions after which gates can be formed which overlie the epitaxially grown silicon layers. Portions of the first and second semiconductor regions adjacent to the gates can be removed to form recesses. Regions consisting essentially of silicon can be grown within the recesses to form embedded silicon regions. Source and drain regions then can be formed in the embedded silicon regions. The difference between the lattice constant of silicon and that of the underlying first and second regions results in tensile stressed silicon over the first semiconductor region and compressive stressed silicon over the second semiconductor region. | 10-15-2009 |
20090267196 | HIGH PERFORMANCE 3D FET STRUCTURES, AND METHODS FOR FORMING THE SAME USING PREFERENTIAL CRYSTALLOGRAPHIC ETCHING - The present invention relates to high performance three-dimensional (3D) field effect transistors (FETs). Specifically, a 3D semiconductor structure having a bottom surface oriented along one of a first set of equivalent crystal planes and multiple additional surfaces oriented along a second, different set of equivalent crystal planes can be used to form a high performance 3D FET with carrier channels oriented along the second, different set of equivalent crystal planes. More importantly, such a 3D semiconductor structure can be readily formed over the same substrate with an additional 3D semiconductor structure having a bottom surface and multiple additional surfaces all oriented along the first set of equivalent crystal planes. The additional 3D semiconductor structure can be used to form an additional 3D FET, which is complementary to the above-described 3D FET and has carrier channels oriented along the first set of equivalent crystal planes. | 10-29-2009 |
20090283829 | FINFET WITH A V-SHAPED CHANNEL - A fin-type field effect transistor (finFET) structure comprises a substrate having a planar upper surface, an elongated fin on the planar upper surface of the substrate (wherein the length and the height of the fin are greater that the width of the fin) and an elongated gate conductor on the planar upper surface of the substrate. The length and the height of the gate conductor are greater than the width of the gate conductor. The fin comprises a center section comprising a semiconducting channel region and end sections distal to the channel region. The end sections of the fin comprise conductive source and drain regions. The gate conductor covers the channel region of the fin. The sidewalls of the channel region comprise a different crystal orientation than the sidewalls of the source and drain regions. | 11-19-2009 |
20090294894 | INTEGRATED CIRCUIT HAVING LOCALIZED EMBEDDED SiGe AND METHOD OF MANUFACTURING - An integrated circuit (IC) with localized SiGe embedded in a substrate and a method of manufacturing the IC is provided. The method includes forming recesses in a substrate on each side of a gate structure and remote from a shallow trench isolation structure. The method further includes growing a stress material within the recesses such that the stress material is bounded on its side only by the substrate. | 12-03-2009 |
20090315117 | CMOS DEVICES HAVING REDUCED THRESHOLD VOLTAGE VARIATIONS AND METHODS OF MANUFACTURE THEREOF - Stress enhanced transistor devices and methods of fabricating the same are provided. In one embodiment, a transistor device comprises: a gate conductor disposed above a semiconductor substrate between a pair of dielectric spacers, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the recessed regions undercut the dielectric spacers to form undercut areas of the channel region; and epitaxial source and drain regions disposed in the recessed regions of the semiconductor substrate and extending laterally underneath the dielectric spacers into the undercut areas of the channel region. | 12-24-2009 |
20090321847 | HIGH PERFORMANCE CMOS DEVICES COMPRISING GAPPED DUAL STRESSORS WITH DIELECTRIC GAP FILLERS, AND METHODS OF FABRICATING THE SAME - The present invention relates to complementary metal-oxide-semiconductor (CMOS) devices having gapped dual stressors with dielectric gap fillers. Specifically, each CMOS device of the present invention includes at least one n-channel field effect transistor (n-FET) and at least one p-channel field effect transistor (p-FET). A tensilely stressed dielectric layer overlays the n-FET, and a compressively stressed dielectric layer overlays the p-FET. A gap is located between the tensilely and compressively stressed dielectric layers and is filled with a dielectric filler material. In one specific embodiment of the present invention, both the tensilely and compressively stressed dielectric layers are covered by a layer of the dielectric filler material, which is essentially free of stress. In an alternatively embodiment of the present invention, the dielectric filler material is only present in the gap between the tensilely and compressively stressed dielectric layers. | 12-31-2009 |
20100065922 | Semiconductor Devices and Methods of Manufacture Thereof - Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming at least one isolation structure within the semiconductor wafer, and forming at least one feature over the semiconductor wafer. A top portion of the at least one isolation structure is removed, and a liner is formed over the semiconductor wafer, the at least one feature, and the at least one isolation structure. A fill material is formed over the liner. The fill material and the liner are removed from over at least a portion of a top surface of the semiconductor wafer. | 03-18-2010 |
20100148259 | SOI SUBSTRATES AND SOI DEVICES, AND METHODS FOR FORMING THE SAME - An improved semiconductor-on-insulator (SOI) substrate is provided, which contains a patterned buried insulator layer at varying depths. Specifically, the SOI substrate has a substantially planar upper surface and comprises: (1) first regions that do not contain any buried insulator, (2) second regions that contain first portions of the patterned buried insulator layer at a first depth (i.e., measured from the planar upper surface of the SOI substrate), and (3) third regions that contain second portions of the patterned buried insulator layer at a second depth, where the first depth is larger than the second depth. One or more field effect transistors (FETs) can be formed in the SOI substrate. For example, the FETs may comprise: channel regions in the first regions of the SOI substrate, source and drain regions in the second regions of the SOI substrate, and source/drain extension regions in the third regions of the SOI substrate. | 06-17-2010 |
20100213571 | EDRAM INCLUDING METAL PLATES - A method for forming a memory device is provided by first forming at least one trench in a semiconductor substrate. Next, a lower electrode is formed in the at least one trench, and thereafter a conformal dielectric layer is formed on the lower electrode. | 08-26-2010 |
20110156110 | Field Effect Transistors Having Gate Electrode Silicide Layers with Reduced Surface Damage - Methods of forming integrated circuit devices include forming a field effect transistor having a gate electrode, a sacrificial spacer on a sidewall of the gate electrode and silicided source/drain regions. The sacrificial spacer is used as an implantation mask when forming highly doped portions of the source/drain regions. The sacrificial spacer is then removed from the sidewall of the gate electrode. A stress-inducing electrically insulating layer, which is configured to induce a net tensile stress (for NMOS transistors) or compressive stress (for PMOS transistors) in a channel region of the field effect transistor, is then formed on the sidewall of the gate electrode. | 06-30-2011 |
20110163387 | METHODS FOR FORMING SELF-ALIGNED DUAL STRESS LINERS FOR CMOS SEMICONDUCTOR DEVICES - CMOS (complementary metal oxide semiconductor) fabrication techniques are provided to form DSL (dual stress liner) semiconductor devices having non-overlapping, self-aligned, dual stress liner structures. | 07-07-2011 |
20110183481 | PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region. The crystallographic etch ensures that the second profile is angled so that all of the exposed recess surfaces comprise silicon. Thus, the recesses can be filled by epitaxial deposition without divot formation. Additional process steps can be used to ensure that the first side of the recess is formed with a different profile that enhances the desired stress in the channel region. | 07-28-2011 |
20110215437 | METHOD OF PATTERNING SEMICONDUCTOR STRUCTURE AND STRUCTURE THEREOF - Method of patterning a semiconductor structure is disclosed. The method involves crystallographic etching techniques to enhance a patterned monocrystalline layer as a hard mask. In one embodiment, the method includes bonding a monocrystalline silicon layer to a non-crystalline protective layer; patterning the monocrystalline layer to form a hard mask; enhancing the pattern of the hard mask; stripping the hard mask after conventional etching of protective layer; and forming a gate oxide thereon. The enhanced patterning of the hard mask is performed with crystallographic etching to replace optical effects of rounding and dimension narrowing at the ends of a defined region with straight edges and sharp corners. A resulting structure from the use of the enhanced patterned hard mask includes a layer of composite materials on the substrate of the semiconductor structure. The layer of composite materials includes different materials in discrete blocks defined by straight edges within the layer. | 09-08-2011 |
20110237039 | Methods of Forming P-Channel Field Effect Transistors Having SiGe Source/Drain Regions - Methods of forming p-channel MOSFETs use halo-implant steps that are performed relatively early in the fabrication process. These methods include forming a gate electrode having first sidewall spacers thereon, on a semiconductor substrate, and then forming a sacrificial sidewall spacer layer on the gate electrode. A mask layer is then patterned on the gate electrode. The sacrificial sidewall spacer layer is selectively etched to define sacrificial sidewall spacers on the first sidewall spacers, using the patterned mask layer as an etching mask. A PFET halo-implant of dopants is then performed into portions of the semiconductor substrate that extend adjacent the gate electrode, using the sacrificial sidewall spacers as an implant mask. Following this implant step, source and drain region trenches are etched into the semiconductor substrate, on opposite sides of the gate electrode. These source and drain region trenches are then filled by epitaxially growing SiGe source and drain regions therein. | 09-29-2011 |
20120135591 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. A method of forming a semiconductor structure includes forming sidewalls and spacers adjacent to a gate stack structure, and forming a recess in the gate stack structure. The method further includes epitaxially growing a straining material on a polysilicon layer of the gate stack structure, and in the recess in the gate stack structure. The straining material is Si:C and the gate stack structure is a PFET gate stack structure. The straining material is grown above and covering a top surface of the sidewalls and the spacers. | 05-31-2012 |
20120175640 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer. | 07-12-2012 |
20130001660 | PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region. The crystallographic etch ensures that the second profile is angled so that all of the exposed recess surfaces comprise silicon. Thus, the recesses can be filled by epitaxial deposition without divot formation. Additional process steps can be used to ensure that the first side of the recess is formed with a different profile that enhances the desired stress in the channel region. | 01-03-2013 |
20130273715 | SILICON-ON-INSULATOR SUBSTRATE WITH BUILT-IN SUBSTRATE JUNCTION - A method of forming a SOI substrate, diodes in the SOI substrate and electronic devices in the SOI substrate and an electronic device formed using the SOI substrate. The method of forming the SOI substrate includes forming an oxide layer on a silicon first substrate; ion-implanting hydrogen through the oxide layer into the first substrate, to form a fracture zone in the substrate; forming a doped dielectric bonding layer on a silicon second substrate; bonding a top surface of the bonding layer to a top surface of the oxide layer; thinning the first substrate by thermal cleaving of the first substrate along the fracture zone to form a silicon layer on the oxide layer to formed a bonded substrate; and heating the bonded substrate to drive dopant from the bonding layer into the second substrate to form a doped layer in the second substrate adjacent to the bonding layer. | 10-17-2013 |
20140061914 | DOPING OF COPPER WIRING STRUCTURES IN BACK END OF LINE PROCESSING - A method of forming a metal interconnect structure includes forming a copper line within an interlevel dielectric (ILD) layer; directly doping a top surface of the copper line with a copper alloy material; and forming a dielectric layer over the ILD layer and the copper alloy material; wherein the copper alloy material serves an adhesion interface layer between the copper line and the dielectric layer. | 03-06-2014 |
20140099787 | SEMICONDUCTOR DEVICE PROCESSING WITH REDUCED WIRING PUDDLE FORMATION - A method of forming an interconnect structure for a semiconductor device includes forming a lower antireflective coating layer over a dielectric layer; forming an organic planarizing layer on the lower antireflective coating layer; transferring a wiring pattern through the organic planarizing layer; transferring the wiring pattern through the lower antireflective coating layer; and transferring the wiring pattern through the dielectric layer, wherein unpatterned portions of the lower antireflective coating layer serve as an etch stop layer so as to prevent any bubble defects present in the organic planarizing layer from being transferred to the dielectric layer. | 04-10-2014 |
20140139236 | MEASURING METAL LINE SPACING IN SEMICONDUCTOR DEVICES - A test layout structure including a first series of parallel metal lines in a first level, and a first series of contact structures in a second level, the second level being positioned above the first level, the first series of contact structures being positioned at known increments, where the increments are in a direction perpendicular to a length of the first series of parallel metal lines, and where one or more of the first series of contact structures is in electrical contact with one or more of the first series of parallel metal lines. | 05-22-2014 |
20140203435 | SELECTIVE LOCAL METAL CAP LAYER FORMATION FOR IMPROVED ELECTROMIGRATION BEHAVIOR - A method of forming a wiring structure for an integrated circuit device includes forming one or more copper lines within an interlevel dielectric layer (ILD); masking selected regions of the one or more copper lines; selectively plating metal cap regions over exposed regions of the one or more copper lines; and forming a conformal insulator layer over the metal cap regions and uncapped regions of the one or more copper lines. | 07-24-2014 |
20140246776 | DOPING OF COPPER WIRING STRUCTURES IN BACK END OF LINE PROCESSING - A method of forming a metal interconnect structure includes forming a copper line within an interlevel dielectric (ILD) layer; directly doping a top surface of the copper line with a copper alloy material; and forming a dielectric layer over the ILD layer and the copper alloy material; wherein the copper alloy material serves an adhesion interface layer between the copper line and the dielectric layer. | 09-04-2014 |
20150037957 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. A method of forming a semiconductor structure includes forming sidewalls and spacers adjacent to a gate stack structure, and forming a recess in the gate stack structure. The method further includes epitaxially growing a straining material on a polysilicon layer of the gate stack structure, and in the recess in the gate stack structure. The straining material is Si:C and the gate stack structure is a PFET gate stack structure. The straining material is grown above and covering a top surface of the sidewalls and the spacers. | 02-05-2015 |
20150054028 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer. | 02-26-2015 |