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Takumichi Sutani
HITACHINAKA, JP
1. 20090218491 SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION INSPECTING/MEASURING APPARATUS 09-03-20092. 20090208090 METHOD AND APPARATUS FOR INSPECTING DEFECT OF PATTERN FORMED ON SEMICONDUCTOR DEVICE 08-20-2009
3. 20090152463 METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPECTION SYSTEM USING THE SAME 06-18-2009
4. 20090032707 PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT SYSTEM 02-05-2009
5. 20080310702 Defect inspection device and defect inspection method 12-18-2008
6. 20080250380 Method of OPC Model Building, Information-Processing Apparatus, and Method of Determining Process Conditions of Semiconductor Device 10-09-2008
7. 20080224035 Pattern displacement measuring method and pattern measuring device 09-18-2008