Patent application number | Description | Published |
20080241556 | Composite structure and method for forming the same - A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section. | 10-02-2008 |
20080274333 | Composite structure and production method thereof - It is intended to provide a composite structure excellent in resistance characteristics such as plasma resistance. The composite structure includes a base material having a surface containing a ceramic polycrystal and a structure formed on the surface of the base material containing the ceramic polycrystal, wherein the structure contains a polycrystal containing a brittle material; a grain boundary layer having a glass layer does not substantially exist on a boundary face between crystals forming the polycrystal; a part of the polycrystal forms an anchor part embedded into the base material surface; and an average roughness (Ra) of an interface between the anchor part and the base material surface is 100 nm or less. | 11-06-2008 |
20090233126 | Composite Structure - According to the present invention, a structure made of yttrium oxide is formed on a surface of a substrate comprises yttrium oxide polycrystals as a main component, a boundary layer made of hyaline does not substantially exist on a boundary face between crystals which form the structure, and both a cubic system and a monoclinic system exist in the crystal system of the yttrium oxide polycrystals. With this, it is possible to adjust the hardness of the structure made of yttrium oxide formed on a surface of a substrate to be larger than that of an yttrium oxide sintered body. | 09-17-2009 |
20090239454 | CMP CONDITIONER AND PROCESS FOR PRODUCING THE SAME - A CMP conditioner having excellent corrosion resistance around abrasive grains includes a grindstone base having, formed on one side, an abrasive grain layer including abrasive grains fixed in a metallic bonding phase treated to form a first protective layer comprising an oxide on the surface of the metallic bonding phase of the abrasive grain layer by the sol-gel method. Subsequently, an aerosol obtained by dispersing fine particles of a brittle material in a gas is jetted and caused to strike on the surface of the first protective layer to form a second protective layer comprising a thick oxide film. | 09-24-2009 |
20100148389 | COMPOSITE STRUCTURE FORMING METHOD - A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section. | 06-17-2010 |
Patent application number | Description | Published |
20080274347 | Method for Producing Film Using Aerosol, Particles Mixture Therefor, and Film and Composite Material - There is disclosed a method for producing a film with use of aerosol which is capable of forming a film of satisfactory quality at a high film formation rate. In the method, first, a carrier gas is mixed into a particle mixture which comprises raw fine particles comprising a brittle material as a main component and having a 50% average particle diameter of 0.010 μm to 1.0 μm on a volume basis, and auxiliary particles comprising a brittle material of the same type as or a different type from the brittle material of the raw fine particles as a main component and having a 50% average particle diameter of 3.0 μm to 100 μm on a volume basis, to form an aerosol. The aerosol is ejected onto the surface of a substrate to make the particle mixture come into collision with the substrate, so that the collision crushes or deforms the raw fine particles to form a film on the substrate. | 11-06-2008 |
20080274348 | Method for Producing Coating Film Using Aerosol, Fine Particles for Use Therein, and Coating Film and Composite Material - There is disclosed a method for producing a film with use of aerosol which is capable of forming a film of satisfactory quality at an extremely high film formation rate. In the method, first, a carrier gas is mixed into fine particles comprising a brittle material as a main component and having a 50% average particle diameter of 100 nm to 300 nm on a number basis to form an aerosol. The aerosol is ejected onto the surface of a substrate to make the fine particles come into collision with the substrate, so that the collision crushes or deforms the fine particles to form a film on the substrate. | 11-06-2008 |
20080276865 | Electrostatic Chuck, Manufacturing method thereof and substrate treating apparatus - An electrostatic chuck includes: a mounting surface on which a workpiece is to be mounted, the mounting surface including a polycrystalline structure formed by aerosol deposition, the polycrystalline structure having a protrusion on its surface. At least the protrusion contains yttria (Y | 11-13-2008 |
20090311422 | Particle cluster, composite structure formation method, and formation system - A particle cluster for an aerosol deposition method, the particle cluster includes: an assembly packed with a plurality of fine particles including brittle material fine particles, the particle clusters having a spatula angle of 46.2° or less. | 12-17-2009 |
20090324933 | Composite structure formation method, controlled particle and composite structure formation system - A composite structure formation method based on an aerosol deposition method by which an aerosol with brittle material fine particles dispersed in a gas is sprayed toward a substrate to form a structure made of the brittle material fine particles, the composite structure formation method includes: storing a plurality of controlled particles in a storage mechanism, the controlled particle being an assembly packed with a plurality of particles including the brittle material fine particles; supplying the controlled particles from the storage mechanism to an aerosolation mechanism; disaggregating the supplied controlled particles in the aerosolation mechanism to form an aerosol; and spraying the aerosol toward the substrate to form a composite structure having the structure and the substrate. | 12-31-2009 |
20120276388 | PRE-FORMED CONTROLLED PARTICLES FORMED OF FINE PARTICLES NON-CHEMICALLY BONDED TOGETHER, PRE-FORMED CONTROLLED PARTICLES FOR USE IN AN AEROSOL DEPOSITION METHOD, AND COMPOSITE STRUCTURE FORMATION SYSTEM INVOLVING CONTROLLED PARTICLES - A plurality of pre-formed controlled particles for use in an aerosol deposition method by which an aerosol with brittle material fine particles dispersed in a gas is sprayed toward a substrate to form a structure made of the brittle material fine particles. Each of the controlled particles includes an assembly packed with a plurality of fine particles which are not chemically bonded together, which include the brittle material fine particles, and have a mean primary particle diameter of 0.1 μm or more and 5 μm or less. The controlled particles have a mean circle-equivalent diameter of 20 μm or more. | 11-01-2012 |