Patent application number | Description | Published |
20090196488 | DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY - Methods to pattern substrates with dense periodic nanostructures that combine top-down lithographic tools and self-assembling block copolymer materials are provided. According to various embodiments, the methods involve chemically patterning a substrate, depositing a block copolymer film on the chemically patterned imaging layer, and allowing the block copolymer to self-assemble in the presence of the chemically patterned substrate, thereby producing a pattern in the block copolymer film that is improved over the substrate pattern in terms feature size, shape, and uniformity, as well as regular spacing between arrays of features and between the features within each array compared to the substrate pattern. In certain embodiments, the density and total number of pattern features in the block copolymer film is also increased. High density and quality nanoimprint templates and other nanopatterned structures are also provided. | 08-06-2009 |
20090308837 | METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS - The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. | 12-17-2009 |
20090311363 | METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS - A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used. | 12-17-2009 |
20100163520 | STRUCTURE FORMATION USING METAL DEPOSITED ON A RIE-ABLE SEEDLAYER - Methods for fabricating a device component are provided. A substrate comprising a RIE stop layer, an oxide layer formed on the RIE stop layer, and a RIE-able layer formed on the oxide layer may be provided. A resist layer may be patterned on the RIE-able layer. A metal layer may be formed on portions of the RIE-able layer that are not covered by the resist layer. The resist layer may be removed and an RIE performed to remove exposed portions of the RIE-able layer and portions of the oxide layer beneath the exposed portions of the RIE-able layer. Thereafter, the metal layer may be removed, and the component may be formed in an opening in the oxide layer formed during the RIE. | 07-01-2010 |
20100165512 | SYSTEM, METHOD AND APPARATUS FOR MASTER PATTERN GENERATION, INCLUDING SERVO PATTERNS, FOR ULTRA-HIGH DENSITY DISCRETE TRACK MEDIA USING E-BEAM AND SELF-ASSEMBLY OF BLOCK COPOLYMER MICRODOMAINS - A system, method, and apparatus for forming a high quality master pattern for patterned media, including features to support servo patterns, is disclosed. Block copolymer self-assembly is used to facilitate the formation of a track pattern with narrower tracks. E-beam lithography forms a chemical contrast pattern of concentric rings, where the spacing of the rings is equal to an integral multiple of the target track pitch. The rings include regions within each servo sector header where the rings are offset radially by a fraction of a track pitch. Self-assembly is performed to form a new ring pattern at the target track pitch on top of the chemical contrast pattern, including the radial offsets in the servo sector headers. When this pattern is transferred to disks via nanoimprinting and etching, it creates tracks separated by nonmagnetic grooves, with the grooves and tracks including the radial offset regions. | 07-01-2010 |
20110032640 | MULTI-LAYER, THIN FILM OVERCOAT FOR MAGNETIC MEDIA DISK - A thin film magnetic disk overcoat for perpendicular magnetic recording media comprises three layers. The initial layer comprises a dense mixture of both SiC | 02-10-2011 |
20110096436 | PATTERNED MAGNETIC RECORDING DISK WITH PATTERNED SERVO SECTORS AND METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING THE DISK - A patterned-media perpendicular magnetic recording disk has patterned servo regions and is nanoimprinted from a master mold made using directed self-assembly of block copolymers. The disk has patterned concentric circular data tracks of discrete data islands, with the tracks having a track pitch in the radial or cross-track direction. The disk also has patterned servo sectors extending generally radially across the patterned data tracks. The servo pattern is a chevron pattern of slanted or non-radial stripes that have a stripe pitch in the cross-stripe direction substantially equal to the track pitch. As a result of the method of making the master mold, the nanoimprinted disk has a chevron servo pattern with non-radial stripes that are magnetized segments of radial lines separated by nonmagnetic spaces. | 04-28-2011 |
20110102940 | SYSTEM, METHOD AND APPARATUS FOR PLANARIZING SURFACES WITH FUNCTIONALIZED POLYMERS - The surfaces of hard disk drive magnetic media disks are planarized with surface-grafted polymer chains that form a monolayer-thick film of uniform, self-limiting thickness. The thickness is controlled by the molecular weight of the polymer selected. The polymer film may be swollen by a solvent vapor to fill variable width gaps in the topography. The polymer may be cross-linked in place by radiation or thermal processing. | 05-05-2011 |
20110143169 | PERPENDICULAR MAGNETIC RECORDING DISK WITH ORDERED NUCLEATION LAYER AND METHOD FOR MAKING THE DISK - A continuous-media perpendicular magnetic recording disk with an oxide-containing granular Co alloy recording layer (RL) having minimal grain size dispersion has an ordered nucleation layer (ONL) formed below RL. The ONL has ordered nucleation sites arranged in a generally repetitive pattern. The nucleation sites are generally surrounded by non-nucleation regions of a different material than the nucleation sites. The Co-alloy grains of the subsequently deposited RL grow on the nucleation sites and the oxide of the RL become generally segregated on the non-nucleation regions. The ordered nucleation sites may be formed of a Ru-containing material and the non-nucleation regions may be formed of an oxide. The ONL is formed by nanoimprint lithography, preferably by a master mold fabricated with a method using self-assembling block copolymers for creating periodic nanometer scale features. | 06-16-2011 |
20110151236 | SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS - Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure comprises a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. A method, according to another embodiment, comprises forming a block copolymer layer on a substrate, inducing self assembly of the block copolymer layer, selectively degrading a block polymer from the block copolymer layer, forming a porous membrane over the block copolymer layer, and removing a portion of the block copolymer layer for defining a plurality of nanostructures extending upwardly from the substrate after forming the porous membrane over the block copolymer layer. Other systems and methods are disclosed as well. | 06-23-2011 |
20110235215 | PATTERNED MAGNETIC RECORDING DISK WITH HIGH BIT-ASPECT-RATIO AND MASTER MOLD FOR NANOIMPRINTING THE DISK - A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used. | 09-29-2011 |
20110286125 | PATTERNED-MEDIA MAGNETIC RECORDING DISK DRIVE WITH DATA ISLAND MISPLACEMENT INFORMATION IN THE SERVO SECTORS - A disk drive with patterned-media disks has information recorded in the servo sectors that identifies misplacement of the data islands in the data regions between the servo sectors. This misplacement information is read from the servo sectors prior to writing to correct either or both the radial position of the write head and the timing of the write pulses to the data islands. The misplacement information may include radial deviation of the data tracks, circumferential or along-the-track misplacement of the data islands, or the location of defective data islands. | 11-24-2011 |
20110287698 | SYSTEM, METHOD AND APPARATUS FOR ELASTOMER PAD FOR FABRICATING MAGNETIC RECORDING DISKS - A pad for polishing media disks has an elastomeric body with a Shore A hardness of not greater than 20, and a coating of polystyrene (PS) and a flexible polymer. The elastomeric pad may comprise styrene-isoprene-styrene block copolymers, or a styrene-ethylene-butylene-styrene block copolymer. The pad may be viscoleastic with a particulate composite coating. The pad may be a styrenic block copolymer and the coating is a different type of styrenic block copolymer containing solid particles. The coating may have a binder with a mixture of PS and flexible styrenic block copolymers, and filler particles comprising cross-linked PS/divinylbenzene polymer microspheres. | 11-24-2011 |
20120237733 | SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS - Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well. | 09-20-2012 |
20130126473 | METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL BINARY ENCODED NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS - A method using directed self-assembly of BCPs enables the making of a master disk for nanoimprinting magnetic recording disks that have patterned data islands and patterned binary encoded nondata marks. The method uses guided self-assembly of a BCP to form patterns of sets of radial lines and circumferential gaps of one of the BCP components, which can be used as an etch mask to make the master disk. The sets of radial lines and circumferential gaps can be patterned so as to encode binary numbers. The pattern is replicated as binary encoded nondata marks into the nanoimprinted disks, with the marks functioning as binary numbers for data sector numbers and/or servo sector numbers. If the disks also use a chevron servo pattern, the binary numbers can function to identify groups of tracks associated with the chevron servo pattern. | 05-23-2013 |
20130265673 | PATTERNED MAGNETIC MEDIA WITH OFFSET DATA AND SERVO REGIONS - A patterned magnetic media having offset servo and data regions. The media can be constructed by a method that allows both a data region and a servo region to be patterned without the patterning of one region adversely affecting the patterning of the other region. The method results in a patterned data region a patterned servo region and intermediate regions between the servo and data regions. The intermediate regions, which are most likely, but not necessarily, asymmetrical with one another indicate that the method has been used to pattern the media. | 10-10-2013 |