Akio Kaneko
Akio Kaneko, Yokohama-Shi JP
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20110012201 | Semiconductor device having fins FET and manufacturing method thereof - A line-form insulator is formed on a substrate and then the substrate is etched with the insulator used as a mask to form first trenches on both sides of the insulator. Side wall insulators are formed on the side walls of the first trenches, the substrate is etched with the insulator and side wall insulators used as a mask to form second trenches in the bottom of the first trenches. After, the substrate is oxidized with the insulator and side wall insulators used as an anti-oxidation mask to cause oxide regions formed on the adjacent side walls of the second trenches lying on both sides of the substrate to make contact with each other and the insulator and side wall insulators are removed. Then, a fin FET having a semiconductor region as a line-form fin is formed in the substrate. | 01-20-2011 |
Akio Kaneko, Kawasaki-Shi JP
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20080265324 | Semiconductor device and method of manufacturing the same - A semiconductor device according to the present invention comprises a semiconductor substrate, a gate insulating film which is composed of a material whose main component is a tetravalent metal oxide, a mixture of a tetravalent metal oxide and SiO | 10-30-2008 |
20090000547 | Semiconductor device fabrication method and fabrication apparatus - According to the present invention, there is provided a semiconductor device fabrication method comprising: | 01-01-2009 |
20100035396 | Semiconductor device and method of manufacturing the same - This disclosure concerns a manufacturing method of a semiconductor device includes forming a Fin-type body on an insulation layer, the Fin-type body being made of a semiconductor material and having an upper surface covered with a protective film; forming a gate insulation film on side surfaces of the Fin-type body; depositing a gate electrode material so as to cover the Fin-type body; planarizing the gate electrode material; forming a gate electrode by processing the gate electrode material; depositing an interlayer insulation film so as to cover the gate electrode; exposing the upper surface of the gate electrode; depositing a metal layer on the upper surface of the gate electrode; siliciding the gate electrode by reacting the gate electrode with the metal layer; forming a trench on the upper surface of the protective film by removing an unreacted metal in the metal layer; and filling the trench with a conductor. | 02-11-2010 |
20100159686 | Semiconductor device and method of manufacturing the same - A semiconductor device according to the present invention comprises a semiconductor substrate, a gate insulating film which is composed of a material whose main component is a tetravalent metal oxide, a mixture of a tetravalent metal oxide and SiO | 06-24-2010 |
20100173487 | Semiconductor apparatus and method of manufacturing the semiconductor apparatus - A semiconductor apparatus wherein a device formed on a semiconductor substrate comprises a gate insulating film including a high dielectric constant film formed on the substrate and an anti-reaction film formed on the high dielectric constant film, and a gate electrode formed on the anti-reaction film, the high dielectric constant film comprises a film containing at least one of Hf and Zr, and Si and O, or a film containing at least one of Hf and Zr, and Si, O and N, the anti-reaction film comprises an SiO | 07-08-2010 |
20100304555 | Semiconductor device and method of manufacturing semiconductor device - The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface. | 12-02-2010 |
20120012935 | Semiconductor device and method of manufacturing semiconductor device - The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface. | 01-19-2012 |
Akio Kaneko, Fishkill, NY US
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20100025780 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - A semiconductor device of the present invention includes: a semiconductor layer; a gate insulation film provided on the semiconductor layer and including at least one of Hf and Zr; and a gate electrode provided on the gate insulation film and including a carbonitride which includes at least one of Hf and Zr. | 02-04-2010 |
20120077336 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - A semiconductor device of the present invention includes: a semiconductor layer; a gate insulation film provided on the semiconductor layer and including at least one of Hf and Zr; and a gate electrode provided on the gate insulation film and including a carbonitride which includes at least one of Hf and Zr. | 03-29-2012 |
Akio Kaneko, Kanagawa JP
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20100003813 | Semiconductor device and method of fabricating the same - According to the present invention, there is provided a semiconductor device comprising: | 01-07-2010 |
Akio Kaneko, Tokyo JP
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20090194821 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device according to one embodiment includes: forming a SiGe crystal layer on a semiconductor substrate, the SiGe crystal layer having a first plane and a second plane inclined with respect to the first plane; forming an amorphous Si film on the SiGe crystal layer; crystallizing a portion located adjacent to the first and second planes of the amorphous Si film by applying heat treatment using the first and second planes of the SiGe crystal layer as a seed, thereby forming a Si crystal layer; selectively removing or thinning a portion of the amorphous Si film that is not crystallized by the heat treatment; applying oxidation treatment to a surface of the Si crystal layer, thereby forming a gate insulating film on the surface of the Si crystal layer; and forming a gate electrode on the gate insulating film. | 08-06-2009 |
Akio Kaneko, Kawasaki-Shi TW
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20080220582 | Semiconductor device and method of fabricating the same - According to the present invention, there is provided a semiconductor device fabrication method, comprising: | 09-11-2008 |
Akio Kaneko, Mie JP
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20140043909 | WRITING METHOD OF NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - According to one embodiment, there is provided a writing method. The method includes setting potentials of a plurality of word lines to a first potential. The first potential is a potential to allow memory cells corresponding to a selective bit line to be in on state. The method also includes setting potentials of non-adjacent word lines to a second potential while maintaining potentials of adjacent word lines at a potential which allows the memory cells corresponding to the selective bit line to be in on state and setting a potential of a selective word line to a third potential. The second potential is a potential which is determined so as to allow the memory cells corresponding to the selective bit line to be in off state. The third potential is a potential where data is written in the selective memory cell corresponding to the selective bit line. | 02-13-2014 |
20140043917 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE - According to one embodiment, there is provided a non-volatile semiconductor storage device including a memory cell and a control unit. The memory cell has a gate electrode including a control gate and a charge storage region on a semiconductor substrate and has a channel region under the gate electrode in the semiconductor substrate. The control unit, during an erase operation where electric charges written in the charge storage region are extracted to the channel region, periodically varies a voltage which is to be applied between the control gate and the channel region. | 02-13-2014 |
Akio Kaneko, Yokkaichi JP
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20160071863 | METHOD OF MANUFACTURING SEMICONDUCTOR STORAGE APPARATUS, AND SEMICONDUCTOR STORAGE APPARATUS - A method of manufacturing a semiconductor storage apparatus according to an embodiment includes forming an array of a plurality of memory cells. The method includes forming an interlayer insulating film that covers the memory cells. The method includes forming a first nitride film that covers an upper part of the interlayer insulating film. The method includes ion-implanting a first impurity into the first nitride film. | 03-10-2016 |