Patent application number | Description | Published |
20120126138 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME - The drawing apparatus of the present inventions includes a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among a plurality of charged particle beams, and configured to detect an intensity of a charged particle beam incident thereon. A controller is configured to perform a control of a position of the detector and a control of a blanking deflector array such that one of two adjacent charged particle beams is in a blanking state and the other is in a non-blanking state on the detector that is moved, and each of the plurality of charged particle beams becomes in a blanking state and a non-blanking state sequentially, to cause the detector to perform an output in parallel with the control, and to inspect a defect in each blanking deflector in the blanking deflector array based on the output. | 05-24-2012 |
20120228516 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME - The charged particle beam drawing apparatus of the present invention is a charged particle beam drawing apparatus that renders a pattern on a substrate using a charged particle beam and includes a detector that detects charge amount depending on the irradiation of the charged particle beam; first and second deflectors that are arranged along the direction of the irradiation of the charged particle beam and are capable of deflecting the charged particle beam; and a controller that controls the first and second deflectors, wherein the controller transmits a signal, which is used for switching the irradiation/nonirradiation of the charged particle beam to the detector, to the first and second deflectors at a predetermined timing, and adjusts the operation timing of the first and second deflectors based on the output of the detector depending on the signal. | 09-13-2012 |
20130230806 | LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A lithography apparatus includes a deflector configured to deflect the charged particle beam to scan the charged particle beam on the substrate in a scan direction; a detector including a shield for shielding the charged particle beam, and configured to detect an intensity of a charged particle beam not shielded by the shield; and a processor configured to process a signal obtained with the detector scanned with the charged particle beam in the scan direction by the deflector, wherein an effective region of the shield has a shape such that a position of an edge thereof in the scan direction continuously changes along the edge, and wherein the processor is configured to process the signal with respect to a plurality of positions of the edge to determine a relationship between a command value to the deflector and a scan position of the charged particle beam. | 09-05-2013 |
20140057212 | TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a transmission apparatus for transmitting a light signal between an outside and an inside of a vacuum chamber, comprising a plurality of first transmission lines configured to transmit a plurality of light signals outside the vacuum chamber, a plurality of second transmission lines configured to transmit the plurality of light signals inside the vacuum chamber, and a light-transmissive member configured to transmit the light signals between the plurality of first transmission lines and the plurality of second transmission lines, wherein the light-transmissive member has a structure formed to isolate light paths of the plurality of light signals between the plurality of first transmission lines and the plurality of second transmission lines from each other. | 02-27-2014 |
20150044615 | DRAWING DATA GENERATING METHOD, PROCESSING APPARATUS, STORAGE MEDIUM, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - A method generates drawing data for performing drawing on a substrate with a plurality of charged particle beams based on pattern data representing a pattern to be drawn on the substrate. The method includes: a grouping step of grouping the plurality of charged particle beams into a plurality of groups based on a displacement amount of an irradiation position of each of the plurality of charged particle beams from target position thereof; and a generating step of generating the drawing data by changing the pattern data with respect to each of the plurality of groups based on the displacement amount of each of the plurality of charged particle beams. | 02-12-2015 |
Patent application number | Description | Published |
20090187379 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND MEMORY MEDIUM - An information processing apparatus for processing information generated by an exposure apparatus which exposes a substrate to radiant energy, comprises an information collecting unit configured to collect first apparatus information obtained by the exposure apparatus via an operation thereof with respect to each of a plurality of first regions which form a first array defined on the substrate, a converting unit configured to convert at least a part of the first apparatus information collected with respect to each of the plurality of first regions by the information collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array, a statistical processing unit configured to statistically process the second apparatus information, and an analyzing unit configured to analyze the statistical processing result obtained by the statistical processing unit. | 07-23-2009 |
20100081096 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold. | 04-01-2010 |
20100228757 | INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND MEMORY MEDIUM - An information processing system using apparatus data recorded in a database in accordance with a data definition updated as needed, comprises a storage unit configured to store a data definition history that makes a data definition version and a period during which a data definition for the data definition version was used to correspond to each other, a data definition library in which the data definition version and the data definition for the data definition version are registered in correspondence with each other, and a detection unit configured to detect, from the data definition history, a data definition version of a data definition used in a period designated via a user interface, to detect a data definition for the detected data definition version from the data definition library, and to provide the detected data definition version and data definition to the user interface. | 09-09-2010 |
20100235384 | INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM - An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface. | 09-16-2010 |
20100248165 | INFORMATION PROCESSING METHOD, EXPOSURE PROCESSING SYSTEM USING SAME, DEVICE MANUFACTURING METHOD, AND INFORMATION PROCESSING APPARATUS - The information processing method of the present invention is provided that specifies an extraction period for extracting apparatus data to be generated by an industrial apparatus and analyzes a state of the industrial apparatus based on the apparatus data having an occurrence time within the extraction period. The information processing method includes a period changing step of changing the extraction period so as to enable the apparatus data required for the analysis of the state to be included, when the apparatus data required for the analysis of the state is not included within the extraction period. | 09-30-2010 |
20110029685 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS FOR TRANSMITTING DATA GENERATED BY DEVICE MANUFACTURING APPARATUS - An apparatus which transmits data generated by a device manufacturing apparatus to at least one terminal, comprises a communication unit, a transmission request processor configured to accept or reject a transmission request which the communication unit has received from the terminal, and a transmission controller configured to control the communication unit to transmit, in response to a transmission request accepted by the transmission request processor, data corresponding to the transmission request to a terminal, of the at least one terminal, which has transmitted the transmission request, wherein the transmission request processor accepts a new transmission request if a sum of transmission rates of the respective data concurrently transmitted from the communication unit in response to transmission requests which the transmission request processor has already accepted and a transmission rate at which data is transmitted in response to the new transmission request does not exceed a preset allowable transmission rate. | 02-03-2011 |