Patent application number | Description | Published |
20090021716 | ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Illumination systems for microlithographic projection exposure apparatus, as well as related systems, components and methods are disclosed. In some embodiments, an illumination system includes one or more scattering structures and an optical integrator that produces a plurality of secondary light sources. | 01-22-2009 |
20090021839 | OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems. | 01-22-2009 |
20110083542 | OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - The disclosure relates to an optical integrator configured to produce a plurality of secondary light sources in an illumination system of a microlithographic projection exposure apparatus. The disclosure also relates to a method of manufacturing an array of elongated microlenses for use in such an illumination system. Arrays of elongated microlenses are often contained in optical integrators or scattering plates of such illumination systems. | 04-14-2011 |
20130148092 | ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Illumination systems for microlithographic projection exposure apparatus, as well as related systems, components and methods are disclosed. In some embodiments, an illumination system includes one or more scattering structures and an optical integrator that produces a plurality of secondary light sources. | 06-13-2013 |
20130170056 | SUBSTRATE FOR MIRRORS FOR EUV LITHOGRAPHY - Substrates suitable for mirrors which are used at wavelengths in the EUV wavelength range have a main body ( | 07-04-2013 |
20130335816 | METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJECTION EXPOSURE APPARATUS AND COMPONENT OF THIS TYPE - A method for producing a reflective optical component for an EUV projection exposure apparatus, the component having a substrate having a base body, and a reflective layer arranged on the substrate, wherein the substrate has an optically operative microstructuring, comprises the following steps: working the microstructuring into the substrate, polishing the substrate after the microstructuring has been worked into the substrate, applying the reflective layer to the substrate. A reflective optical component for an EUV projection exposure apparatus correspondingly has a polished surface between the microstructuring and the reflective layer. | 12-19-2013 |
Patent application number | Description | Published |
20130034159 | DECODER, ENCODER, METHOD FOR DECODING AND ENCODING, DATA STREAM - A decoder for decoding a picture is described, having: an extractor adapted to extract a first subset of syntax elements from a received data stream and a second subset of syntax elements being disjoint from the first subset of syntax elements, wherein the second subset of syntax elements has filter indication information defining a first filter for a first region of at least two different regions of the picture and a second filter for a second region of the at least two different regions of the picture; a pre-decoder adapted to pre-decode the picture based on the first subset of syntax elements to produce a reconstructed version of the picture; and a filter stage adapted to apply the first filter to the first region of the reconstructed picture to obtain a first filtered version of the reconstructed version of the picture and to apply the second filter to the second region of the first filtered version of the reconstructed version of the picture to obtain a second filtered version of the reconstructed version of the picture. | 02-07-2013 |
20140140400 | ENTROPY CODING SUPPORTING MODE SWITCHING - A decoder for decoding a data stream into which media data is coded has a mode switch configured to activate a low-complexity mode or a high-efficiency mode depending on the data stream, an entropy decoding engine configured to retrieve each symbol of a sequence of symbols by entropy decoding using a selected one of a plurality of entropy decoding schemes, a desymbolizer configured to desymbolize the sequence of symbols to obtain a sequence of syntax elements, a reconstructor configured to reconstruct the media data based on the sequence of syntax elements, selection depending on the activated low-complexity mode or the high-efficiency mode. In another aspect, a desymbolizer is configured to perform desymbolization such that the control parameter varies in accordance with the data stream at a first rate in case of the high-efficiency mode being activated and the control parameter is constant irrespective of the data stream or changes depending on the data stream, but at a second lower rate in case of the low-complexity mode being activated. | 05-22-2014 |
20140177707 | ENTROPY CODING OF MOTION VECTOR DIFFERENCES - An entropy decoder is configured to, for horizontal and vertical components of motion vector differences, derive a truncated unary code from the data stream using context-adaptive binary entropy decoding with exactly one context per bin position of the truncated unary code, which is common for horizontal and vertical components of the motion vector differences, and an Exp-Golomb code using a constant equi-probability bypass mode to obtain the binarizations of the motion vector differences. A desymbolizer is configured to debinarize the binarizations of the motion vector difference syntax elements to obtain integer values of the horizontal and vertical components of the motion vector differences; A reconstructor is configured to reconstruct a video based on the integer values of the horizontal and vertical components of the motion vector differences. | 06-26-2014 |
20140198841 | CONTEXT INTIALIZATION IN ENTROPY CODING - A decoder includes an entropy decoder configured to derive a number of bins of the binarizations from the data stream using binary entropy decoding by selecting a context among different contexts and updating probability states associated with the different contexts, dependent on previously decoded portions of the data stream; a desymbolizer configured to debinarize the binarizations of the syntax elements to obtain integer values of the syntax elements; a reconstructor configured to reconstruct the video based on the integer values of the syntax elements using a quantization parameter, wherein the entropy decoder is configured to distinguish between 126 probability states and to initialize the probability states associated with the different contexts according to a linear equation of the quantization parameter, wherein the entropy decoder is configured to, for each of the different contexts, derive a slope and an offset of the linear equation from first and second four bit parts of a respective 8 bit initialization value. | 07-17-2014 |
20140210652 | ENTROPY CODING - An encoder for encoding a sequence of symbols is described which has an assigner configured to assign a number of parameters to each symbol of the sequence of symbols based on information contained within previous symbols of the sequence of symbols; a plurality of entropy encoders each of which is configured to convert the symbols forwarded to the respective entropy encoder into a respective bitstream; and a selector configured to forward each symbol to a selected one of the plurality of entropy encoders, the selection depending on the number of parameters assigned to the respective symbol. | 07-31-2014 |
20140333458 | BINARY ARITHMETIC CODING SCHEME - A binary arithmetic coding scheme is extended by a functionality to encode and decode non-negative integer values with particular low computational complexity. | 11-13-2014 |
20150195566 | SCALABLE VIDEO CODING USING DERIVATION OF SUBBLOCK SUBDIVISION FOR PREDICTION FROM BASE LAYER - Scalable video coding is rendered more efficient by deriving/selecting a subblock subdivision to be used for enhancement layer prediction, among a set of possible subblock subdivisions of an enhancement layer block by evaluating the spatial variation of the base layer coding parameters over the base layer signal. By this measure, less of the signalization overhead has to be spent on signaling this subblock subdivision within the enhancement layer data stream, if any. The subblock subdivision thus selected may be used in predictively coding/decoding the enhancement layer signal. | 07-09-2015 |