Patent application number | Description | Published |
20090174913 | IMAGE FORMING APPARATUS AND CONTROL METHOD AND PROGRAM FOR IMAGE FORMING APPARATUS - The invention aims to provide an image forming apparatus digitally correcting curve and inclination of a laser beam. To this end, provided is an image forming apparatus that corrects a position shift of a scan line in a sub-scanning direction. | 07-09-2009 |
20090201521 | IMAGE FORMING APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM - An image forming apparatus includes a data recording unit to store a misregistration amount of a scanning line from an ideal scanning line when a plurality of laser beams is scanned in a main scanning direction, a calculation unit to calculate a shape of the scanning line based on the misregistration amount stored, and to determine a scanning line curvature cancellation curve which cancels misregistration of the calculated shape of the scanning line, and an image forming unit to form an image that reflects the scanning line curvature cancellation curve by shifting image data which is read out from a memory unit in a sub scanning direction according to the scanning line curvature cancellation curve. The image forming unit corrects the amount of misregistration which is smaller than a main scanning line interval by adjusting a transfer point at which the image data is shifted in the sub scanning direction. | 08-13-2009 |
20090213419 | IMAGE FORMING DEVICE, IMAGE FORMING METHOD AND PROGRAM - The problem of the present invention is to be capable of executing color shift correction processing also in consideration of a mechanical inclination component in an image forming device. For solving the problem, the image forming device according to the present invention comprises information processing unit, first measurement requesting unit, holding unit of curve information, notifying unit of curve information, receiving unit of a measurement pattern image, measurement processing unit, determining unit of a result of the measurement processing, and second measurement requesting unit. | 08-27-2009 |
20100097623 | IMAGE FORMING APPARATUS, IMAGE FORMING METHOD, AND IMAGE FORMING PROGRAM - A printer not optically correcting bends and inclinations of scanning lines needs to execute such control as to electrically correct them. However, a conventional correction method has a problem that this correction causes an image defect such as an image streak or an uneven concentration in a specific area. A correction method of the present invention, when an input image has only one color, executes only correction by a second correction component which corrects distortions in a main scanning direction without executing correction by a first correction component which corrects bends and inclinations in a sub-scanning direction, and when an input image has two or more colors, executes both of correction by the first correction component and correction by the second correction component. This control can reduce the frequency of occurrence of an image defect. | 04-22-2010 |
20100103441 | IMAGE FORMING APPARATUS, IMAGE FORMING METHOD, AND IMAGE FORMING PROGRAM - A printer not optically correcting bends and inclinations of scanning lines needs to execute such control as to electrically correct them. However, a conventional correction method has a problem that this correction causes an image defect such as an image streak or an uneven density in a specific area. A correction method of the present invention, when an input image has only one color, executes only correction by a second correction component which corrects distortions in a main scanning direction without executing correction by a first correction component which corrects bends and inclinations in a sub-scanning direction, and when an input image has two or more colors, executes both of correction by the first correction component and correction by the second correction component. This control can reduce the frequency of occurrence of an image defect. | 04-29-2010 |
20110161746 | INFORMATION PROCESSING APPARATUS, CONTROL METHOD OF INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING SYSTEM - A reception unit receives, in a case where an error has occurred in an image forming apparatus during execution of a designated job, error information indicating that the error has occurred. An acquisition unit acquires information indicating that it is designated to skip the error and to execute the job in the image forming apparatus. A determination unit determines, in a case where the acquisition unit acquires the information, whether or not to continue to display the error information depending on a type of the error. A control unit continues, in a case where the determination unit determines that the error information is continued to be displayed, to display the error information, and ceases, in a case where the determination unit determines that the error information is not continued to be displayed, to display the error information. | 06-30-2011 |
20140029061 | IMAGE FORMING DEVICE, IMAGE FORMING METHOD AND PROGRAM - The problem of the present invention is to be capable of executing color shift correction processing also in consideration of a mechanical inclination component in an image forming device. For solving the problem, the image forming device according to the present invention comprises information processing unit, first measurement requesting unit, holding unit of curve information, notifying unit of curve information, receiving unit of a measurement pattern image, measurement processing unit, determining unit of a result of the measurement processing, and second measurement requesting unit. | 01-30-2014 |
Patent application number | Description | Published |
20120160274 | Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein - Disclosed is a liquid processing apparatus that processes a substrate with a processing liquid. The processing apparatus includes: a substrate holder configured to hold the substrate; a processing liquid supply unit configured to supply the processing liquid to the substrate held by the substrate holder; a rinsing liquid supply unit configured to supply a rinsing liquid to the substrate; and a light emitting element configured to emit light of a wavelength range, which is absorbed only by the substrate, and irradiate the emitted light to the substrate. | 06-28-2012 |
20120325795 | HEATING APPARATUS AND ANNEALING APPARATUS - A heating apparatus includes a heat dissipating board formed of a metal; an insulating layer directly formed on the heat dissipating board; a plurality of wiring elements which are arranged on the insulating layer in a wiring pattern; and a plurality of LED elements provided on the wiring elements, respectively. The heating apparatus further includes metal wiring lines which electrically connect the adjacent LED elements to each other in series. | 12-27-2012 |
20120328273 | HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD - Disclosed is a thermal processing apparatus and method that can acquire a high throughput and reduce the occupation area of the thermal processing apparatus. A wafer is heated by an LED module that irradiates infrared light corresponding to the absorption wavelength of the wafer, and therefore, the wafer can be rapidly heated. Since an LED is used as a heat source and a temperature rise of LED is small, a cooling process after the heating process can be performed in the same process area as the heating process area. As a result, an installation area of the thermal processing apparatus can be reduced. Since the time for moving between a heating process area and a cooling process area can be saved, a time required for a series of processes including the heating process and the subsequent cooling process can be shortened, thereby improving a throughput. | 12-27-2012 |
20150075748 | Substrate Temperature Regulating Device and Substrate Processing Apparatus Using the Same - Provided is a device for regulating a temperature of a substrate within a chamber of a substrate processing apparatus, which includes: a mounting stand configured to mount the substrate thereon and including a temperature regulating medium flow path formed therein; a substrate elevating mechanism configured to move the substrate up and down between a first position and a second position; a first temperature regulating unit configured to supply a temperature regulating medium to the flow path and configured to regulate the temperature of the substrate to a first temperature in the first position; a second temperature regulating unit installed below the mounting stand and configured to regulate the substrate to a second temperature by emitting light toward the substrate in the second position and heating the substrate; and a light transmitting window configured to transmit the light emitted from the second temperature regulating unit. | 03-19-2015 |
Patent application number | Description | Published |
20120001278 | SEMICONDUCTOR PHYSICAL QUANTITY SENSOR - A semiconductor physical quantity sensor includes a sensor chip, a support member for fixing the sensor chip to a fixing position and an adhesive bonding the sensor chip with the support member. The sensor chip includes a semiconductor substrate and a chip base supporting the semiconductor substrate. The semiconductor substrate is provided with a sensing portion for detecting a physical quantity. The chip base is bonded with the support member through the adhesive. The adhesive is provided by a mixture of an adhesive base material mainly made of a resin and a granular material mainly made of a cross-linked resin. | 01-05-2012 |
20120240683 | PRESSURE SENSOR - A pressure sensor is disclosed. The pressure sensor comprises a sensor chip having a depressed portion and a diaphragm defining a bottom of the depressed portion, a support member defining a pressure transmission passage communicating with the depressed portion, and a gel member continuously filling the depressed portion and at least a part of the pressure transmission passage. The sensor chip is bonded to a mounting surface of the support member with an adhesive. An edge of an open end of the pressure transmission passage on the mounting surface faces an surrounding region of the depressed portion of the sensor chip. | 09-27-2012 |
20160025580 | PRESSURE SENSOR - An antenna unit having an antenna coil pattern is disposed in a casing. A sensor unit has a surface acoustic wave detecting element including a first sensing electrode that generates and receives a surface acoustic wave and a first reflector that reflects the surface acoustic wave, which are provided on a substrate configured of a piezoelectric material, and a sensor coil pattern electrically connected to the first sensing electrode and coupled to the antenna coil pattern. The sensor unit is disposed in a pressure receiving portion, and a signal is transmitted between the sensor unit and the antenna unit by wireless communication resulting from a coil coupling. | 01-28-2016 |
Patent application number | Description | Published |
20100323421 | METHOD FOR CHEMICALLY MODIFYING BIOPOLYMER AND POLYPEPTIDE - It is an object of the present invention to provide a method for chemically modifying biopolymer and polypeptide with a hydrophobic compound or a compound which causes degradation or reaction under basic condition. The present invention provides a method for producing a chemically modified biopolymer or polypeptide, wherein a biopolymer or polypeptide is chemically modified in a reaction solution containing an organic fluorine compound. | 12-23-2010 |
20110009497 | DRUG-CONTAINING COMPOSITION - It is an object of the present invention to provide a drug-containing composition which is capable of dissolving a poorly water-soluble drug, has low toxicity to the human body, and has high binding affinity with drugs. The present invention provides a composition which is composed of: (a) at least one poorly water-soluble compound; and (b) a carrier comprising a polymer (excluding plasma protein) having binding affinity with the poorly water-soluble compound. | 01-13-2011 |
20110028396 | MEDICAL COMPOSITION - It is an object of the present invention to attach a biopolymer composition to a synthetic polymer substrate without the use of a toxic adhesive. The present invention provides a medical composition, wherein a synthetic polymer substrate and a composition mainly composed of a biopolymer directly adhere to each other due to dissolution of the surfaces thereof. | 02-03-2011 |
20110300127 | DRUG-CONTAINING COMPOSITION - It is an object of the present invention to provide a drug-containing composition capable of stably retaining a water-soluble compound without the loss of drug efficacy of a pharmaceutically active ingredient and thus preventing the compound from diffusing in the body, which is unlikely to cause disassociation at a non-target site and thus achieves disassociation/sustained release/delivery specifically at a target site. The present invention provides a composition which is composed of: (a) at least one a water-soluble compound; and (b) a carrier comprising a polymer having binding affinity with the water-soluble compound. | 12-08-2011 |
20120165263 | BONE REGENERATION AGENT COMPRISING GELATIN - It is an object of the present invention to provide a bone regeneration agent and a bone supplementation formulation, in which a supplementation material itself is capable of promoting bone regeneration. The present invention provides a bone regeneration agent which comprises a gelatin having an amino acid sequence derived from a partial amino acid of collagen. | 06-28-2012 |
Patent application number | Description | Published |
20110273786 | LENS BARREL - A lens barrel includes lens groups, lens retaining frames retaining the lens groups, respectively, between a collapsed state and a photographic state are moved toward an object side, a movable cylinder retaining the plurality of lens retaining frames therewithin, and a driving mechanism to move the lens retaining frames. The driving mechanism includes a main guide shaft parallel to the photographic axis and supports a retractable lens retaining frame retaining a retractable lens group movably along and rotatably about the main guide shaft, a lead screw disposed in parallel with the main guide shaft and to be driven to rotate, a screw member to be screwed on the lead screw by coming into contact with the lead screw in directions perpendicular to the lead screw to be moved along the lead screw by a rotation of the lead screw, and a cam structure connecting the retractable lens retaining frame with the screw member to convert a movement of the screw member along the lead screw into a rotary motion of the retractable lens retaining frame about the main guide shaft and a linear motion of the retractable lens retaining frame along the main guide shaft. | 11-10-2011 |
20120002307 | LENS BARREL - A lens barrel includes a plurality of lens groups including a retractable lens group, a plurality of lens retaining frames to retain the plurality of lens groups, a movable lens barrel to retain the plurality of lens retaining frames therein, and a fixed cylinder portion to retain the movable lens barrel therein. The plurality of lens retaining frames, the movable lens barrel and the fixed cylinder portion are configured to move the plurality of lens groups between a collapsed state with at least one portion of the plurality of lens groups collapsed and a photographing state. The plurality of lens retaining frames include a retractable lens retaining frame configured to movably retain the retractable lens group so as to position the plurality of lens groups in photographing positions on a single optical axis in the photographing state and to retract the retractable lens group to a retracted position outside an inside diameter position of the fixed cylinder portion in the collapsed state. The retractable lens retaining frame moves the retractable lens group between the photographing position and the retracted position by a driving force to drive the movable lens barrel relative to the fixed cylinder portion. | 01-05-2012 |
20120300314 | LENS BARREL, IMAGING APPARATUS, AND INFORMATION DEVICE - A lens barrel includes: a cam cylinder on which a plurality of cam grooves is formed; a plurality of lens groups that has equal to or more than one lens each; and a plurality of lens-holding frames that integrally holds the lens per lens group, has a cam follower each that engages with each cam groove, and is moved along an optical axis direction along a track of each cam groove, each lens-holding frame having: a lens supporting part; and a cylindrical part, and on an outer circumferential surface of which the cam follower is protrusively provided, wherein an inner circumferential part corresponding to a position of the cam follower in the cylindrical part of each lens-holding frame and a cylindrical part of a lens-holding frame positioned on an image plane side are arranged to always overlap in the optical axis direction. | 11-29-2012 |
20140347742 | LENS BARREL - A lens barrel includes: a lens holder which holds a lens group and includes a cam follower; a rotating cylinder including on a circumferential surface thereof a cam groove; a guide member to which the rotating cylinder is rotatably provided, which guides the lens holder to move in an optical axis direction; and a transmission member which transmits a drive force outputted from a drive source to the rotating cylinder. When the drive force is transmitted and the rotating cylinder rotates, the lens holder is guided in the optical axis direction and the cam groove has contact with the cam follower, and thereby the lens holder moves back and forth in accordance with a rotation posture of the rotating cylinder. The transmission member is provided on a more inner side than one, which is provided on an outermost side, of the lens holder, the guide member, and the rotating member. | 11-27-2014 |
Patent application number | Description | Published |
20090280760 | RADIO COMMUNICATION APPARATUS AND RADIO COMMUNICATION METHOD - A disclosed radio communication apparatus transmits a radio signal to multiple users via multiple transmit antenna groups at appropriate transmit power levels, each of the transmit antenna groups including one or more transmit antennas, the transmit antenna groups having respective transmit power constraints. The apparatus includes a precoding unit configured to perform precoding on signals modulated for individual users and generate transmit weights, an optimum transmit power calculation unit configured to receive the transmit weights from the precoding unit and use components of the transmit weights and respective transmit power limit values for the transmit antenna groups to calculate an initial value for a transmit power optimization problem for calculation of the appropriate transmit power levels for the users, and a transmission unit configured to transmit radio signals at the calculated transmit power levels. | 11-12-2009 |
20090280855 | RADIO COMMUNICATION APPARATUS AND RADIO COMMUNICATION METHOD - A disclosed radio communication apparatus includes a preceding unit configured to precode multiple streams, a splitting unit configured to split the precoded streams into two or more stream sets each including one or more streams, a sub power optimization unit configured to execute an iterative transmit power optimization algorithm on each of the split stream sets to determine respective transmit power levels for the individual stream sets, a power optimization unit configured to execute the iterative transmit power optimization algorithm by using the determined transmit power levels as initial values for the iterative transmit power optimization algorithm to determine respective transmit power levels for the individual streams, and a transmission unit configured to transmit radio signals from individual transmit antennas at the determined transmit power levels. | 11-12-2009 |
20090280856 | RADIO COMMUNICATION APPARATUS AND RADIO COMMUNICATION METHOD - A disclosed radio communication apparatus includes a preceding unit, a optimum transmit power calculation unit and a transmission unit. The optimum transmit power calculation unit receives the transmit weight related information from the preceding unit and calculates a transmit power level to optimize an objective function in accordance with an interior point method. The objective function results from addition of a barrier function adjusted with a barrier parameter to an original objective function associated with a constrained optimization problem. The original objective function includes a function of respective channel capacities for individual users derived from the transmit weight related information. The optimum transmit power calculation unit adaptively updates a logarithm of the barrier parameter and uses a gradient obtained through a high-order derivative with the logarithm of the barrier parameter to calculate the transmit power level to optimize the resulting objective function. | 11-12-2009 |
20130322362 | Communication System, Transmitting Device, Receiving Device, and Communication Method - There is provided a communication system capable of achieving a high usage efficiency of frequencies without the need for cooperation of multiplexed users. A communication system communicates over frequency channels set by dividing a frequency bandwidth assigned to the system allows interference between channels by overlapping the adjacent frequency channels with each other in the frequency domain, or a transmitting and receiving device, which transmits and receives a signal by allowing the interference between symbols at a waveform level for each channel to decrease the occupied bandwidth, is provided with ICI removal and ISI compensation filter | 12-05-2013 |
Patent application number | Description | Published |
20100225849 | LIGHT EMITTING MODULE, BACKLIGHT USING THE SAME, AND LIQUID CRYSTAL DISPLAY DEVICE - A light emitting module | 09-09-2010 |
20110109222 | LIGHT EMITTING DEVICE, AND BACKLIGHT, LIQUID CRYSTAL DISPLAY DEVICE AND ILLUMINATION DEVICE USING THE SAME - A light emitting device | 05-12-2011 |
20110116005 | LINEAR WHITE LIGHT SOURCE, AND BACKLIGHT AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME - A linear white light source | 05-19-2011 |
20110128466 | WHITE LED, AND BACKLIGHT AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME - A white LED includes a light emitting element with a light emission peak wavelength equal to or longer than 380 nm and equal to or shorter than 420 nm, and a phosphor layer containing three or more types of phosphors including at least a blue phosphor, a green phosphor, and a red phosphor and disposed in a manner to cover at least part of the light emitting element. The phosphor layer has a first phosphor layer and a second phosphor layer disposed in an opposite side of a side of the light emitting element of the first phosphor layer. In the first phosphor layer, a content of the blue phosphor in an entire phosphor contained in the first phosphor layer is equal to or less than 5 mass %, or the blue phosphor is not contained. In the second phosphor layer, a content of phosphor other than the blue phosphor in an entire phosphor contained in the second phosphor layer is equal to or less than 5 mass %, or no phosphor other than the blue phosphor is contained. | 06-02-2011 |
20120062821 | WHITE LED, BACKLIGHT USING SAME, AND LIQUID CRYSTAL DISPLAY DEVICE CONFORMING TO EBU STANDARD - In a embodiment, a white LED for a backlight of a liquid crystal display device conforming to the EBU standard includes an ultraviolet (purple) light-emitting element, and a phosphor layer which contains 1 to 10 wt % of a green phosphor including a divalent europium-activated silicate phosphor, 40 to 80 wt % of a blue phosphor including at least one selected from a divalent europium-activated halo-phosphate phosphor and a divalent europium-activated aluminate phosphor, and 10 to 50 wt % of a red phosphor including at least one selected from a europium-activated lanthanum oxysulfide phosphor and a europium-activated yttrium oxysulfide phosphor. | 03-15-2012 |
20120206671 | WHITE LED, BACKLIGHT USING THE SAME, AND LIQUID CRYSTAL DISPLAY DEVICE - Certain embodiments provide a white LED for a backlight of a liquid crystal display device, which comprises an ultraviolet (or violet) light emitting element and a phosphor layer that contains a green phosphor selected from trivalent cerium- and terbium-activated rare earth borate phosphors, a blue phosphor selected from divalent europium-activated halophosphate phosphors and divalent europium-activated aluminate phosphors, and a red phosphor selected from europium-activated lanthanum oxysulfide phosphors and europium-activated yttrium oxysulfide phosphors as the contained amounts of the respective phosphors relative to the total amount of the phosphors as follows: 35-50% by weight of the green phosphor content; 50-70% by weight of the blue phosphor content; and 1-10% by weight of the red phosphor content. | 08-16-2012 |
20120223352 | PHOSPHOR AND LED LIGHT EMITTING DEVICE USING THE SAME - An LED light emitting device is provided that has high color rendering properties and is excellent color uniformity and, at the same time, can realize even luminescence unattainable by conventional techniques. A phosphor having a composition represented by formula: (Sr | 09-06-2012 |
20130100645 | LED LIGHT BULB - In one embodiment, an LED light bulb includes an LED module, a base portion on which the LED module is disposed, and a glove attached to the base portion. The LED module includes an ultraviolet to violet light-emitting LED chip mounted on a substrate. A lighting circuit and a bayonet cap are provided in and on the base portion. A fluorescent film is provided on an inner surface of the glove, and emits white light by absorbing ultraviolet to violet light emitted from the LED chip. The fluorescent film has a film thickness in a range of 80 to 800 μm. In the LED light bulb, an amount of ultraviolet light which leaks from the glove is 0.1 mW/nm/lm or less. | 04-25-2013 |
20130169147 | LED LIGHT BULB - In one embodiment, an LED light bulb includes an LED module, a base part on which the LED module is disposed, and a globe attached to the base part. The LED module includes an ultraviolet to violet light-emitting LED chip mounted on a substrate. A lighting circuit and a bayonet cap are provided at the base part. A phosphor screen emitting white light by absorbing the ultraviolet to violet light emitted from the LED chip is provided on an inner surface of the globe. The phosphor screen has a color in which a* is −10 or more and +10 or less, b* is 0 (zero) or more and +30 or less, and L* is +40 or more when a body color thereof is represented by an L*a*b* color system. | 07-04-2013 |
20130188333 | LED LIGHT BULB - In one embodiment, an LED light bulb includes an LED module, a base part on which the LED module is disposed, and a globe attached to the base part. The LED module includes an ultraviolet to violet light-emitting LED chip mounted on a surface of a substrate. The globe has a shape in which a cross section in a direction in parallel to the surface of the substrate is circular. A phosphor screen emitting white light by absorbing the ultraviolet to violet light emitted from the LED chip is provided on an inner surface of the globe. The globe has a shape in which a diameter D | 07-25-2013 |
20130240915 | LIGHT EMITTING DEVICE - A light emitting device | 09-19-2013 |
20150060926 | WHITE LED LAMP, BACKLIGHT, LIGHT EMITTING DEVICE, DISPLAY DEVICE AND ILLUMINATION DEVICE - A white LED lamp including: a conductive portion; a light emitting diode chip mounted on the conductive portion, for emitting a primary light having a peak wavelength of 360 nm to 420 nm; a transparent resin layer including a first hardened transparent resin, for sealing the light emitting diode chip; and a phosphor layer covering the transparent resin layer, the phosphor layer being formed by dispersing a phosphor powder into a second hardened transparent resin, and the phosphor powder receiving the primary light and radiating a secondary light having a wavelength longer than that of the primary light. An energy of the primary light contained in the radiated secondary light is 0.4 mW/lm or less. | 03-05-2015 |
Patent application number | Description | Published |
20100190350 | PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD AND STORAGE MEDIUM - A plasma etching method for forming a hole in an etching target film by a plasma processing apparatus is provided. The apparatus includes an RF power supply for applying RF power for plasma generation to at least one of upper and lower electrodes, and a DC power supply for applying minus DC voltage to the upper electrode. A first condition that plasma is generated by turning on the RF power supply and minus DC voltage is applied to the upper electrode and a second condition that the plasma is extinguished by turning off the RF power supply and minus DC voltage is applied to the upper electrode are alternately repeated. Etching is performed by positive ions in the plasma under the first condition and negative ions are supplied into the hole by the DC voltage to neutralize positive ions in the hole under the second condition. | 07-29-2010 |
20100210114 | PLASMA PROCESSING METHOD - A plasma processing method performed in a plasma processing apparatus including a processing chamber accommodating a substrate in which a plasma is generated; a mounting table mounting the substrate, which is provided in the processing chamber and to which a plasma attraction high frequency voltage is applied; and a facing electrode provided to face the mounting table in the processing chamber, to which a negative DC voltage is applied, the method including: applying a plasma attraction high frequency voltage to the mounting table for a predetermined period of time; and stopping the application of the plasma attraction high frequency voltage to the mounting table. In the plasma processing method, the application of the plasma attraction high frequency voltage and stopping thereof are alternately repeated. | 08-19-2010 |
20120000886 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - The substrate processing apparatus includes a process chamber which accommodates a wafer and performs a plasma etching process on the wafer, an exhaust chamber which communicates with the process chamber, an exhaust plate which divides the process chamber from the exhaust chamber and prevents plasma inside the process chamber from leaking into the exhaust chamber, and an upper electrode plate arranged inside the exhaust chamber, wherein the exhaust plate includes a plurality of through holes, and the upper electrode plate includes a plurality of through holes, is capable of contacting the exhaust plate in parallel, and is capable of being spaced apart from the exhaust plate. | 01-05-2012 |
20140102638 | PLASMA PROCESSING APPARATUS - A plasma processing apparatus capable of optimizing a plasma process is provided. The plasma processing apparatus includes a control unit for controlling a minimum energy and a maximum energy of ions incident onto a substrate independently of each other such that ion energy of the ions are concentrated at a first energy band and a second energy band respectively. In the plasma processing apparatus, the oxide film is etched to form a hole within the oxide film, the first energy band is lower than a first energy value at which the oxide film is etched while the organic film is not etched, and the second energy band is higher than a second energy value at which an etching yield at an inclined surface of the hole is higher than an etching yield of an upper surface of the organic film. | 04-17-2014 |