Patent application number | Description | Published |
20090090617 | Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films - An enhanced sputtered film processing system and associated method comprises one or more sputter deposition sources each having a sputtering target surface and one or more side shields extending therefrom, to increase the relative collimation of the sputter deposited material, such as about the periphery of the sputtering target surface, toward workpiece substrates. One or more substrates are provided, wherein the substrates have a front surface and an opposing back surface, and may have one or more previously applied layers, such as an adhesion or release layer. The substrates and the deposition targets are controllably moved with respect to each other. The relatively collimated portion of the material sputtered from the sputtering target surface travels beyond the side shields and is deposited on the front surface of the substrates. The increase in relative collimation results in deposited films with desirable properties including but not limited to high levels of both readily controllable compressive stress and mechanical integrity without the use of ion bombardment. | 04-09-2009 |
20130186746 | Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films - An enhanced sputtered film processing system and associated method comprises one or more sputter deposition sources each having a sputtering target surface and one or more side shields extending therefrom, to increase the relative collimation of the sputter deposited material, such as about the periphery of the sputtering target surface, toward workpiece substrates. One or more substrates are provided, wherein the substrates have a front surface and an opposing back surface, and may have one or more previously applied layers, such as an adhesion or release layer. The substrates and the deposition targets are controllably moved with respect to each other. The relatively collimated portion of the material sputtered from the sputtering target surface travels beyond the side shields and is deposited on the front surface of the substrates. The increase in relative collimation results in deposited films with desirable properties including but not limited to high levels of both readily controllable compressive stress and mechanical integrity without the use of ion bombardment. | 07-25-2013 |
Patent application number | Description | Published |
20090072212 | ANTI-FUSE MEMORY DEVICE - A One Time Programmable (OTP) memory cell ( | 03-19-2009 |
20100103751 | CIRCUIT WITH A MEMORY ARRAY AND A REFERENCE LEVEL GENERATOR CIRCUIT - A circuit comprises an array of memory cells ( | 04-29-2010 |
20110092864 | SYSTEM AND METHOD FOR AUTOMATIC CPR - A method for applying a plurality of compressive forces to a thorax of a patient, measuring a displacement corresponding to each of the plurality of compressive forces, and determining properties of the thorax based on the compressive forces and the displacement. A system having a force applying device applying compressive forces to a thorax of a patient, a measurement device measuring a displacement of the thorax corresponding to each of the compressive forces, and a control device determining properties of the thorax based on the displacements of the thorax corresponding to each of the compressive forces. | 04-21-2011 |
20110166490 | Smart Servo for a Mechanical CPR System - The invention relates to an apparatus and a method for automated Cardio Pulmonary Resuscitation. The apparatus comprises a chest compression actuator, an actuator driver that supplies time-varying drive signals to the chest compression actuator in dependence of operating parameters of the actuator driver, a physiological parameter sensor supplying measured values of a physiological parameter related to the function of the chest compression actuator, and an adaptive control for the operating parameters of the actuator driver. The operating parameters determining a dynamic behavior of a system comprising the chest compression actuator and a chest of a patient. | 07-07-2011 |