Patent application number | Description | Published |
20100099271 | METHOD FOR IMPROVING PROCESS CONTROL AND FILM CONFORMALITY OF PECVD FILM - A method for forming a silicon-based dielectric film on a substrate with a single deposition process operation using pulsed plasma enhanced chemical vapor deposition (PECVD) wherein the high frequency radio frequency power of the plasma is pulsed, allows enhanced control, efficiency and product quality of the PECVD process. Pulsing the high frequency RF power of the plasma reduces the deposited film thickness per unit time the high frequency RF power of the plasma is on. This yields silicon-based dielectric films that are both thin and conformal. | 04-22-2010 |
20110256724 | GAS AND LIQUID INJECTION METHODS AND APPARATUS - A liquid injection system for a processing chamber includes a liquid injector that receives a liquid from a liquid supply and that selectively pulses the liquid into a conduit. A control module selects a number of pulses and a pulse width of the liquid injector. A gas supply supplies gas into the conduit. A sensor senses at least one of a first temperature and a first pressure in the conduit and that generates at least one of a first temperature signal and a first pressure signal, respectively. The control module confirms that the selected number of pulses occur based on the at least one of the first temperature signal and the first pressure signal. | 10-20-2011 |
20130189854 | METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM - Described are methods of making silicon nitride (SiN) materials on substrates. Improved SiN films made by the methods are also included. One aspect relates to depositing chlorine (Cl)-free conformal SiN films. In some embodiments, the SiN films are Cl-free and carbon (C)-free. Another aspect relates to methods of tuning the stress and/or wet etch rate of conformal SiN films. Another aspect relates to low-temperature methods of depositing high quality conformal SiN films. In some embodiments, the methods involve using trisilylamine (TSA) as a silicon-containing precursor. | 07-25-2013 |
20130196516 | METHODS FOR UV-ASSISTED CONFORMAL FILM DEPOSITION - Described are methods of making silicon nitride (SiN) materials and other silicon-containing films, including carbon-containing and/or oxygen-containing films such as SiCN (also referred to as SiNC), SiON and SiONC films, on substrates. According to various embodiments, the methods involve electromagnetic radiation-assisted activation of one or more reactants. In certain embodiments, for example, the methods involve ultraviolet (UV) activation of vapor phase amine coreactants. The methods can be used to deposit silicon-containing films, including SiN and SiCN films, at temperatures below about 400° C. | 08-01-2013 |
20140051262 | METHODS FOR UV-ASSISTED CONFORMAL FILM DEPOSITION - Described are methods of making silicon nitride (SiN) materials and other silicon-containing films, including carbon-containing and/or oxygen-containing films such as SiCN (also referred to as SiNC), SiON and SiONC films, on substrates. According to various embodiments, the methods involve electromagnetic radiation-assisted activation of one or more reactants. In certain embodiments, for example, the methods involve ultraviolet (UV) activation of vapor phase amine coreactants. The methods can be used to deposit silicon-containing films, including SiN and SiCN films, at temperatures below about 400° C. | 02-20-2014 |
20140094038 | ENHANCING ADHESION OF CAP LAYER FILMS - The present invention provides methods and apparatuses for improving adhesion of dielectric and conductive layers on a substrate to the underlying layer. The methods involve passing a process gas through a plasma generator downstream of the substrate to create reactive species. The underlying layer is then exposed to reactive species that interact with the film surface without undesirable sputtering. The gas is selected such that the interaction of the reactive species with the underlying layer modifies the surface of the layer in a manner that improves adhesion to the subsequently formed overlying layer. During exposure to the reactive species, the substrate and/or process gas may be exposed to ultraviolet radiation to enhance surface modification. In certain embodiments, a single UV cure tool is used to cure the underlying film and improve adhesion. | 04-03-2014 |
20140106574 | GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AND PECVD METHOD - Provided herein are methods and apparatus for filling one or more gaps on a semiconductor substrate. The disclosed embodiments are especially useful for forming seam-free, void-free fill in both narrow and wide features. The methods may be performed without any intervening etching operations to achieve a single step deposition. In various implementations, a first operation is performed using a novel PEALD fill mechanism to fill narrow gaps and line wide gaps. A second operation may be performed using PECVD methods to continue filling the wide gaps. | 04-17-2014 |
20140141626 | METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM - Described are methods of making silicon nitride (SiN) materials on substrates. Improved SiN films made by the methods are also included. One aspect relates to depositing chlorine (Cl)-free conformal SiN films. In some embodiments, the SiN films are Cl-free and carbon (C)-free. Another aspect relates to methods of tuning the stress and/or wet etch rate of conformal SiN films. Another aspect relates to low-temperature methods of depositing high quality conformal SiN films. In some embodiments, the methods involve using trisilylamine (TSA) as a silicon-containing precursor. | 05-22-2014 |
20150206719 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 07-23-2015 |
20150259791 | METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM - Described are methods of making silicon nitride (SiN) materials on substrates. Improved SiN films made by the methods are also included. One aspect relates to depositing chlorine (Cl)-free conformal SiN films. In some embodiments, the SiN films are Cl-free and carbon (C)-free. Another aspect relates to methods of tuning the stress and/or wet etch rate of conformal SiN films. Another aspect relates to low-temperature methods of depositing high quality conformal SiN films. In some embodiments, the methods involve using trisilylamine (TSA) as a silicon-containing precursor. | 09-17-2015 |
Patent application number | Description | Published |
20110256726 | PLASMA ACTIVATED CONFORMAL FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by the following operations: (a) exposing the substrate surface to a first reactant in vapor phase under conditions allowing the first reactant to adsorb onto the substrate surface; (b) exposing the substrate surface to a second reactant in vapor phase while the first reactant is adsorbed on the substrate surface; and (c) exposing the substrate surface to plasma to drive a reaction between the first and second reactants adsorbed on the substrate surface to form the film. | 10-20-2011 |
20110256734 | SILICON NITRIDE FILMS AND METHODS - Described are methods of making SiN materials on substrates, particularly SiN thin films on semiconductor substrates. Improved SiN films made by the methods are also included. | 10-20-2011 |
20120028454 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 02-02-2012 |
20140209562 | PLASMA ACTIVATED CONFORMAL FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by the following operations: (a) exposing the substrate surface to a first reactant in vapor phase under conditions allowing the first reactant to adsorb onto the substrate surface; (b) exposing the substrate surface to a second reactant in vapor phase while the first reactant is adsorbed on the substrate surface; and (c) exposing the substrate surface to plasma to drive a reaction between the first and second reactants adsorbed on the substrate surface to form the film. | 07-31-2014 |
20140216337 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 08-07-2014 |
20150114292 | MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS - The present invention provides improved methods of preparing a low-k dielectric material on a substrate. The methods involve multiple operation ultraviolet curing processes in which UV intensity, wafer substrate temperature, UV spectral distribution, and other conditions may be independently modulated in each operation. Operations may be pulsed or even be concurrently applied to the same wafer. In certain embodiments, a film containing a structure former and a porogen is exposed to UV radiation in a first operation to facilitate removal of the porogen and create a porous dielectric film. In a second operation, the film is exposed to UV radiation to increase cross-linking within the porous film. | 04-30-2015 |
20150221519 | VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS - Vacuum-integrated photoresist-less methods and apparatuses for forming metal hardmasks can provide sub-30 nm patterning resolution. A metal-containing (e.g., metal salt or organometallic compound) film that is sensitive to a patterning agent is deposited on a semiconductor substrate. The metal-containing film is then patterned directly (i.e., without the use of a photoresist) by exposure to the patterning agent in a vacuum ambient to form the metal mask. For example, the metal-containing film is photosensitive and the patterning is conducted using sub-30 nm wavelength optical lithography, such as EUV lithography. | 08-06-2015 |
Patent application number | Description | Published |
20100089783 | United Nations Certified 4G Fiberboard Box - A 4G fiberboard box certified for shipping hazardous materials in accordance with United Nations regulations. In some embodiments, the 4G fiberboard box includes an outer shell, a three-piece partition assembly, a top insert and a bottom insert. The outer shell has a width and a length, each no greater than ⅓ of 46 inches. Thus, the 4G fiberboard box is shippable in a 3×3 configuration on a standard 46″×46″ pallet. The three-piece partition assembly is disposed within the shell and has four compartments, each compartment configured to receive a container storing hazardous material. The top insert and bottom insert are also disposed with the shell, with the partition assembly positioned therebetween. | 04-15-2010 |
20110155601 | United Nations Certified 4G Fiberboard Box - A 4 G fiberboard box certified for shipping hazardous materials in accordance with United Nations regulations. In some embodiments, the 4 G fiberboard box includes an outer shell, a three-piece partition assembly, a top insert and a bottom insert. The outer shell has a width and a length, each no greater than ⅓ of 46 inches. Thus, the 4 G fiberboard box is shippable in a 3×3 configuration on a standard 46″×46″ pallet. The three-piece partition assembly is disposed within the shell and has four compartments, each compartment configured to receive a container storing hazardous material. The top insert and bottom insert are also disposed with the shell, with the partition assembly positioned therebetween. | 06-30-2011 |
Patent application number | Description | Published |
20110078098 | METHOD AND SYSTEM FOR EXTRACTION - A system and method for extracting information from at least one document in at least one set of documents, the method comprising: generating, using at least one ranking and/or matching processor, at least one ranked possible match list comprising at least one possible match for at least one target entry on the at least one document, the at least one ranked possible match list based on at least one attribute score and at least one localization score. | 03-31-2011 |
20110103688 | System and method for increasing the accuracy of optical character recognition (OCR) - A system and/or method for increasing the accuracy of optical character recognition (OCR) for at least one item, comprising: obtaining OCR results of OCR scanning from at least one OCR module; creating at least one OCR seed using at least a portion of the OCR results; creating at least one OCR learn set using at least a portion of the OCR seed; and applying the OCR learn set to the at least one item to obtain additional optical character recognition (OCR) results. | 05-05-2011 |
20110103689 | SYSTEM AND METHOD FOR OBTAINING DOCUMENT INFORMATION - A method and system for determining at least one target value of at least one target in at least one document, comprising: determining, utilizing at least one scoring application; at least one possible target value, wherein the at least one scoring application utilizes information from at least one training document, and applying the information, utilizing the at least one scoring application, on the at least one new document to determine at least one value of the at least one target on the at least one new document. | 05-05-2011 |
20110106823 | SYSTEM AND METHOD OF USING DYNAMIC VARIANCE NETWORKS - A method and system for determining at least one location of at least one target in at least one document, comprising: creating, utilizing at least one localization module, information compiled from at least one training document, the information comprising at least one reference and at least one reference vector tying each reference to the at least one target. | 05-05-2011 |
20140089302 | METHOD AND SYSTEM FOR EXTRACTION - A system and method for extracting information from at least one document in at least one set of documents, the method comprising: generating, using at least one ranking and/or matching processor, at least one ranked possible match list comprising at least one possible match for at least one target entry on the at least one document, the at least one ranked possible match list based on at least one attribute score and at least one localization score. | 03-27-2014 |
20140369602 | Methods for Automatic Structured Extraction of Data in OCR Documents Having Tabular Data - Methods to select and extract tabular data among the optical character recognition returned strings to automatically process documents, including documents containing academic transcripts. | 12-18-2014 |
Patent application number | Description | Published |
20140050572 | SOUND ENCLOSURE FOR A COMPRESSOR - A sound enclosure of a compressor to attenuate an operational sound level of the compressor is disclosed. The sound enclosure may be configured to generally enclose the compressor and attenuate radiantly emitted sound by the compressor. The sound enclosure may be configured to include a plurality of assembly sections, particularly two side sections and one bottom section, where the two side sections can be joined together like two halves of a clam shell and joined to the bottom section to facilitate easy assembly. The sound enclosure may form openings at longitudinal ends of the sound enclosure to accommodate refrigerant lines. The assembly sections of the sound enclosure may include one or more openings to accommodate a compressor junction box, wire bundles, oil lines, mounting mechanisms, etc. | 02-20-2014 |
20150219360 | SOUND ENCLOSURE FOR A COMPRESSOR - A sound enclosure of a compressor to attenuate an operational sound level of the compressor is disclosed. The sound enclosure may be configured to generally enclose the compressor and attenuate radiantly emitted sound by the compressor. The sound enclosure may be configured to include a plurality of assembly sections, particularly two side sections and one bottom section, where the two side sections can be joined together like two halves of a clam shell and joined to the bottom section to facilitate easy assembly. The sound enclosure may form openings at longitudinal ends of the sound enclosure to accommodate refrigerant lines. The assembly sections of the sound enclosure may include one or more openings to accommodate a junction box, wire bundles, oil lines, mounting mechanisms, etc. | 08-06-2015 |
Patent application number | Description | Published |
20090166617 | INTEGRATED CIRCUIT AND METHOD FOR OPERATING - An integrated circuit and a method for operating an integrated circuit is disclosed. One embodiment provides a semi-conductor component, an electronic system, and a method for operating an integrated circuit. A method for operating an integrated circuit provides applying a voltage to a line or a connection in accordance with data to be input. A current is applied to the line or the connection in accordance with data to be output. | 07-02-2009 |
20090237282 | Oversampling PID Controller for Integration with a Delta-Sigma Analog-to-Digital Converter - An embodiment of the invention relates to a controller that includes a delta-sigma modulator to produce a one-bit, oversampled signal representing a measured characteristic of a process, and a delta-sigma modulator to produce a one-bit, oversampled signal representing a set-point value for the characteristic. A multiplexer selects a partial sum based on a difference of the oversampled signals to produce a control signal for the process. The controller that produces the control signal for the process can be a PID controller. | 09-24-2009 |
20100039079 | Regulation of a Current through an Inductive Load - A current regulator and a method for regulating current are described. | 02-18-2010 |
20100315091 | Detecting a Short Circuit in an Inductive Load Current Path - A method detects a short circuit in a load current path that includes an inductive load. | 12-16-2010 |
20120081928 | Flyback Converter with an Adaptively Controlled Rectifier Arrangement - A flyback converter includes input terminals and output terminals. A transformer with a first winding and a second winding are inductively coupled. A first switching element is connected in series with the first winding and a first series circuit with the first switching element, the first winding being coupled between the input terminals. A rectifier arrangement is connected in series with the second winding and a second series circuit with the rectifier arrangement, the second winding being coupled between the output terminals. The rectifier arrangement includes a second switching element. A control circuit is configured in one drive cycle to switch on the first switching element for a first time period. After the first time period the second switching element is switched on for a second time period. A third time period is determined between an end of the second time period and the time at which the transformer assumes a predetermined transformer state. The control circuit is further configured to adapt the second time period to be applied in a subsequent drive cycle dependent on the second time period applied in the one drive cycle and the third time period is determined in the one drive cycle. | 04-05-2012 |
20130254600 | System and Method to Transmit Data, in Particular Error Data Over a Bus System - The invention relates to an electrical or electronic system, and more specifically, to a system with a bus, and a method to transmit data, in particular error data over a bus system. According to an embodiment, a method to transmit error data over a bus system that connects a plurality of modules/components/elements of an electronic system in a chain-like structure comprises in a first phase, transmitting information regarding what kinds of errors have occurred in the system, and in a second phase, transmitting information regarding where in the system an error has occurred. | 09-26-2013 |
20130318263 | System and Method to Transmit Data over a Bus System - A system includes a bus system to connect a number of components in a chain-like structure. A first control device (e.g., microcontroller or microprocessor) is configured to control the components in a first mode of the system. A second control device (e.g., microcontroller or microprocessor) is configured to control a first subset of the components in a second mode of the system. | 11-28-2013 |
20130321188 | System and Method for Operating an Analog to Digital Converter - A system and method can be used for scaling an output of a modulator of a sigma-delta analog to digital converter and systems and a method can be used for compensating temperature-dependent variations of a reference voltage in a sigma-delta analog to digital converter. In accordance with one embodiment, a system can be used for scaling an output of a modulator of a sigma-delta analog digital converter (ADC). A decimation filter has a decimation length that is adjustable by a decimation length value received as an input to the decimation filter. The decimation filter is configured to receive the output of the modulator of the sigma-delta ADC and to decimate the received output of the modulator of the sigma-delta ADC using the received decimation length value. | 12-05-2013 |
20140009166 | Monitoring Circuit with a Signature Watchdog - A method can be used for monitoring a processing circuit. The processing circuit generates a response to a request and the response is compared with an expected response. A pass pulse is generated when the response matches the expected response. The causing, comparing and generating steps are repeated a number of times A frequency at which pass pulses occur is evaluated. | 01-09-2014 |
20140013150 | Monitoring Circuit with a Window Watchdog - A method of monitoring a processing circuit is disclosed. The processing circuit is operable, in a normal operation mode, to generate a sequence of trigger commands, with at least one trigger command of the sequence of trigger commands including time information. At least one window sequence with a closed window period and an open window period is generated such that the duration of the closed window period and/or the open window period is defined, at least in part, by the time information. It is detected if one trigger command is received within the open window period of the at least one sequence. | 01-09-2014 |
20140035357 | Battery, Battery Management System, and Method to Control a Battery - The invention relates to a battery, a battery management system, and a method to control a battery. According to an embodiment, a system includes a plurality of batteries. Each battery includes an individual associated battery control chip. Advantageously, each battery control chip is mounted within a housing of a respective associated battery. Further, each battery control chip may be adapted for wireless communication. | 02-06-2014 |
20150048958 | SIGNAL CONVERTER AND METHOD FOR OPERATING A SIGNAL CONVERTER - In accordance with an embodiment, a method for operating a signal converter includes converting an analog input signal to a digital output signal, comprising by comparing the analog input signal to an analog comparison signal, and detecting whether the analog input signal exceeds a predetermined maximum or minimum threshold by comparing the analog input signal to an analog threshold signal. The analog comparison signal and the analog threshold signal are generated by a same digital-to-analog converter. | 02-19-2015 |
Patent application number | Description | Published |
20140358390 | DIRECT CLUTCH SLIP CONTROL - An automatic transmission for a vehicle drivetrain includes a transmission housing, an input shaft, an output shaft, and a plurality of gears within the transmission housing. The plurality of gears defines multiple mechanical gear ratios between the input shaft and the output shaft. The transmission further includes a plurality of clutches operable to selectively engage the multiple mechanical gear ratios, and a plurality of rotational speed sensors. Each rotational speed sensor is operable to measure rotational speeds relative to the transmission housing for of one of the input shaft, the output shaft, or one of the plurality of gears. The transmission further includes a transmission control system configured to receive signals representing the measured rotational speeds from the plurality of rotational speed sensors and control the plurality of clutches to change between gear ratios based at least in part on the signals representing the measured rotational speeds. | 12-04-2014 |
20150300486 | DIRECT CLUTCH SLIP CONTROL - An automatic transmission for a vehicle drivetrain includes a transmission housing, an input shaft, an output shaft, and a plurality of gears within the transmission housing. The plurality of gears defines multiple mechanical gear ratios between the input shaft and the output shaft. The transmission further includes a plurality of clutches operable to selectively engage the multiple mechanical gear ratios, and a plurality of rotational speed sensors. Each rotational speed sensor is operable to measure rotational speeds relative to the transmission housing for of one of the input shaft, the output shaft, or one of the plurality of gears. The transmission further includes a transmission control system configured to receive signals representing the measured rotational speeds from the plurality of rotational speed sensors and control the plurality of clutches to change between gear ratios based at least in part on the signals representing the measured rotational speeds. | 10-22-2015 |