Patent application number | Description | Published |
20090144693 | Exposure data generator and method thereof - An exposure data generator for generating exposure data representing graphical information of a pattern to be exposed and a computer-readable recording medium are provided. The generator includes a storage device for storing pre-correction exposure data which include information on positions and sizes of patterns placed within an target region and a search device for classifying the patterns according to placement positions within the target region, searching for a pattern which is another pattern by using the classified patterns, and storing information on the patterns. The generator also includes a back-scattering intensity calculation device for calculating a back-scattering intensity from at an evaluation point on the pattern. The generator also includes a movement quantity calculation device for calculating a movement quantity of a side of a pattern. | 06-04-2009 |
20090162760 | SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND COMPUTER READABLE MEDIUM - In a multi-project-chip semiconductor device, semiconductor elements fabricated on a wafer have a layout that corresponds to an exposure order of a pattern of the semiconductor elements and that is based on information indicating manufacture conditions and the number of shots and are arranged such that the semiconductor elements having the same manufacture condition are adjacent to each other in ascending or descending order of the number of shots. | 06-25-2009 |
20090187878 | DATA GENERATION METHOD FOR SEMICONDUCTOR DEVICE, AND ELECTRON BEAM EXPOSURE SYSTEM - A method includes: generating electron beam exposure data, used for electron beam exposure, from design data of a semiconductor device; extracting differential information indicating a difference in shape between an electron beam exposure pattern formed on a substrate through electron beam exposure on the basis of the electron beam exposure data and a photoexposure pattern formed on the substrate through photoexposure on the basis of the design data of the semiconductor device; determining whether the size of the difference in shape between the electron beam exposure pattern and the photoexposure pattern falls within a predetermined reference value; acquiring shape changed exposure data by changing the shape of the pattern of the electron beam exposure data in accordance with the differential information and updating the electron beam exposure data; and repeating the differential extraction, the determination and the updating when the size of the difference falls outside the predetermined reference value. | 07-23-2009 |
20090239160 | METHOD FOR PREPARING DATA FOR EXPOSURE AND METHOD FOR MANUFACTURING PHOTO MASK - A method for preparing data for exposure includes forming a first plurality of rectangular patterns from a reticle preparing rule; lining an object pattern for performing reticle exposure with the first rectangular patterns, and extracting a second plurality of rectangular patterns, disposed in an N×N matrix, from the first plurality of rectangular patterns in the object pattern; and performing a violation detecting treatment and a correcting treatment of the pattern width and the pattern distance of the reticle exposure pattern on the basis of the distance between the second plurality of rectangular patterns. | 09-24-2009 |
20110320987 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD, DATA GENERATING APPARATUS, DATA GENERATING METHOD AND RECORDING MEDIUM READABLE BY COMPUTER RECORDED WITH DATA GENERATING PROGRAM - A semiconductor manufacturing method comprising, a data generating process including, acquiring a simulation light pattern that simulates a shape of a light exposure pattern formed on a substrate on the basis of design data of a semiconductor device, acquiring a simulation electron beam exposure pattern that simulates a shape of an electron beam exposure pattern formed by an electron beam exposure on the substrate on the basis of the design data, extracting difference information representing a shape difference portion between the simulation light pattern and the simulation electron beam exposure pattern, acquiring changed design data for modifying shape by changing the design data in accordance with the difference information, conducting the electron beam exposure on the substrate by use of the changed design data for modifying the shape. | 12-29-2011 |
20120236279 | Mask Pattern Correction Device, Method of Correcting Mask Pattern, Light Exposure Correction Device, and Method of Correcting Light Exposure - In view of realizing a lithographic process which makes it possible to estimate and correct flare with an extremely high accuracy, and causes only an extremely small dimensional variation in width, over the entire portion not only of a single shot region, but also of a single chip region, a mask pattern correction device of the present invention has a numerical aperture calculation unit calculating, for every single shot region, flare energy for a mask pattern corresponding to a transferred pattern, based on an exposure layout of a plurality of shot regions, or more specifically, while considering flare from a plurality of shot regions located around every single shot region. | 09-20-2012 |
Patent application number | Description | Published |
20100296395 | PACKET TRANSMISSION SYSTEM, PACKET TRANSMISSION APPARATUS, AND PACKET TRANSMISSION METHOD - A first apparatus includes a sending unit which attaches a sequence number which is numbered for each priority of QoS set in a first packet, the sequence number is numbered for each priority of QoS set in the first packet, and sends the first packet with the sequence number. A second apparatus includes a storage unit which stores, for each priority, a history of sequence numbers attached to packets received, a determining unit which receives the first packet from the first apparatus, identifies the sequence number of the first packet, and determines whether the first packet has been previously received by comparing the identified sequence number with the history of sequence numbers according to the priority of QoS set in the first packet stored in the storage unit, and a unit which discards, when the determining unit determines the first packet has been previously received, the first packet. | 11-25-2010 |
20100303233 | PACKET TRANSMITTING AND RECEIVING APPARATUS AND PACKET TRANSMITTING AND RECEIVING METHOD - When being triggered by a call setting request that has been made, dummy information that is different from information to be transmitted and is information used for creating a path on which encrypted communication is to be performed is generated. The path on which the encrypted communication is to be performed is established by using the generated dummy information. A responding process of responding to the call setting request is performed after the path on which the encrypted communication is to be performed has been established. Thus, in the case where information that is obtained after the responding process of responding to the call setting request is encrypted and transmitted, it is possible to transmit the information while maintaining the real-time characteristics of the information to be transmitted. | 12-02-2010 |
20110038316 | CONTROL APPARATUS, WIRELESS COMMUNICATION APPARATUS, COMMUNICATION SYSTEM, AND CONTROL METHOD - A mobile communication system has a mobile terminal, basestations, and a Radio Network Controller (RNC). In the case where drop of a frame occurs during data communication in Iub/Iur (between the basestations and the RNC), the RNC executes retransmission of an EDCH FP frame between the RNC and the basestations by transmitting a TN frame to the basestations to repair the drop of the frame without executing retransmission with the terminal device. | 02-17-2011 |
20110299386 | APPARATUS AND METHOD FOR SWITCHING BETWEEN REDUNDANT COMMUNICATION DEVICES - A packet is transmitted from a transmitting device to an active communication device which transmits a reception history identifying the received packets to the transmitting device. The transmitting device transmits an active-mode request message to a standby communication device when having failed to receive the reception history from the active communication device within a predetermined time period. Then, the standby communication device becomes a new active communication device, and the active communication device becomes an old active communication device. The new active communication device transmits to the transmitting device a switching request message for switching a destination of the packet from the old active communication device to the new active communication device. The transmitting device retransmits packets that have been transmitted from the transmitting device to the old active communication device and have failed to be received by the old active communication device, to the new active communication device. | 12-08-2011 |
Patent application number | Description | Published |
20100209063 | PATCH PANEL SYSTEM - A patch panel system includes a base panel having an array of openings and an array of engageable portions provided adjacent to the openings, and a first panel having a first opening and a first engageable portion which is arranged to be cooperatively engageable with the corresponding one of the engageable portions of the base panel, the first opening being configured to accommodate a first adapter, the corresponding of the openings in the base panel being configured to receive the first adapter therein. | 08-19-2010 |
20120080939 | POWER TERMINAL BLOCK AND POWER SUPPLY APPARATUS - A power terminal block includes a base made of an insulator, a plurality of power terminals electrically insulated from each other and disposed on the base, and a plurality of terminal bases, each terminal base including a base connecting part made of a conductor and electrically coupled to the power terminals, and a first conductor connecting part made of a conductor, the first conductor connecting part being physically and electrically coupled to the base connecting part, the base connecting part and the first conductor connecting part being provided at different heights, wherein adjoining terminal bases, electrically coupled to power terminals supplied with currents with different electrical potentials, are coupled with the first conductor connecting parts of adjoining terminal bases disposed in different directions. | 04-05-2012 |
20140118972 | ELECTRONIC CIRCUIT UNIT AND COMMUNICATION DEVICE - An electronic circuit unit includes an electronic circuit unit main body that is housed in a shelf, a first rotating shaft that is provided on a front side of the electronic circuit unit main body, a lever member rotatably provided about the first rotating shaft for urging the electronic-circuit-unit-main-body toward a depth side of the shelf, a second rotating shaft that is provided in the lever member and extends parallel to the first rotating shaft, a locking member rotatably provided about the second rotating shaft. When the lever member is rotated in a first direction about the first rotating shaft, the electronic circuit unit main body is moved toward a depth side of the shelf. When the lever member is rotated in a second direction, opposite to the first direction, the electronic circuit unit main body is moved toward a front side of the shelf. | 05-01-2014 |
Patent application number | Description | Published |
20140190669 | COOLING HEAD AND ELECTRONIC APPARATUS - A cooling head includes: a first refrigerant flow channel, provided so as to be in contact with an object to be cooled, configured to flow refrigerant; a second refrigerant flow channel configured to flow the refrigerant; and at least one communication hole, provided between both ends of the object to be cooled in the first refrigerant flow channel in a first flow direction of refrigerant in the first refrigerant flow channel, configured to allow the first refrigerant flow channel and the second refrigerant flow channel to communicate with each other. | 07-10-2014 |
20140209285 | METHOD FOR MANUFACTURING COOLING DEVICE, COOLING DEVICE AND ELECTRONIC COMPONENT PACKAGE EQUIPPED WITH COOLING DEVICE - A method for manufacturing an integral molded cooling device, a circulation channel of a refrigerant being formed in the inside of the cooling device, the method includes: laminating a channel forming plate, a top plate and a bottom plate, a plurality of comb tooth units being provided on the channel forming plate; and integrating the channel forming plate, the top plate and the bottom plate by diffusion joining. | 07-31-2014 |
20140376187 | PACKAGE MOUNTING STRUCTURE - A package mounting structure includes: a first substrate having wiring; a second substrate having wiring; at least one cooling unit having a first face and a second face different from the first face; at least one power supply unit that is mounted on the first substrate and is joined to the first face of the cooling unit; and at least one electronic component that is mounted on the second substrate and is joined to the second face of the cooling unit, wherein the power supply unit supplies power to the electronic component through the wiring of the first substrate, the cooling unit, and the wiring of the second substrate. | 12-25-2014 |