Patent application number | Description | Published |
20090072399 | SEMICONDUCTOR MOUNTING BONDING WIRE - There is provided a bonding wire which does not cause a leaning failure or the like. A semiconductor mounting bonding wire has a breaking elongation of 7 to 20%, and stress at 1% elongation is greater than or equal to 90% of a tensile strength and is less than or equal to 100% thereof. | 03-19-2009 |
20100282495 | BONDING WIRE FOR SEMICONDUCTOR DEVICE - An object of the present invention is to provide a high-performance bonding wire that is suitable for semiconductor mounting technology, such as stacked chip bonding, thinning, and fine pitch mounting, where wire lean (leaning) at an upright position of a ball and spring failure can be suppressed and loop linearity and loop height stability are excellent. This bonding wire for a semiconductor device includes a core material made of a conductive metal, and a skin layer formed on the core material and containing a metal different from the core material as a main component; wherein a relationship between an average size (a) of crystal grains in the skin layer on a wire surface along a wire circumferential direction and an average size (b) of crystal grains in the core material on a normal cross section, the normal cross section being a cross section normal to a wire axis, satisfies an inequality of a/b≦0.7. | 11-11-2010 |
20100294532 | BONDING WIRE FOR SEMICONDUCTOR DEVICES - It is an object of the present invention to provide a highly-functional bonding wire which has good wire-surface nature, loop linearity, stability of loop heights, and stability of a wire bonding shape, and which can cope with semiconductor packaging technologies, such as thinning, achievement of a fine pitch, achievement of a long span, and three-dimensional packaging. A semiconductor-device bonding wire comprises a core member formed of an electrically-conductive metal, and a skin layer mainly composed of a face-centered cubic metal different from the core member and formed thereon. The percentage of <100> orientations in crystalline orientations in the lengthwise direction in the surface of the skin layer is greater than or equal to 50%. | 11-25-2010 |
20100327450 | SEMICONDUCTOR DEVICE BONDING WIRE AND WIRE BONDING METHOD - It is an object of the present invention to provide a copper-based bonding wire whose material cost is low, having excellent ball bondability, reliability in a heat cycle test or reflow test, and storage life, enabling an application to thinning of a wire used for fine pitch connection. The bonding wire includes a core material having copper as a main component and an outer layer which is provided on the core material and contains a metal M and copper, in which the metal M differs from the core material in one or both of components and composition. The outer layer is 0.021 to 0.12 μm in thickness. | 12-30-2010 |
20110011618 | COPPER ALLOY BONDING WIRE FOR SEMICONDUCTOR DEVICE - The present invention provides a semiconductor-device copper-alloy bonding wire which has an inexpensive material cost, ensures a superior ball joining shape, wire joining characteristic, and the like, and a good loop formation characteristic, and a superior mass productivity. The semiconductor-device copper-alloy bonding wire contains at least one of Mg and P in total of 10 to 700 mass ppm, and oxygen within a range from 6 to 30 mass ppm. | 01-20-2011 |
20110011619 | BONDING WIRE FOR SEMICONDUCTOR DEVICES - It is an object of the present invention to provide a highly-functional bonding wire which can reduce damages at a neck part, has good linearity of loops, stability of loop heights, and stability of bonded shape of a bonding wire, and can cope with semiconductor packaging techniques, such as low looping, thinning, achievement of a fine pitch, and three-dimensional packaging. A semiconductor-device bonding wire comprises a core member formed of an electrically-conductive metal, and a skin layer mainly composed of a face-centered cubic metal different from the core member and formed thereon. The percentage of <100> orientations in crystalline orientations in the lengthwise direction in the surface of the skin layer is greater than or equal to 50%. | 01-20-2011 |
20110104510 | BONDING STRUCTURE OF BONDING WIRE - The invention is aimed at providing a bonding structure of a copper-based bonding wire, realizing low material cost, high productivity in a continuous bonding in reverse bonding for wedge bonding on bumps, as well as excellent reliability in high-temperature heating, thermal cycle test, reflow test, HAST test or the like. The bonding structure is for connecting the bonding wire onto a ball bump formed on an electrode of a semiconductor device, the bonding wire and the ball bump respectively containing copper as a major component thereof. The bonding structure comprises a concentrated layer A provided at an interface of a bonding part of the ball bump and the bonding wire, wherein the concentration of a metal R other than copper in the concentrated layer A is not less than ten times the average concentration of the metal R in the ball bump; and a concentrated layer B provided at an interface of a bonding part of the ball bump and the electrode, wherein the concentration of the metal R in the concentrated layer B is not less than ten times the average concentration of the metal R in the ball bump. | 05-05-2011 |
20110120594 | BONDING WIRE FOR SEMICONDUCTOR - It is an object of the present invention to provide a multilayer wire which can accomplish both ball bonding property and wire workability simultaneously, and which enhances a loop stability, a pull strength, and a wedge bonding property. A semiconductor bonding wire comprises a core member mainly composed of equal to or greater than one kind of following elements: Cu, Au, and Ag, and an outer layer formed on the core member and mainly composed of Pd. A total hydrogen concentration contained in a whole wire is within a range from 0.0001 to 0.008 mass %. | 05-26-2011 |
20110203524 | ALD FILM-FORMING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE - An atomic layer deposition apparatus includes a reaction chamber, a wafer boat in the reaction chamber, a gas supply system connected to the reaction chamber, a first gas exhaust system connected to the reaction chamber, and a second gas exhaust system connected to the reaction chamber. The gas supply system supplies at least a material gas into the reaction chamber in a deposition process. The gas supply system supplies a purge gas into the reaction chamber in a purging process. The first gas exhaust system performs exhausting operation in the deposition process. The first gas exhaust system is prohibited from performing exhausting operation in the purging process. The second gas exhaust system is prohibited from performing exhausting operation in the deposition process. The second gas exhaust system performs exhausting operation in the purging process. | 08-25-2011 |
20120094121 | COPPER ALLOY BONDING WIRE FOR SEMICONDUCTOR - The present invention is a copper-based bonding wire for use in a semiconductor element. The bonding wire of the present invention can be manufactured with an inexpensive material cost, and has a superior PCT reliability in a high-humidity/temperature environment. Further, the bonding wire of the present invention exhibits: a favorable TCT reliability through a thermal cycle test; a favorable press-bonded ball shape; a favorable wedge bondability; a favorable loop formability, and so on. Specifically, the bonding wire of the present invention is a copper alloy bonding wire for semiconductor manufactured by drawing a copper alloy containing 0.13 to 1.15% by mass of Pd and a remainder comprised of copper and unavoidable impurities. | 04-19-2012 |
20120104613 | BONDING WIRE FOR SEMICONDUCTOR DEVICE - It is an object of the present invention to provide a copper-based bonding wire whose material cost is low, having excellent ball bondability, reliability in a heat cycle test or reflow test, and storage life, enabling an application to thinning of a wire used for fine pitch connection. The bonding wire includes a core material having copper as a main component and an outer layer which is provided on the core material and contains a metal M and copper, in which the metal M differs from the core material in one or both of components and composition. The outer layer is 0.021 to 0.12 μm in thickness. | 05-03-2012 |
20120118610 | BONDING WIRE FOR SEMICONDUCTOR - There is provided a bonding wire for semiconductor, capable of ensuring a favorable wedge bondability even when bonded to a palladium-plated lead frame, superior in oxidation resistivity and having a core wire of copper or a copper alloy. This bonding wire comprises: a core wire of copper or a copper alloy; a coating layer containing palladium and having a thickness of 10 to 200 nm; and an alloy layer formed on a surface of the coating layer, such alloy layer containing a noble metal and palladium and having a thickness of 1 to 80 nm. The aforementioned noble metal is either silver or metal, and a concentration of such noble metal in the alloy layer is not less than 10% and not more than 75% by volume. | 05-17-2012 |
20130180757 | BONDING STRUCTURE OF MULTILAYER COPPER BONDING WIRE - A bonding structure of a ball-bonded portion is obtained by bonding a ball portion formed on a front end of a multilayer copper bonding wire. The multilayer copper bonding wire includes a core member that is mainly composed of copper, and an outer layer that is formed on the core member and is mainly composed of at least one noble metal selected from a group of Pd, Au, Ag and Pt. Further, a first concentrated portion of such noble metal(s) is formed in a ball-root region located at a boundary with the copper bonding wire in a surface region of the ball-bonded portion. | 07-18-2013 |
20130207171 | SEMICONDUCTOR DEVICE HAVING CAPACITOR INCLUDING HIGH-K DIELECTRIC - A first semiconductor device comprises a metal-oxide film over a substrate. The metal-oxide film is formed by an atomic layer deposition method including a treatment in a reducing gas atmosphere after forming oxidized metal. A second semiconductor device comprises a lower electrode having a cup shape over a substrate, a metal-oxide film covering the lower electrode, and an upper electrode covering the metal-oxide film. The metal-oxide film is formed by an atomic layer deposition method including a treatment in a reducing gas atmosphere after forming oxidized metal. | 08-15-2013 |
20130285202 | SEMICONDUCTOR DEVICE - To provide a semiconductor device including a capacitor which includes a cylindrical or columnar lower electrode, a support film in contact with the upper portion of the lower electrode for supporting the lower electrode, a dielectric film covering the lower electrode and the support film, and an upper electrode facing the lower electrode with the dielectric film interposed therebetween, wherein the dielectric film has a first thickness on the upper surface of the support film and a second thickness thinner than the first thickness on the side surface of the lower electrode, and thereby the mechanical strength of the support film is increased. | 10-31-2013 |
20130306352 | BONDING WIRE FOR SEMICONDUCTOR - There is provided a bonding wire for semiconductor, capable of ensuring a favorable wedge bondability even when bonded to a palladium-plated lead frame, superior in oxidation resistivity and having a core wire of copper or a copper alloy. This bonding wire comprises: a core wire of copper or a copper alloy; a coating layer containing palladium and having a thickness of 10 to 200 nm; and an alloy layer formed on a surface of the coating layer, such alloy layer containing a noble metal and palladium and having a thickness of 1 to 80 nm. The aforementioned noble metal is either silver or metal, and a concentration of such noble metal in the alloy layer is not less than 10% and not more than 75% by volume. | 11-21-2013 |