Patent application number | Description | Published |
20110203310 | RAW MATERIAL RECOVERY METHOD AND TRAPPING MECHANISM FOR RECOVERING RAW MATERIAL - A raw material recovery method for recovering a raw material of an organic metallic compound, which has the property of being stable toward a specific refrigerant without being decomposed thereby, from exhaust gas discharged from a treatment container in which a metallic thin film is formed on the surface of an object to be treated by using source gas obtained by vaporizing the raw material is characterized by being provided with a solidification step for solidifying the unreacted source gas by cooling the exhaust gas by bringing the exhaust gas into contact with the refrigerant and reprecipitating the raw material, and a recovery step for separating and recovering the raw material reprecipitated in the solidification step from the refrigerant. To provide a method for controlling an exhaust gas flow rate so that flow of gas in a processing chamber becomes uniform. | 08-25-2011 |
20120196052 | METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING COPPER FILM - A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding Cu in the trench or hole by forming a Cu film on the Ru film using PVD while annealing the substrate such that migration of copper into the trench or hole occurs. | 08-02-2012 |
20120196437 | METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING SYSTEM - A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding copper in the trench or hole by forming a Cu film on the Ru film using PVD while heating the substrate such that migration of copper into the trench or hole occurs. | 08-02-2012 |
20130237053 | FILM FORMING METHOD AND FILM FORMING APPARATUS - A film forming method which generates metal ions from a metal target with a plasma in a processing chamber and attracts the metal ions with a bias to deposit a metal thin film on a target object wherein trenches are formed. The method includes: generating metal ions from a target and attracting the metal ions into a target object with a bias to form a base film in a trench; ionizing a rare gas with the bias in a state where no metal ion is generated and attracting the generated ions into the target object to etch the base film; and plasma sputtering the target to generate metal ions and attracting the metal ions into the object with a high frequency power for bias to deposit a main film as a metal film, while reflowing the main film by heating. | 09-12-2013 |
20140060572 | PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM - In a plasma processing apparatus, a mounting table is provided in a processing chamber, and a remote plasma generating unit is configured to generate an excited gas by exiting a hydrogen-containing gas. The remote plasma generating unit has an outlet for discharging the excited gas. A diffusion unit is provided to correspond to the outlet of the remote plasma generating unit and serves to receive the excited gas flowing from the outlet and diffuse the hydrogen active species having a reduced amount of hydrogen ions. An ion filter is disposed between the diffusion unit and the mounting table while being separated from the diffusion unit. The ion filter serves to capture the hydrogen ions contained in the hydrogen active species diffused by the diffusion unit and allow the hydrogen active species having a further reduced amount of hydrogen ions to pass therethrough the mounting table. | 03-06-2014 |
Patent application number | Description | Published |
20090248811 | SYSTEMS AND METHODS OF AUTOMATIC RETRANSMISSION OF ELECTRONIC MAIL - Disclosed are systems and methods of automatic retransmission of electronic mail. | 10-01-2009 |
20140289262 | GENERATING AN ORDERED LIST OF MANAGED TARGETS - An apparatus generates an ordered list of managed targets. A list generating hardware unit generates a list of managed targets. A list displaying hardware unit displays, on a display device, the list of managed targets. The list generating hardware unit further acquires, from a predetermined storage device, history information relating to a session for each managed target from the list of managed targets, where the history information includes information for identifying a session executor who executed the session at a session time. The list generating hardware unit is further configured to determine, using acquired history information related to the session for each managed target from the list of managed targets, an order of the managed targets in the list of managed targets according to rules that are set based on a content of managed information for each managed target. | 09-25-2014 |
20140304686 | RESPONDING TO A PROBLEM DURING SOFTWARE TESTING - An apparatus executes and tests software. The apparatus comprises: an execution hardware unit that executes software to be tested; an interface screen control hardware unit that causes a display device to display an interface screen by the software to be tested and receives a user's input operation using the interface screen; and a problem report management hardware unit that manages information on a problem that has occurred during a test of the software, wherein the problem report management hardware unit includes: a selection operation receiving hardware unit that receives a selection of a component part of the interface screen; an input receiving hardware unit that receives a user's input of information; and a report generating hardware unit that generates report information on the component part, based on information on the component part related to the selection received. | 10-09-2014 |
Patent application number | Description | Published |
20090110784 | PACKAGING CONTAINER FOR MICROWAVE OVEN AND PROCESS FOR MANUFACTURING THE SAME - Provided are a packaging container for a microwave oven that excels in the sealing performance between a container body and lid, and that at heating/cooking by a microwave oven, maintains the internal pressure of the container for a given period of time to thereby enhance the taste of contents through steaming effect, and that thereafter, can spontaneously open with certainty from a steam releasing seal part; and an efficient process for manufacturing the packaging container. In the packaging container for microwave oven having a lid heat-sealed to the periphery of a flange part of container body made of a synthetic resin so as to attain hermetic sealing, at least one steam releasing seal part with a weakened part is disposed inside the peripheral seal part of the flange part at a position separate from the peripheral seal part. | 04-30-2009 |
20090110785 | PACKAGE FOR COOKING BY MICROWAVE OVEN - Provided is a package for cooking in a microwave oven, in which a synthetic resin container body having a flange part is filled with contents and a lid is heat-sealed to the flange part to seal the package hermetically. Independent concave parts sandwiching a heat-sealed part are provided in a part of the flange part on the inner and outer sides of the heat-sealed part to form, on the heat-sealed part, a projection part directed to the inner direction of the container and serving as a steam releasing part by automatically opening. The package is prevented from being broken or deformed by preventing the heat-sealed part from being peeled immediately after the contents are placed in the container body. When heating cooking is performed in a microwave oven, the package improves the taste of the contents by the steaming effect. The lid is sure to automatically open by the increase of the pressure in the container. | 04-30-2009 |
20090145895 | PACKAGING CONTAINER FOR COOKING BY ELECTRONIC OVEN - A packaging container for cooking by an electronic oven having high sealability between a container body and a cover member and capable of being automatically and securely opened starting at a steam releasing seal part after taste of contents is improved by a steaming effect by holding a pressure in the packaging container for a specified time when the contents are heated and cooked by the electronic oven. The packaging container comprises a synthetic resin container body having a flange part and the cover member heat-sealed to the flange part of the container body. The cover member comprises (1) an upper member in which inner surfaces of resin films are positioned opposite to each other to form an abutted part, an unsealed part communicating with the inside of the container body is formed by heat-sealing a peripheral edge part of the abutted part excluding one side of the abutted part forming a base part, and the steam releasing seal part is formed at the abutted part and (2) a lower member which covers a lower surface of the upper member and in which a steam guide part communicating with the inside of the container body is formed at or near the base part of the abutted part. | 06-11-2009 |