Patent application number | Description | Published |
20090009031 | METHOD OF DRIVING PIEZOELECTRIC DEVICES - The driving method includes a first drive step of applying a specified drive voltage to a piezoelectric film to drive a piezoelectric device during a first drive period, a standby step of suspending a drive of the piezoelectric device to keep the piezoelectric device on standby during a drive standby period and a second drive step of applying the specified drive voltage to the piezoelectric film to drive the piezoelectric device during a second drive period that follows the first drive period. During the drive standby period between the first drive period and the second drive period, a reverse electric field with respect to a drive electric field formed in the piezoelectric film by the specified drive voltage routinely applied during a drive of the piezoelectric device is applied to the piezoelectric film for a specified period of time. | 01-08-2009 |
20090066763 | PIEZOELECTRIC DEVICE, INK-JET HEAD USING THE SAME, AND PROCESS FOR PRODUCING THE SAME - The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The in %-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member. | 03-12-2009 |
20110014394 | FILM DEPOSITING APPARATUS AND METHOD - A film depositing apparatus comprises: a vacuum vessel; an evacuating unit for evacuating the interior of the vacuum vessel; a gas supply source for supplying the vacuum vessel with gases necessary for film deposition; a backing plate that is placed within the vacuum vessel for holding a target formed by sintering; a substrate holder for holding a deposition substrate within the vacuum vessel in a face-to-face relation with the backing plate; and a power supply unit for supplying electric power between the backing plate and the substrate holder to generate a plasma within the vacuum vessel, wherein the backing plate has a smaller thermal expansion coefficient than that of the target which has a sinter density of at least 95%, the sinter density representing the ratio of the actual weight of a sintered form of the target to its theoretical weight. | 01-20-2011 |
20130111753 | METHOD OF MANUFACTURING LIQUID DROPLET EJECTION HEAD - An object of the invention is to provide a method of manufacturing a liquid droplet ejection head that is capable of realizing cost reduction by a simple process and obtaining ejection reliability over a long period of time. The method includes: forming a water repellent film on a nozzle forming substrate having a nozzle hole and inside the nozzle hole; adhering a protective film on the water repellent film that is formed on the surface of the nozzle forming substrate; removing the water repellent film formed inside the nozzle by a plasma treatment; and peeling the protective film, wherein polysiloxane is not contained in an adhesion component and a base material of the protective film. | 05-09-2013 |
Patent application number | Description | Published |
20080303876 | LIQUID DISCHARGE APPARATUS - A liquid discharge apparatus includes a liquid storage-discharge member having a liquid storage chamber for storing liquid and a liquid outlet for discharging the liquid from the liquid storage chamber to the outside of the liquid storage chamber, a vibration plate formed on the liquid storage-discharge member and a piezoelectric element having a lower electrode, a piezoelectric body and an upper electrode, which are sequentially formed on the vibration plate. The piezoelectric body includes an edge portion including at least a portion of the piezoelectric body, the portion positioned on the outside of the wall position of the liquid storage chamber, and a main portion, which is the remaining portion of the piezoelectric body. Further, the edge portion and the main portion are formed on different base layers from each other and the fracture stress of the edge portion is higher than that of the main portion. | 12-11-2008 |
20100091073 | PIEZOELCTRIC ACTUATOR, METHOD OF MANUFACTURING SAME, AND LIQUID EJECTION HEAD - The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body. | 04-15-2010 |
20100208007 | PIEZOELECTRIC DEVICE, METHOD FOR PRODUCING PIEZOELECTRIC DEVICE, AND LIQUID DISCHARGE DEVICE - A piezoelectric device of the present invention includes a piezoelectric material and lower and upper electrodes for applying an electric field to the piezoelectric material. The upper electrode is patterned, and an edge portion of the upper electrode is provided with a structure where an intensity of the electric field exerted on the piezoelectric material gradually decreases along a direction from a central portion toward an edge surface of the upper electrode when the electric field is applied to the piezoelectric material. | 08-19-2010 |
20110121096 | PIEZOELECTRIC DEVICE, PIEZOELECTRIC DEVICE MANUFACTURING METHOD, AND LIQUID DISCHARGE APPARATUS - A piezoelectric device, including the following on a substrate in the order listed below: a lower electrode, a piezoelectric film which contains a Pb containing perovskite oxide represented by a general expression (P) below, and an upper electrode, in which the piezoelectric film has a layer of pyrochlore oxide on the surface facing the lower electrode, and the average layer thickness of the pyrochlore oxide layer is not greater than 20 nm. | 05-26-2011 |
20110148255 | PIEZOELECTRIC MEMS SWITCH AND METHOD OF MANUFACTURING PIEZOELECTRIC MEMS SWITCH - A piezoelectric MEMS switch includes: a base substrate; a diaphragm arranged to oppose the base substrate via a gap; a first piezoelectric drive section constituted by layering a first lower electrode, a first piezoelectric body and a first upper electrode on a first surface of the diaphragm, the first surface being across the diaphragm from the gap; a second piezoelectric drive section constituted by layering a second lower electrode, a second piezoelectric body and a second upper electrode on a second surface of the diaphragm, the second surface facing the gap; a fixed electrode provided on a gap side of the base substrate; and a movable electrode which is fixed to a second piezoelectric drive section side of the diaphragm and opposes the fixed electrode in such a manner that the movable electrode makes contact with and separates from the fixed electrode according to displacement of the diaphragm. | 06-23-2011 |
Patent application number | Description | Published |
20080216297 | PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, AND LIQUID EJECTION HEAD - The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer. | 09-11-2008 |
20080238263 | PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING SAME, AND LIQUID EJECTION HEAD - The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body. | 10-02-2008 |
20090271964 | PIEZOELECTRIC ACTUATOR, METHOD OF MANUFACTURING SAME, AND LIQUID EJECTION HEAD - The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body. | 11-05-2009 |
20120019603 | LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD THEREOF - The liquid discharge head comprises: a diaphragm; a first piezoelectric member which is formed on a first surface of the diaphragm, the first piezoelectric member driving the diaphragm; and a pressure chamber dividing wall which is formed on a second surface of the diaphragm opposite to the first surface, wherein the first piezoelectric member and the pressure chamber dividing wall are formed by a deposition method. | 01-26-2012 |