Ayothi
Ramakrishnan Ayothi, San Jose, CA US
Patent application number | Description | Published |
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20090136868 | PHOTOACID GENERATOR COMPOUNDS AND COMPOSITIONS - The invention provides various ionic and non-ionic photoacid generator compounds. Photoresist compositions that include the novel ionic and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications. | 05-28-2009 |
20110008732 | PHOTOACID GENERATOR COMPOUNDS AND COMPOSITIONS - The invention provides various ionic and non-ionic photoacid generator compounds. Photoresist compositions that include the novel ionic and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications. | 01-13-2011 |
20140242526 | POSITIVE TONE ORGANIC SOLVENT DEVELOPED CHEMICALLY AMPLIFIED RESIST - Provided is a method for developing positive-tone chemically amplified resists with an organic developer solvent having at least one polyhydric alcohol, such as ethylene glycol and/or glycerol, alone or in combination with an additional organic solvent, such as isopropyl alcohol, and/or water. The organic solvent developed positive tone resists described herein are useful for lithography pattern forming processes; for producing semiconductor devices, such as integrated circuits (IC); and for applications where basic solvents are not suitable, such as the fabrication of chips patterned with arrays of biomolecules or deprotection applications that do not require the presence of acid moieties. | 08-28-2014 |
20150086925 | SULFONIC ACID ESTER CONTAINING POLYMERS FOR ORGANIC SOLVENT BASED DUAL-TONE PHOTORESISTS - Provided are chemically amplified resist compositions that include acid-labile sulfonate-ester photoresist polymers that are developable in an organic solvent. The chemically amplified resists produce high resolution positive tone development (PTD) and negative tone development (NTD) images depending on the selection of organic development solvent. Furthermore, the dissolution contrast of the traditional chemically amplified resists may be optimized for dual tone imaging through the addition of a photoresist polymer comprising an acid-labile sulfonate-ester moiety. | 03-26-2015 |
Ramakrishnan Ayothi, Sunnyvale, CA US
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20090098490 | Radiation-Sensitive, Wet Developable Bottom Antireflective Coating Compositions and Their Applications in Semiconductor Manufacturing - The present invention is directed to novel radiation-sensitive, wet developable bottom antireflective coating (DBARC) compositions and their use in semiconductor device manufacturing. The DBARC compositions contain a photoacid generator that produces a photoacid upon exposure to activating radiation. In a photolithographic imaging process, the relatively strong photoacid reduces or eliminates scumming. Further, the relatively large size of the photoacid limits its diffusion through the DBARC, thus minimizing or preventing undercut. The inventive method also limits diffusion of the photoacid by controlling the temperature of the post-exposure baking step. Use of the DBARC compositions with a photoresist in photolithography results in highly resolved features having essentially vertical profiles and no scumming and no undercut, which is critical as microelectronics and semiconductor components become increasingly miniaturized. | 04-16-2009 |
Ramakrishnan Ayothi, Ithaca, NY US
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20080227032 | ENVIRONMENTAL FRIENDLY PHOTOACID GENERATORS (PAGs) WITH NO PERFLUOROOCTYL SULFONATES - Novel classes of ionic photoacid generator (PAGs) compounds having relatively environmentally friendly anions with no perfluorooctyl sulfonate (no-PFOS) are provided and photoresist composition that comprise such compounds. The new PAGs produce a photoacid having a short or no perfluoro alkyl chain (i.e., no-PFOS) attached to a variety of functional groups. The PAGs of the invention are useful as photoactive component in the chemically amplified resist compositions used for microfabrication. | 09-18-2008 |
Rekha Ayothi, Hyderabad IN
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20160088056 | PROVIDING ACCESS VIA HYPERTEXT TRANSFER PROTOCOL (HTTP) REQUEST METHODS TO SERVICES IMPLEMENTED BY STATELESS OBJECTS - An aspect of the present disclosure provides access via HTTP verbs to services implemented by stateless objects. In one embodiment, the list of services implemented by a stateless object deployed on an application server is displayed to a user/administrator. Upon receiving (from the user/administrator) an input data indicating selection of some of the services (from the displayed list), only the selected service are provided access via a corresponding HTTP verb. In other words, a first service that is included in the selection is provided access via a HTTP verb, while a second service not included in the selection is not made accessible via HTTP verbs. Thus, a user/administrator is facilitated to provide access via HTTP verbs to only services of interest among those implemented by a stateless object at or after the deployment of the stateless object. | 03-24-2016 |