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Toshihide NABATAME

CHIYODA-KU, JP

1. 20090096067 METHOD OF FABRICATING A METAL OXYNITRIDE THIN FILM THAT INCLUDES A FIRST ANNEALING OF A METAL OXIDE FILM IN A NITROGEN-CONTAINING ATMOSPHERE TO FORM A METAL OXYNITRIDE FILM AND A SECOND ANNEALING OF THE METAL OXYNITRIDE FILM IN AN OXIDIZING ATMOSPHERE 04-16-2009