Patent application number | Description | Published |
20090095731 | MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS - A mounting table structure arranged in a processing chamber is provided for mounting a target object to be processed on the upper surface. The mounting table structure is characterized in having a mounting table wherein a heating unit are embedded to heat the target object to perform a specified heat treatment to the target object, and a supporting column which stands on the bottom portion of the processing chamber and supports the mounting table. The mounting table structure is also characterized in that a heat-equalizing member spread in a planar direction is embedded above the heating unit in the mounting table. | 04-16-2009 |
20090266808 | PLANAR HEATER AND SEMICONDUCTOR HEAT TREATMENT APPARATUS PROVIDED WITH THE HEATER - A plane heater and a semiconductor heat treatment apparatus having the heater which suppress high frequency induction heating by having an earth electrode therein for suppressing high frequency induction and do not corrode with an excited reaction gas is provided. A plane heater | 10-29-2009 |
20100051613 | MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS USING THE SAME - A mounting table structure for use in a processing chamber for performing a heat treatment by using a microwave, includes a mounting table for mounting thereon a target object, the mounting table including therein a heating unit having a heating element made of a non-metal material and a supporting column standing up on a bottom portion of the processing chamber to support the mounting table. A shield member for blocking the microwave is provided on a top surface of the mounting table. | 03-04-2010 |
20100163183 | MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS - A mounting table structure includes a mounting table provided with a heating unit having heaters respectively arranged in concentrically divided heating zones and on which an object to be heat-treated is placed, a temperature measurement units respectively arranged in the heating zones, and a hollow column for supporting the mounting table in an upstanding state. The diameter of the column is gradually expanded from its bottom to its top, and the upper end of the column is bonded to the bottom surface of the mounting table. A measurement unit main body of each temperature measurement unit is inserted into the hollow column and an insertion passageway provided at a sidewall of the column. | 07-01-2010 |
20100224620 | PLANE HEATER - [Problem to be Solved] To provide a plane heater including a carbon wire heating element which has an arrangement pattern allowing a heating surface to be a substantially uniform heating temperature plane. | 09-09-2010 |