Patent application number | Description | Published |
20080213716 | Heat system, heat method, and program - The present invention provides a heating system, a heating method and a program, which can readily control processing temperature. A temperature calculating computer | 09-04-2008 |
20080262791 | Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire - A life estimating method for a heater wire, which can estimate the life of the heater wire more appropriately than conventional one, by utilizing data obtained during a period (e.g., a temperature rising period), in which a sign of disconnection of the heater wire is likely to be seen, upon estimating the life in advance before the heater wire used in a heating apparatus is disconnected. This method comprises the steps of: detecting a maximum value of magnitude of electric power supplied to the heater wire during the temperature rising period provided for elevating the temperature up to a heating temperature, by supplying the electric power to the heater wire prior to providing a heating process to a wafer or wafers. The method further comprises obtaining an index indicative of magnitude of amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the indexes respectively indicative of the magnitude of the electric power and the magnitude of amplitude of the electric power exceed threshold values respectively provided thereto. | 10-23-2008 |
20110035165 | INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM - A information processing apparatus | 02-10-2011 |
20120169505 | LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE MEDIUM, AND LIFE ESTIMATING SYSTEM FOR HEATER WIRE - A life estimating method for a heater wire utilizes data obtained during a period (e.g., a temperature rising period), in which a sign of disconnection of the heater wire is likely to be seen. This method includes detecting a maximum magnitude value of electric power supplied to the heater wire during the temperature rising period for elevating the temperature to a heating temperature prior to providing a heating process to a wafer or wafers. The method further includes obtaining an index indicative of a magnitude of the amplitude of the electric power, and giving notice that the heater wire is approaching the end of its life when the indexes respectively indicate that the electric power magnitude and the amplitude magnitude exceed threshold values respectively. | 07-05-2012 |
20150045942 | GROUP MANAGEMENT SYSTEM AND RECORDING MEDIUM - There is provided a group management system including one or more manufacturing devices and one or more server devices. Each of the manufacturing devices includes a manufacturing device display unit configured to display information on the specified process, an acquiring unit configured to acquire information of respective parts of each of the manufacturing devices and an acquired information transmitting unit configured to transmit the acquired information to the server devices. Each of the server devices includes a storage unit configured to store the information transmitted from the acquired information transmitting unit, an analysis unit configured to analyze the stored information and a server device display unit configured to display the stored information and the analyzed information. Each of the manufacturing devices further includes a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit. | 02-12-2015 |
Patent application number | Description | Published |
20090138118 | SERVER AND PROGRAM - A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus identifiers and time information, and storing at least one set of abnormality information indicating an abnormality and one or more measurement information, and outputting one or more abnormality information; a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit, is received; and an output unit for outputting the one or more charts composed by the chart composing unit, so that abnormality analysis can be carried out easily and efficiently. | 05-28-2009 |
20090177308 | SERVER AND PROGRAM - It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unit. | 07-09-2009 |
20090265027 | SERVER DEVICE AND PROGRAM - A server device | 10-22-2009 |
20090276076 | SERVER DEVICE AND PROGRAM - A server device is provided with a measurement information storage unit | 11-05-2009 |