Patent application number | Description | Published |
20080303086 | Semiconductor apparatus and method for fabricating the same - A semiconductor apparatus including a trench gate transistor having at least an active region surrounded by a device isolation insulating film; a trench provided by bringing both ends thereof into contact with the device isolation insulating film in the active region; a gate electrode formed in the trench via a gate insulating film; and a diffusion layer formed close to the trench; on a semiconductor substrate, and also includes an opening portion positioned on one surface of the semiconductor substrate; a pair of first inner walls positioned in a side of the device isolation insulating film and connected with the opening portion; a pair of second inner walls positioned in a side of the active region and connected with the opening portion; and a bottom portion positioned opposite to the opening portion and connected with the first inner walls and the second inner walls, wherein a cross sectional outline of the second inner wall is substantially linear, and a burr generated inside the trench is removed or reduced. | 12-11-2008 |
20090078993 | SEMICONDUCTOR DEVICE WITH REDUCED GATE-OVERLAP CAPACITANCE AND METHOD OF FORMING THE SAME - A semiconductor device includes a vertically extending semiconductor portion above a semiconductor substrate, first and second diffusion regions being disposed near the bottom and top portions of the vertically extending semiconductor portion, respectively. A gate insulating film extends along the side surface of the vertically extending semiconductor portion which is separated by the gate insulating film from a gate electrode. The level of the top portion of the gate electrode is nearly equal to or lower than the level of the bottom portion of the second diffusion regions and the level of the bottom portion of the gate electrode is nearly equal to or higher than the level of the top portion of the first diffusion region. | 03-26-2009 |
20090108354 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A polysilicon film is formed all over a surface of a semiconductor substrate, then is subject to a CMP process through a mask pattern as a stopper. Then, a metal film is formed all over the resulting surface, and is allowed at least a part of the polysilicon film and at least a part of the metal film to react with each other to silicidize the metal. This forms the gate electrode. | 04-30-2009 |
20090121284 | Semiconductor device and method for manufacturing the same - A sacrifice oxide film is formed in a Fin semiconductor substrate portion, and impurities are then implanted in the semiconductor substrate through a mask pattern as a mask. Thereafter, the sacrifice oxide film is removed to expose the semiconductor substrate. A gate insulating film is then formed on the exposed semiconductor substrate. | 05-14-2009 |
20090152611 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device comprises a first contact plug, a first structure and a second insulating layer, or comprises a first contact plug, a first structure, a protruding region and a second insulating layer. The first contact plug extends in a predetermined direction and including a step converting a cross section area of the first contact plug perpendicular to the predetermined direction discontinuously via the step in one end side. The second insulating layer is formed on side surface of a part of the first contact plug closer to the first structure than the step, or on side surfaces of the protruding region and a part of the first contact plug closer to the first structure than the step. | 06-18-2009 |
20090184367 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device in which the formation of buried wiring is facilitated includes: forming columnar patterns, which are arranged in a two-dimensional array, and bridge patterns, which connect the columnar patterns in a column direction, on a main surface of a silicon substrate; injecting an impurity in a surface portion of each of the columnar patterns and bridge patterns and in surface portions of the silicon substrate, thereby forming impurity injection layers; forming a side wall on sides of the columnar patterns and bridge patterns; removing the impurity injection layer, which has been formed in the silicon substrate, with the exception of the impurity injection layer covered by the bottom portions of the side walls; removing the side walls by etch-back; and thermally oxidizing the surface portion of the bridge patterns and then etching away the same. Buried wiring extending in the column direction of the columnar patterns is formed within the silicon substrate. | 07-23-2009 |
20090206445 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A semiconductor device may include, but is not limited to, first and second well regions, and a well isolation region isolating the first and second well regions. The first and second well regions each may include an active region, a device isolation groove that defines the active region, and a device isolation insulating film that fills the device isolation groove. The first and second well regions may include first and second well layers, respectively. The well isolation region may include a well isolation groove, a well isolation insulating film that fills the well isolation groove, and a diffusion stopper layer disposed under a bottom of the well isolation groove. The first and second well layers have first and second bottoms respectively, which are deeper in depth than a bottom of the device isolation groove and shallower in depth than the bottom of the well isolation groove. | 08-20-2009 |
20090212365 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes: a monocrystalline substrate; an inter-layer film formed on the monocrystalline substrate; a contact hole penetrating the inter-layer film and partially exposing an upper surface of the monocrystalline substrate; a sidewall formed on an inner surface of the contact hole; a plurality of first monocrystalline layers which include few defects, fill the contact hole, and cover the inter-layer film; and a plurality of second monocrystalline layers which include many defects and cover the sidewall and an upper surface of the inter-layer film so as to be sandwiched between the first monocrystalline layers and the inter-layer film. | 08-27-2009 |
20090261408 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A semiconductor device includes a semiconductor substrate, a first diffusion region, a gate insulating film, a gate electrode, a second diffusion region and a contact plug. The semiconductor substrate includes a base and at least a pillar. The first diffusion region is disposed in the base. The gate insulating film covers a side surface of the pillar. The gate electrode is separated from the pillar by the gate insulating film. The second diffusion region is disposed in an upper portion of the pillar. The contact plug is connected to the second diffusion region. The contact plug is connected to the entirety of the top surface of the pillar. | 10-22-2009 |
20100123170 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A semiconductor device includes a transistor, a conductive pad, and a contact. The conductive pad is electrically connected to the transistor. The conductive pad may include, but is not limited to, a first region and a second region. The contact is electrically connected to the conductive pad. At least a main part of the first region overlaps the transistor in plan view. At least a main part of the second region does not overlap the transistor in plan view. At least a main part of the contact overlaps the second region in plan view. The at least main part of the contact does not overlap the first region in plan view. The at least main part of the contact does not overlap the transistor in plan view. | 05-20-2010 |
20100133497 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The invention includes: multiple bit lines b | 06-03-2010 |
20100140688 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING SEMICONDUCTOR DEVICE - A semiconductor device includes a first semiconductor pillar, a first insulating film covering a side face of the first semiconductor pillar, a first electrode covering the first insulating film, a second semiconductor pillar, a second insulating film covering a side face of the second semiconductor pillar, and a second electrode covering the second insulating film. The top level of the second electrode is higher than the top level of the first electrode. | 06-10-2010 |
20100148233 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING SEMICONDUCTOR DEVICE - A semiconductor device include a semiconductor substrate comprising a substrate body, a base over the substrate body and a pillar over a first region of the base; a buried line adjacent to a side surface of the base; a first diffusion layer over a second region of the base; a second diffusion layer over the pillar, the second diffusion layer being higher in level than the first diffusion layer; and a third diffusion layer disposed between the buried line and the semiconductor substrate. The third diffusion layer is different in level from the first diffusion layer. The top level of the third diffusion layer is lower than the top level of the first diffusion layer. | 06-17-2010 |
20100330774 | METHOD OF FORMING SEMICONDUCTOR DEVICE - A semiconductor device may include, but is not limited to, first and second well regions, and a well isolation region isolating the first and second well regions. The first and second well regions each may include an active region, a device isolation groove that defines the active region, and a device isolation insulating film that fills the device isolation groove. The first and second well regions may include first and second well layers, respectively. The well isolation region may include a well isolation groove, a well isolation insulating film that fills the well isolation groove, and a diffusion stopper layer disposed under a bottom of the well isolation groove. The first and second well layers have first and second bottoms respectively, which are deeper in depth than a bottom of the device isolation groove and shallower in depth than the bottom of the well isolation groove. | 12-30-2010 |
20110033994 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of forming a semiconductor device includes the following processes. A pillar is formed which stands on a semiconductor substrate. A first insulating film is formed which covers a side surface of the pillar. An upper portion of the first insulating film is removed to expose a side surface of an upper portion of the pillar. A contact plug is formed, which contacts the side surface of the upper portion of the pillar and a top surface of the pillar. | 02-10-2011 |
20110143509 | METHOD OF FORMING A SEMICONDUCTOR DEVICE - A method of forming a semiconductor device includes the following processes. A groove is formed in a semiconductor substrate. A gate insulating film is formed on an inside wall of the groove. A buried gate electrode is formed on the gate insulating film and on a bottom portion of the groove. A cap insulating film covering the buried gate electrode is formed in an upper portion of the groove. The cap insulating film has a top surface which is different in level from a top surface of the semiconductor substrate. A first inter-layer insulating film is formed on the top surface of the semiconductor substrate and on the top surface of the cap insulating film. The first inter-layer insulating film with a flat top surface fills a gap in level between the top surface of the semiconductor substrate and the top surface of the cap insulating film. | 06-16-2011 |
20120080742 | Semiconductor device having vertical type transistor - A semiconductor device includes: a first vertical type transistor having a first lower diffusion layer, a first upper diffusion layer, and a gate electrode; a second vertical type transistor having a second lower diffusion layer, a second upper diffusion layer, and a second gate electrode; a gate wiring connected to the first and second gate electrodes; a first wiring connected to the first lower diffusion layer and second upper diffusion layer; and a second wiring connected to the first upper diffusion layer and second lower diffusion layer. | 04-05-2012 |
20120313156 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of forming a semiconductor device includes the following processes. A pillar is formed which stands on a semiconductor substrate. A first insulating film is formed which covers a side surface of the pillar. An upper portion of the first insulating film is removed to expose a side surface of an upper portion of the pillar. A contact plug is formed, which contacts the side surface of the upper portion of the pillar and a top surface of the pillar. | 12-13-2012 |
20130241009 | SEMICONDUCTOR DEVICE - A memory cell region comprises a first interlayer insulating film having a bit contact hole, a contact plug formed of a first conductor film embedded in the bit contact hole, and a second conductor film which is stacked on the first interlayer insulating film to constitute a bit line connected to the contact plug. A peripheral transistor region comprises a peripheral transistor having a gate insulating film and a gate electrode stack formed on the gate insulating film. The gate electrode stack is provided with a metal gate film formed on the gate insulating film, an upper gate film stacked on the metal gate film, and a third conductor film stacked on the upper gate film. A height from a semiconductor substrate to a top face of the upper gate film is equal to or lower than a height of a top face of the first interlayer insulating film. | 09-19-2013 |
20140367864 | SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME - A method for producing a semiconductor device includes: a process for forming a first conductor on a first interlayer insulating film provided on a semiconductor substrate, a process for forming in order a first stopper interlayer film, a second interlayer insulating film, a second stopper interlayer film, and a third interlayer insulating film on the first interlayer insulating film to cover the first conductor, a process for penetrating the third interlayer insulating film, the second stopper interlayer film, and the second interlayer insulating film, and forming a first contact hole having a first inner diameter on a position corresponding to the first conductor, a process for expanding the inner diameter of the first contact hole on the second interlayer insulating film to a second inner diameter larger than the first inner diameter, and a process for forming on the first stopper interlayer film a second contact hole. | 12-18-2014 |